DE112023003041T5 - Palladiumcobaltoxid-dünnschicht, oxiddünnschicht vom delafossit-typ, schottky-elektrode mit oxiddünnschicht vom delafossit-typ, verfahren zum herstellen einer palladiumcobaltoxid-dünnschicht und verfahren zum herstellen einer oxiddünnschicht vom delafossit-typ - Google Patents

Palladiumcobaltoxid-dünnschicht, oxiddünnschicht vom delafossit-typ, schottky-elektrode mit oxiddünnschicht vom delafossit-typ, verfahren zum herstellen einer palladiumcobaltoxid-dünnschicht und verfahren zum herstellen einer oxiddünnschicht vom delafossit-typ

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Publication number
DE112023003041T5
DE112023003041T5 DE112023003041.3T DE112023003041T DE112023003041T5 DE 112023003041 T5 DE112023003041 T5 DE 112023003041T5 DE 112023003041 T DE112023003041 T DE 112023003041T DE 112023003041 T5 DE112023003041 T5 DE 112023003041T5
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Germany
Prior art keywords
thin film
palladium
oxide thin
cobalt oxide
delafossite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112023003041.3T
Other languages
German (de)
English (en)
Inventor
Takayuki Harada
Yasushi Masahiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute For Materials Science Tsuk Jp
Tanaka Precious Metal Technologies Co Ltd
Original Assignee
Tanaka Precious Metal Tech Co Ltd
National Institute for Materials Science
Tanaka Precious Metal Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tanaka Precious Metal Tech Co Ltd, National Institute for Materials Science, Tanaka Precious Metal Technologies Co Ltd filed Critical Tanaka Precious Metal Tech Co Ltd
Publication of DE112023003041T5 publication Critical patent/DE112023003041T5/de
Pending legal-status Critical Current

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DE112023003041.3T 2022-07-11 2023-03-27 Palladiumcobaltoxid-dünnschicht, oxiddünnschicht vom delafossit-typ, schottky-elektrode mit oxiddünnschicht vom delafossit-typ, verfahren zum herstellen einer palladiumcobaltoxid-dünnschicht und verfahren zum herstellen einer oxiddünnschicht vom delafossit-typ Pending DE112023003041T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022111428 2022-07-11
JP2022-111428 2022-07-11
PCT/JP2023/012315 WO2024014068A1 (ja) 2022-07-11 2023-03-27 パラジウムコバルト酸化物薄膜、デラフォサイト型酸化物薄膜、デラフォサイト型酸化物薄膜を有するショットキー電極、パラジウムコバルト酸化物薄膜の製造方法及びデラフォサイト型酸化物薄膜の製造方法

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DE112023003041T5 true DE112023003041T5 (de) 2025-10-02

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DE112023003041.3T Pending DE112023003041T5 (de) 2022-07-11 2023-03-27 Palladiumcobaltoxid-dünnschicht, oxiddünnschicht vom delafossit-typ, schottky-elektrode mit oxiddünnschicht vom delafossit-typ, verfahren zum herstellen einer palladiumcobaltoxid-dünnschicht und verfahren zum herstellen einer oxiddünnschicht vom delafossit-typ

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US (1) US20260011560A1 (https=)
JP (1) JPWO2024014068A1 (https=)
KR (1) KR20250024049A (https=)
CN (1) CN119563044A (https=)
DE (1) DE112023003041T5 (https=)
TW (1) TWI873706B (https=)
WO (1) WO2024014068A1 (https=)

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