DE1251287C2 - Verfahren zur herstellung von nichtporoesem siliciumnitrid - Google Patents
Verfahren zur herstellung von nichtporoesem siliciumnitridInfo
- Publication number
- DE1251287C2 DE1251287C2 DENDATU0010096 DEU0010096A DE1251287C2 DE 1251287 C2 DE1251287 C2 DE 1251287C2 DE NDATU0010096 DENDATU0010096 DE NDATU0010096 DE U0010096 A DEU0010096 A DE U0010096A DE 1251287 C2 DE1251287 C2 DE 1251287C2
- Authority
- DE
- Germany
- Prior art keywords
- silicon nitride
- silicon
- gaseous
- density
- ammonia
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 35
- 238000000034 method Methods 0.000 title claims description 19
- 229910021426 porous silicon Inorganic materials 0.000 title claims description 5
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 32
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 30
- 229910021529 ammonia Inorganic materials 0.000 claims description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 229910002804 graphite Inorganic materials 0.000 claims description 14
- 239000010439 graphite Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- -1 silicon halide Chemical class 0.000 claims description 10
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 239000002244 precipitate Substances 0.000 claims description 4
- 238000001556 precipitation Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 241001072332 Monia Species 0.000 claims description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims description 2
- 239000008246 gaseous mixture Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 3
- 230000015556 catabolic process Effects 0.000 claims 2
- 230000003647 oxidation Effects 0.000 claims 2
- 238000007254 oxidation reaction Methods 0.000 claims 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 2
- 239000012670 alkaline solution Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000010276 construction Methods 0.000 claims 1
- 238000002050 diffraction method Methods 0.000 claims 1
- 239000000446 fuel Substances 0.000 claims 1
- 150000004820 halides Chemical class 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910001507 metal halide Inorganic materials 0.000 claims 1
- 150000005309 metal halides Chemical class 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 239000000615 nonconductor Substances 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 230000002441 reversible effect Effects 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 229910015900 BF3 Inorganic materials 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical compound [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- ZOKXUAHZSKEQSS-UHFFFAOYSA-N tribufos Chemical compound CCCCSP(=O)(SCCCC)SCCCC ZOKXUAHZSKEQSS-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US222662A US3226194A (en) | 1962-09-10 | 1962-09-10 | Process for producing silicon nitride and a product thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1251287B DE1251287B (enExample) | |
| DE1251287C2 true DE1251287C2 (de) | 1975-10-09 |
Family
ID=22833171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DENDATU0010096 Expired DE1251287C2 (de) | 1962-09-10 | Verfahren zur herstellung von nichtporoesem siliciumnitrid |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3226194A (enExample) |
| CH (1) | CH444831A (enExample) |
| DE (1) | DE1251287C2 (enExample) |
| GB (1) | GB1063305A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3902628A1 (de) * | 1989-01-30 | 1990-08-02 | Hauni Elektronik Gmbh | Duennschichtmaterial fuer sensoren oder aktuatoren und verfahren zu dessen herstellung |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1050932A (enExample) * | 1963-05-30 | |||
| GB1117788A (en) * | 1964-11-27 | 1968-06-26 | Plessey Uk Ltd | Improvements relating to silicon nitride |
| US3413090A (en) * | 1965-03-19 | 1968-11-26 | Mallory & Co Inc P R | Preparation of silicon nitride whiskers |
| US4089992A (en) * | 1965-10-11 | 1978-05-16 | International Business Machines Corporation | Method for depositing continuous pinhole free silicon nitride films and products produced thereby |
| JPS5128983B1 (enExample) * | 1966-10-28 | 1976-08-23 | ||
| US3472689A (en) * | 1967-01-19 | 1969-10-14 | Rca Corp | Vapor deposition of silicon-nitrogen insulating coatings |
| US3637423A (en) * | 1969-02-10 | 1972-01-25 | Westinghouse Electric Corp | Pyrolytic deposition of silicon nitride films |
| US3983198A (en) * | 1975-02-12 | 1976-09-28 | Ford Motor Company | Method of increasing the oxidation resistance of silicon nitride |
| US4058579A (en) * | 1975-02-27 | 1977-11-15 | Union Carbide Corporation | Process for producing an improved boron nitride crucible |
| US4036653A (en) * | 1975-05-28 | 1977-07-19 | E. I. Du Pont De Nemours And Company | Amorphous silicon nitride composition containing carbon, and vapor phase process |
| GB1518564A (en) * | 1975-11-25 | 1978-07-19 | Motorola Inc | Method for the low pressure pyrolytic deposition of silicon nitride |
| JPS6047202B2 (ja) * | 1976-01-13 | 1985-10-21 | 東北大学金属材料研究所長 | 超硬高純度の配向多結晶質窒化珪素 |
| US4090851A (en) * | 1976-10-15 | 1978-05-23 | Rca Corporation | Si3 N4 Coated crucible and die means for growing single crystalline silicon sheets |
| US4099924A (en) * | 1977-03-16 | 1978-07-11 | Rca Corporation | Apparatus improvements for growing single crystalline silicon sheets |
| US4289801A (en) * | 1980-05-21 | 1981-09-15 | United Technologies Corporation | Method for producing fine grained pyrolytic silicon nitride |
| US4500483A (en) * | 1982-03-19 | 1985-02-19 | United Technologies Corporation | Manufacture of hollow CVD silicon nitride articles |
| US4425407A (en) | 1982-06-24 | 1984-01-10 | United Technologies Corporation | CVD SiC pretreatment for carbon-carbon composites |
| DE3426911A1 (de) * | 1984-07-20 | 1986-01-30 | United Technologies Corp., Hartford, Conn. | Kohlenstoff-kohlenstoff-verbundgegenstand mit hoher bestaendigkeit gegen einen abbau durch umgebungseinwirkung bei erhoehten temperaturen |
| DE3448429C2 (de) * | 1984-07-20 | 1993-10-07 | United Technologies Corp | Verfahren zum Aufbringen eines Schutzüberzugs auf einen Kohlenstoff-Kohlenstoff-Verbundgegenstand |
| US4671845A (en) * | 1985-03-22 | 1987-06-09 | The United States Of America As Represented By The Secretary Of The Navy | Method for producing high quality germanium-germanium nitride interfaces for germanium semiconductors and device produced thereby |
| US5298287A (en) * | 1993-02-05 | 1994-03-29 | United Technologies Corporation | Method of making CVD Si3 N4 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2618565A (en) * | 1948-02-26 | 1952-11-18 | Carborundum Co | Manufacture of silicon nitride-bonded articles |
| US2750268A (en) * | 1952-05-01 | 1956-06-12 | Union Carbide & Carbon Corp | Silicon nitride |
-
0
- DE DENDATU0010096 patent/DE1251287C2/de not_active Expired
-
1962
- 1962-09-10 US US222662A patent/US3226194A/en not_active Expired - Lifetime
-
1963
- 1963-09-03 CH CH1089463A patent/CH444831A/de unknown
- 1963-09-05 GB GB35033/63A patent/GB1063305A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3902628A1 (de) * | 1989-01-30 | 1990-08-02 | Hauni Elektronik Gmbh | Duennschichtmaterial fuer sensoren oder aktuatoren und verfahren zu dessen herstellung |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1063305A (en) | 1967-03-30 |
| US3226194A (en) | 1965-12-28 |
| CH444831A (de) | 1967-10-15 |
| DE1251287B (enExample) |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| E77 | Valid patent as to the heymanns-index 1977 | ||
| EHJ | Ceased/non-payment of the annual fee |