DE10336745A1 - Trägervorrichtung für magnetisierbare Substrate - Google Patents
Trägervorrichtung für magnetisierbare Substrate Download PDFInfo
- Publication number
- DE10336745A1 DE10336745A1 DE10336745A DE10336745A DE10336745A1 DE 10336745 A1 DE10336745 A1 DE 10336745A1 DE 10336745 A DE10336745 A DE 10336745A DE 10336745 A DE10336745 A DE 10336745A DE 10336745 A1 DE10336745 A1 DE 10336745A1
- Authority
- DE
- Germany
- Prior art keywords
- substrates
- carrier device
- magnetizable
- magnetizable substrates
- dollar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/18—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by resistance strain gauges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
- Measuring Fluid Pressure (AREA)
- Chemically Coating (AREA)
- Patch Boards (AREA)
Abstract
Mit der vorliegenden Erfindung wird eine Trägervorrichtung für magnetisierbare Substrate, wie z. B. Edelstahlsubstrate, vorgeschlagen, die sich insbesondere zur Prozessierung von Dünnschichtsubstraten eignet. DOLLAR A Dazu umfasst die erfindungsgemäße Trägervorrichtung mindestens ein magnetisch wirkendes Grundelement (1) mit mindestens einer Aufnahme (7) für ein Substrat (2).
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10336745A DE10336745A1 (de) | 2003-08-11 | 2003-08-11 | Trägervorrichtung für magnetisierbare Substrate |
UAA200601313A UA83236C2 (en) | 2003-08-11 | 2004-07-01 | Switchgear |
EP04738870A EP1656468A1 (de) | 2003-08-11 | 2004-07-07 | Trägervorrichtung für magnetisierbare substrate |
JP2006519754A JP2007506942A (ja) | 2003-08-11 | 2004-07-07 | 磁化可能な基板のための支持装置 |
US10/568,137 US20060238286A1 (en) | 2003-08-11 | 2004-07-07 | Carrier device for magnetizable substrate |
PCT/DE2004/001448 WO2005014878A1 (de) | 2003-08-11 | 2004-07-07 | Trägervorrichtung für magnetisierbare substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10336745A DE10336745A1 (de) | 2003-08-11 | 2003-08-11 | Trägervorrichtung für magnetisierbare Substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
DE10336745A1 true DE10336745A1 (de) | 2005-03-10 |
Family
ID=34129529
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10336745A Withdrawn DE10336745A1 (de) | 2003-08-11 | 2003-08-11 | Trägervorrichtung für magnetisierbare Substrate |
Country Status (6)
Country | Link |
---|---|
US (1) | US20060238286A1 (de) |
EP (1) | EP1656468A1 (de) |
JP (1) | JP2007506942A (de) |
DE (1) | DE10336745A1 (de) |
UA (1) | UA83236C2 (de) |
WO (1) | WO2005014878A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT510420B1 (de) * | 2011-04-08 | 2012-04-15 | Bosch Gmbh Robert | Verfahren zum gasnitrieren von hochdruckkomponenten |
CN111390589A (zh) * | 2020-04-10 | 2020-07-10 | 陕西柴油机重工有限公司 | 一种v型柴油机开档、主轴承孔及底面的加工方法及系统 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10121581B2 (en) | 2014-09-29 | 2018-11-06 | Apple Inc. | Method for magnetizing multiple zones in a monolithic piece of magnetic material |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU654694A1 (ru) * | 1976-10-19 | 1979-03-30 | Предприятие П/Я Г-4598 | Устройство дл нанесени покрытий из газовой фазы |
JPH0240468B2 (ja) * | 1982-09-07 | 1990-09-11 | Taiho Kogyo Co Ltd | Hankyutainotanmenkakoyojigu |
JPH03101206A (ja) * | 1989-09-14 | 1991-04-26 | Fuji Photo Film Co Ltd | スパッタ装置 |
DE4227848B4 (de) * | 1991-11-28 | 2009-05-07 | Robert Bosch Gmbh | Bauteilträger und Verfahren zum Halten eines aus einem ferromagnetischen Werkstoff ausgebildeten Bauteils |
KR960704303A (ko) * | 1994-05-09 | 1996-08-31 | 이데이 노부유키 | 자기헤드 및 그 제조방법 |
DE19831064C2 (de) * | 1998-07-10 | 2000-05-18 | Bosch Gmbh Robert | Vorrichtung zum Halten von aus ferromagnetischem Werkstoff bestehenden Bauteilen |
DE19901624A1 (de) * | 1999-01-18 | 2000-09-14 | Helmut Fischer Gmbh & Co | Bauteilträger |
SE514666C2 (sv) * | 1999-07-05 | 2001-04-02 | Sandvik Ab | Metod för fixering av skär vid PVD-beläggning |
DE19934114A1 (de) * | 1999-07-21 | 2001-01-25 | Bosch Gmbh Robert | Substrat und Werkstückträger zur Aufnahme des Substrates |
US7517498B2 (en) * | 2003-08-19 | 2009-04-14 | Agilent Technologies, Inc. | Apparatus for substrate handling |
-
2003
- 2003-08-11 DE DE10336745A patent/DE10336745A1/de not_active Withdrawn
-
2004
- 2004-07-01 UA UAA200601313A patent/UA83236C2/ru unknown
- 2004-07-07 WO PCT/DE2004/001448 patent/WO2005014878A1/de active Application Filing
- 2004-07-07 US US10/568,137 patent/US20060238286A1/en not_active Abandoned
- 2004-07-07 JP JP2006519754A patent/JP2007506942A/ja active Pending
- 2004-07-07 EP EP04738870A patent/EP1656468A1/de not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT510420B1 (de) * | 2011-04-08 | 2012-04-15 | Bosch Gmbh Robert | Verfahren zum gasnitrieren von hochdruckkomponenten |
CN111390589A (zh) * | 2020-04-10 | 2020-07-10 | 陕西柴油机重工有限公司 | 一种v型柴油机开档、主轴承孔及底面的加工方法及系统 |
Also Published As
Publication number | Publication date |
---|---|
UA83236C2 (en) | 2008-06-25 |
US20060238286A1 (en) | 2006-10-26 |
JP2007506942A (ja) | 2007-03-22 |
WO2005014878A1 (de) | 2005-02-17 |
EP1656468A1 (de) | 2006-05-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8139 | Disposal/non-payment of the annual fee |