JP2022513882A - 層システムを製造するためのコーティング設備を動作させる方法 - Google Patents

層システムを製造するためのコーティング設備を動作させる方法 Download PDF

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Publication number
JP2022513882A
JP2022513882A JP2021534251A JP2021534251A JP2022513882A JP 2022513882 A JP2022513882 A JP 2022513882A JP 2021534251 A JP2021534251 A JP 2021534251A JP 2021534251 A JP2021534251 A JP 2021534251A JP 2022513882 A JP2022513882 A JP 2022513882A
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target
actual
layer
simulation
layer thickness
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JP2021534251A
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English (en)
Japanese (ja)
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JP2022513882A5 (https=
Inventor
シェルシュリヒト，リュディガー
ラドゥンズ，ステファン
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ローデンシュトック ゲーエムベーハー
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Publication of JP2022513882A publication Critical patent/JP2022513882A/ja
Publication of JP2022513882A5 publication Critical patent/JP2022513882A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00865—Applying coatings; tinting; colouring
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Surface Treatment Of Optical Elements (AREA)
JP2021534251A 2018-12-20 2019-12-17 層システムを製造するためのコーティング設備を動作させる方法 Pending JP2022513882A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102018133187.8A DE102018133187A1 (de) 2018-12-20 2018-12-20 Verfahren zum Betreiben einer Beschichtungsanlage zur Herstellung von Schichtsystemen
DE102018133187.8 2018-12-20
PCT/EP2019/085810 WO2020127394A1 (de) 2018-12-20 2019-12-17 Verfahren zum betreiben einer beschichtungsanlage zur herstellung von schichtsystemen

Publications (2)

Publication Number Publication Date
JP2022513882A true JP2022513882A (ja) 2022-02-09
JP2022513882A5 JP2022513882A5 (https=) 2022-12-02

Family

ID=69375310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021534251A Pending JP2022513882A (ja) 2018-12-20 2019-12-17 層システムを製造するためのコーティング設備を動作させる方法

Country Status (11)

Country Link
US (2) US12234547B2 (https=)
EP (2) EP4451039B1 (https=)
JP (1) JP2022513882A (https=)
CN (1) CN113272622B (https=)
CL (1) CL2021001579A1 (https=)
DE (1) DE102018133187A1 (https=)
ES (1) ES2989589T3 (https=)
IL (1) IL283986B2 (https=)
MX (1) MX2021007133A (https=)
PH (1) PH12021551399A1 (https=)
WO (1) WO2020127394A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115449771B (zh) * 2022-09-21 2025-01-28 华中科技大学 模具涂层生成方法、装置、设备、存储介质和程序产品
CN116045791B (zh) * 2023-04-03 2023-07-21 成都飞机工业（集团）有限责任公司 一种金属漆涂层厚度评估方法
CN120745007B (zh) * 2025-06-23 2026-03-27 深圳市艾丽斯卡文化创意有限公司 多材料混色工艺数字孪生仿真平台

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011053573A (ja) * 2009-09-04 2011-03-17 Konica Minolta Opto Inc 薄膜形成方法
JP2017218626A (ja) * 2016-06-07 2017-12-14 日東電工株式会社 多層膜の成膜方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2826883B1 (en) * 2013-07-17 2018-10-03 Applied Materials, Inc. Inline deposition control apparatus and method of inline deposition control
DE102015100091A1 (de) 2015-01-07 2016-07-07 Rodenstock Gmbh Schichtsystem und optisches Element mit einem Schichtsystem
EP3346023A1 (en) * 2017-01-05 2018-07-11 Essilor International Method for layer by layer optimization of a thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011053573A (ja) * 2009-09-04 2011-03-17 Konica Minolta Opto Inc 薄膜形成方法
JP2017218626A (ja) * 2016-06-07 2017-12-14 日東電工株式会社 多層膜の成膜方法

Also Published As

Publication number Publication date
CN113272622A (zh) 2021-08-17
US20250163567A1 (en) 2025-05-22
IL283986A (en) 2021-07-29
IL283986B2 (en) 2025-11-01
EP3899422A1 (de) 2021-10-27
ES2989589T3 (es) 2024-11-27
BR112021011616A2 (pt) 2021-08-31
CL2021001579A1 (es) 2022-02-04
EP4451039A3 (de) 2024-12-25
EP4451039B1 (de) 2026-03-25
MX2021007133A (es) 2021-11-03
IL283986B1 (en) 2025-07-01
EP3899422B1 (de) 2024-08-07
US20220049347A1 (en) 2022-02-17
WO2020127394A1 (de) 2020-06-25
CN113272622B (zh) 2023-12-26
DE102018133187A1 (de) 2020-06-25
PH12021551399A1 (en) 2022-05-11
EP4451039A2 (de) 2024-10-23
EP3899422C0 (de) 2024-08-07
US12234547B2 (en) 2025-02-25

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