ATE488700T1 - Schnelldrehende vakuumpumpe - Google Patents

Schnelldrehende vakuumpumpe

Info

Publication number
ATE488700T1
ATE488700T1 AT08716880T AT08716880T ATE488700T1 AT E488700 T1 ATE488700 T1 AT E488700T1 AT 08716880 T AT08716880 T AT 08716880T AT 08716880 T AT08716880 T AT 08716880T AT E488700 T1 ATE488700 T1 AT E488700T1
Authority
AT
Austria
Prior art keywords
vacuum pump
rotating vacuum
fast rotating
rotor
fnom
Prior art date
Application number
AT08716880T
Other languages
German (de)
English (en)
Inventor
Heinrich Englaender
Christian Harig
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Application granted granted Critical
Publication of ATE488700T1 publication Critical patent/ATE488700T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
AT08716880T 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe ATE488700T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007009080A DE102007009080A1 (de) 2007-02-24 2007-02-24 Schnelldrehende Vakuumpumpe
PCT/EP2008/051874 WO2008101876A1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe

Publications (1)

Publication Number Publication Date
ATE488700T1 true ATE488700T1 (de) 2010-12-15

Family

ID=39322764

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08716880T ATE488700T1 (de) 2007-02-24 2008-02-15 Schnelldrehende vakuumpumpe

Country Status (8)

Country Link
US (1) US20100322798A1 (zh)
EP (1) EP2118492B1 (zh)
JP (1) JP5498171B2 (zh)
KR (1) KR20090113341A (zh)
CN (1) CN101617125B (zh)
AT (1) ATE488700T1 (zh)
DE (2) DE102007009080A1 (zh)
WO (1) WO2008101876A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2970053B1 (fr) 2011-01-05 2013-01-25 Turbomeca Dispositif et procede de protection mecanique
FR2974400B1 (fr) 2011-04-22 2013-05-10 Turbomeca Dispositif de protection mecanique
DE102020134924A1 (de) 2020-12-23 2022-06-23 Huga Kg Türflügel mit flächenbündigem Drückerbeschlag

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163980A (ja) * 1984-09-05 1986-04-02 Hitachi Ltd 磁気デイスク装置
JPH0772556B2 (ja) * 1988-03-18 1995-08-02 株式会社荏原製作所 ターボ分子ポンプ
US5824004A (en) * 1990-06-18 1998-10-20 The Procter & Gamble Company Stretchable absorbent articles
AU4637493A (en) * 1992-08-10 1994-03-03 Dow Deutschland Inc. Process and device for monitoring vibrational excitation of an axial compressor
JPH08114187A (ja) * 1994-10-19 1996-05-07 Hitachi Ltd 密閉形圧縮機
JPH09105412A (ja) * 1995-10-11 1997-04-22 Seiko Seiki Co Ltd 磁気軸受装置
US5833374A (en) * 1997-05-19 1998-11-10 Varian Associates, Inc. Rotatable assembly for supporting of the rotor of a vacuum pump
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
EP1024294A3 (en) * 1999-01-29 2002-03-13 Ibiden Co., Ltd. Motor and turbo-molecular pump
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
DE10016912C1 (de) * 2000-04-05 2001-12-13 Aerodyn Eng Gmbh Turmeigenfrequenzabhängige Betriebsführung von Offshore-Windenergieanlagen
JP2002174238A (ja) * 2000-12-07 2002-06-21 Seiko Instruments Inc 磁気軸受制御装置、及び該装置を用いた真空ポンプ
JP2004116354A (ja) * 2002-09-25 2004-04-15 Mitsubishi Heavy Ind Ltd ターボ分子ポンプ
ATE362051T1 (de) * 2004-01-29 2007-06-15 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP4907525B2 (ja) * 2004-07-01 2012-03-28 エリオット・カンパニー ４軸受装置
DE102004048866A1 (de) * 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe

Also Published As

Publication number Publication date
US20100322798A1 (en) 2010-12-23
DE102007009080A1 (de) 2008-08-28
WO2008101876A1 (de) 2008-08-28
EP2118492A1 (de) 2009-11-18
CN101617125B (zh) 2011-06-08
KR20090113341A (ko) 2009-10-29
CN101617125A (zh) 2009-12-30
EP2118492B1 (de) 2010-11-17
JP2010519453A (ja) 2010-06-03
JP5498171B2 (ja) 2014-05-21
DE502008001821D1 (de) 2010-12-30

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