DE102018201263B3 - Ein verfahren und eine vorrichtung zum herstellen eines pin-fin-leistungsmoduls - Google Patents
Ein verfahren und eine vorrichtung zum herstellen eines pin-fin-leistungsmoduls Download PDFInfo
- Publication number
- DE102018201263B3 DE102018201263B3 DE102018201263.6A DE102018201263A DE102018201263B3 DE 102018201263 B3 DE102018201263 B3 DE 102018201263B3 DE 102018201263 A DE102018201263 A DE 102018201263A DE 102018201263 B3 DE102018201263 B3 DE 102018201263B3
- Authority
- DE
- Germany
- Prior art keywords
- holes
- fins
- fin
- pin
- power module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000011810 insulating material Substances 0.000 claims abstract description 17
- 238000005266 casting Methods 0.000 claims abstract description 10
- 239000003822 epoxy resin Substances 0.000 claims abstract description 7
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 7
- 238000009826 distribution Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 229920006254 polymer film Polymers 0.000 claims description 3
- 239000004593 Epoxy Substances 0.000 abstract description 6
- 238000005452 bending Methods 0.000 abstract description 2
- 238000000465 moulding Methods 0.000 abstract description 2
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001721 transfer moulding Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14065—Positioning or centering articles in the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14639—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14065—Positioning or centering articles in the mould
- B29C2045/14131—Positioning or centering articles in the mould using positioning or centering means forming part of the insert
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018201263.6A DE102018201263B3 (de) | 2018-01-29 | 2018-01-29 | Ein verfahren und eine vorrichtung zum herstellen eines pin-fin-leistungsmoduls |
CN201980006546.9A CN111527598A (zh) | 2018-01-29 | 2019-01-10 | 用于制造针-翅型功率模块的方法和夹具 |
EP19700871.7A EP3747046A1 (en) | 2018-01-29 | 2019-01-10 | A method and a jig for manufacturing a pin-fin type power module |
JP2020541446A JP7290650B2 (ja) | 2018-01-29 | 2019-01-10 | ピンフィン型パワーモジュールを製造する方法および治具 |
PCT/EP2019/050488 WO2019145154A1 (en) | 2018-01-29 | 2019-01-10 | A method and a jig for manufacturing a pin-fin type power module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018201263.6A DE102018201263B3 (de) | 2018-01-29 | 2018-01-29 | Ein verfahren und eine vorrichtung zum herstellen eines pin-fin-leistungsmoduls |
Publications (1)
Publication Number | Publication Date |
---|---|
DE102018201263B3 true DE102018201263B3 (de) | 2019-05-16 |
Family
ID=65036765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102018201263.6A Active DE102018201263B3 (de) | 2018-01-29 | 2018-01-29 | Ein verfahren und eine vorrichtung zum herstellen eines pin-fin-leistungsmoduls |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP3747046A1 (ja) |
JP (1) | JP7290650B2 (ja) |
CN (1) | CN111527598A (ja) |
DE (1) | DE102018201263B3 (ja) |
WO (1) | WO2019145154A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102020208862A1 (de) * | 2020-07-15 | 2022-01-20 | Zf Friedrichshafen Ag | Formwerkzeug zum verkapseln eines pin-fin-artigen leistungsmoduls und verfahren zum herstellen eines leistungsmoduls |
CN114514105B (zh) * | 2020-09-16 | 2023-08-22 | 华为技术有限公司 | 注塑模具及注塑方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130322019A1 (en) | 2010-10-05 | 2013-12-05 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Heat-sink device intended for at least one electronic component and corresponding method |
DE112012005791T5 (de) | 2012-01-31 | 2014-10-16 | Mitsubishi Electric Corporation | Halbleiterbauteil und Verfahren zu dessen Herstellung |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011238644A (ja) * | 2010-05-06 | 2011-11-24 | Denso Corp | パワー半導体モジュールの製造方法 |
JP2012164763A (ja) * | 2011-02-04 | 2012-08-30 | Toyota Motor Corp | ヒートシンク付き半導体パッケージの製造方法及び当該ヒートシンク |
JP5776328B2 (ja) * | 2011-05-19 | 2015-09-09 | トヨタ自動車株式会社 | 冶具、半導体モジュールの製造方法及び半導体モジュール |
JP5987190B2 (ja) * | 2012-09-25 | 2016-09-07 | 三菱電機株式会社 | 半導体装置封止用金型及び半導体装置 |
JP6021695B2 (ja) * | 2013-03-06 | 2016-11-09 | 三菱電機株式会社 | 半導体装置の製造方法および半導体装置の製造装置 |
JP2015185835A (ja) * | 2014-03-26 | 2015-10-22 | 株式会社デンソー | 半導体装置及びその製造方法 |
JP6446280B2 (ja) * | 2015-01-28 | 2018-12-26 | 日立オートモティブシステムズ株式会社 | 電子装置 |
-
2018
- 2018-01-29 DE DE102018201263.6A patent/DE102018201263B3/de active Active
-
2019
- 2019-01-10 EP EP19700871.7A patent/EP3747046A1/en not_active Withdrawn
- 2019-01-10 JP JP2020541446A patent/JP7290650B2/ja active Active
- 2019-01-10 WO PCT/EP2019/050488 patent/WO2019145154A1/en unknown
- 2019-01-10 CN CN201980006546.9A patent/CN111527598A/zh active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130322019A1 (en) | 2010-10-05 | 2013-12-05 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Heat-sink device intended for at least one electronic component and corresponding method |
DE112012005791T5 (de) | 2012-01-31 | 2014-10-16 | Mitsubishi Electric Corporation | Halbleiterbauteil und Verfahren zu dessen Herstellung |
Also Published As
Publication number | Publication date |
---|---|
JP2021513217A (ja) | 2021-05-20 |
WO2019145154A1 (en) | 2019-08-01 |
CN111527598A (zh) | 2020-08-11 |
EP3747046A1 (en) | 2020-12-09 |
JP7290650B2 (ja) | 2023-06-13 |
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Legal Events
Date | Code | Title | Description |
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R012 | Request for examination validly filed | ||
R016 | Response to examination communication | ||
R018 | Grant decision by examination section/examining division | ||
R020 | Patent grant now final |