DE102004035784B8 - Vorrichtung zur Erfassung einer physikalischen Größe unter Verwendung eines kapazitiven Sensors, Airbagsystem hiermit, sowie Verfahren zum Testen der Vorrichtung - Google Patents

Vorrichtung zur Erfassung einer physikalischen Größe unter Verwendung eines kapazitiven Sensors, Airbagsystem hiermit, sowie Verfahren zum Testen der Vorrichtung Download PDF

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Publication number
DE102004035784B8
DE102004035784B8 DE102004035784A DE102004035784A DE102004035784B8 DE 102004035784 B8 DE102004035784 B8 DE 102004035784B8 DE 102004035784 A DE102004035784 A DE 102004035784A DE 102004035784 A DE102004035784 A DE 102004035784A DE 102004035784 B8 DE102004035784 B8 DE 102004035784B8
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Prior art keywords
testing
detecting
methods
well
physical quantity
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Expired - Fee Related
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DE102004035784A
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English (en)
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DE102004035784A1 (de
DE102004035784B4 (de
Inventor
Minoru Murata
Takaaki Kawai
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Denso Corp
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Denso Corp
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Publication of DE102004035784B8 publication Critical patent/DE102004035784B8/de
Expired - Fee Related legal-status Critical Current
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
DE102004035784A 2003-07-25 2004-07-23 Vorrichtung zur Erfassung einer physikalischen Größe unter Verwendung eines kapazitiven Sensors, Airbagsystem hiermit, sowie Verfahren zum Testen der Vorrichtung Expired - Fee Related DE102004035784B8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003279960A JP4207154B2 (ja) 2003-07-25 2003-07-25 スティッキング検査機能を有する静電容量式センサ装置及び検査方法並びにエアバッグシステム
JP2003-279960 2003-07-25

Publications (3)

Publication Number Publication Date
DE102004035784A1 DE102004035784A1 (de) 2005-02-17
DE102004035784B4 DE102004035784B4 (de) 2012-10-18
DE102004035784B8 true DE102004035784B8 (de) 2012-12-27

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DE102004035784A Expired - Fee Related DE102004035784B8 (de) 2003-07-25 2004-07-23 Vorrichtung zur Erfassung einer physikalischen Größe unter Verwendung eines kapazitiven Sensors, Airbagsystem hiermit, sowie Verfahren zum Testen der Vorrichtung

Country Status (3)

Country Link
US (1) US7168320B2 (de)
JP (1) JP4207154B2 (de)
DE (1) DE102004035784B8 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040031167A1 (en) * 2002-06-13 2004-02-19 Stein Nathan D. Single wafer method and apparatus for drying semiconductor substrates using an inert gas air-knife
US20080234140A1 (en) * 2005-03-17 2008-09-25 A. Kuoni Method and Device for Applying a Plurality of Microdroplets on a Substrate
JP2007178420A (ja) * 2005-11-30 2007-07-12 Denso Corp 容量式物理量センサおよびその診断方法
US7924029B2 (en) * 2005-12-22 2011-04-12 Synaptics Incorporated Half-bridge for capacitive sensing
JP4765708B2 (ja) * 2006-03-23 2011-09-07 株式会社デンソー 容量式物理量センサ
JP2008216118A (ja) * 2007-03-06 2008-09-18 Denso Corp 力学量センサ
JP5105949B2 (ja) * 2007-04-27 2012-12-26 キヤノン株式会社 センサ
JP2009097932A (ja) * 2007-10-15 2009-05-07 Freescale Semiconductor Inc 容量型検出装置
US7987069B2 (en) * 2007-11-12 2011-07-26 Bee Cave, Llc Monitoring patient support exiting and initiating response
KR101427586B1 (ko) * 2007-12-26 2014-08-07 삼성디스플레이 주식회사 표시 장치 및 그 구동 방법
US20100122565A1 (en) * 2008-11-15 2010-05-20 Freescale Semiconductor, Inc. Continuous selftest for inertial sensors at 0 hz
JP5249001B2 (ja) * 2008-12-03 2013-07-31 日立オートモティブシステムズ株式会社 物理量センサ及び物理量センサの制御装置
IT1392553B1 (it) * 2008-12-11 2012-03-09 St Microelectronics Rousset Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico
US8661871B2 (en) * 2009-07-31 2014-03-04 Stmicroelectronics S.R.L. Method for testing a microelectromechanical device, microelectromechanical device
JP2011095001A (ja) * 2009-10-27 2011-05-12 Panasonic Electric Works Co Ltd 加速度センサ
US8714012B2 (en) * 2010-02-16 2014-05-06 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope
US9525925B2 (en) 2011-02-25 2016-12-20 Infineon Technologies Ag Sensor with movable part and biasing
CN103858016B (zh) * 2011-11-22 2016-06-29 富士电机株式会社 静电电容检测电路
US9240296B2 (en) 2012-08-06 2016-01-19 Synaptics Incorporated Keyboard construction having a sensing layer below a chassis layer
US10088495B2 (en) * 2014-02-27 2018-10-02 Panasonic Intellectual Property Management Co., Ltd. Capacitive physical quality detection device
JP6500522B2 (ja) * 2015-03-16 2019-04-17 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体
CN110383474B (zh) 2017-03-09 2022-11-29 三菱电机株式会社 电子模块和功率模块
US11287443B2 (en) * 2019-02-20 2022-03-29 Invensense, Inc. High performance accelerometer
US11175138B2 (en) 2019-06-26 2021-11-16 Stmicroelectronics, Inc. MEMS gyroscope control circuit
US11255670B2 (en) 2019-06-26 2022-02-22 Stmicroelectronics, Inc. MEMS gyroscope self-test using a technique for deflection of the sensing mobile mass
US11320452B2 (en) * 2019-06-26 2022-05-03 Stmicroelectronics, Inc. MEMS accelerometer self-test using an active mobile mass deflection technique
US11162790B2 (en) 2019-06-26 2021-11-02 Stmicroelectronics, Inc. MEMS gyroscope start-up process and circuit

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160429A (ja) * 1992-11-16 1994-06-07 Omron Corp 半導体加速度センサの自己診断方法並びに装置及びそれに用いられる半導体加速度センサ
JPH08110355A (ja) * 1994-09-15 1996-04-30 Robert Bosch Gmbh 容量式加速度センサおよび作動法
JP2002040047A (ja) * 2000-07-25 2002-02-06 Denso Corp 容量型物理量検出センサ
JP2003279960A (ja) * 2002-01-15 2003-10-02 Seiko Epson Corp カラーフィルタ基板、その製造方法、液晶表示パネルおよび電子機器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4178658B2 (ja) * 1998-06-30 2008-11-12 株式会社デンソー 容量式物理量検出装置
DE10046958B4 (de) * 1999-09-27 2009-01-02 Denso Corp., Kariya-shi Kapazitive Vorrichtung zum Erfassen einer physikalischen Grösse
US6508126B2 (en) * 2000-07-21 2003-01-21 Denso Corporation Dynamic quantity sensor having movable and fixed electrodes with high rigidity

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160429A (ja) * 1992-11-16 1994-06-07 Omron Corp 半導体加速度センサの自己診断方法並びに装置及びそれに用いられる半導体加速度センサ
JPH08110355A (ja) * 1994-09-15 1996-04-30 Robert Bosch Gmbh 容量式加速度センサおよび作動法
JP2002040047A (ja) * 2000-07-25 2002-02-06 Denso Corp 容量型物理量検出センサ
DE10135943A1 (de) * 2000-07-25 2002-02-07 Denso Corp Kapazitiver Sensor für eine physikalische Grösse
JP2003279960A (ja) * 2002-01-15 2003-10-02 Seiko Epson Corp カラーフィルタ基板、その製造方法、液晶表示パネルおよび電子機器

Also Published As

Publication number Publication date
DE102004035784A1 (de) 2005-02-17
JP4207154B2 (ja) 2009-01-14
US7168320B2 (en) 2007-01-30
US20050016273A1 (en) 2005-01-27
DE102004035784B4 (de) 2012-10-18
JP2005043309A (ja) 2005-02-17

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