IL283986B2 - Method for operating a coating installation for producing layer systems - Google Patents

Method for operating a coating installation for producing layer systems

Info

Publication number
IL283986B2
IL283986B2 IL283986A IL28398621A IL283986B2 IL 283986 B2 IL283986 B2 IL 283986B2 IL 283986 A IL283986 A IL 283986A IL 28398621 A IL28398621 A IL 28398621A IL 283986 B2 IL283986 B2 IL 283986B2
Authority
IL
Israel
Prior art keywords
target
actual
layer
simulation
measurement curve
Prior art date
Application number
IL283986A
Other languages
English (en)
Hebrew (he)
Other versions
IL283986A (en
IL283986B1 (en
Inventor
Rudiger Scherschlicht
Stefan Radunz
Original Assignee
Rodenstock Gmbh
Rudiger Scherschlicht
Stefan Radunz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rodenstock Gmbh, Rudiger Scherschlicht, Stefan Radunz filed Critical Rodenstock Gmbh
Publication of IL283986A publication Critical patent/IL283986A/en
Publication of IL283986B1 publication Critical patent/IL283986B1/en
Publication of IL283986B2 publication Critical patent/IL283986B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00865—Applying coatings; tinting; colouring
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Surface Treatment Of Optical Elements (AREA)
IL283986A 2018-12-20 2019-12-17 Method for operating a coating installation for producing layer systems IL283986B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018133187.8A DE102018133187A1 (de) 2018-12-20 2018-12-20 Verfahren zum Betreiben einer Beschichtungsanlage zur Herstellung von Schichtsystemen
PCT/EP2019/085810 WO2020127394A1 (de) 2018-12-20 2019-12-17 Verfahren zum betreiben einer beschichtungsanlage zur herstellung von schichtsystemen

Publications (3)

Publication Number Publication Date
IL283986A IL283986A (en) 2021-07-29
IL283986B1 IL283986B1 (en) 2025-07-01
IL283986B2 true IL283986B2 (en) 2025-11-01

Family

ID=69375310

Family Applications (1)

Application Number Title Priority Date Filing Date
IL283986A IL283986B2 (en) 2018-12-20 2019-12-17 Method for operating a coating installation for producing layer systems

Country Status (11)

Country Link
US (2) US12234547B2 (https=)
EP (2) EP4451039B1 (https=)
JP (1) JP2022513882A (https=)
CN (1) CN113272622B (https=)
CL (1) CL2021001579A1 (https=)
DE (1) DE102018133187A1 (https=)
ES (1) ES2989589T3 (https=)
IL (1) IL283986B2 (https=)
MX (1) MX2021007133A (https=)
PH (1) PH12021551399A1 (https=)
WO (1) WO2020127394A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115449771B (zh) * 2022-09-21 2025-01-28 华中科技大学 模具涂层生成方法、装置、设备、存储介质和程序产品
CN116045791B (zh) * 2023-04-03 2023-07-21 成都飞机工业（集团）有限责任公司 一种金属漆涂层厚度评估方法
CN120745007B (zh) * 2025-06-23 2026-03-27 深圳市艾丽斯卡文化创意有限公司 多材料混色工艺数字孪生仿真平台

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150021168A1 (en) * 2013-07-17 2015-01-22 Applied Materials, Inc. Inline deposition control apparatus and method of inline deposition control
EP3346023A1 (en) * 2017-01-05 2018-07-11 Essilor International Method for layer by layer optimization of a thin film

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011053573A (ja) * 2009-09-04 2011-03-17 Konica Minolta Opto Inc 薄膜形成方法
DE102015100091A1 (de) 2015-01-07 2016-07-07 Rodenstock Gmbh Schichtsystem und optisches Element mit einem Schichtsystem
JP6869648B2 (ja) * 2016-06-07 2021-05-12 日東電工株式会社 多層膜の成膜方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150021168A1 (en) * 2013-07-17 2015-01-22 Applied Materials, Inc. Inline deposition control apparatus and method of inline deposition control
EP3346023A1 (en) * 2017-01-05 2018-07-11 Essilor International Method for layer by layer optimization of a thin film

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
V. A. KHERAJ ET AL,, SIMULATION OF REFLECTIVITY SPECTRUM FOR NON-ABSORBING MULTILAYER OPTICAL THIN FILMS, 1 June 2009 (2009-06-01) *

Also Published As

Publication number Publication date
CN113272622A (zh) 2021-08-17
US20250163567A1 (en) 2025-05-22
IL283986A (en) 2021-07-29
EP3899422A1 (de) 2021-10-27
ES2989589T3 (es) 2024-11-27
BR112021011616A2 (pt) 2021-08-31
CL2021001579A1 (es) 2022-02-04
EP4451039A3 (de) 2024-12-25
EP4451039B1 (de) 2026-03-25
MX2021007133A (es) 2021-11-03
IL283986B1 (en) 2025-07-01
EP3899422B1 (de) 2024-08-07
US20220049347A1 (en) 2022-02-17
WO2020127394A1 (de) 2020-06-25
CN113272622B (zh) 2023-12-26
DE102018133187A1 (de) 2020-06-25
PH12021551399A1 (en) 2022-05-11
EP4451039A2 (de) 2024-10-23
JP2022513882A (ja) 2022-02-09
EP3899422C0 (de) 2024-08-07
US12234547B2 (en) 2025-02-25

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