DE102004005528A1 - Laminated piezoelectric elements - Google Patents
Laminated piezoelectric elements Download PDFInfo
- Publication number
- DE102004005528A1 DE102004005528A1 DE200410005528 DE102004005528A DE102004005528A1 DE 102004005528 A1 DE102004005528 A1 DE 102004005528A1 DE 200410005528 DE200410005528 DE 200410005528 DE 102004005528 A DE102004005528 A DE 102004005528A DE 102004005528 A1 DE102004005528 A1 DE 102004005528A1
- Authority
- DE
- Germany
- Prior art keywords
- laminated
- piezoelectric element
- electrode layers
- side electrode
- electrode layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000011148 porous material Substances 0.000 title claims abstract description 46
- 239000011521 glass Substances 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 39
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 26
- 239000007772 electrode material Substances 0.000 claims description 20
- 239000004332 silver Substances 0.000 claims description 18
- 229910052709 silver Inorganic materials 0.000 claims description 17
- 229910052763 palladium Inorganic materials 0.000 claims description 12
- 239000011230 binding agent Substances 0.000 claims description 9
- 238000002425 crystallisation Methods 0.000 claims description 7
- 230000008025 crystallization Effects 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 4
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 20
- 239000000203 mixture Substances 0.000 description 12
- 239000000843 powder Substances 0.000 description 9
- 230000007774 longterm Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000005245 sintering Methods 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 230000032798 delamination Effects 0.000 description 4
- 238000003475 lamination Methods 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011883 electrode binding agent Substances 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
Landscapes
- Fuel-Injection Apparatus (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003/028842 | 2003-02-05 | ||
JP2003028842A JP4211419B2 (ja) | 2003-02-05 | 2003-02-05 | 積層型圧電体素子 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE102004005528A1 true DE102004005528A1 (de) | 2004-08-26 |
Family
ID=32767650
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE200410005528 Ceased DE102004005528A1 (de) | 2003-02-05 | 2004-02-04 | Laminated piezoelectric elements |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4211419B2 (ja) |
DE (1) | DE102004005528A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005017108A1 (de) * | 2005-01-26 | 2006-07-27 | Epcos Ag | Piezoelektrisches Bauelement |
DE102008055144A1 (de) * | 2008-12-23 | 2010-07-01 | Robert Bosch Gmbh | Piezoaktor, Kraftstoff-Injetor mit Piezoaktor sowie Verfahren zum Herstellen eines Piezoaktors |
DE102008055131A1 (de) * | 2008-12-23 | 2010-07-01 | Robert Bosch Gmbh | Piezoaktor, Kraftstoff-Injektor mit Piezoaktor sowie Verfahren zum Herstellen eines Piezoaktors |
US11296272B2 (en) * | 2017-07-20 | 2022-04-05 | Taiyo Yuden Co., Ltd. | Multilayer piezoelectric element, piezoelectric vibration apparatus, and electronic device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008053467A (ja) * | 2006-08-24 | 2008-03-06 | Denso Corp | 積層型圧電素子及びその製造方法 |
US8578911B2 (en) | 2008-07-29 | 2013-11-12 | Kyocera Corporation | Multi-layer piezoelectric element, and injection device and fuel injection system using the same |
-
2003
- 2003-02-05 JP JP2003028842A patent/JP4211419B2/ja not_active Expired - Fee Related
-
2004
- 2004-02-04 DE DE200410005528 patent/DE102004005528A1/de not_active Ceased
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005017108A1 (de) * | 2005-01-26 | 2006-07-27 | Epcos Ag | Piezoelektrisches Bauelement |
WO2006079324A1 (de) * | 2005-01-26 | 2006-08-03 | Epcos Ag | Piezoelektrisches bauelement |
US7868524B2 (en) | 2005-01-26 | 2011-01-11 | Epcos Ag | Piezoelectric component |
DE102008055144A1 (de) * | 2008-12-23 | 2010-07-01 | Robert Bosch Gmbh | Piezoaktor, Kraftstoff-Injetor mit Piezoaktor sowie Verfahren zum Herstellen eines Piezoaktors |
DE102008055131A1 (de) * | 2008-12-23 | 2010-07-01 | Robert Bosch Gmbh | Piezoaktor, Kraftstoff-Injektor mit Piezoaktor sowie Verfahren zum Herstellen eines Piezoaktors |
US11296272B2 (en) * | 2017-07-20 | 2022-04-05 | Taiyo Yuden Co., Ltd. | Multilayer piezoelectric element, piezoelectric vibration apparatus, and electronic device |
Also Published As
Publication number | Publication date |
---|---|
JP2004241590A (ja) | 2004-08-26 |
JP4211419B2 (ja) | 2009-01-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE602005001090T2 (de) | Dielektrische Zusammensetzung für einen keramischen Mehrschichtkondensator | |
DE69305939T2 (de) | Verfahren zur Herstellung eines keramischen Schaltungssubstrates | |
EP0894341B1 (de) | Monolithischer vielschicht-piezoaktor und verfahren zur herstellung | |
DE60038276T2 (de) | Vielschicht-Piezoelement und dessen Herstellungsverfahren | |
DE112004000186B4 (de) | Mehrschicht-Keramik-Elektronikkomponenten und Verfahren zur Herstellung derselben | |
DE3851548T2 (de) | Keramisches Mehrschichtsubstrat und Verfahren zu seiner Herstellung. | |
DE10051388B4 (de) | Verfahren zur Herstellung einer keramischen Grünfolie und Verfahren zur Herstellung eines keramischen Vielschichtbauelements | |
DE602005003250T2 (de) | Dielektrische keramische Zusammensetzung und mehrschichtiges keramisches Bauteil enthaltend diese Zusammensetzung | |
DE19931914B4 (de) | Keramikelektronikteil | |
DE69031839T2 (de) | Geschichtete Keramikanordnung und Verfahren zur deren Herstellung | |
DE10024236A1 (de) | Keramikkondensator und Verfahren zu seiner Herstellung | |
DE10053769A1 (de) | Monolithisches keramisches elektronisches Bauelement und Verfahren zur Herstellung desselben | |
DE3887186T2 (de) | Verfahren zur Herstellung eines keramischen Mehrschichtkondensators. | |
DE102004001241B4 (de) | Dielektrische Keramiken und deren Verwendung in einem Monolithischen Kramikkondensator | |
DE102007012915B4 (de) | Piezoelektrische Keramikzusammensetzung und laminiertes piezoelektrisches Element | |
DE10164354A1 (de) | Dielektrische Vorrichtung in Schichtbauweise, ein Herstellungsverfahren und ein Elektrodenpastenmaterial | |
DE102007057475A1 (de) | Piezoelektrische Keramikzusammensetzung und laminiertes piezoelektrisches Element | |
DE10307804B4 (de) | Leitfähige Paste und deren Verwendung zur Herstellung eines laminierten keramischen elektronischen Bauteils | |
DE102005013827B4 (de) | Elektrisch leitende Paste und Verfahren zur Erzeugung eines gestapelten piezoelektrischen Elements | |
DE10164252B4 (de) | Dielektrisches Keramikmaterial, Verfahren zu dessen Herstellung und dielektrische Vorrichtung | |
DE112015005617B4 (de) | Elektrisch leitfähiger Oxidsinterkörper, Element zur elektrischen Leitung, Gassensor, piezoelektrisches Element und Verfahren zur Herstellung des piezoelektrischen Elements | |
DE102019119843A1 (de) | Laminat aus keramikschicht und sinterkörper aus kupferpulverpaste | |
DE102012202923A1 (de) | Elektroden-Sinterkörper, vielschichtige elektronische Vorrichtung, interne Elektrodenpaste, Herstellungsverfahren des Elektroden-Sinterkörpers und Herstellungsverfahren der vielschichtigen elektronischen Vorrichtung | |
DE102007012916B4 (de) | Laminiertes piezoelektrisches Element und Herstellungsverfahren hierfür | |
DE102004005528A1 (de) | Laminated piezoelectric elements |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
R002 | Refusal decision in examination/registration proceedings | ||
R003 | Refusal decision now final |