DE1044295B - Ionenquelle - Google Patents

Ionenquelle

Info

Publication number
DE1044295B
DE1044295B DEH28747A DEH0028747A DE1044295B DE 1044295 B DE1044295 B DE 1044295B DE H28747 A DEH28747 A DE H28747A DE H0028747 A DEH0028747 A DE H0028747A DE 1044295 B DE1044295 B DE 1044295B
Authority
DE
Germany
Prior art keywords
electrode
tip
ion
ion source
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DEH28747A
Other languages
German (de)
English (en)
Inventor
Raymond George Herb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
High Voltage Engineering Corp
Original Assignee
High Voltage Engineering Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by High Voltage Engineering Corp filed Critical High Voltage Engineering Corp
Publication of DE1044295B publication Critical patent/DE1044295B/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]
DEH28747A 1956-01-27 1956-12-06 Ionenquelle Pending DE1044295B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US561818A US2809314A (en) 1956-01-27 1956-01-27 Field emission ion source

Publications (1)

Publication Number Publication Date
DE1044295B true DE1044295B (de) 1958-11-20

Family

ID=24243603

Family Applications (1)

Application Number Title Priority Date Filing Date
DEH28747A Pending DE1044295B (de) 1956-01-27 1956-12-06 Ionenquelle

Country Status (7)

Country Link
US (1) US2809314A (xx)
BE (1) BE553596A (xx)
CH (1) CH358515A (xx)
DE (1) DE1044295B (xx)
FR (1) FR1165210A (xx)
GB (1) GB808236A (xx)
NL (2) NL102697C (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1244300B (de) * 1959-10-01 1967-07-13 Atomic Energy Commission Vorrichtung zum Erzeugen eines Ionenstrahls
DE2805273A1 (de) * 1978-02-08 1979-08-09 Max Planck Gesellschaft Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3104322A (en) * 1958-02-10 1963-09-17 High Voltage Engineering Corp Compact neutron source
US3071705A (en) * 1958-10-06 1963-01-01 Grumman Aircraft Engineering C Electrostatic propulsion means
US3117416A (en) * 1960-06-10 1964-01-14 Itt Electronic fluid flow control valve
US3369148A (en) * 1961-07-05 1968-02-13 William J. Hitchcock System for mixing opposite polarity ions on magnetic field axis
US3398685A (en) * 1961-09-11 1968-08-27 Litton Systems Inc Ion drag pumps
US3286187A (en) * 1961-10-16 1966-11-15 Minnesota Mining & Mfg Ion source utilizing a spherically converging electric field
US3232046A (en) * 1962-06-06 1966-02-01 Aerospace Corp Plasma generator and propulsion exhaust system
GB1052902A (xx) * 1963-02-19
US3239130A (en) * 1963-07-10 1966-03-08 Cons Vacuum Corp Gas pumping methods and apparatus
FR1454051A (fr) * 1965-08-20 1966-07-22 Commissariat Energie Atomique Source d'ions
US3345820A (en) * 1965-10-19 1967-10-10 Hugh L Dryden Electron bombardment ion engine
US3405263A (en) * 1966-01-14 1968-10-08 Exxon Research Engineering Co Dual mass spectrometer ion source comprising field ionization and electron bombardment sources and the method of use
US3464207A (en) * 1966-10-10 1969-09-02 American Standard Inc Quasi-corona-aerodynamic vehicle
US3387176A (en) * 1967-01-05 1968-06-04 Hughes Aircraft Co Apparatus for passing charged particles through a field free region and neutralizingsaid particles during transit
US3530290A (en) * 1967-09-13 1970-09-22 Exxon Research Engineering Co Field emission ion source for a mass spectrometer having relatively movable anode and cathode electrodes
DE1900569C3 (de) * 1969-01-07 1976-01-08 Varian Mat Gmbh, 2800 Bremen Festkörper-Ionenquelle
US3852595A (en) * 1972-09-21 1974-12-03 Stanford Research Inst Multipoint field ionization source
US3958848A (en) * 1973-07-03 1976-05-25 Heil Hans W Method of fabricating field desorption ion source
DE2333866A1 (de) * 1973-07-03 1975-01-23 Max Planck Gesellschaft Felddesorptions-ionenquelle und verfahren zu ihrer herstellung
US4121128A (en) * 1976-03-22 1978-10-17 The United States Of America As Represented By The Secretary Of The Army Collective ion accelerator with foil-less beam extraction window
US4085330A (en) * 1976-07-08 1978-04-18 Burroughs Corporation Focused ion beam mask maker
US4328667A (en) * 1979-03-30 1982-05-11 The European Space Research Organisation Field-emission ion source and ion thruster apparatus comprising such sources
JPS6056342A (ja) * 1983-09-08 1985-04-01 Anelva Corp イオンビ−ム発生装置
US4638210A (en) * 1985-04-05 1987-01-20 Hughes Aircraft Company Liquid metal ion source
JPH0831305B2 (ja) * 1986-09-25 1996-03-27 ソニー株式会社 イオンビ−ム装置
US5397901A (en) * 1990-06-12 1995-03-14 American Technologies, Inc. Forming charges in a fluid and generation of a charged beam
US5231824A (en) * 1991-08-09 1993-08-03 Dick Robert C Van Ion beam and ion jet stream motor
US6145298A (en) * 1997-05-06 2000-11-14 Sky Station International, Inc. Atmospheric fueled ion engine
US6573642B1 (en) * 2000-01-26 2003-06-03 Motorola, Inc. Field emission device and method for the conditioning thereof
EP1395820A1 (en) * 2001-04-20 2004-03-10 University Of British Columbia High throughput ion source with multiple ion sprayers and ion lenses
WO2010132265A2 (en) 2009-05-12 2010-11-18 Carl Zeiss Nts, Llc. Gas delivery in a microscope system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2287620A (en) * 1939-06-09 1942-06-23 Kallmann Hartmut Israel Device for irradiating objects with neutrons, especially for depicting them by meansof neutron-radiation
GB697105A (en) * 1950-10-16 1953-09-16 Ass Elect Ind Improvements relating to high voltage electrostatic apparatus for accelerating charged particles

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1244300B (de) * 1959-10-01 1967-07-13 Atomic Energy Commission Vorrichtung zum Erzeugen eines Ionenstrahls
DE2805273A1 (de) * 1978-02-08 1979-08-09 Max Planck Gesellschaft Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen

Also Published As

Publication number Publication date
NL102697C (xx)
FR1165210A (fr) 1958-10-20
BE553596A (xx)
US2809314A (en) 1957-10-08
NL213062A (xx)
GB808236A (en) 1959-01-28
CH358515A (de) 1961-11-30

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