DE102004036316B4 - Vorrichtung, System und Verfahren mit einem Schutzring für ein Detektorarray zur direkten Photo-Elektronenumwandlung - Google Patents

Vorrichtung, System und Verfahren mit einem Schutzring für ein Detektorarray zur direkten Photo-Elektronenumwandlung Download PDF

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Publication number
DE102004036316B4
DE102004036316B4 DE102004036316.1A DE102004036316A DE102004036316B4 DE 102004036316 B4 DE102004036316 B4 DE 102004036316B4 DE 102004036316 A DE102004036316 A DE 102004036316A DE 102004036316 B4 DE102004036316 B4 DE 102004036316B4
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Germany
Prior art keywords
detector
ring
side surfaces
pixel
anode
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Expired - Fee Related
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DE102004036316.1A
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German (de)
English (en)
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DE102004036316A1 (de
Inventor
Wen Li
Jianguo Zhao
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GE Medical Systems Global Technology Co LLC
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GE Medical Systems Global Technology Co LLC
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/02—Arrangements for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
    • A61B6/03—Computed tomography [CT]
    • A61B6/032—Transmission computed tomography [CT]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • G01T1/241—Electrode arrangements, e.g. continuous or parallel strips or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1892—Direct radiation image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Medical Informatics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biomedical Technology (AREA)
  • Theoretical Computer Science (AREA)
  • Biophysics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Pulmonology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Measurement Of Radiation (AREA)
  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
DE102004036316.1A 2003-08-01 2004-07-27 Vorrichtung, System und Verfahren mit einem Schutzring für ein Detektorarray zur direkten Photo-Elektronenumwandlung Expired - Fee Related DE102004036316B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/633,119 2003-08-01
US10/633,119 US6928144B2 (en) 2003-08-01 2003-08-01 Guard ring for direct photo-to-electron conversion detector array

Publications (2)

Publication Number Publication Date
DE102004036316A1 DE102004036316A1 (de) 2005-02-17
DE102004036316B4 true DE102004036316B4 (de) 2016-08-04

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DE102004036316.1A Expired - Fee Related DE102004036316B4 (de) 2003-08-01 2004-07-27 Vorrichtung, System und Verfahren mit einem Schutzring für ein Detektorarray zur direkten Photo-Elektronenumwandlung

Country Status (5)

Country Link
US (1) US6928144B2 (https=)
JP (1) JP5016188B2 (https=)
CN (1) CN100457036C (https=)
DE (1) DE102004036316B4 (https=)
NL (1) NL1026741C2 (https=)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2253997B1 (es) * 2004-07-29 2007-07-16 Udiat Centre Diagnostic, S.A. Sistema digital para realizar biopsia estereotaxica.
US7212604B2 (en) * 2005-06-29 2007-05-01 General Electric Company Multi-layer direct conversion computed tomography detector module
US7612342B1 (en) * 2005-09-27 2009-11-03 Radiation Monitoring Devices, Inc. Very bright scintillators
US7551712B2 (en) * 2006-04-20 2009-06-23 General Electric Company CT detector with non-rectangular cells
JP4881071B2 (ja) * 2006-05-30 2012-02-22 株式会社日立製作所 放射線検出器、及びこれを搭載した放射線撮像装置
US7676073B2 (en) * 2006-08-29 2010-03-09 Siemens Medical Solutions Usa, Inc. System and method for reducing circular artifacts in tomographic imaging
US7486764B2 (en) * 2007-01-23 2009-02-03 General Electric Company Method and apparatus to reduce charge sharing in pixellated energy discriminating detectors
WO2008129433A2 (en) * 2007-04-24 2008-10-30 Koninklijke Philips Electronics N.V. Photodiodes and fabrication thereof
US9202961B2 (en) 2009-02-02 2015-12-01 Redlen Technologies Imaging devices with solid-state radiation detector with improved sensitivity
US8614423B2 (en) * 2009-02-02 2013-12-24 Redlen Technologies, Inc. Solid-state radiation detector with improved sensitivity
US8165266B2 (en) * 2009-09-10 2012-04-24 General Electric Company Transverse scanning bone densitometer and detector used in same
US20110108703A1 (en) * 2009-11-10 2011-05-12 Orbotech Medical Solutions Ltd. Segmented guard strip
JP5683850B2 (ja) * 2010-01-28 2015-03-11 富士フイルム株式会社 放射線検出素子、及び放射線画像撮影装置
IN2014CN01055A (https=) * 2011-08-30 2015-04-10 Koninkl Philips Nv
US20130049151A1 (en) * 2011-08-31 2013-02-28 General Electric Company Anode-illuminated radiation detector
JP6209532B2 (ja) 2011-12-27 2017-10-04 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． Ｐｅｔ検出器のためのタイルの取り付け
JP6231778B2 (ja) * 2013-06-05 2017-11-15 キヤノン株式会社 電気デバイスおよび放射線検査装置
JP6433644B2 (ja) 2013-06-07 2018-12-05 シーメンス アクチエンゲゼルシヤフトＳｉｅｍｅｎｓ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ 半導体ウェハのダイシング方法
JP5886793B2 (ja) 2013-06-11 2016-03-16 浜松ホトニクス株式会社 固体撮像装置
DE102013217941A1 (de) * 2013-09-09 2015-03-12 Siemens Aktiengesellschaft Röntgendetektor und Verfahren
EP2871496B1 (en) 2013-11-12 2020-01-01 Samsung Electronics Co., Ltd Radiation detector and computed tomography apparatus using the same
CN104749606A (zh) 2013-12-27 2015-07-01 同方威视技术股份有限公司 高纯锗探测器
BR112017002916A2 (pt) * 2014-12-05 2017-12-05 Koninklijke Philips Nv dispositivo detector de raios x para detecção de radiação de raio x a um ângulo inclinado em relação à radiação de raio x, sistema e método de imageamento por raios x, elemento de programa de computador para controlar um dispositivo ou um sistema, e mídia legível por computador
JP6683687B2 (ja) * 2015-04-15 2020-04-22 株式会社カネカ イオンビームの荷電変換方法
JP6185098B2 (ja) * 2016-02-12 2017-08-23 浜松ホトニクス株式会社 固体撮像装置
CN106324649B (zh) * 2016-08-31 2023-09-15 同方威视技术股份有限公司 半导体探测器
US10156645B2 (en) * 2016-12-23 2018-12-18 General Electric Company Systems and methods for sub-pixel location determination at sidewalls and corners of detectors
EP3355355B1 (en) * 2017-01-27 2019-03-13 Detection Technology Oy Asymmetrically positioned guard ring contacts
EP3658964A4 (en) * 2017-07-26 2021-01-13 Shenzhen Xpectvision Technology Co., Ltd. Methods of making and using an x-ray detector
JP6873414B2 (ja) 2017-10-17 2021-05-19 株式会社リガク 処理装置、方法およびプログラム
US10813607B2 (en) * 2018-06-27 2020-10-27 Prismatic Sensors Ab X-ray sensor, method for constructing an x-ray sensor and an x-ray imaging system comprising such an x-ray sensor
EP3799787A1 (en) * 2019-10-01 2021-04-07 Koninklijke Philips N.V. Detector for a dark-field; phase-contrast and attenuation interferometric imaging system
FR3105444B1 (fr) * 2019-12-24 2022-01-07 Commissariat Energie Atomique Procédé de détermination d'un biais affectant des pixels d'un détecteur pixellisé de rayonnement ionisant
DE102020111562A1 (de) 2020-04-28 2021-10-28 Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg Bildsensor
JP7534123B2 (ja) * 2020-05-12 2024-08-14 キヤノンメディカルシステムズ株式会社 Ｘ線検出器及びｘ線ｃｔ装置
US12046623B2 (en) 2020-08-07 2024-07-23 Redlen Technologies, Inc. Compound semiconductor x-ray detector tiles and method of dicing thereof
DE102020211327B4 (de) 2020-09-09 2025-10-02 Siemens Healthineers Ag DC-Motor, Liege mit DC-Motor und Verfahren zum Betreiben eines DC-Motors
CN113229833A (zh) * 2021-05-29 2021-08-10 西北工业大学 一种骨密度仪用的x射线探测器
US12429612B2 (en) 2021-09-13 2025-09-30 Redlen Technologies, Inc. Radiation sensor dies having visual identifiers and methods of fabricating thereof
DE102021128022B3 (de) 2021-10-27 2023-02-02 Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg Bildsensor
JP7734052B2 (ja) * 2021-11-18 2025-09-04 キヤノンメディカルシステムズ株式会社 直接変換型ｘ線検出器、ｘ線検出方法、およびｘ線コンピュータ断層撮影装置
WO2023153262A1 (ja) * 2022-02-09 2023-08-17 株式会社ジャパンディスプレイ 検出装置
WO2023189717A1 (ja) * 2022-03-29 2023-10-05 株式会社ジャパンディスプレイ 検出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5905264A (en) * 1996-08-14 1999-05-18 Imarad Imaging Systems Ltd. Semiconductor detector

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4031396A (en) * 1975-02-28 1977-06-21 General Electric Company X-ray detector
US4864378A (en) 1987-10-21 1989-09-05 Massachusetts Institute Of Technology Schottky barrier infrared detector
US5563421A (en) * 1995-06-07 1996-10-08 Sterling Diagnostic Imaging, Inc. Apparatus and method for eliminating residual charges in an image capture panel
GB2318448B (en) * 1996-10-18 2002-01-16 Simage Oy Imaging detector and method of production
US6034373A (en) * 1997-12-11 2000-03-07 Imrad Imaging Systems Ltd. Semiconductor radiation detector with reduced surface effects
GB2335540B (en) * 1998-03-20 2002-01-02 Simage Oy Imaging device for imaging radiation
US6075248A (en) * 1998-10-22 2000-06-13 Direct Radiography Corp. Direct radiographic imaging panel with shielding electrode
US6545711B1 (en) * 1998-11-02 2003-04-08 Agilent Technologies, Inc. Photo diode pixel sensor array having a guard ring
SE9900856L (sv) * 1999-03-10 2000-11-10 Mamea Imaging Ab Metod och anordning för detektering av röntgenstrålar och användning av sådan anordning
US6066884A (en) 1999-03-19 2000-05-23 Lucent Technologies Inc. Schottky diode guard ring structures
DE60025191T2 (de) 1999-04-01 2006-08-31 Sectra Mamea Ab Verfahren und vorrichtung zur vereinfachten ausrichtung in röntgenstrahlungen-bildgebung
EP1173973A1 (en) * 1999-04-26 2002-01-23 Simage Oy Self triggered imaging device for imaging radiation
US6177293B1 (en) 1999-05-20 2001-01-23 Tower Semiconductor Ltd. Method and structure for minimizing white spots in CMOS image sensors
DE19926582A1 (de) * 1999-06-11 2000-12-14 Philips Corp Intellectual Pty Sensor
US6229191B1 (en) 1999-11-19 2001-05-08 Agilent Technologies, Inc. Conductive guard rings for elevated active pixel sensors
US6465824B1 (en) 2000-03-09 2002-10-15 General Electric Company Imager structure
US6399413B1 (en) 2000-04-18 2002-06-04 Agere Systems Guardian Corp. Self aligned gated Schottky diode guard ring structures
US6504158B2 (en) 2000-12-04 2003-01-07 General Electric Company Imaging array minimizing leakage currents
US6583482B2 (en) 2000-12-06 2003-06-24 Alexandre Pauchard Hetero-interface avalance photodetector
US6597025B2 (en) * 2001-03-15 2003-07-22 Koninklijke Philips Electronics N.V. Light sensitive semiconductor component
DE10128654B4 (de) * 2001-06-15 2008-04-10 Forschungszentrum Jülich GmbH Beidseitig mikrostrukturierter, ortsempfindlicher Detektor
JP2003209237A (ja) * 2002-01-16 2003-07-25 Fuji Photo Film Co Ltd 固体検出器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5905264A (en) * 1996-08-14 1999-05-18 Imarad Imaging Systems Ltd. Semiconductor detector

Also Published As

Publication number Publication date
CN1579328A (zh) 2005-02-16
NL1026741C2 (nl) 2007-03-09
US20050023475A1 (en) 2005-02-03
NL1026741A1 (nl) 2005-02-02
DE102004036316A1 (de) 2005-02-17
JP5016188B2 (ja) 2012-09-05
CN100457036C (zh) 2009-02-04
JP2005057281A (ja) 2005-03-03
US6928144B2 (en) 2005-08-09

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