KR20250024049A - 팔라듐 코발트 산화물 박막, 델라포사이트형 산화물 박막, 델라포사이트형 산화물 박막을 갖는 쇼트키 전극, 팔라듐 코발트 산화물 박막의 제조 방법 및 델라포사이트형 산화물 박막의 제조 방법 - Google Patents

팔라듐 코발트 산화물 박막, 델라포사이트형 산화물 박막, 델라포사이트형 산화물 박막을 갖는 쇼트키 전극, 팔라듐 코발트 산화물 박막의 제조 방법 및 델라포사이트형 산화물 박막의 제조 방법 Download PDF

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KR20250024049A
KR20250024049A KR1020257000703A KR20257000703A KR20250024049A KR 20250024049 A KR20250024049 A KR 20250024049A KR 1020257000703 A KR1020257000703 A KR 1020257000703A KR 20257000703 A KR20257000703 A KR 20257000703A KR 20250024049 A KR20250024049 A KR 20250024049A
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thin film
palladium
oxide thin
delafossite
cobalt oxide
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타카유키 하라다
야스시 마사히로
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코쿠리츠켄큐카이하츠호징 붓시쯔 자이료 켄큐키코
다나카 기킨조쿠 고교 가부시키가이샤
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Publication of KR20250024049A publication Critical patent/KR20250024049A/ko
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KR1020257000703A 2022-07-11 2023-03-27 팔라듐 코발트 산화물 박막, 델라포사이트형 산화물 박막, 델라포사이트형 산화물 박막을 갖는 쇼트키 전극, 팔라듐 코발트 산화물 박막의 제조 방법 및 델라포사이트형 산화물 박막의 제조 방법 Pending KR20250024049A (ko)

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JP2022111428 2022-07-11
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PCT/JP2023/012315 WO2024014068A1 (ja) 2022-07-11 2023-03-27 パラジウムコバルト酸化物薄膜、デラフォサイト型酸化物薄膜、デラフォサイト型酸化物薄膜を有するショットキー電極、パラジウムコバルト酸化物薄膜の製造方法及びデラフォサイト型酸化物薄膜の製造方法

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