KR102402287B1 - 광 지속 플라즈마를 형성하기 위한 개방형 플라즈마 램프 - Google Patents

광 지속 플라즈마를 형성하기 위한 개방형 플라즈마 램프 Download PDF

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Publication number
KR102402287B1
KR102402287B1 KR1020217039111A KR20217039111A KR102402287B1 KR 102402287 B1 KR102402287 B1 KR 102402287B1 KR 1020217039111 A KR1020217039111 A KR 1020217039111A KR 20217039111 A KR20217039111 A KR 20217039111A KR 102402287 B1 KR102402287 B1 KR 102402287B1
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South Korea
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plasma
gas
control element
convection control
lamp
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Korean (ko)
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KR20210149892A (ko
Inventor
로렌 윌슨
아난트 침말기
일야 베젤
아나톨리 스체멜린인
매튜 더스틴
길다르도 델가도
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케이엘에이 코포레이션
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32321—Discharge generated by other radiation
    • H01J37/32339—Discharge generated by other radiation using electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Plasma Technology (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • X-Ray Techniques (AREA)
KR1020217039111A 2014-03-27 2015-03-27 광 지속 플라즈마를 형성하기 위한 개방형 플라즈마 램프 Active KR102402287B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201461971035P 2014-03-27 2014-03-27
US61/971,035 2014-03-27
US14/670,210 US9263238B2 (en) 2014-03-27 2015-03-26 Open plasma lamp for forming a light-sustained plasma
US14/670,210 2015-03-26
PCT/US2015/023177 WO2015149022A1 (en) 2014-03-27 2015-03-27 Open plasma lamp for forming a light-sustained plasma
KR1020167029988A KR102381585B1 (ko) 2014-03-27 2015-03-27 광 지속 플라즈마를 형성하기 위한 개방형 플라즈마 램프

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020167029988A Division KR102381585B1 (ko) 2014-03-27 2015-03-27 광 지속 플라즈마를 형성하기 위한 개방형 플라즈마 램프

Publications (2)

Publication Number Publication Date
KR20210149892A KR20210149892A (ko) 2021-12-09
KR102402287B1 true KR102402287B1 (ko) 2022-05-26

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KR1020217039111A Active KR102402287B1 (ko) 2014-03-27 2015-03-27 광 지속 플라즈마를 형성하기 위한 개방형 플라즈마 램프
KR1020167029988A Active KR102381585B1 (ko) 2014-03-27 2015-03-27 광 지속 플라즈마를 형성하기 위한 개방형 플라즈마 램프

Family Applications After (1)

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KR1020167029988A Active KR102381585B1 (ko) 2014-03-27 2015-03-27 광 지속 플라즈마를 형성하기 위한 개방형 플라즈마 램프

Country Status (5)

Country Link
US (2) US9263238B2 (https=)
JP (2) JP6517231B2 (https=)
KR (2) KR102402287B1 (https=)
DE (1) DE112015001498T5 (https=)
WO (1) WO2015149022A1 (https=)

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US9099292B1 (en) * 2009-05-28 2015-08-04 Kla-Tencor Corporation Laser-sustained plasma light source
US10690589B2 (en) * 2017-07-28 2020-06-23 Kla-Tencor Corporation Laser sustained plasma light source with forced flow through natural convection
US11596048B2 (en) * 2019-09-23 2023-02-28 Kla Corporation Rotating lamp for laser-sustained plasma illumination source
US11450521B2 (en) * 2020-02-05 2022-09-20 Kla Corporation Laser sustained plasma light source with high pressure flow
US11690162B2 (en) 2020-04-13 2023-06-27 Kla Corporation Laser-sustained plasma light source with gas vortex flow
US11776804B2 (en) 2021-04-23 2023-10-03 Kla Corporation Laser-sustained plasma light source with reverse vortex flow
US11978620B2 (en) * 2021-08-12 2024-05-07 Kla Corporation Swirler for laser-sustained plasma light source with reverse vortex flow
US11637008B1 (en) * 2022-05-20 2023-04-25 Kla Corporation Conical pocket laser-sustained plasma lamp
US12538408B2 (en) 2023-07-04 2026-01-27 Kla Corporation Laser-sustained plasma generation in supersonic gas jets
US20260005008A1 (en) * 2024-07-01 2026-01-01 Kla Corporation Multi-spot laser-sustained plasma light source

Citations (1)

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US20130106275A1 (en) * 2011-10-11 2013-05-02 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source

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DE3617662A1 (de) * 1986-05-26 1987-12-03 Heimann Gmbh Entladungslampe
JP2002324520A (ja) * 2001-04-26 2002-11-08 Matsushita Electric Ind Co Ltd 無電極放電ランプ
US7652430B1 (en) 2005-07-11 2010-01-26 Kla-Tencor Technologies Corporation Broadband plasma light sources with cone-shaped electrode for substrate processing
US7989786B2 (en) 2006-03-31 2011-08-02 Energetiq Technology, Inc. Laser-driven light source
US7435982B2 (en) * 2006-03-31 2008-10-14 Energetiq Technology, Inc. Laser-driven light source
TWI457715B (zh) 2008-12-27 2014-10-21 Ushio Electric Inc Light source device
JP5322217B2 (ja) * 2008-12-27 2013-10-23 ウシオ電機株式会社 光源装置
US9099292B1 (en) 2009-05-28 2015-08-04 Kla-Tencor Corporation Laser-sustained plasma light source
US8173986B2 (en) 2009-07-30 2012-05-08 Energetiq Technology, Inc. Laser-heated infrared source
EP2534672B1 (en) 2010-02-09 2016-06-01 Energetiq Technology Inc. Laser-driven light source
CA2814185A1 (en) 2010-09-10 2012-07-12 Christopher DACKSON Method and apparatus for laser welding with mixed gas plasma suppression
US9097577B2 (en) 2011-06-29 2015-08-04 KLA—Tencor Corporation Adaptive optics for compensating aberrations in light-sustained plasma cells
US9927094B2 (en) 2012-01-17 2018-03-27 Kla-Tencor Corporation Plasma cell for providing VUV filtering in a laser-sustained plasma light source
US9390892B2 (en) * 2012-06-26 2016-07-12 Kla-Tencor Corporation Laser sustained plasma light source with electrically induced gas flow
US9534848B2 (en) 2012-08-28 2017-01-03 Kla-Tencor Corporation Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
US9390902B2 (en) * 2013-03-29 2016-07-12 Kla-Tencor Corporation Method and system for controlling convective flow in a light-sustained plasma
US9185788B2 (en) 2013-05-29 2015-11-10 Kla-Tencor Corporation Method and system for controlling convection within a plasma cell
US9433070B2 (en) 2013-12-13 2016-08-30 Kla-Tencor Corporation Plasma cell with floating flange

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US20130106275A1 (en) * 2011-10-11 2013-05-02 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source

Also Published As

Publication number Publication date
DE112015001498T5 (de) 2017-01-05
KR20160138241A (ko) 2016-12-02
WO2015149022A1 (en) 2015-10-01
JP6727371B2 (ja) 2020-07-22
KR20210149892A (ko) 2021-12-09
KR102381585B1 (ko) 2022-04-04
US20150279628A1 (en) 2015-10-01
US20160163516A1 (en) 2016-06-09
JP2019145518A (ja) 2019-08-29
JP6517231B2 (ja) 2019-05-22
JP2017514271A (ja) 2017-06-01
US9721761B2 (en) 2017-08-01
US9263238B2 (en) 2016-02-16

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