DE102011075393B4 - Anordnung zur Aktuierung eines Elementes in einer Projektionsbelichtungsanlage - Google Patents

Anordnung zur Aktuierung eines Elementes in einer Projektionsbelichtungsanlage Download PDF

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Publication number
DE102011075393B4
DE102011075393B4 DE102011075393A DE102011075393A DE102011075393B4 DE 102011075393 B4 DE102011075393 B4 DE 102011075393B4 DE 102011075393 A DE102011075393 A DE 102011075393A DE 102011075393 A DE102011075393 A DE 102011075393A DE 102011075393 B4 DE102011075393 B4 DE 102011075393B4
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DE
Germany
Prior art keywords
actuator
arrangement according
filter
forces
actuator part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102011075393A
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German (de)
English (en)
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DE102011075393A1 (de
Inventor
Markus Hauf
Ulrich SCHÖNHOFF
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to DE102011075393A priority Critical patent/DE102011075393B4/de
Priority to JP2014508730A priority patent/JP6121401B2/ja
Priority to PCT/EP2012/056628 priority patent/WO2012152520A1/en
Priority to CN201280022137.6A priority patent/CN103502891B/zh
Publication of DE102011075393A1 publication Critical patent/DE102011075393A1/de
Application granted granted Critical
Publication of DE102011075393B4 publication Critical patent/DE102011075393B4/de
Priority to US14/022,819 priority patent/US9081292B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70766—Reaction force control means, e.g. countermass
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
DE102011075393A 2011-05-06 2011-05-06 Anordnung zur Aktuierung eines Elementes in einer Projektionsbelichtungsanlage Expired - Fee Related DE102011075393B4 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE102011075393A DE102011075393B4 (de) 2011-05-06 2011-05-06 Anordnung zur Aktuierung eines Elementes in einer Projektionsbelichtungsanlage
JP2014508730A JP6121401B2 (ja) 2011-05-06 2012-04-12 投影露光装置の素子を作動させる機構
PCT/EP2012/056628 WO2012152520A1 (en) 2011-05-06 2012-04-12 Arrangement for actuating an element in a projection exposure apparatus
CN201280022137.6A CN103502891B (zh) 2011-05-06 2012-04-12 致动投射曝光设备中的元件的装置
US14/022,819 US9081292B2 (en) 2011-05-06 2013-09-10 Arrangement for actuating an element in a projection exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011075393A DE102011075393B4 (de) 2011-05-06 2011-05-06 Anordnung zur Aktuierung eines Elementes in einer Projektionsbelichtungsanlage

Publications (2)

Publication Number Publication Date
DE102011075393A1 DE102011075393A1 (de) 2012-11-08
DE102011075393B4 true DE102011075393B4 (de) 2013-08-14

Family

ID=47019435

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102011075393A Expired - Fee Related DE102011075393B4 (de) 2011-05-06 2011-05-06 Anordnung zur Aktuierung eines Elementes in einer Projektionsbelichtungsanlage

Country Status (5)

Country Link
US (1) US9081292B2 (https=)
JP (1) JP6121401B2 (https=)
CN (1) CN103502891B (https=)
DE (1) DE102011075393B4 (https=)
WO (1) WO2012152520A1 (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150013605A (ko) 2012-04-26 2015-02-05 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 디바이스 제조 방법
DE102013201081A1 (de) * 2013-01-24 2014-03-13 Carl Zeiss Smt Gmbh Vorrichtung zur Lagerung eines optischen Bauelements
JP6168957B2 (ja) * 2013-09-30 2017-07-26 キヤノン株式会社 光学装置、投影光学系、露光装置および物品の製造方法
EP3078148B1 (en) * 2013-12-02 2020-03-18 Sony Corporation Communication device, infrastructure equipment and methods for receiving downlink control information
WO2015158487A1 (en) * 2014-04-17 2015-10-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP6371576B2 (ja) * 2014-05-02 2018-08-08 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法
JP6730197B2 (ja) * 2014-05-14 2020-07-29 カール・ツァイス・エスエムティー・ゲーエムベーハー ニアフィールドマニピュレータを有する投影露光装置
DE102015201870A1 (de) 2015-02-03 2016-08-04 Carl Zeiss Smt Gmbh Anordnung zur Positionsmanipulation eines Elementes, insbesondere in einem optischen System
DE102016202408A1 (de) * 2016-02-17 2017-01-26 Carl Zeiss Smt Gmbh Anordnung zur Positionsmanipulation eines Elementes in einem optischen System
ES2603655B1 (es) * 2016-04-21 2017-09-25 Consorci Per A La Construcció, Equipament I Explotació Del Laboratori De Llum De Sincrotró Dispositivo y método de aplicación de fuerza en un objeto
DE102016216917A1 (de) * 2016-09-07 2018-03-08 Carl Zeiss Smt Gmbh Optisches System, insbesondere Lithographieanlage, sowie Verfahren
DE102016225900A1 (de) * 2016-12-21 2018-06-21 Carl Zeiss Smt Gmbh Tauchspulenaktuator
JP6884869B2 (ja) * 2017-02-02 2021-06-09 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置、リソグラフィ投影装置及びデバイス製造方法
DE102017216458A1 (de) * 2017-09-18 2019-03-21 Carl Zeiss Smt Gmbh Verfahren zur Herstellung eines Spiegels als optischer Komponente für ein optisches System einer Projektionsbelichtungsanlage für die Projektionslithographie
DE102018200528A1 (de) * 2018-01-15 2018-12-13 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Halbleiterlithographie mit Sensorschutz
DE102020208013B3 (de) 2020-06-29 2021-09-02 Carl Zeiss Smt Gmbh Kompensation von kriecheffekten in einer abbildungseinrichtung
DE102023205570A1 (de) * 2023-06-14 2024-06-27 Carl Zeiss Smt Gmbh Optisches system und projektionsbelichtungsanlage
DE102023208718A1 (de) * 2023-09-08 2025-03-13 Carl Zeiss Smt Gmbh Vibrationskorrektureinheit, Verfahren zum Betreiben einer Vibrationskorrektureinheit, Sensor und Lithographieanlage mit einem Sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050275822A1 (en) * 2004-06-14 2005-12-15 Asml Netherlands B.V. Positioning device and device manufacturing method
US7443619B2 (en) * 2005-10-04 2008-10-28 Canon Kabushiki Kaisha Optical element holding apparatus, exposure apparatus and device manufacturing method
US20100321662A1 (en) * 2008-03-18 2010-12-23 Asml Netherlands B.V. Actuator System, Lithographic Apparatus, and Device Manufacturing Method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW316874B (https=) * 1995-05-30 1997-10-01 Philips Electronics Nv
US20030019791A1 (en) * 2001-06-18 2003-01-30 Petronetics, Llc. Method to upgrade hydrocarbon mixtures
EP1321822A1 (en) * 2001-12-21 2003-06-25 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4574206B2 (ja) * 2003-04-25 2010-11-04 キヤノン株式会社 駆動装置、それを用いた露光装置、デバイスの製造方法
WO2005085671A1 (ja) * 2004-03-08 2005-09-15 Nikon Corporation 防振装置、露光装置、及び防振方法
JP2007316132A (ja) * 2006-05-23 2007-12-06 Canon Inc 反射装置
JP5008630B2 (ja) * 2007-10-02 2012-08-22 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置およびデバイス製造方法
US8164737B2 (en) * 2007-10-23 2012-04-24 Asml Netherlands B.V. Lithographic apparatus having an active damping subassembly
NL2003424A (en) * 2008-10-07 2010-04-08 Asml Netherlands Bv Projection assembly and lithographic apparartus.
EP2295829B1 (de) * 2009-09-11 2016-07-13 Integrated Dynamics Engineering Verbessertes aktives Schwingungsisolationssystem
DE102012202553A1 (de) * 2012-02-20 2013-08-22 Carl Zeiss Smt Gmbh Lithographievorrichtung mit dämpfungsvorrichtung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050275822A1 (en) * 2004-06-14 2005-12-15 Asml Netherlands B.V. Positioning device and device manufacturing method
US7443619B2 (en) * 2005-10-04 2008-10-28 Canon Kabushiki Kaisha Optical element holding apparatus, exposure apparatus and device manufacturing method
US20100321662A1 (en) * 2008-03-18 2010-12-23 Asml Netherlands B.V. Actuator System, Lithographic Apparatus, and Device Manufacturing Method

Also Published As

Publication number Publication date
JP2014519186A (ja) 2014-08-07
CN103502891B (zh) 2016-11-02
JP6121401B2 (ja) 2017-04-26
CN103502891A (zh) 2014-01-08
WO2012152520A1 (en) 2012-11-15
US20140016109A1 (en) 2014-01-16
DE102011075393A1 (de) 2012-11-08
US9081292B2 (en) 2015-07-14

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R018 Grant decision by examination section/examining division
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Effective date: 20131115

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee