CN100457036C - 用于直接光-电子转换探测器阵列的保护环 - Google Patents
用于直接光-电子转换探测器阵列的保护环 Download PDFInfo
- Publication number
- CN100457036C CN100457036C CNB2004100556610A CN200410055661A CN100457036C CN 100457036 C CN100457036 C CN 100457036C CN B2004100556610 A CNB2004100556610 A CN B2004100556610A CN 200410055661 A CN200410055661 A CN 200410055661A CN 100457036 C CN100457036 C CN 100457036C
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- China
- Prior art keywords
- detector
- ring
- guard ring
- side surfaces
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 31
- 238000003384 imaging method Methods 0.000 claims abstract description 11
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 230000001681 protective effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000002059 diagnostic imaging Methods 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 238000003491 array Methods 0.000 description 4
- 238000002591 computed tomography Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 229910004611 CdZnTe Inorganic materials 0.000 description 2
- 238000013170 computed tomography imaging Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009607 mammography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 210000000779 thoracic wall Anatomy 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/02—Arrangements for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
- A61B6/03—Computed tomography [CT]
- A61B6/032—Transmission computed tomography [CT]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
- G01T1/241—Electrode arrangements, e.g. continuous or parallel strips or the like
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
- H10F39/1892—Direct radiation image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Medical Informatics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Biomedical Technology (AREA)
- Theoretical Computer Science (AREA)
- Biophysics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Pulmonology (AREA)
- Heart & Thoracic Surgery (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Measurement Of Radiation (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/633,119 | 2003-08-01 | ||
| US10/633,119 US6928144B2 (en) | 2003-08-01 | 2003-08-01 | Guard ring for direct photo-to-electron conversion detector array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1579328A CN1579328A (zh) | 2005-02-16 |
| CN100457036C true CN100457036C (zh) | 2009-02-04 |
Family
ID=34080739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100556610A Expired - Lifetime CN100457036C (zh) | 2003-08-01 | 2004-08-02 | 用于直接光-电子转换探测器阵列的保护环 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6928144B2 (https=) |
| JP (1) | JP5016188B2 (https=) |
| CN (1) | CN100457036C (https=) |
| DE (1) | DE102004036316B4 (https=) |
| NL (1) | NL1026741C2 (https=) |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2253997B1 (es) * | 2004-07-29 | 2007-07-16 | Udiat Centre Diagnostic, S.A. | Sistema digital para realizar biopsia estereotaxica. |
| US7212604B2 (en) * | 2005-06-29 | 2007-05-01 | General Electric Company | Multi-layer direct conversion computed tomography detector module |
| US7612342B1 (en) * | 2005-09-27 | 2009-11-03 | Radiation Monitoring Devices, Inc. | Very bright scintillators |
| US7551712B2 (en) * | 2006-04-20 | 2009-06-23 | General Electric Company | CT detector with non-rectangular cells |
| JP4881071B2 (ja) * | 2006-05-30 | 2012-02-22 | 株式会社日立製作所 | 放射線検出器、及びこれを搭載した放射線撮像装置 |
| US7676073B2 (en) * | 2006-08-29 | 2010-03-09 | Siemens Medical Solutions Usa, Inc. | System and method for reducing circular artifacts in tomographic imaging |
| US7486764B2 (en) * | 2007-01-23 | 2009-02-03 | General Electric Company | Method and apparatus to reduce charge sharing in pixellated energy discriminating detectors |
| WO2008129433A2 (en) * | 2007-04-24 | 2008-10-30 | Koninklijke Philips Electronics N.V. | Photodiodes and fabrication thereof |
| US9202961B2 (en) | 2009-02-02 | 2015-12-01 | Redlen Technologies | Imaging devices with solid-state radiation detector with improved sensitivity |
| US8614423B2 (en) * | 2009-02-02 | 2013-12-24 | Redlen Technologies, Inc. | Solid-state radiation detector with improved sensitivity |
| US8165266B2 (en) * | 2009-09-10 | 2012-04-24 | General Electric Company | Transverse scanning bone densitometer and detector used in same |
| US20110108703A1 (en) * | 2009-11-10 | 2011-05-12 | Orbotech Medical Solutions Ltd. | Segmented guard strip |
| JP5683850B2 (ja) * | 2010-01-28 | 2015-03-11 | 富士フイルム株式会社 | 放射線検出素子、及び放射線画像撮影装置 |
| IN2014CN01055A (https=) * | 2011-08-30 | 2015-04-10 | Koninkl Philips Nv | |
| US20130049151A1 (en) * | 2011-08-31 | 2013-02-28 | General Electric Company | Anode-illuminated radiation detector |
| JP6209532B2 (ja) | 2011-12-27 | 2017-10-04 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | Pet検出器のためのタイルの取り付け |
| JP6231778B2 (ja) * | 2013-06-05 | 2017-11-15 | キヤノン株式会社 | 電気デバイスおよび放射線検査装置 |
| JP6433644B2 (ja) | 2013-06-07 | 2018-12-05 | シーメンス アクチエンゲゼルシヤフトSiemens Aktiengesellschaft | 半導体ウェハのダイシング方法 |
| JP5886793B2 (ja) | 2013-06-11 | 2016-03-16 | 浜松ホトニクス株式会社 | 固体撮像装置 |
| DE102013217941A1 (de) * | 2013-09-09 | 2015-03-12 | Siemens Aktiengesellschaft | Röntgendetektor und Verfahren |
| EP2871496B1 (en) | 2013-11-12 | 2020-01-01 | Samsung Electronics Co., Ltd | Radiation detector and computed tomography apparatus using the same |
| CN104749606A (zh) | 2013-12-27 | 2015-07-01 | 同方威视技术股份有限公司 | 高纯锗探测器 |
| BR112017002916A2 (pt) * | 2014-12-05 | 2017-12-05 | Koninklijke Philips Nv | dispositivo detector de raios x para detecção de radiação de raio x a um ângulo inclinado em relação à radiação de raio x, sistema e método de imageamento por raios x, elemento de programa de computador para controlar um dispositivo ou um sistema, e mídia legível por computador |
| JP6683687B2 (ja) * | 2015-04-15 | 2020-04-22 | 株式会社カネカ | イオンビームの荷電変換方法 |
| JP6185098B2 (ja) * | 2016-02-12 | 2017-08-23 | 浜松ホトニクス株式会社 | 固体撮像装置 |
| CN106324649B (zh) * | 2016-08-31 | 2023-09-15 | 同方威视技术股份有限公司 | 半导体探测器 |
| US10156645B2 (en) * | 2016-12-23 | 2018-12-18 | General Electric Company | Systems and methods for sub-pixel location determination at sidewalls and corners of detectors |
| EP3355355B1 (en) * | 2017-01-27 | 2019-03-13 | Detection Technology Oy | Asymmetrically positioned guard ring contacts |
| EP3658964A4 (en) * | 2017-07-26 | 2021-01-13 | Shenzhen Xpectvision Technology Co., Ltd. | Methods of making and using an x-ray detector |
| JP6873414B2 (ja) | 2017-10-17 | 2021-05-19 | 株式会社リガク | 処理装置、方法およびプログラム |
| US10813607B2 (en) * | 2018-06-27 | 2020-10-27 | Prismatic Sensors Ab | X-ray sensor, method for constructing an x-ray sensor and an x-ray imaging system comprising such an x-ray sensor |
| EP3799787A1 (en) * | 2019-10-01 | 2021-04-07 | Koninklijke Philips N.V. | Detector for a dark-field; phase-contrast and attenuation interferometric imaging system |
| FR3105444B1 (fr) * | 2019-12-24 | 2022-01-07 | Commissariat Energie Atomique | Procédé de détermination d'un biais affectant des pixels d'un détecteur pixellisé de rayonnement ionisant |
| DE102020111562A1 (de) | 2020-04-28 | 2021-10-28 | Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg | Bildsensor |
| JP7534123B2 (ja) * | 2020-05-12 | 2024-08-14 | キヤノンメディカルシステムズ株式会社 | X線検出器及びx線ct装置 |
| US12046623B2 (en) | 2020-08-07 | 2024-07-23 | Redlen Technologies, Inc. | Compound semiconductor x-ray detector tiles and method of dicing thereof |
| DE102020211327B4 (de) | 2020-09-09 | 2025-10-02 | Siemens Healthineers Ag | DC-Motor, Liege mit DC-Motor und Verfahren zum Betreiben eines DC-Motors |
| CN113229833A (zh) * | 2021-05-29 | 2021-08-10 | 西北工业大学 | 一种骨密度仪用的x射线探测器 |
| US12429612B2 (en) | 2021-09-13 | 2025-09-30 | Redlen Technologies, Inc. | Radiation sensor dies having visual identifiers and methods of fabricating thereof |
| DE102021128022B3 (de) | 2021-10-27 | 2023-02-02 | Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg | Bildsensor |
| JP7734052B2 (ja) * | 2021-11-18 | 2025-09-04 | キヤノンメディカルシステムズ株式会社 | 直接変換型x線検出器、x線検出方法、およびx線コンピュータ断層撮影装置 |
| WO2023153262A1 (ja) * | 2022-02-09 | 2023-08-17 | 株式会社ジャパンディスプレイ | 検出装置 |
| WO2023189717A1 (ja) * | 2022-03-29 | 2023-10-05 | 株式会社ジャパンディスプレイ | 検出装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4031396A (en) * | 1975-02-28 | 1977-06-21 | General Electric Company | X-ray detector |
| US5905264A (en) * | 1996-08-14 | 1999-05-18 | Imarad Imaging Systems Ltd. | Semiconductor detector |
| US6545711B1 (en) * | 1998-11-02 | 2003-04-08 | Agilent Technologies, Inc. | Photo diode pixel sensor array having a guard ring |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4864378A (en) | 1987-10-21 | 1989-09-05 | Massachusetts Institute Of Technology | Schottky barrier infrared detector |
| US5563421A (en) * | 1995-06-07 | 1996-10-08 | Sterling Diagnostic Imaging, Inc. | Apparatus and method for eliminating residual charges in an image capture panel |
| GB2318448B (en) * | 1996-10-18 | 2002-01-16 | Simage Oy | Imaging detector and method of production |
| US6034373A (en) * | 1997-12-11 | 2000-03-07 | Imrad Imaging Systems Ltd. | Semiconductor radiation detector with reduced surface effects |
| GB2335540B (en) * | 1998-03-20 | 2002-01-02 | Simage Oy | Imaging device for imaging radiation |
| US6075248A (en) * | 1998-10-22 | 2000-06-13 | Direct Radiography Corp. | Direct radiographic imaging panel with shielding electrode |
| SE9900856L (sv) * | 1999-03-10 | 2000-11-10 | Mamea Imaging Ab | Metod och anordning för detektering av röntgenstrålar och användning av sådan anordning |
| US6066884A (en) | 1999-03-19 | 2000-05-23 | Lucent Technologies Inc. | Schottky diode guard ring structures |
| DE60025191T2 (de) | 1999-04-01 | 2006-08-31 | Sectra Mamea Ab | Verfahren und vorrichtung zur vereinfachten ausrichtung in röntgenstrahlungen-bildgebung |
| EP1173973A1 (en) * | 1999-04-26 | 2002-01-23 | Simage Oy | Self triggered imaging device for imaging radiation |
| US6177293B1 (en) | 1999-05-20 | 2001-01-23 | Tower Semiconductor Ltd. | Method and structure for minimizing white spots in CMOS image sensors |
| DE19926582A1 (de) * | 1999-06-11 | 2000-12-14 | Philips Corp Intellectual Pty | Sensor |
| US6229191B1 (en) | 1999-11-19 | 2001-05-08 | Agilent Technologies, Inc. | Conductive guard rings for elevated active pixel sensors |
| US6465824B1 (en) | 2000-03-09 | 2002-10-15 | General Electric Company | Imager structure |
| US6399413B1 (en) | 2000-04-18 | 2002-06-04 | Agere Systems Guardian Corp. | Self aligned gated Schottky diode guard ring structures |
| US6504158B2 (en) | 2000-12-04 | 2003-01-07 | General Electric Company | Imaging array minimizing leakage currents |
| US6583482B2 (en) | 2000-12-06 | 2003-06-24 | Alexandre Pauchard | Hetero-interface avalance photodetector |
| US6597025B2 (en) * | 2001-03-15 | 2003-07-22 | Koninklijke Philips Electronics N.V. | Light sensitive semiconductor component |
| DE10128654B4 (de) * | 2001-06-15 | 2008-04-10 | Forschungszentrum Jülich GmbH | Beidseitig mikrostrukturierter, ortsempfindlicher Detektor |
| JP2003209237A (ja) * | 2002-01-16 | 2003-07-25 | Fuji Photo Film Co Ltd | 固体検出器 |
-
2003
- 2003-08-01 US US10/633,119 patent/US6928144B2/en not_active Expired - Lifetime
-
2004
- 2004-07-27 DE DE102004036316.1A patent/DE102004036316B4/de not_active Expired - Fee Related
- 2004-07-29 NL NL1026741A patent/NL1026741C2/nl not_active IP Right Cessation
- 2004-07-30 JP JP2004223009A patent/JP5016188B2/ja not_active Expired - Fee Related
- 2004-08-02 CN CNB2004100556610A patent/CN100457036C/zh not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4031396A (en) * | 1975-02-28 | 1977-06-21 | General Electric Company | X-ray detector |
| US5905264A (en) * | 1996-08-14 | 1999-05-18 | Imarad Imaging Systems Ltd. | Semiconductor detector |
| US6545711B1 (en) * | 1998-11-02 | 2003-04-08 | Agilent Technologies, Inc. | Photo diode pixel sensor array having a guard ring |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1579328A (zh) | 2005-02-16 |
| NL1026741C2 (nl) | 2007-03-09 |
| US20050023475A1 (en) | 2005-02-03 |
| DE102004036316B4 (de) | 2016-08-04 |
| NL1026741A1 (nl) | 2005-02-02 |
| DE102004036316A1 (de) | 2005-02-17 |
| JP5016188B2 (ja) | 2012-09-05 |
| JP2005057281A (ja) | 2005-03-03 |
| US6928144B2 (en) | 2005-08-09 |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090204 |
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| CX01 | Expiry of patent term |