CN113272622B - 用于操作用于生产层系统的涂覆设施的方法 - Google Patents

用于操作用于生产层系统的涂覆设施的方法 Download PDF

Info

Publication number
CN113272622B
CN113272622B CN201980086583.5A CN201980086583A CN113272622B CN 113272622 B CN113272622 B CN 113272622B CN 201980086583 A CN201980086583 A CN 201980086583A CN 113272622 B CN113272622 B CN 113272622B
Authority
CN
China
Prior art keywords
target
actual
simulated
layer
measurement curve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201980086583.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN113272622A (zh
Inventor
R·谢尔施利赫特
S·拉丹兹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rodenstock GmbH
Original Assignee
Rodenstock GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rodenstock GmbH filed Critical Rodenstock GmbH
Publication of CN113272622A publication Critical patent/CN113272622A/zh
Application granted granted Critical
Publication of CN113272622B publication Critical patent/CN113272622B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00865—Applying coatings; tinting; colouring
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Surface Treatment Of Optical Elements (AREA)
CN201980086583.5A 2018-12-20 2019-12-17 用于操作用于生产层系统的涂覆设施的方法 Active CN113272622B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102018133187.8A DE102018133187A1 (de) 2018-12-20 2018-12-20 Verfahren zum Betreiben einer Beschichtungsanlage zur Herstellung von Schichtsystemen
DE102018133187.8 2018-12-20
PCT/EP2019/085810 WO2020127394A1 (de) 2018-12-20 2019-12-17 Verfahren zum betreiben einer beschichtungsanlage zur herstellung von schichtsystemen

Publications (2)

Publication Number Publication Date
CN113272622A CN113272622A (zh) 2021-08-17
CN113272622B true CN113272622B (zh) 2023-12-26

Family

ID=69375310

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980086583.5A Active CN113272622B (zh) 2018-12-20 2019-12-17 用于操作用于生产层系统的涂覆设施的方法

Country Status (11)

Country Link
US (2) US12234547B2 (https=)
EP (2) EP4451039B1 (https=)
JP (1) JP2022513882A (https=)
CN (1) CN113272622B (https=)
CL (1) CL2021001579A1 (https=)
DE (1) DE102018133187A1 (https=)
ES (1) ES2989589T3 (https=)
IL (1) IL283986B2 (https=)
MX (1) MX2021007133A (https=)
PH (1) PH12021551399A1 (https=)
WO (1) WO2020127394A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115449771B (zh) * 2022-09-21 2025-01-28 华中科技大学 模具涂层生成方法、装置、设备、存储介质和程序产品
CN116045791B (zh) * 2023-04-03 2023-07-21 成都飞机工业（集团）有限责任公司 一种金属漆涂层厚度评估方法
CN120745007B (zh) * 2025-06-23 2026-03-27 深圳市艾丽斯卡文化创意有限公司 多材料混色工艺数字孪生仿真平台

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016110339A1 (de) * 2015-01-07 2016-07-14 Rodenstock Gmbh Schichtsystem und optisches element mit einem schichtsystem
EP3346023A1 (en) * 2017-01-05 2018-07-11 Essilor International Method for layer by layer optimization of a thin film

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011053573A (ja) * 2009-09-04 2011-03-17 Konica Minolta Opto Inc 薄膜形成方法
EP2826883B1 (en) * 2013-07-17 2018-10-03 Applied Materials, Inc. Inline deposition control apparatus and method of inline deposition control
JP6869648B2 (ja) * 2016-06-07 2021-05-12 日東電工株式会社 多層膜の成膜方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016110339A1 (de) * 2015-01-07 2016-07-14 Rodenstock Gmbh Schichtsystem und optisches element mit einem schichtsystem
EP3346023A1 (en) * 2017-01-05 2018-07-11 Essilor International Method for layer by layer optimization of a thin film

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Simulation of reflectivity spectrum for non-absorbing multilayer optical thin films;V A KHERAJ等;《PRAMANA-journal of physics》;20090630;第72卷(第6期);第1011-1022段 *

Also Published As

Publication number Publication date
CN113272622A (zh) 2021-08-17
US20250163567A1 (en) 2025-05-22
IL283986A (en) 2021-07-29
IL283986B2 (en) 2025-11-01
EP3899422A1 (de) 2021-10-27
ES2989589T3 (es) 2024-11-27
BR112021011616A2 (pt) 2021-08-31
CL2021001579A1 (es) 2022-02-04
EP4451039A3 (de) 2024-12-25
EP4451039B1 (de) 2026-03-25
MX2021007133A (es) 2021-11-03
IL283986B1 (en) 2025-07-01
EP3899422B1 (de) 2024-08-07
US20220049347A1 (en) 2022-02-17
WO2020127394A1 (de) 2020-06-25
DE102018133187A1 (de) 2020-06-25
PH12021551399A1 (en) 2022-05-11
EP4451039A2 (de) 2024-10-23
JP2022513882A (ja) 2022-02-09
EP3899422C0 (de) 2024-08-07
US12234547B2 (en) 2025-02-25

Similar Documents

Publication Publication Date Title
US20250163567A1 (en) Method for operating a coating installation for producing layer systems
US20190383972A1 (en) Layer system and optical element comprising a layer system
CN1795284B (zh) 超低残留反射的低应力透镜涂层
JP7252324B2 (ja) 層パケットのスタックを備えた光学素子、および当該光学素子を製造するための方法
CN106443841B (zh) 一种超低剩余反射率ZnS基底长波减反射薄膜
EP3605202B1 (en) Method and system for determining a lens of customized color
JP7565353B2 (ja) 層システムを製造するためのコーティングシステムを動作させる方法
CN110168133A (zh) 薄膜的逐层优化方法
JP4622564B2 (ja) 膜厚測定方法
JP2022513882A5 (https=)
RU2133049C1 (ru) Способ нанесения просветляющего многослойного покрытия на поверхность оптического элемента и установка для осуществления способа
Johnson Bandpass filters: Past and present
BR112021004390B1 (pt) Elemento óptico com uma pilha de pacotes de camada e método para produzir o elemento óptico
CN1173645A (zh) 绿色薄膜的膜系结构
Yao et al. New methods for determining optical constants of thin films from single measurements
CN120762207A (zh) 一种光学薄膜多波段响应特性协同调控方法
Vignaux et al. Optimized procedure for in-situ optical monitoring of multilayer structures
CN121159150A (zh) 光学玻璃镀膜方法及光学玻璃
CN102542107A (zh) 一种用于实现氟掺杂氧化锡镀膜玻璃表面色彩控制的方法
JPH10245673A (ja) 光学薄膜設計システムおよび光学薄膜製造システム

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant