DE102018133187A1 - Verfahren zum Betreiben einer Beschichtungsanlage zur Herstellung von Schichtsystemen - Google Patents
Verfahren zum Betreiben einer Beschichtungsanlage zur Herstellung von Schichtsystemen Download PDFInfo
- Publication number
- DE102018133187A1 DE102018133187A1 DE102018133187.8A DE102018133187A DE102018133187A1 DE 102018133187 A1 DE102018133187 A1 DE 102018133187A1 DE 102018133187 A DE102018133187 A DE 102018133187A DE 102018133187 A1 DE102018133187 A1 DE 102018133187A1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- URROIMSKGFJNKC-UHFFFAOYSA-N oxygen(2-) praseodymium(3+) titanium(4+) Chemical compound [O-2].[Ti+4].[Pr+3] URROIMSKGFJNKC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
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- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00865—Applying coatings; tinting; colouring
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Optics & Photonics (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Surface Treatment Of Optical Elements (AREA)
Priority Applications (14)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102018133187.8A DE102018133187A1 (de) | 2018-12-20 | 2018-12-20 | Verfahren zum Betreiben einer Beschichtungsanlage zur Herstellung von Schichtsystemen |
| EP24192101.4A EP4451039B1 (de) | 2018-12-20 | 2019-12-17 | System von beschichtungsanlagen zur herstellung von schichtsystemen |
| PCT/EP2019/085810 WO2020127394A1 (de) | 2018-12-20 | 2019-12-17 | Verfahren zum betreiben einer beschichtungsanlage zur herstellung von schichtsystemen |
| EP19845695.6A EP3899422B1 (de) | 2018-12-20 | 2019-12-17 | Verfahren zum betreiben einer beschichtungsanlage zur herstellung von schichtsystemen |
| JP2021534251A JP2022513882A (ja) | 2018-12-20 | 2019-12-17 | 層システムを製造するためのコーティング設備を動作させる方法 |
| IL283986A IL283986B2 (en) | 2018-12-20 | 2019-12-17 | Method for operating a coating installation for producing layer systems |
| CN201980086583.5A CN113272622B (zh) | 2018-12-20 | 2019-12-17 | 用于操作用于生产层系统的涂覆设施的方法 |
| US17/414,652 US12234547B2 (en) | 2018-12-20 | 2019-12-17 | Method for operating a coating installation for producing layer systems |
| MX2021007133A MX2021007133A (es) | 2018-12-20 | 2019-12-17 | Metodo para operar una instalacion de recubrimiento para producir sistemas de capas. |
| ES19845695T ES2989589T3 (es) | 2018-12-20 | 2019-12-17 | Procedimiento de funcionamiento de un sistema de revestimiento para la producción de sistemas de capas |
| BR112021011616-8A BR112021011616B1 (pt) | 2018-12-20 | 2019-12-17 | Método para operar uma instalação de revestimento para produzir sistemas de camadas, sistema de revestimento para a produção de um sistema de camadas e meio de armazenamento legível por computador |
| PH1/2021/551399A PH12021551399A1 (en) | 2018-12-20 | 2019-12-17 | Method for operating a coating installation for producing layer systems |
| CL2021001579A CL2021001579A1 (es) | 2018-12-20 | 2021-06-16 | Método para operar una instalación de recubrimiento para producir sistemas de capas |
| US19/029,478 US20250163567A1 (en) | 2018-12-20 | 2025-01-17 | Method for operating a coating installation for producing layer systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102018133187.8A DE102018133187A1 (de) | 2018-12-20 | 2018-12-20 | Verfahren zum Betreiben einer Beschichtungsanlage zur Herstellung von Schichtsystemen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102018133187A1 true DE102018133187A1 (de) | 2020-06-25 |
Family
ID=69375310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102018133187.8A Pending DE102018133187A1 (de) | 2018-12-20 | 2018-12-20 | Verfahren zum Betreiben einer Beschichtungsanlage zur Herstellung von Schichtsystemen |
Country Status (11)
| Country | Link |
|---|---|
| US (2) | US12234547B2 (https=) |
| EP (2) | EP4451039B1 (https=) |
| JP (1) | JP2022513882A (https=) |
| CN (1) | CN113272622B (https=) |
| CL (1) | CL2021001579A1 (https=) |
| DE (1) | DE102018133187A1 (https=) |
| ES (1) | ES2989589T3 (https=) |
| IL (1) | IL283986B2 (https=) |
| MX (1) | MX2021007133A (https=) |
| PH (1) | PH12021551399A1 (https=) |
| WO (1) | WO2020127394A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115449771B (zh) * | 2022-09-21 | 2025-01-28 | 华中科技大学 | 模具涂层生成方法、装置、设备、存储介质和程序产品 |
| CN116045791B (zh) * | 2023-04-03 | 2023-07-21 | 成都飞机工业（集团）有限责任公司 | 一种金属漆涂层厚度评估方法 |
| CN120745007B (zh) * | 2025-06-23 | 2026-03-27 | 深圳市艾丽斯卡文化创意有限公司 | 多材料混色工艺数字孪生仿真平台 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150021168A1 (en) * | 2013-07-17 | 2015-01-22 | Applied Materials, Inc. | Inline deposition control apparatus and method of inline deposition control |
| WO2016110339A1 (de) | 2015-01-07 | 2016-07-14 | Rodenstock Gmbh | Schichtsystem und optisches element mit einem schichtsystem |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011053573A (ja) * | 2009-09-04 | 2011-03-17 | Konica Minolta Opto Inc | 薄膜形成方法 |
| JP6869648B2 (ja) * | 2016-06-07 | 2021-05-12 | 日東電工株式会社 | 多層膜の成膜方法 |
| EP3346023A1 (en) * | 2017-01-05 | 2018-07-11 | Essilor International | Method for layer by layer optimization of a thin film |
-
2018
- 2018-12-20 DE DE102018133187.8A patent/DE102018133187A1/de active Pending
-
2019
- 2019-12-17 MX MX2021007133A patent/MX2021007133A/es unknown
- 2019-12-17 EP EP24192101.4A patent/EP4451039B1/de active Active
- 2019-12-17 PH PH1/2021/551399A patent/PH12021551399A1/en unknown
- 2019-12-17 US US17/414,652 patent/US12234547B2/en active Active
- 2019-12-17 EP EP19845695.6A patent/EP3899422B1/de active Active
- 2019-12-17 WO PCT/EP2019/085810 patent/WO2020127394A1/de not_active Ceased
- 2019-12-17 JP JP2021534251A patent/JP2022513882A/ja active Pending
- 2019-12-17 IL IL283986A patent/IL283986B2/en unknown
- 2019-12-17 ES ES19845695T patent/ES2989589T3/es active Active
- 2019-12-17 CN CN201980086583.5A patent/CN113272622B/zh active Active
-
2021
- 2021-06-16 CL CL2021001579A patent/CL2021001579A1/es unknown
-
2025
- 2025-01-17 US US19/029,478 patent/US20250163567A1/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150021168A1 (en) * | 2013-07-17 | 2015-01-22 | Applied Materials, Inc. | Inline deposition control apparatus and method of inline deposition control |
| WO2016110339A1 (de) | 2015-01-07 | 2016-07-14 | Rodenstock Gmbh | Schichtsystem und optisches element mit einem schichtsystem |
Non-Patent Citations (3)
| Title |
|---|
| DIN EN ISO 11664-4:2012-06 |
| EN ISO 13666:2012 |
| Norm DIN EN ISO 13666:2013-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113272622A (zh) | 2021-08-17 |
| US20250163567A1 (en) | 2025-05-22 |
| IL283986A (en) | 2021-07-29 |
| IL283986B2 (en) | 2025-11-01 |
| EP3899422A1 (de) | 2021-10-27 |
| ES2989589T3 (es) | 2024-11-27 |
| BR112021011616A2 (pt) | 2021-08-31 |
| CL2021001579A1 (es) | 2022-02-04 |
| EP4451039A3 (de) | 2024-12-25 |
| EP4451039B1 (de) | 2026-03-25 |
| MX2021007133A (es) | 2021-11-03 |
| IL283986B1 (en) | 2025-07-01 |
| EP3899422B1 (de) | 2024-08-07 |
| US20220049347A1 (en) | 2022-02-17 |
| WO2020127394A1 (de) | 2020-06-25 |
| CN113272622B (zh) | 2023-12-26 |
| PH12021551399A1 (en) | 2022-05-11 |
| EP4451039A2 (de) | 2024-10-23 |
| JP2022513882A (ja) | 2022-02-09 |
| EP3899422C0 (de) | 2024-08-07 |
| US12234547B2 (en) | 2025-02-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R012 | Request for examination validly filed |