DE102008013229B4 - Beleuchtungsoptik für die Mikrolithographie - Google Patents

Beleuchtungsoptik für die Mikrolithographie Download PDF

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Publication number
DE102008013229B4
DE102008013229B4 DE102008013229.2A DE102008013229A DE102008013229B4 DE 102008013229 B4 DE102008013229 B4 DE 102008013229B4 DE 102008013229 A DE102008013229 A DE 102008013229A DE 102008013229 B4 DE102008013229 B4 DE 102008013229B4
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DE
Germany
Prior art keywords
field
illumination
intensity
plane
facets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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DE102008013229.2A
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German (de)
English (en)
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DE102008013229A1 (de
Inventor
Martin Endres
Ralf Stützle
Jens Ossmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
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Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to EP08859710.9A priority Critical patent/EP2240830B1/en
Priority to KR1020107014669A priority patent/KR101517645B1/ko
Priority to JP2010537272A priority patent/JP5548135B2/ja
Priority to CN201410006090.5A priority patent/CN103713474B/zh
Priority to CN200880120429.7A priority patent/CN101896869B/zh
Priority to PCT/EP2008/009786 priority patent/WO2009074211A1/en
Priority to TW97147987A priority patent/TWI474125B/zh
Publication of DE102008013229A1 publication Critical patent/DE102008013229A1/de
Priority to US12/789,772 priority patent/US8937708B2/en
Priority to JP2014102463A priority patent/JP5888622B2/ja
Application granted granted Critical
Publication of DE102008013229B4 publication Critical patent/DE102008013229B4/de
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70083—Non-homogeneous intensity distribution in the mask plane
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
DE102008013229.2A 2007-12-11 2008-03-07 Beleuchtungsoptik für die Mikrolithographie Active DE102008013229B4 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
PCT/EP2008/009786 WO2009074211A1 (en) 2007-12-11 2008-11-20 Illumination optics for microlithography
JP2010537272A JP5548135B2 (ja) 2007-12-11 2008-11-20 マイクロリソグラフィ用の照明光学系
CN201410006090.5A CN103713474B (zh) 2007-12-11 2008-11-20 用于微光刻的照明光学部件
CN200880120429.7A CN101896869B (zh) 2007-12-11 2008-11-20 用于微光刻的照明光学部件
EP08859710.9A EP2240830B1 (en) 2007-12-11 2008-11-20 Illumination optics for microlithography
KR1020107014669A KR101517645B1 (ko) 2007-12-11 2008-11-20 마이크로리소그래피용 조명 광학소자
TW97147987A TWI474125B (zh) 2007-12-11 2008-12-10 用於微顯影蝕刻術之照明光學機構
US12/789,772 US8937708B2 (en) 2007-12-11 2010-05-28 Illumination optics for microlithography
JP2014102463A JP5888622B2 (ja) 2007-12-11 2014-05-16 マイクロリソグラフィ用の照明光学系

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US1281207P 2007-12-11 2007-12-11
US61/012,812 2007-12-11

Publications (2)

Publication Number Publication Date
DE102008013229A1 DE102008013229A1 (de) 2009-06-18
DE102008013229B4 true DE102008013229B4 (de) 2015-04-09

Family

ID=40680146

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102008013229.2A Active DE102008013229B4 (de) 2007-12-11 2008-03-07 Beleuchtungsoptik für die Mikrolithographie

Country Status (8)

Country Link
US (1) US8937708B2 (enExample)
EP (1) EP2240830B1 (enExample)
JP (2) JP5548135B2 (enExample)
KR (1) KR101517645B1 (enExample)
CN (2) CN101896869B (enExample)
DE (1) DE102008013229B4 (enExample)
TW (1) TWI474125B (enExample)
WO (1) WO2009074211A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008042462B4 (de) * 2008-09-30 2010-11-04 Carl Zeiss Smt Ag Beleuchtungssystem für die EUV-Mikrolithographie
CN102203675B (zh) * 2008-10-31 2014-02-26 卡尔蔡司Smt有限责任公司 用于euv微光刻的照明光学部件
DE202009004769U1 (de) 2009-01-19 2010-06-17 Paul Hettich Gmbh & Co. Kg Auszugsführung
DE102010001388A1 (de) 2010-01-29 2011-08-04 Carl Zeiss SMT GmbH, 73447 Facettenspiegel zum Einsatz in der Mikrolithografie
DE102010062779A1 (de) * 2010-12-10 2012-06-14 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithographie
KR101528397B1 (ko) * 2010-12-28 2015-06-11 칼 짜이스 에스엠티 게엠베하 마이크로리소그래피 투영 노광 장치의 조명 시스템
DE102011005881A1 (de) 2011-03-22 2012-05-03 Carl Zeiss Smt Gmbh Verfahren zur Einstellung eines Beleuchtungssystems einer Projektionsbelichtungsanlage für die Projektionslithographie
NL2008322A (en) 2011-04-13 2012-10-16 Asml Holding Nv Double euv illumination uniformity correction system and method.
DE102011076297A1 (de) 2011-05-23 2012-11-29 Carl Zeiss Smt Gmbh Blende
DE102012205886A1 (de) 2012-04-11 2013-10-17 Carl Zeiss Smt Gmbh Beleuchtungsintensitäts-Korrekturvorrichtung zur Vorgabe einer Beleuchtungsintensität über ein Beleuchtungsfeld einer lithographischen Projektionsbelichtungsanlage
DE102012208016A1 (de) * 2012-05-14 2013-05-08 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Mikrolithographie
DE102012212664A1 (de) * 2012-07-19 2014-01-23 Carl Zeiss Smt Gmbh Verfahren zum Einstellen eines Beleuchtungssettings
DE102015209453A1 (de) 2015-05-22 2016-11-24 Carl Zeiss Smt Gmbh Pupillenfacettenspiegel
DE102017220265A1 (de) 2017-11-14 2019-05-16 Carl Zeiss Smt Gmbh Beleuchtungsintensitäts-Korrekturvorrichtung zur Vorgabe einer Beleuchtungsintensität über ein Beleuchtungsfeld einer lithographischen Projektionsbelichtungsanlage
DE102018201009A1 (de) * 2018-01-23 2019-07-25 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithographie
DE102018208710A1 (de) 2018-06-04 2019-12-05 Carl Zeiss Smt Gmbh Blende zur Anordnung in einer Engstelle eines EUV-Beleuchtungsbündels
DE102018215505A1 (de) 2018-09-12 2018-10-31 Carl Zeiss Smt Gmbh Projektionsoptik für eine Projektionsbelichtungsanlage
DE102018217707A1 (de) 2018-10-16 2018-12-27 Carl Zeiss Smt Gmbh Feldfacettenspiegel zum Einsatz in einer Beleuchtungsoptik einer Projektionsbelichtungsanlage für die EUV-Projektonslithographie
JP7623956B2 (ja) * 2019-04-29 2025-01-29 カール・ツァイス・エスエムティー・ゲーエムベーハー 照明光をｅｕｖリソグラフィのための投影露光システムの物体視野内へ案内するための測定照明光学ユニット
DE102019206869A1 (de) 2019-05-13 2019-08-08 Carl Zeiss Smt Gmbh Strahlungsquellen-Modul
KR20230167934A (ko) 2022-06-03 2023-12-12 삼성전자주식회사 극자외선 노광 장치 및 그것의 동작 방법

Citations (2)

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Publication number Priority date Publication date Assignee Title
US6198793B1 (en) * 1998-05-05 2001-03-06 Carl-Zeiss-Stiftung Trading As Carl Zeiss Illumination system particularly for EUV lithography
US7030958B2 (en) * 2003-12-31 2006-04-18 Asml Netherlands B.V. Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method

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JP3057998B2 (ja) * 1994-02-16 2000-07-04 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
JPH1039227A (ja) * 1996-07-29 1998-02-13 Olympus Optical Co Ltd 遮光装置及び光学顕微鏡
US6013401A (en) * 1997-03-31 2000-01-11 Svg Lithography Systems, Inc. Method of controlling illumination field to reduce line width variation
DE10100265A1 (de) * 2001-01-08 2002-07-11 Zeiss Carl Beleuchtungssystem mit Rasterelementen unterschiedlicher Größe
DE10053587A1 (de) 2000-10-27 2002-05-02 Zeiss Carl Beleuchtungssystem mit variabler Einstellung der Ausleuchtung
US6476905B1 (en) * 2000-01-20 2002-11-05 Taiwan Semiconductor Manufacturing Co., Ltd. Step and scan exposure system equipped with a plurality of attenuator blades for exposure control
US6603532B2 (en) * 2000-08-15 2003-08-05 Nikon Corporation Illuminance measurement apparatus, exposure apparatus, and exposure method
JP2002110529A (ja) * 2000-10-03 2002-04-12 Nikon Corp 投影露光装置及び該装置を用いたマイクロデバイス製造方法
EP1491959A1 (en) 2001-09-07 2004-12-29 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
US6741329B2 (en) * 2001-09-07 2004-05-25 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US6771352B2 (en) * 2002-03-18 2004-08-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7170587B2 (en) * 2002-03-18 2007-01-30 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP3720788B2 (ja) * 2002-04-15 2005-11-30 キヤノン株式会社 投影露光装置及びデバイス製造方法
DE10219514A1 (de) * 2002-04-30 2003-11-13 Zeiss Carl Smt Ag Beleuchtungssystem, insbesondere für die EUV-Lithographie
WO2005040927A2 (en) 2003-10-18 2005-05-06 Carl Zeiss Smt Ag Device and method for illumination dose adjustments in microlithography
US7023524B2 (en) * 2003-12-18 2006-04-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
DE102004002415B4 (de) 2004-01-16 2008-07-10 Metzeler Automotive Profile Systems Gmbh Vorrichtung zum Steuern und Überwachen eines bewegbaren Schliesselements, insbesondere einer elektrisch angetriebenen Fensterscheibe eines Kraftfahrzeugs
US20060103828A1 (en) * 2004-11-17 2006-05-18 David Douglas J Adjustable illumination blade assembly for photolithography scanners
US7088527B2 (en) * 2004-12-28 2006-08-08 Asml Holding N.V. Uniformity correction system having light leak and shadow compensation
CN1645258A (zh) * 2005-01-24 2005-07-27 中国科学院光电技术研究所 高数值孔径光刻成像偏振控制装置
JP2006253487A (ja) * 2005-03-11 2006-09-21 Nikon Corp 照明装置、投影露光方法、投影露光装置、及びマイクロデバイスの製造方法
DE102006017336B4 (de) * 2006-04-11 2011-07-28 Carl Zeiss SMT GmbH, 73447 Beleuchtungssystem mit Zoomobjektiv
JP4797764B2 (ja) * 2006-04-14 2011-10-19 株式会社ニコン 露光装置の較正方法及び露光装置
NL1036162A1 (nl) * 2007-11-28 2009-06-02 Asml Netherlands Bv Lithographic apparatus and method.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6198793B1 (en) * 1998-05-05 2001-03-06 Carl-Zeiss-Stiftung Trading As Carl Zeiss Illumination system particularly for EUV lithography
US7030958B2 (en) * 2003-12-31 2006-04-18 Asml Netherlands B.V. Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method

Also Published As

Publication number Publication date
JP5548135B2 (ja) 2014-07-16
TWI474125B (zh) 2015-02-21
CN101896869A (zh) 2010-11-24
JP5888622B2 (ja) 2016-03-22
CN103713474A (zh) 2014-04-09
EP2240830B1 (en) 2015-04-01
JP2014179645A (ja) 2014-09-25
WO2009074211A1 (en) 2009-06-18
CN101896869B (zh) 2014-02-26
EP2240830A1 (en) 2010-10-20
CN103713474B (zh) 2016-06-01
US8937708B2 (en) 2015-01-20
US20100253926A1 (en) 2010-10-07
KR20100110316A (ko) 2010-10-12
KR101517645B1 (ko) 2015-05-04
JP2011507241A (ja) 2011-03-03
TW200941149A (en) 2009-10-01
DE102008013229A1 (de) 2009-06-18

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: CARL ZEISS SMT GMBH, 73447 OBERKOCHEN, DE

R018 Grant decision by examination section/examining division
R020 Patent grant now final