DE1133469B - Elektrischer Kondensator mit Metalloxyd-Dielektrikum und Verfahren zu seiner Herstellung - Google Patents
Elektrischer Kondensator mit Metalloxyd-Dielektrikum und Verfahren zu seiner HerstellungInfo
- Publication number
- DE1133469B DE1133469B DEST15195A DEST015195A DE1133469B DE 1133469 B DE1133469 B DE 1133469B DE ST15195 A DEST15195 A DE ST15195A DE ST015195 A DEST015195 A DE ST015195A DE 1133469 B DE1133469 B DE 1133469B
- Authority
- DE
- Germany
- Prior art keywords
- metal
- dielectric
- oxide layer
- oxide
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 title claims description 37
- 238000000034 method Methods 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 229910044991 metal oxide Inorganic materials 0.000 title claims description 4
- 150000004706 metal oxides Chemical class 0.000 title claims description 4
- 239000010410 layer Substances 0.000 claims description 66
- 229910052751 metal Inorganic materials 0.000 claims description 44
- 239000002184 metal Substances 0.000 claims description 44
- 229910052715 tantalum Inorganic materials 0.000 claims description 10
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 239000000654 additive Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 5
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 5
- 239000003792 electrolyte Substances 0.000 claims description 4
- 229910021645 metal ion Inorganic materials 0.000 claims description 4
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 4
- 239000002344 surface layer Substances 0.000 claims description 3
- 238000009835 boiling Methods 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 230000007547 defect Effects 0.000 claims description 2
- GKMXREIWPASRMP-UHFFFAOYSA-J dipotassium;oxalate;oxygen(2-);titanium(4+) Chemical compound [O-2].[K+].[K+].[Ti+4].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O GKMXREIWPASRMP-UHFFFAOYSA-J 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000004408 titanium dioxide Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 230000000996 additive effect Effects 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000005518 electrochemistry Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 150000002739 metals Chemical class 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- -1 cations Cations Chemical class 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000011244 liquid electrolyte Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/0029—Processes of manufacture
- H01G9/0032—Processes of manufacture formation of the dielectric layer
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL252101D NL252101A (US08066781-20111129-C00013.png) | 1959-05-30 | ||
| DEST15195A DE1133469B (de) | 1959-05-30 | 1959-05-30 | Elektrischer Kondensator mit Metalloxyd-Dielektrikum und Verfahren zu seiner Herstellung |
| US31832A US3226607A (en) | 1959-05-30 | 1960-05-26 | Electrical capacitor |
| CH610560A CH385347A (de) | 1959-05-30 | 1960-05-27 | Elektrischer Kondensator |
| GB18797/60A GB926010A (en) | 1959-05-30 | 1960-05-27 | Electrolytic capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEST15195A DE1133469B (de) | 1959-05-30 | 1959-05-30 | Elektrischer Kondensator mit Metalloxyd-Dielektrikum und Verfahren zu seiner Herstellung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1133469B true DE1133469B (de) | 1962-07-19 |
Family
ID=7456597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEST15195A Pending DE1133469B (de) | 1959-05-30 | 1959-05-30 | Elektrischer Kondensator mit Metalloxyd-Dielektrikum und Verfahren zu seiner Herstellung |
Country Status (5)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2805170A1 (de) * | 1977-06-21 | 1979-01-04 | Ibm | Duennschichtkondensator |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3531383A (en) * | 1966-08-05 | 1970-09-29 | Siemens Ag | Method of producing electric capacitors |
| JPS6026289B2 (ja) * | 1979-04-13 | 1985-06-22 | ソニー株式会社 | タンタルコンデンサ |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1906691A (en) * | 1928-03-28 | 1933-05-02 | Lilienfeld Julius Edgar | Electrical condenser device |
| DE892326C (de) * | 1942-06-27 | 1953-10-05 | Siemens Ag | Elektrischer Kondensator mit einem auf einer Belegung aufgewachsenen nichtleitenden Umsetzungsprodukt als Dielektrikum |
| DE898482C (de) * | 1943-03-12 | 1953-11-30 | Siemens Ag | Verfahren zur Herstellung elektrischer Kondensatoren mit hoher spezifischer Kapazitaet |
| DE1736203U (de) * | 1955-05-07 | 1956-12-20 | Int Standard Electric Corp | Elektrischer kondensator. |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE655700C (de) * | 1935-01-08 | 1938-01-21 | Max Schenk Dr | Verfahren zur Herstellung opaker, emailaehnlicher Schutzschichten auf Aluminium und dessen Legierungen |
| US2299228A (en) * | 1938-01-12 | 1942-10-20 | Radio Patents Corp | Electric condenser |
| US2504178A (en) * | 1947-04-28 | 1950-04-18 | Sprague Electric Co | Electrical condenser |
| US2739110A (en) * | 1951-10-27 | 1956-03-20 | Gen Electric | Method of forming oxide films on electrodes for electrolytic capacitors |
| US2836776A (en) * | 1955-05-07 | 1958-05-27 | Nippon Electric Co | Capacitor |
-
0
- NL NL252101D patent/NL252101A/xx unknown
-
1959
- 1959-05-30 DE DEST15195A patent/DE1133469B/de active Pending
-
1960
- 1960-05-26 US US31832A patent/US3226607A/en not_active Expired - Lifetime
- 1960-05-27 GB GB18797/60A patent/GB926010A/en not_active Expired
- 1960-05-27 CH CH610560A patent/CH385347A/de unknown
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1906691A (en) * | 1928-03-28 | 1933-05-02 | Lilienfeld Julius Edgar | Electrical condenser device |
| DE892326C (de) * | 1942-06-27 | 1953-10-05 | Siemens Ag | Elektrischer Kondensator mit einem auf einer Belegung aufgewachsenen nichtleitenden Umsetzungsprodukt als Dielektrikum |
| DE898482C (de) * | 1943-03-12 | 1953-11-30 | Siemens Ag | Verfahren zur Herstellung elektrischer Kondensatoren mit hoher spezifischer Kapazitaet |
| DE1736203U (de) * | 1955-05-07 | 1956-12-20 | Int Standard Electric Corp | Elektrischer kondensator. |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2805170A1 (de) * | 1977-06-21 | 1979-01-04 | Ibm | Duennschichtkondensator |
Also Published As
| Publication number | Publication date |
|---|---|
| GB926010A (en) | 1963-05-15 |
| CH385347A (de) | 1964-12-15 |
| NL252101A (US08066781-20111129-C00013.png) | |
| US3226607A (en) | 1965-12-28 |
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