DE102012209620B4 - Verfahren zum Herstellen eines Sensorträgers, Sensorträger und Sensor - Google Patents
Verfahren zum Herstellen eines Sensorträgers, Sensorträger und Sensor Download PDFInfo
- Publication number
- DE102012209620B4 DE102012209620B4 DE102012209620.5A DE102012209620A DE102012209620B4 DE 102012209620 B4 DE102012209620 B4 DE 102012209620B4 DE 102012209620 A DE102012209620 A DE 102012209620A DE 102012209620 B4 DE102012209620 B4 DE 102012209620B4
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- sensor
- sensor carrier
- powder mixture
- electrically conductive
- conductive structures
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000000843 powder Substances 0.000 claims abstract description 49
- 239000000203 mixture Substances 0.000 claims abstract description 44
- 239000000919 ceramic Substances 0.000 claims abstract description 23
- 229910052878 cordierite Inorganic materials 0.000 claims abstract description 22
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 238000005245 sintering Methods 0.000 claims abstract description 12
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000000227 grinding Methods 0.000 claims abstract description 9
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- 230000001590 oxidative effect Effects 0.000 claims abstract description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 10
- 229910000679 solder Inorganic materials 0.000 claims description 10
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- 235000013339 cereals Nutrition 0.000 claims 1
- 235000013312 flour Nutrition 0.000 claims 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
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- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
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- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
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- 239000010959 steel Substances 0.000 description 2
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- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 229910006501 ZrSiO Inorganic materials 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010344 co-firing Methods 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- ZTMBTYCPRBJULN-UHFFFAOYSA-N hexylperoxy hydrogen carbonate Chemical compound CCCCCCOOOC(O)=O ZTMBTYCPRBJULN-UHFFFAOYSA-N 0.000 description 1
- 238000010316 high energy milling Methods 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
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- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- 239000002994 raw material Substances 0.000 description 1
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- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
- C04B35/18—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
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- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
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- G—PHYSICS
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
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- G—PHYSICS
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/26—Devices for measuring efficiency, i.e. the ratio of power output to power input
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Composite Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102012209620.5A DE102012209620B4 (de) | 2012-06-08 | 2012-06-08 | Verfahren zum Herstellen eines Sensorträgers, Sensorträger und Sensor |
| IT000901A ITMI20130901A1 (it) | 2012-06-08 | 2013-06-03 | Procedimento per la produzione di un supporto di sensore, supporto di sensore e sensore |
| FR1355192A FR2991677B1 (fr) | 2012-06-08 | 2013-06-06 | Procede de realisation a un support de capteur ainsi que support et capteur obtenus |
| CN201310225259.1A CN103487197A (zh) | 2012-06-08 | 2013-06-07 | 用于制造传感器载体的方法、传感器载体和传感器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102012209620.5A DE102012209620B4 (de) | 2012-06-08 | 2012-06-08 | Verfahren zum Herstellen eines Sensorträgers, Sensorträger und Sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE102012209620A1 DE102012209620A1 (de) | 2013-12-12 |
| DE102012209620B4 true DE102012209620B4 (de) | 2023-01-19 |
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| DE102012209620.5A Active DE102012209620B4 (de) | 2012-06-08 | 2012-06-08 | Verfahren zum Herstellen eines Sensorträgers, Sensorträger und Sensor |
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| Country | Link |
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| CN (1) | CN103487197A (it) |
| DE (1) | DE102012209620B4 (it) |
| FR (1) | FR2991677B1 (it) |
| IT (1) | ITMI20130901A1 (it) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE102015217794B3 (de) * | 2015-09-17 | 2016-12-29 | Continental Automotive Gmbh | Sensor und Verfahren zur Herstellung eines Sensors |
| FR3070626B1 (fr) * | 2017-09-07 | 2020-12-11 | Safran Ceram | Procede de fabrication d'une piece en materiau composite munie d'un capteur |
| CN113004033B (zh) * | 2019-12-20 | 2022-11-11 | 比亚迪股份有限公司 | 氧化锆陶瓷及其制备方法和应用 |
| CN111664020B (zh) * | 2020-05-14 | 2021-08-31 | 东风汽车集团有限公司 | 一种带有缸压传感器套筒的气缸盖及其安装方法 |
| CN115838281A (zh) * | 2022-12-03 | 2023-03-24 | 昆明理工大学 | 一种低热膨胀系数的复合陶瓷材料及其制备方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1180230A1 (en) | 1999-05-26 | 2002-02-20 | Work Smart Energy Enterprises, Inc. | Improved control system for a refrigerator with two evaporating temperatures |
| US20020139556A1 (en) | 2001-03-30 | 2002-10-03 | Jerry Ok | Method and apparatus for providing hermetic electrical feedthrough |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4576919A (en) * | 1984-11-02 | 1986-03-18 | General Electric Company | Zircon-cordierite composite ceramic |
| US5707148A (en) * | 1994-09-23 | 1998-01-13 | Ford Global Technologies, Inc. | Catalytic calorimetric gas sensor |
| JP3359242B2 (ja) * | 1995-10-25 | 2002-12-24 | 株式会社日立ユニシアオートモティブ | セラミックス製品およびその製造方法 |
| JP2001041838A (ja) * | 1999-08-03 | 2001-02-16 | Yamatake Corp | 圧力センサおよびその製造方法 |
| US7276787B2 (en) * | 2003-12-05 | 2007-10-02 | International Business Machines Corporation | Silicon chip carrier with conductive through-vias and method for fabricating same |
| CN101390228B (zh) * | 2006-02-27 | 2010-12-08 | 京瓷株式会社 | 陶瓷构件的制造方法、陶瓷构件、气体传感器元件、燃料电池元件、过滤元件、层叠型压电元件、喷射装置以及燃料喷射系统 |
| DE102008040187A1 (de) * | 2008-07-04 | 2010-01-07 | Robert Bosch Gmbh | Sensorelement, Verfahren zu seiner Herstellung sowie Verwendung |
| JP5416757B2 (ja) * | 2011-02-22 | 2014-02-12 | 日本特殊陶業株式会社 | ガスセンサ素子及びガスセンサ |
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2012
- 2012-06-08 DE DE102012209620.5A patent/DE102012209620B4/de active Active
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2013
- 2013-06-03 IT IT000901A patent/ITMI20130901A1/it unknown
- 2013-06-06 FR FR1355192A patent/FR2991677B1/fr active Active
- 2013-06-07 CN CN201310225259.1A patent/CN103487197A/zh active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1180230A1 (en) | 1999-05-26 | 2002-02-20 | Work Smart Energy Enterprises, Inc. | Improved control system for a refrigerator with two evaporating temperatures |
| US20020139556A1 (en) | 2001-03-30 | 2002-10-03 | Jerry Ok | Method and apparatus for providing hermetic electrical feedthrough |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103487197A (zh) | 2014-01-01 |
| ITMI20130901A1 (it) | 2013-12-09 |
| FR2991677B1 (fr) | 2021-09-17 |
| FR2991677A1 (fr) | 2013-12-13 |
| DE102012209620A1 (de) | 2013-12-12 |
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