DE102015120647B4 - Elektrisches Bauelement mit dünner Lot-Stopp-Schicht und Verfahren zur Herstellung - Google Patents

Elektrisches Bauelement mit dünner Lot-Stopp-Schicht und Verfahren zur Herstellung Download PDF

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DE102015120647B4
DE102015120647B4 DE102015120647.1A DE102015120647A DE102015120647B4 DE 102015120647 B4 DE102015120647 B4 DE 102015120647B4 DE 102015120647 A DE102015120647 A DE 102015120647A DE 102015120647 B4 DE102015120647 B4 DE 102015120647B4
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Prior art keywords
carrier
stop layer
contact surface
solder stop
component
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DE102015120647.1A
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German (de)
English (en)
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DE102015120647A1 (de
Inventor
Alexander Schmajew
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SnapTrack Inc
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SnapTrack Inc
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Priority to DE102015120647.1A priority Critical patent/DE102015120647B4/de
Application filed by SnapTrack Inc filed Critical SnapTrack Inc
Priority to EP16762778.5A priority patent/EP3381052A1/de
Priority to PCT/EP2016/070973 priority patent/WO2017088998A1/de
Priority to JP2018527165A priority patent/JP2018536994A/ja
Priority to KR1020187011776A priority patent/KR20180088798A/ko
Priority to CN201680062169.7A priority patent/CN108369935A/zh
Priority to US15/776,019 priority patent/US20180331062A1/en
Priority to BR112018010666A priority patent/BR112018010666A8/pt
Publication of DE102015120647A1 publication Critical patent/DE102015120647A1/de
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    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/16238Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area protruding from the surface of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/8119Arrangement of the bump connectors prior to mounting
    • H01L2224/81192Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818Bonding techniques
    • H01L2224/81801Soldering or alloying
    • H01L2224/81815Reflow soldering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L24/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/38Effects and problems related to the device integration
    • H01L2924/384Bump effects
    • H01L2924/3841Solder bridging

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Geometry (AREA)
  • Wire Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
DE102015120647.1A 2015-11-27 2015-11-27 Elektrisches Bauelement mit dünner Lot-Stopp-Schicht und Verfahren zur Herstellung Active DE102015120647B4 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE102015120647.1A DE102015120647B4 (de) 2015-11-27 2015-11-27 Elektrisches Bauelement mit dünner Lot-Stopp-Schicht und Verfahren zur Herstellung
PCT/EP2016/070973 WO2017088998A1 (de) 2015-11-27 2016-09-06 Elektrisches bauelement mit dünner lot-stopp-schicht und verfahren zu seiner herstellung
JP2018527165A JP2018536994A (ja) 2015-11-27 2016-09-06 薄いはんだストップ層を備える電子部品及び製造方法
KR1020187011776A KR20180088798A (ko) 2015-11-27 2016-09-06 얇은 솔더 정지 층을 갖는 전기 디바이스 및 제조를 위한 방법
EP16762778.5A EP3381052A1 (de) 2015-11-27 2016-09-06 Elektrisches bauelement mit dünner lot-stopp-schicht und verfahren zu seiner herstellung
CN201680062169.7A CN108369935A (zh) 2015-11-27 2016-09-06 具有薄的焊料阻止层的电元器件和用于制造的方法
US15/776,019 US20180331062A1 (en) 2015-11-27 2016-09-06 Electrical component with thin solder resist layer and method for the production thereof
BR112018010666A BR112018010666A8 (pt) 2015-11-27 2016-09-06 dispositivo elétrico com camada de máscara de solda fina e método para produção

Applications Claiming Priority (1)

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DE102015120647.1A DE102015120647B4 (de) 2015-11-27 2015-11-27 Elektrisches Bauelement mit dünner Lot-Stopp-Schicht und Verfahren zur Herstellung

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US (1) US20180331062A1 (enExample)
EP (1) EP3381052A1 (enExample)
JP (1) JP2018536994A (enExample)
KR (1) KR20180088798A (enExample)
CN (1) CN108369935A (enExample)
BR (1) BR112018010666A8 (enExample)
DE (1) DE102015120647B4 (enExample)
WO (1) WO2017088998A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI130166B (en) 2019-03-08 2023-03-23 Picosun Oy Solder mask
DE102023116055A1 (de) * 2023-06-20 2024-12-24 Ams-Osram International Gmbh Anschlussträger, verfahren zur herstellung einer lotverbindung und bauelement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040182915A1 (en) * 2002-12-20 2004-09-23 Bachman Mark Adam Structure and method for bonding to copper interconnect structures
US20050136558A1 (en) * 2003-12-18 2005-06-23 Wang James J. Stacked semiconductor device assembly and method for forming
US20050173803A1 (en) * 2002-09-20 2005-08-11 Victor Lu Interlayer adhesion promoter for low k materials

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03218644A (ja) * 1990-01-24 1991-09-26 Sharp Corp 回路基板の接続構造
US5620131A (en) * 1995-06-15 1997-04-15 Lucent Technologies Inc. Method of solder bonding
US6294840B1 (en) * 1999-11-18 2001-09-25 Lsi Logic Corporation Dual-thickness solder mask in integrated circuit package
US6645791B2 (en) * 2001-04-23 2003-11-11 Fairchild Semiconductor Semiconductor die package including carrier with mask
US6790759B1 (en) * 2003-07-31 2004-09-14 Freescale Semiconductor, Inc. Semiconductor device with strain relieving bump design
US7294451B2 (en) * 2003-11-18 2007-11-13 Texas Instruments Incorporated Raised solder-mask-defined (SMD) solder ball pads for a laminate electronic circuit board
KR100626617B1 (ko) * 2004-12-07 2006-09-25 삼성전자주식회사 반도체 패키지용 배선 기판의 볼 랜드 구조
JP4795112B2 (ja) * 2006-05-17 2011-10-19 株式会社フジクラ 接合基材の製造方法
JP5031403B2 (ja) * 2007-03-01 2012-09-19 京セラケミカル株式会社 封止用エポキシ樹脂組成物、樹脂封止型半導体装置及びその製造方法
US7812460B2 (en) * 2008-05-30 2010-10-12 Unimicron Technology Corp. Packaging substrate and method for fabricating the same
US9524945B2 (en) * 2010-05-18 2016-12-20 Taiwan Semiconductor Manufacturing Company, Ltd. Cu pillar bump with L-shaped non-metal sidewall protection structure
US8922004B2 (en) * 2010-06-11 2014-12-30 Taiwan Semiconductor Manufacturing Company, Ltd. Copper bump structures having sidewall protection layers
TWI575684B (zh) * 2011-06-13 2017-03-21 矽品精密工業股份有限公司 晶片尺寸封裝件
KR101307436B1 (ko) * 2011-11-10 2013-09-12 (주)유우일렉트로닉스 Mems 센서 패키징 및 그 방법
US10192804B2 (en) * 2012-07-09 2019-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Bump-on-trace packaging structure and method for forming the same
GB2520952A (en) * 2013-12-04 2015-06-10 Ibm Flip-chip electronic device with carrier having heat dissipation elements free of solder mask
CN104637967A (zh) * 2015-02-13 2015-05-20 苏州晶方半导体科技股份有限公司 封装方法及封装结构
US9859234B2 (en) * 2015-08-06 2018-01-02 Invensas Corporation Methods and structures to repair device warpage

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050173803A1 (en) * 2002-09-20 2005-08-11 Victor Lu Interlayer adhesion promoter for low k materials
US20040182915A1 (en) * 2002-12-20 2004-09-23 Bachman Mark Adam Structure and method for bonding to copper interconnect structures
US20050136558A1 (en) * 2003-12-18 2005-06-23 Wang James J. Stacked semiconductor device assembly and method for forming

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CN108369935A (zh) 2018-08-03
KR20180088798A (ko) 2018-08-07
WO2017088998A1 (de) 2017-06-01
US20180331062A1 (en) 2018-11-15
BR112018010666A2 (pt) 2018-11-13
BR112018010666A8 (pt) 2019-02-26
EP3381052A1 (de) 2018-10-03
JP2018536994A (ja) 2018-12-13
DE102015120647A1 (de) 2017-06-01

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