DE112015001498T5 - Offene Plasmalampe zur Bildung eines mittels Licht aufrechterhaltenen Plasmas - Google Patents

Offene Plasmalampe zur Bildung eines mittels Licht aufrechterhaltenen Plasmas Download PDF

Info

Publication number
DE112015001498T5
DE112015001498T5 DE112015001498.5T DE112015001498T DE112015001498T5 DE 112015001498 T5 DE112015001498 T5 DE 112015001498T5 DE 112015001498 T DE112015001498 T DE 112015001498T DE 112015001498 T5 DE112015001498 T5 DE 112015001498T5
Authority
DE
Germany
Prior art keywords
plasma
gas
nozzle assembly
cavity portion
plasma lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112015001498.5T
Other languages
German (de)
English (en)
Inventor
Gildardo Delgado
Lauren Wilson
Anant Chimmalgi
Ilya Bezel
Anatoly Shchemelinin
Matthew W. Derstine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Publication of DE112015001498T5 publication Critical patent/DE112015001498T5/de
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32321—Discharge generated by other radiation
    • H01J37/32339—Discharge generated by other radiation using electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Plasma Technology (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • X-Ray Techniques (AREA)
DE112015001498.5T 2014-03-27 2015-03-27 Offene Plasmalampe zur Bildung eines mittels Licht aufrechterhaltenen Plasmas Pending DE112015001498T5 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201461971035P 2014-03-27 2014-03-27
US61/971,035 2014-03-27
US14/670,210 US9263238B2 (en) 2014-03-27 2015-03-26 Open plasma lamp for forming a light-sustained plasma
US14/670,210 2015-03-26
PCT/US2015/023177 WO2015149022A1 (en) 2014-03-27 2015-03-27 Open plasma lamp for forming a light-sustained plasma

Publications (1)

Publication Number Publication Date
DE112015001498T5 true DE112015001498T5 (de) 2017-01-05

Family

ID=54191377

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112015001498.5T Pending DE112015001498T5 (de) 2014-03-27 2015-03-27 Offene Plasmalampe zur Bildung eines mittels Licht aufrechterhaltenen Plasmas

Country Status (5)

Country Link
US (2) US9263238B2 (https=)
JP (2) JP6517231B2 (https=)
KR (2) KR102402287B1 (https=)
DE (1) DE112015001498T5 (https=)
WO (1) WO2015149022A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9099292B1 (en) * 2009-05-28 2015-08-04 Kla-Tencor Corporation Laser-sustained plasma light source
US10690589B2 (en) * 2017-07-28 2020-06-23 Kla-Tencor Corporation Laser sustained plasma light source with forced flow through natural convection
US11596048B2 (en) * 2019-09-23 2023-02-28 Kla Corporation Rotating lamp for laser-sustained plasma illumination source
US11450521B2 (en) * 2020-02-05 2022-09-20 Kla Corporation Laser sustained plasma light source with high pressure flow
US11690162B2 (en) 2020-04-13 2023-06-27 Kla Corporation Laser-sustained plasma light source with gas vortex flow
US11776804B2 (en) 2021-04-23 2023-10-03 Kla Corporation Laser-sustained plasma light source with reverse vortex flow
US11978620B2 (en) * 2021-08-12 2024-05-07 Kla Corporation Swirler for laser-sustained plasma light source with reverse vortex flow
US11637008B1 (en) * 2022-05-20 2023-04-25 Kla Corporation Conical pocket laser-sustained plasma lamp
US12538408B2 (en) 2023-07-04 2026-01-27 Kla Corporation Laser-sustained plasma generation in supersonic gas jets
US20260005008A1 (en) * 2024-07-01 2026-01-01 Kla Corporation Multi-spot laser-sustained plasma light source

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3617662A1 (de) * 1986-05-26 1987-12-03 Heimann Gmbh Entladungslampe
JP2002324520A (ja) * 2001-04-26 2002-11-08 Matsushita Electric Ind Co Ltd 無電極放電ランプ
US7652430B1 (en) 2005-07-11 2010-01-26 Kla-Tencor Technologies Corporation Broadband plasma light sources with cone-shaped electrode for substrate processing
US7989786B2 (en) 2006-03-31 2011-08-02 Energetiq Technology, Inc. Laser-driven light source
US7435982B2 (en) * 2006-03-31 2008-10-14 Energetiq Technology, Inc. Laser-driven light source
TWI457715B (zh) 2008-12-27 2014-10-21 Ushio Electric Inc Light source device
JP5322217B2 (ja) * 2008-12-27 2013-10-23 ウシオ電機株式会社 光源装置
US9099292B1 (en) 2009-05-28 2015-08-04 Kla-Tencor Corporation Laser-sustained plasma light source
US8173986B2 (en) 2009-07-30 2012-05-08 Energetiq Technology, Inc. Laser-heated infrared source
EP2534672B1 (en) 2010-02-09 2016-06-01 Energetiq Technology Inc. Laser-driven light source
CA2814185A1 (en) 2010-09-10 2012-07-12 Christopher DACKSON Method and apparatus for laser welding with mixed gas plasma suppression
US9097577B2 (en) 2011-06-29 2015-08-04 KLA—Tencor Corporation Adaptive optics for compensating aberrations in light-sustained plasma cells
US9318311B2 (en) 2011-10-11 2016-04-19 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source
US9927094B2 (en) 2012-01-17 2018-03-27 Kla-Tencor Corporation Plasma cell for providing VUV filtering in a laser-sustained plasma light source
US9390892B2 (en) * 2012-06-26 2016-07-12 Kla-Tencor Corporation Laser sustained plasma light source with electrically induced gas flow
US9534848B2 (en) 2012-08-28 2017-01-03 Kla-Tencor Corporation Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
US9390902B2 (en) * 2013-03-29 2016-07-12 Kla-Tencor Corporation Method and system for controlling convective flow in a light-sustained plasma
US9185788B2 (en) 2013-05-29 2015-11-10 Kla-Tencor Corporation Method and system for controlling convection within a plasma cell
US9433070B2 (en) 2013-12-13 2016-08-30 Kla-Tencor Corporation Plasma cell with floating flange

Also Published As

Publication number Publication date
KR20160138241A (ko) 2016-12-02
WO2015149022A1 (en) 2015-10-01
JP6727371B2 (ja) 2020-07-22
KR20210149892A (ko) 2021-12-09
KR102381585B1 (ko) 2022-04-04
US20150279628A1 (en) 2015-10-01
US20160163516A1 (en) 2016-06-09
JP2019145518A (ja) 2019-08-29
JP6517231B2 (ja) 2019-05-22
JP2017514271A (ja) 2017-06-01
US9721761B2 (en) 2017-08-01
US9263238B2 (en) 2016-02-16
KR102402287B1 (ko) 2022-05-26

Similar Documents

Publication Publication Date Title
DE112015001498T5 (de) Offene Plasmalampe zur Bildung eines mittels Licht aufrechterhaltenen Plasmas
DE112014001493B4 (de) Plasmazelle zur Steuerung von Konvektion sowie Verfahren und System zur Steuerung von Konvektion in einer Plasmazelle
DE112014001747B4 (de) Verfahren und Vorrichtung zur Steuerung einer Konvektionsströmung in einem lichtgestützten Plasma
DE112007000821B4 (de) Lasergetriebene Lichtquelle
DE112013007825B4 (de) Plasmazelle einer mittels eines lasers aufrecht erhaltenen plasmalichtquelle mit einer anordnung zur rotation des plasmakolbens und einer flüssigkeit zur filterung von vuv-strahlung
DE112015001623B4 (de) Lasergestützte Plasma-Lichtquelle mit optischen Elementen zum Richten einer Pumpbeleuchtung, so dass eine Vielzahl voneinander räumlich getrennter Plasmen aufrecht erhalten wird und entsprechendes Verfahren für langgestreckte Plasmen
DE112015001355B4 (de) Lichtquelle mit nanostrukturierter antireflexions-schicht
DE112010000850B4 (de) Verfahren und Vorrichtung zum Aufrechterhalten und Erzeugen eines Plasmas
DE112015002079T5 (de) Breitbandlichtquelle mit transparentem Bereich hohen Hydroxidgehalts
DE112016004526T5 (de) System und Verfahren zum elektrodenlosen Zünden von Plasma in einer lasergestützten Plasmalichtquelle
DE112016000310T5 (de) System und verfahren zum inhibieren von strahlungsemission einer lasergestützten plasmaquelle
DE112014005636B4 (de) Plasmazelle mit freiem Flansch
CH666776A5 (de) Strahlungsquelle fuer optische geraete, insbesondere fuer fotolithografische abbildungssysteme.
DE102012025396A1 (de) Ausleuchtvorrichtung für die Ausleuchtung eines Ausleuchtbereichs
DE112012002703T5 (de) Optisches Pumpen zum Erhalt von Plasma
DE1501900A1 (de) Einrichtung zum Entzuenden des OElnebels eines mit Schweroel beschickten Heizungskessels
DE60316929T2 (de) Festkörperlaservorrichtung mit radialem valenzdotierungsprofil
DE112023001604T5 (de) Pulsunterstütztes lasergestütztes plasma in strömenden hochdruckflüssigkeiten
DE10205189B4 (de) Verfahren zur Erzeugung von extrem ultravioletter Strahlung auf Basis eines strahlungsemittierenden Plasmas
DE1170071B (de) Reflektoranordnung fuer mit selektiver Fluoreszenz arbeitende optische Sender oder Verstaerker
DE102015201253A1 (de) Thermisch optimierte obskurationsblenden und projektionsbelichtungsanlage mit derartigen blenden
WO2003056605A2 (de) Gekühlte hochdruckgasentladungslampe
DE3214110A1 (de) Lichtquelle mit definiertem emissionsspektrum
DE2133106C3 (de) Abstimmbarer optischer Sender (Laser)
DE1926935C (de) Scheinwerfer

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R016 Response to examination communication
R016 Response to examination communication