DE102020001816A1 - Verfahren zur herstellung eines keramischen produktes, das siliciumcarbid enthält - Google Patents

Verfahren zur herstellung eines keramischen produktes, das siliciumcarbid enthält Download PDF

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Publication number
DE102020001816A1
DE102020001816A1 DE102020001816.5A DE102020001816A DE102020001816A1 DE 102020001816 A1 DE102020001816 A1 DE 102020001816A1 DE 102020001816 A DE102020001816 A DE 102020001816A DE 102020001816 A1 DE102020001816 A1 DE 102020001816A1
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DE
Germany
Prior art keywords
furnace
silicon carbide
containing silicon
product containing
ceramic product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102020001816.5A
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German (de)
English (en)
Inventor
Yoshiyuki Kamei
Chikashi Ihara
Masato Shimada
Kazuhi Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
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NGK Insulators Ltd
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Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE102020001816A1 publication Critical patent/DE102020001816A1/de
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
    • F27B9/045—Furnaces with controlled atmosphere
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/0006—Honeycomb structures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/06—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof by burning-out added substances by burning natural expanding materials or by sublimating or melting out added substances
    • C04B38/063—Preparing or treating the raw materials individually or as batches
    • C04B38/0635—Compounding ingredients
    • C04B38/0645—Burnable, meltable, sublimable materials
    • C04B38/068—Carbonaceous materials, e.g. coal, carbon, graphite, hydrocarbons
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00793—Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/0081—Uses not provided for elsewhere in C04B2111/00 as catalysts or catalyst carriers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/428—Silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567—Treatment time
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6581—Total pressure below 1 atmosphere, e.g. vacuum
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6583—Oxygen containing atmosphere, e.g. with changing oxygen pressures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6586—Processes characterised by the flow of gas
    • C—CHEMISTRY; METALLURGY
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/95—Products characterised by their size, e.g. microceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B7/00—Rotary-drum furnaces, i.e. horizontal or slightly inclined
    • F27B7/02—Rotary-drum furnaces, i.e. horizontal or slightly inclined of multiple-chamber or multiple-drum type
    • F27B2007/025—Rotary-drum furnaces, i.e. horizontal or slightly inclined of multiple-chamber or multiple-drum type with different chambers, e.g. treatment zones
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00—Cooling of furnaces or of charges therein
    • F27D2009/007—Cooling of charges therein
    • F27D2009/0072—Cooling of charges therein the cooling medium being a gas
    • F27D2009/0078—Cooling of charges therein the cooling medium being a gas in indirect contact with the charge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F27D2019/0006—Monitoring the characteristics (composition, quantities, temperature, pressure) of at least one of the gases of the kiln atmosphere and using it as a controlling value

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ceramic Products (AREA)
  • Furnace Details (AREA)
  • Filtering Materials (AREA)
  • Porous Artificial Stone Or Porous Ceramic Products (AREA)
  • Tunnel Furnaces (AREA)
  • Furnace Charging Or Discharging (AREA)
DE102020001816.5A 2019-03-28 2020-03-19 Verfahren zur herstellung eines keramischen produktes, das siliciumcarbid enthält Pending DE102020001816A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019064908A JP7249848B2 (ja) 2019-03-28 2019-03-28 炭化珪素含有セラミックス製品の製造方法
JP2019-064908 2019-03-28

Publications (1)

Publication Number Publication Date
DE102020001816A1 true DE102020001816A1 (de) 2020-10-01

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE102020001816.5A Pending DE102020001816A1 (de) 2019-03-28 2020-03-19 Verfahren zur herstellung eines keramischen produktes, das siliciumcarbid enthält

Country Status (4)

Country Link
US (1) US12553667B2 (https=)
JP (1) JP7249848B2 (https=)
CN (1) CN111747758B (https=)
DE (1) DE102020001816A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9362546B1 (en) 2013-01-07 2016-06-07 Quantumscape Corporation Thin film lithium conducting powder material deposition from flux
US10403931B2 (en) 2013-10-07 2019-09-03 Quantumscape Corporation Garnet materials for Li secondary batteries and methods of making and using garnet materials
EP3283449B8 (en) 2015-04-16 2021-05-05 QuantumScape Battery, Inc. Lithium stuffed garnet setter plates for solid electrolyte fabrication
US20170022112A1 (en) 2015-07-21 2017-01-26 Quantumscape Corporation Processes and materials for casting and sintering green garnet thin films
US9966630B2 (en) 2016-01-27 2018-05-08 Quantumscape Corporation Annealed garnet electrolyte separators
WO2018027200A1 (en) 2016-08-05 2018-02-08 Quantumscape Corporation Translucent and transparent separators
WO2018075809A1 (en) 2016-10-21 2018-04-26 Quantumscape Corporation Lithium-stuffed garnet electrolytes with a reduced surface defect density and methods of making and using the same
ES2973278T3 (es) 2017-06-23 2024-06-19 Quantumscape Battery Inc Electrolitos de granate rellenos de litio con inclusiones de fase secundaria
US11600850B2 (en) 2017-11-06 2023-03-07 Quantumscape Battery, Inc. Lithium-stuffed garnet thin films and pellets having an oxyfluorinated and/or fluorinated surface and methods of making and using the thin films and pellets
JP7708766B2 (ja) 2020-01-15 2025-07-15 クアンタムスケープ バッテリー，インコーポレイテッド 電池用の高グリーン密度セラミック
WO2025063034A1 (ja) * 2023-09-20 2025-03-27 株式会社プロテリアル 炭化珪素系セラミックハニカム構造体及びその製造方法
JP7566193B1 (ja) 2024-03-18 2024-10-11 ノリタケ株式会社 焼成炉

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2960744A (en) * 1957-10-08 1960-11-22 Gen Electric Equilibrium atmosphere tunnel kilns for ferrite manufacture
US3807052A (en) * 1972-06-26 1974-04-30 Union Carbide Corp Apparatus for irradiation of a moving product in an inert atmosphere
JPS60233492A (ja) * 1984-05-07 1985-11-20 電元冶金工業株式会社 連続焼成炉
DE4234855B4 (de) * 1991-10-18 2005-02-24 Denso Corp., Kariya Aluminiumhartlötverfahren und Ofen dafür
JP3280059B2 (ja) * 1992-02-18 2002-04-30 東海カーボン株式会社 活性炭化珪素の製造方法
JPH0745624A (ja) * 1993-07-29 1995-02-14 Tokyo Electron Tohoku Ltd 熱処理装置
JP3210208B2 (ja) * 1995-06-26 2001-09-17 シャープ株式会社 炭化ケイ素セラミックヒーターの製造方法
KR100305245B1 (ko) * 1999-02-06 2001-09-13 한종웅 탄화규소질 내화재의 제조방법
US6854319B2 (en) * 2002-09-25 2005-02-15 Continental Cement Company Methods and apparatus for providing a gas tight enclosure
JP2004292197A (ja) 2003-03-26 2004-10-21 Ngk Insulators Ltd ハニカム構造体の製造方法
KR100842595B1 (ko) 2004-08-04 2008-07-01 이비덴 가부시키가이샤 연속 소성로 및 이것을 이용한 다공질 세라믹 부재의 제조방법
JPWO2006013651A1 (ja) 2004-08-04 2008-05-01 イビデン株式会社 焼成炉及びこれを用いた多孔質セラミック部材の製造方法
EP1818639A4 (en) * 2004-08-04 2007-08-29 Ibiden Co Ltd FURNACE AND METHOD FOR PRODUCING A BURNTED POROUS CERAMIC ARTICLE USING THE FUEL
WO2007086145A1 (ja) * 2006-01-30 2007-08-02 International Customer Service ガス雰囲気熱処理装置
JP2007254237A (ja) 2006-03-24 2007-10-04 Ngk Insulators Ltd 含Ｓｉ非酸化物セラミックス体の製造方法
CN200975838Y (zh) * 2006-09-12 2007-11-14 洛阳市西格马仪器制造有限公司 真空气氛管式电阻炉
JP5311324B2 (ja) * 2007-08-31 2013-10-09 Ｎｔｎ株式会社 熱処理炉
CN201246955Y (zh) 2008-06-05 2009-05-27 钢铁研究总院 高温氮化遂道炉
JP2010235387A (ja) * 2009-03-31 2010-10-21 Ngk Insulators Ltd 炭化珪素質体及びその製造方法
EP2540370B1 (en) * 2010-02-22 2018-04-04 Hitachi Metals, Ltd. Ceramic honeycomb structure
CN102071288B (zh) * 2011-01-26 2012-11-28 中冶京诚工程技术有限公司 固溶热处理炉设备
US9242313B2 (en) * 2012-07-30 2016-01-26 General Electric Company Welding furnace and viewport assembly
CN103115487B (zh) * 2013-01-23 2014-12-24 青海拓海新材料有限公司 用气流床反应器排放氮气生产氮化硅结合碳化硅制品的隧道窑
JP6257968B2 (ja) * 2013-09-06 2018-01-10 日本碍子株式会社 多孔質材料、ハニカム構造体及びハニカムフィルタ
CN104233046B (zh) * 2014-09-16 2017-04-05 江苏鼎跃金属制品有限公司 一种氮化铬铁的生产方法
JP2016067992A (ja) * 2014-09-29 2016-05-09 イビデン株式会社 ハニカムフィルタの製造方法
FR3030297B1 (fr) * 2014-12-18 2016-12-23 Saint-Gobain Centre De Rech Et D'Etudes Europeen Filtres comprenant des membranes en sic incorporant de l'azote
CN108290796B (zh) * 2015-11-25 2020-08-28 日本碍子株式会社 非活性气体的置换方法以及使用非活性气体的置换方法的陶瓷结构体的制造方法
JP6423102B2 (ja) * 2016-03-24 2018-11-14 日本碍子株式会社 工業炉及びその熱利用方法
JP6654085B2 (ja) * 2016-03-31 2020-02-26 日本碍子株式会社 多孔質材料、及び多孔質材料の製造方法並びにハニカム構造体
JP6633014B2 (ja) 2017-03-17 2020-01-22 日本碍子株式会社 炭化珪素質ハニカム構造体の製造方法
CN208333779U (zh) * 2018-07-06 2019-01-04 北京品驰医疗设备有限公司 一种非腔体结构件的检漏装置

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