Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
G03F5/00—Screening processes; Screens therefor
G03F5/02—Screening processes; Screens therefor by projection methods
G03F5/04—Screening processes; Screens therefor by projection methods changing the screen effect
Landscapes
Physics & Mathematics
(AREA)
General Physics & Mathematics
(AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials
(AREA)
Preparing Plates And Mask In Photomechanical Process
(AREA)
Verfahren zur Zerlegung von Halbtoenen in Druckelemente verschiedener Groesse unter Abtastung der Vorlage durch ein durchgehendes oder auffallendes Lichtbuendel von bestimmtem Querschnitt