DE102007009080A1 - Schnelldrehende Vakuumpumpe - Google Patents

Schnelldrehende Vakuumpumpe Download PDF

Info

Publication number
DE102007009080A1
DE102007009080A1 DE102007009080A DE102007009080A DE102007009080A1 DE 102007009080 A1 DE102007009080 A1 DE 102007009080A1 DE 102007009080 A DE102007009080 A DE 102007009080A DE 102007009080 A DE102007009080 A DE 102007009080A DE 102007009080 A1 DE102007009080 A1 DE 102007009080A1
Authority
DE
Germany
Prior art keywords
vacuum pump
rotor
frequency
bending
critical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102007009080A
Other languages
German (de)
English (en)
Inventor
Heinrich Dipl.-Ing. Engländer
Christian Dipl.-Ing. Harig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Priority to DE102007009080A priority Critical patent/DE102007009080A1/de
Priority to CN2008800058397A priority patent/CN101617125B/zh
Priority to EP08716880A priority patent/EP2118492B1/de
Priority to DE502008001821T priority patent/DE502008001821D1/de
Priority to KR1020097019677A priority patent/KR20090113341A/ko
Priority to PCT/EP2008/051874 priority patent/WO2008101876A1/de
Priority to JP2009550267A priority patent/JP5498171B2/ja
Priority to AT08716880T priority patent/ATE488700T1/de
Priority to US12/528,192 priority patent/US20100322798A1/en
Publication of DE102007009080A1 publication Critical patent/DE102007009080A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE102007009080A 2007-02-24 2007-02-24 Schnelldrehende Vakuumpumpe Withdrawn DE102007009080A1 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
DE102007009080A DE102007009080A1 (de) 2007-02-24 2007-02-24 Schnelldrehende Vakuumpumpe
CN2008800058397A CN101617125B (zh) 2007-02-24 2008-02-15 快速旋转的真空泵
EP08716880A EP2118492B1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe
DE502008001821T DE502008001821D1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe
KR1020097019677A KR20090113341A (ko) 2007-02-24 2008-02-15 빠르게 회전하는 진공 펌프
PCT/EP2008/051874 WO2008101876A1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe
JP2009550267A JP5498171B2 (ja) 2007-02-24 2008-02-15 高速回転式真空ポンプ
AT08716880T ATE488700T1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe
US12/528,192 US20100322798A1 (en) 2007-02-24 2008-02-15 Rapidly rotating vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007009080A DE102007009080A1 (de) 2007-02-24 2007-02-24 Schnelldrehende Vakuumpumpe

Publications (1)

Publication Number Publication Date
DE102007009080A1 true DE102007009080A1 (de) 2008-08-28

Family

ID=39322764

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102007009080A Withdrawn DE102007009080A1 (de) 2007-02-24 2007-02-24 Schnelldrehende Vakuumpumpe
DE502008001821T Active DE502008001821D1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE502008001821T Active DE502008001821D1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe

Country Status (8)

Country Link
US (1) US20100322798A1 (zh)
EP (1) EP2118492B1 (zh)
JP (1) JP5498171B2 (zh)
KR (1) KR20090113341A (zh)
CN (1) CN101617125B (zh)
AT (1) ATE488700T1 (zh)
DE (2) DE102007009080A1 (zh)
WO (1) WO2008101876A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020134924A1 (de) 2020-12-23 2022-06-23 Huga Kg Türflügel mit flächenbündigem Drückerbeschlag

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2970053B1 (fr) * 2011-01-05 2013-01-25 Turbomeca Dispositif et procede de protection mecanique
FR2974400B1 (fr) 2011-04-22 2013-05-10 Turbomeca Dispositif de protection mecanique

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69319116T2 (de) * 1992-07-23 1998-10-29 Procter & Gamble Monatshöschen mit verbessertem perinealen kontakt
EP1269015B1 (de) * 2000-04-05 2005-08-24 aerodyn Engineering GmbH Turmeigenfrequenzabhängige betriebsführung von offshore-windenergieanlagen
DE102004048866A1 (de) * 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163980A (ja) * 1984-09-05 1986-04-02 Hitachi Ltd 磁気デイスク装置
JPH0772556B2 (ja) * 1988-03-18 1995-08-02 株式会社荏原製作所 ターボ分子ポンプ
AU4637493A (en) * 1992-08-10 1994-03-03 Dow Deutschland Inc. Process and device for monitoring vibrational excitation of an axial compressor
JPH08114187A (ja) * 1994-10-19 1996-05-07 Hitachi Ltd 密閉形圧縮機
JPH09105412A (ja) * 1995-10-11 1997-04-22 Seiko Seiki Co Ltd 磁気軸受装置
US5833374A (en) * 1997-05-19 1998-11-10 Varian Associates, Inc. Rotatable assembly for supporting of the rotor of a vacuum pump
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
EP1024294A3 (en) * 1999-01-29 2002-03-13 Ibiden Co., Ltd. Motor and turbo-molecular pump
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
JP2002174238A (ja) * 2000-12-07 2002-06-21 Seiko Instruments Inc 磁気軸受制御装置、及び該装置を用いた真空ポンプ
JP2004116354A (ja) * 2002-09-25 2004-04-15 Mitsubishi Heavy Ind Ltd ターボ分子ポンプ
ATE362051T1 (de) * 2004-01-29 2007-06-15 Pfeiffer Vacuum Gmbh Gasreibungspumpe
KR101173443B1 (ko) * 2004-07-01 2012-08-16 엘리오트 컴퍼니 컴프레서의 진동감소를 위한 베어링 장치 및 샤프트의 진동 감소 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69319116T2 (de) * 1992-07-23 1998-10-29 Procter & Gamble Monatshöschen mit verbessertem perinealen kontakt
EP1269015B1 (de) * 2000-04-05 2005-08-24 aerodyn Engineering GmbH Turmeigenfrequenzabhängige betriebsführung von offshore-windenergieanlagen
DE102004048866A1 (de) * 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020134924A1 (de) 2020-12-23 2022-06-23 Huga Kg Türflügel mit flächenbündigem Drückerbeschlag

Also Published As

Publication number Publication date
WO2008101876A1 (de) 2008-08-28
JP5498171B2 (ja) 2014-05-21
CN101617125B (zh) 2011-06-08
DE502008001821D1 (de) 2010-12-30
EP2118492B1 (de) 2010-11-17
ATE488700T1 (de) 2010-12-15
EP2118492A1 (de) 2009-11-18
JP2010519453A (ja) 2010-06-03
US20100322798A1 (en) 2010-12-23
CN101617125A (zh) 2009-12-30
KR20090113341A (ko) 2009-10-29

Similar Documents

Publication Publication Date Title
EP1971772B1 (de) Verfahren zum betreiben einer windenergieanlage und windenergieanlage
DE102008013864B4 (de) Verfahren und Vorrichtung zum Drehen einer Komponente einer Windenergieanlage
EP2280116B1 (de) Pulper mit Torque-Motor und Verfahren zum Betrieb eines solchen Pulpers
DE112016006959T5 (de) Getriebe mit variabler drehzahl
WO2001036826A1 (de) Schnelllaufende turbopumpe
DE102007009080A1 (de) Schnelldrehende Vakuumpumpe
DE102016118877B4 (de) Mechanische Getriebeanordnung
EP1243791A2 (de) Drehmomentübertragungsvorrichtung für eine Windkraftanlage
EP3351826A1 (de) Kompaktes mehrstufiges getriebe mit einem planetengetriebe und einem daran anschliessenden wellgetriebe
WO2013020725A1 (de) Stetigförderer zum transport von schwerem schütt- oder stückgut
DE2932293A1 (de) Windkraftanlage
EP1626179B1 (de) Vakuumpumpe
AT14813U1 (de) Antriebsstrang und Verfahren zum Betreiben eines Antriebsstranges
EP3002856A1 (de) Greif- oder schwenkeinheit
DE10244865A1 (de) Kettenzug
EP3491238A2 (de) Maschinenhaus und rotor für eine windenergieanlage sowie verfahren
EP3507485A1 (de) Rotorblattnabe für eine windenergieanlage, und windenergieanlage mit selbiger
DE202013010209U1 (de) Vakuumpumpen-Welle
DE102013219629A1 (de) Aufbereitungsmaschine und Aufbereitungsanlage
DE69101259T2 (de) Zerspannungsscheibe zur Herstellung von Holzspänen.
DE102021112354A1 (de) Wasserturbine und/oder Wasserpumpe
EP2189055B1 (de) Elektrohandwerkzeuggerät
DE102008058149A1 (de) Turbomolekularpumpe
DE102006058672B4 (de) Anordnung mit Vakuumpumpe
EP2068000A2 (de) Anordnung mit Vakuumpumpe

Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20120901