DE1244113B - Verfahren zur Verringerung der Gitterstoerungen in aus Halbleitermaterial bestehenden Kristallen - Google Patents
Verfahren zur Verringerung der Gitterstoerungen in aus Halbleitermaterial bestehenden KristallenInfo
- Publication number
- DE1244113B DE1244113B DES82693A DES0082693A DE1244113B DE 1244113 B DE1244113 B DE 1244113B DE S82693 A DES82693 A DE S82693A DE S0082693 A DES0082693 A DE S0082693A DE 1244113 B DE1244113 B DE 1244113B
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor material
- reducing
- crystals
- melt
- crystals made
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
- C30B15/18—Heating of the melt or the crystallised materials using direct resistance heating in addition to other methods of heating, e.g. using Peltier heat
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/917—Magnetic
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
709 610/442 7.67 © Bundesdrucfcerei Berlin
Claims (1)
- Patentanspruch:Verfahren zur Verringerung der Gitterstörungen in aus Halbleitermaterial bestehenden Kristallen, insbesonder Einkristallen, beim Ziehen der Kristalle mit Hilfe eines Keims aus einer Schmelze des Halbleitermaterials, bei dem durch den Kristall und die Schmelze ein elektrischer Gleichstrom geschickt wird, der während des Ziehens hinsichtlich seiner Richtung und Stärke praktisch nicht verändert wird, dadurch gekennzeichnet, daß zusätzlich zu dem elektrischen Gleichstrom ein elektrischer Wechselstrom durch den Kristall und die Schmelze geschickt wird.In Betracht gezogene Druckschriften:
Deutsche Patentschrift Nr. 964 708;
deutsche Auslegeschriften Nr. 1105 621,
732;USA.-Patentschrift Nr. 2 789 039.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL301226D NL301226A (de) | 1962-12-03 | ||
DES82693A DE1244113B (de) | 1962-12-03 | 1962-12-03 | Verfahren zur Verringerung der Gitterstoerungen in aus Halbleitermaterial bestehenden Kristallen |
FR955543A FR1376154A (fr) | 1962-12-03 | 1963-11-29 | Procédé pour tirer des cristaux semi-conducteurs |
SE13331/63A SE310356B (de) | 1962-12-03 | 1963-12-02 | |
CH1468463A CH406160A (de) | 1962-12-03 | 1963-12-02 | Verfahren zum Ziehen von Halbleiterkristallen aus Schmelzen |
US327556A US3268301A (en) | 1962-12-03 | 1963-12-02 | Method of pulling a semiconductor crystal from a melt |
GB47394/63A GB1013064A (en) | 1962-12-03 | 1963-12-02 | Process for drawing a crystalline semiconductor body from a melt |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES82693A DE1244113B (de) | 1962-12-03 | 1962-12-03 | Verfahren zur Verringerung der Gitterstoerungen in aus Halbleitermaterial bestehenden Kristallen |
Publications (1)
Publication Number | Publication Date |
---|---|
DE1244113B true DE1244113B (de) | 1967-07-13 |
Family
ID=7510532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DES82693A Pending DE1244113B (de) | 1962-12-03 | 1962-12-03 | Verfahren zur Verringerung der Gitterstoerungen in aus Halbleitermaterial bestehenden Kristallen |
Country Status (6)
Country | Link |
---|---|
US (1) | US3268301A (de) |
CH (1) | CH406160A (de) |
DE (1) | DE1244113B (de) |
GB (1) | GB1013064A (de) |
NL (1) | NL301226A (de) |
SE (1) | SE310356B (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2234512C3 (de) * | 1972-07-13 | 1979-04-19 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen von (Umorientierten Halbleitereinkristallstäben mit zur Stabmitte abtauendem spezifischem Widerstand |
US4012242A (en) * | 1973-11-14 | 1977-03-15 | International Rectifier Corporation | Liquid epitaxy technique |
FR2358021A1 (fr) * | 1976-07-09 | 1978-02-03 | Radiotechnique Compelec | Procede de depot epitaxique d'un semi-conducteur par polarisation electrique d'une phase liquide |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2789039A (en) * | 1953-08-25 | 1957-04-16 | Rca Corp | Method and apparatus for zone melting |
DE964708C (de) * | 1955-01-13 | 1957-05-29 | Siemens Ag | Verfahren zum Herstellen von Zonen unterschiedlicher Dotierung in Halbleiterkristallen durch Ziehen des Kristalls aus der Schmelze |
DE1106732B (de) * | 1957-05-01 | 1961-05-18 | Sylvania Electric Prod | Verfahren zur Zonenreinigung von polykristallinen schmelzbaren Halbleitern |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2792317A (en) * | 1954-01-28 | 1957-05-14 | Westinghouse Electric Corp | Method of producing multiple p-n junctions |
US2932562A (en) * | 1956-12-27 | 1960-04-12 | Bell Telephone Labor Inc | Zone-melting with joule heat |
US2970895A (en) * | 1956-12-31 | 1961-02-07 | Union Carbide Corp | Process for crystalline growth employing collimated electrical energy |
US2937216A (en) * | 1957-12-30 | 1960-05-17 | Minnesota Mining & Mfg | Zone refining apparatus |
US3058915A (en) * | 1960-01-18 | 1962-10-16 | Westinghouse Electric Corp | Crystal growing process |
US3152022A (en) * | 1962-05-25 | 1964-10-06 | Bell Telephone Labor Inc | Epitaxial deposition on the surface of a freshly grown dendrite |
-
0
- NL NL301226D patent/NL301226A/xx unknown
-
1962
- 1962-12-03 DE DES82693A patent/DE1244113B/de active Pending
-
1963
- 1963-12-02 GB GB47394/63A patent/GB1013064A/en not_active Expired
- 1963-12-02 CH CH1468463A patent/CH406160A/de unknown
- 1963-12-02 SE SE13331/63A patent/SE310356B/xx unknown
- 1963-12-02 US US327556A patent/US3268301A/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2789039A (en) * | 1953-08-25 | 1957-04-16 | Rca Corp | Method and apparatus for zone melting |
DE964708C (de) * | 1955-01-13 | 1957-05-29 | Siemens Ag | Verfahren zum Herstellen von Zonen unterschiedlicher Dotierung in Halbleiterkristallen durch Ziehen des Kristalls aus der Schmelze |
DE1105621B (de) * | 1955-01-13 | 1961-04-27 | Siemens Ag | Verfahren zur Beeinflussung der Kristallisation aus einer Schmelze aus Halbleitergrundstoff nach dem Stufen-ziehverfahren unter Anwendung des Peltier-Effektes |
DE1106732B (de) * | 1957-05-01 | 1961-05-18 | Sylvania Electric Prod | Verfahren zur Zonenreinigung von polykristallinen schmelzbaren Halbleitern |
Also Published As
Publication number | Publication date |
---|---|
CH406160A (de) | 1966-01-31 |
GB1013064A (en) | 1965-12-15 |
US3268301A (en) | 1966-08-23 |
NL301226A (de) | |
SE310356B (de) | 1969-04-28 |
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