JP5548135B2 - マイクロリソグラフィ用の照明光学系 - Google Patents

マイクロリソグラフィ用の照明光学系 Download PDF

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JP5548135B2
JP5548135B2 JP2010537272A JP2010537272A JP5548135B2 JP 5548135 B2 JP5548135 B2 JP 5548135B2 JP 2010537272 A JP2010537272 A JP 2010537272A JP 2010537272 A JP2010537272 A JP 2010537272A JP 5548135 B2 JP5548135 B2 JP 5548135B2
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field
illumination
plane
optical system
intensity setting
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JP2011507241A (ja
JP2011507241A5 (enExample
Inventor
マルティン エントレス
ラルフ シュテューツレ
イェンス オスマン
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カール・ツァイス・エスエムティー・ゲーエムベーハー
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70083—Non-homogeneous intensity distribution in the mask plane
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
JP2010537272A 2007-12-11 2008-11-20 マイクロリソグラフィ用の照明光学系 Active JP5548135B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US1281207P 2007-12-11 2007-12-11
US61/012,812 2007-12-11
DE102008013229.2 2008-03-07
DE102008013229.2A DE102008013229B4 (de) 2007-12-11 2008-03-07 Beleuchtungsoptik für die Mikrolithographie
PCT/EP2008/009786 WO2009074211A1 (en) 2007-12-11 2008-11-20 Illumination optics for microlithography

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014102463A Division JP5888622B2 (ja) 2007-12-11 2014-05-16 マイクロリソグラフィ用の照明光学系

Publications (3)

Publication Number Publication Date
JP2011507241A JP2011507241A (ja) 2011-03-03
JP2011507241A5 JP2011507241A5 (enExample) 2012-01-19
JP5548135B2 true JP5548135B2 (ja) 2014-07-16

Family

ID=40680146

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2010537272A Active JP5548135B2 (ja) 2007-12-11 2008-11-20 マイクロリソグラフィ用の照明光学系
JP2014102463A Active JP5888622B2 (ja) 2007-12-11 2014-05-16 マイクロリソグラフィ用の照明光学系

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014102463A Active JP5888622B2 (ja) 2007-12-11 2014-05-16 マイクロリソグラフィ用の照明光学系

Country Status (8)

Country Link
US (1) US8937708B2 (enExample)
EP (1) EP2240830B1 (enExample)
JP (2) JP5548135B2 (enExample)
KR (1) KR101517645B1 (enExample)
CN (2) CN103713474B (enExample)
DE (1) DE102008013229B4 (enExample)
TW (1) TWI474125B (enExample)
WO (1) WO2009074211A1 (enExample)

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DE102008042462B4 (de) * 2008-09-30 2010-11-04 Carl Zeiss Smt Ag Beleuchtungssystem für die EUV-Mikrolithographie
JP5134732B2 (ja) * 2008-10-31 2013-01-30 カール・ツァイス・エスエムティー・ゲーエムベーハー Ｅｕｖマイクロリソグラフィ用の照明光学系
DE202009004769U1 (de) 2009-01-19 2010-06-17 Paul Hettich Gmbh & Co. Kg Auszugsführung
DE102010001388A1 (de) * 2010-01-29 2011-08-04 Carl Zeiss SMT GmbH, 73447 Facettenspiegel zum Einsatz in der Mikrolithografie
DE102010062779A1 (de) 2010-12-10 2012-06-14 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithographie
CN102859440B (zh) * 2010-12-28 2015-04-22 卡尔蔡司Smt有限责任公司 微光刻投射曝光设备的照明系统
DE102011005881A1 (de) 2011-03-22 2012-05-03 Carl Zeiss Smt Gmbh Verfahren zur Einstellung eines Beleuchtungssystems einer Projektionsbelichtungsanlage für die Projektionslithographie
NL2008322A (en) 2011-04-13 2012-10-16 Asml Holding Nv Double euv illumination uniformity correction system and method.
DE102011076297A1 (de) * 2011-05-23 2012-11-29 Carl Zeiss Smt Gmbh Blende
DE102012205886A1 (de) * 2012-04-11 2013-10-17 Carl Zeiss Smt Gmbh Beleuchtungsintensitäts-Korrekturvorrichtung zur Vorgabe einer Beleuchtungsintensität über ein Beleuchtungsfeld einer lithographischen Projektionsbelichtungsanlage
DE102012208016A1 (de) * 2012-05-14 2013-05-08 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Mikrolithographie
DE102012212664A1 (de) * 2012-07-19 2014-01-23 Carl Zeiss Smt Gmbh Verfahren zum Einstellen eines Beleuchtungssettings
DE102015209453A1 (de) 2015-05-22 2016-11-24 Carl Zeiss Smt Gmbh Pupillenfacettenspiegel
DE102017220265A1 (de) 2017-11-14 2019-05-16 Carl Zeiss Smt Gmbh Beleuchtungsintensitäts-Korrekturvorrichtung zur Vorgabe einer Beleuchtungsintensität über ein Beleuchtungsfeld einer lithographischen Projektionsbelichtungsanlage
DE102018201009A1 (de) * 2018-01-23 2019-07-25 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithographie
DE102018208710A1 (de) 2018-06-04 2019-12-05 Carl Zeiss Smt Gmbh Blende zur Anordnung in einer Engstelle eines EUV-Beleuchtungsbündels
DE102018215505A1 (de) 2018-09-12 2018-10-31 Carl Zeiss Smt Gmbh Projektionsoptik für eine Projektionsbelichtungsanlage
DE102018217707A1 (de) 2018-10-16 2018-12-27 Carl Zeiss Smt Gmbh Feldfacettenspiegel zum Einsatz in einer Beleuchtungsoptik einer Projektionsbelichtungsanlage für die EUV-Projektonslithographie
WO2020221763A1 (de) * 2019-04-29 2020-11-05 Carl Zeiss Smt Gmbh Mess-beleuchtungsoptik zur führung von beleuchtungslicht in ein objektfeld einer projektionsbelichtungsanlage für die euv-lithografie
DE102019206869A1 (de) 2019-05-13 2019-08-08 Carl Zeiss Smt Gmbh Strahlungsquellen-Modul
KR20230167934A (ko) 2022-06-03 2023-12-12 삼성전자주식회사 극자외선 노광 장치 및 그것의 동작 방법

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JP3057998B2 (ja) * 1994-02-16 2000-07-04 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
JPH1039227A (ja) * 1996-07-29 1998-02-13 Olympus Optical Co Ltd 遮光装置及び光学顕微鏡
US6013401A (en) 1997-03-31 2000-01-11 Svg Lithography Systems, Inc. Method of controlling illumination field to reduce line width variation
EP0955641B1 (de) * 1998-05-05 2004-04-28 Carl Zeiss Beleuchtungssystem insbesondere für die EUV-Lithographie
DE10100265A1 (de) * 2001-01-08 2002-07-11 Zeiss Carl Beleuchtungssystem mit Rasterelementen unterschiedlicher Größe
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JP3836418B2 (ja) * 2001-09-07 2006-10-25 エイエスエムエル ネザランドズ ベスローテン フエンノートシャップ リソグラフィ装置およびデバイスの製造方法
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KR100576750B1 (ko) * 2002-03-18 2006-05-03 에이에스엠엘 네델란즈 비.브이. 리소그래피장치 및 디바이스제조방법
US7170587B2 (en) * 2002-03-18 2007-01-30 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP3720788B2 (ja) * 2002-04-15 2005-11-30 キヤノン株式会社 投影露光装置及びデバイス製造方法
DE10219514A1 (de) * 2002-04-30 2003-11-13 Zeiss Carl Smt Ag Beleuchtungssystem, insbesondere für die EUV-Lithographie
WO2005040927A2 (en) 2003-10-18 2005-05-06 Carl Zeiss Smt Ag Device and method for illumination dose adjustments in microlithography
US7023524B2 (en) * 2003-12-18 2006-04-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7030958B2 (en) * 2003-12-31 2006-04-18 Asml Netherlands B.V. Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method
DE102004002415B4 (de) 2004-01-16 2008-07-10 Metzeler Automotive Profile Systems Gmbh Vorrichtung zum Steuern und Überwachen eines bewegbaren Schliesselements, insbesondere einer elektrisch angetriebenen Fensterscheibe eines Kraftfahrzeugs
US20060103828A1 (en) * 2004-11-17 2006-05-18 David Douglas J Adjustable illumination blade assembly for photolithography scanners
US7088527B2 (en) * 2004-12-28 2006-08-08 Asml Holding N.V. Uniformity correction system having light leak and shadow compensation
CN1645258A (zh) * 2005-01-24 2005-07-27 中国科学院光电技术研究所 高数值孔径光刻成像偏振控制装置
JP2006253487A (ja) * 2005-03-11 2006-09-21 Nikon Corp 照明装置、投影露光方法、投影露光装置、及びマイクロデバイスの製造方法
DE102006017336B4 (de) * 2006-04-11 2011-07-28 Carl Zeiss SMT GmbH, 73447 Beleuchtungssystem mit Zoomobjektiv
JP4797764B2 (ja) * 2006-04-14 2011-10-19 株式会社ニコン 露光装置の較正方法及び露光装置
NL1036162A1 (nl) 2007-11-28 2009-06-02 Asml Netherlands Bv Lithographic apparatus and method.

Also Published As

Publication number Publication date
EP2240830A1 (en) 2010-10-20
KR20100110316A (ko) 2010-10-12
JP2011507241A (ja) 2011-03-03
WO2009074211A1 (en) 2009-06-18
US8937708B2 (en) 2015-01-20
TW200941149A (en) 2009-10-01
CN103713474B (zh) 2016-06-01
DE102008013229A1 (de) 2009-06-18
CN103713474A (zh) 2014-04-09
TWI474125B (zh) 2015-02-21
US20100253926A1 (en) 2010-10-07
JP2014179645A (ja) 2014-09-25
KR101517645B1 (ko) 2015-05-04
EP2240830B1 (en) 2015-04-01
CN101896869B (zh) 2014-02-26
CN101896869A (zh) 2010-11-24
JP5888622B2 (ja) 2016-03-22
DE102008013229B4 (de) 2015-04-09

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