DD210809A3 - Aufbereitung von bei der herstellung elektronischer halbleiterbauelemente anfallenden abprodukten - Google Patents
Aufbereitung von bei der herstellung elektronischer halbleiterbauelemente anfallenden abprodukten Download PDFInfo
- Publication number
- DD210809A3 DD210809A3 DD81235308A DD23530881A DD210809A3 DD 210809 A3 DD210809 A3 DD 210809A3 DD 81235308 A DD81235308 A DD 81235308A DD 23530881 A DD23530881 A DD 23530881A DD 210809 A3 DD210809 A3 DD 210809A3
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- waste products
- solution
- water
- rinsing
- toxic
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 238000002360 preparation method Methods 0.000 title claims description 4
- 239000000243 solution Substances 0.000 claims abstract description 17
- 239000007789 gas Substances 0.000 claims abstract description 16
- 239000000047 product Substances 0.000 claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000002699 waste material Substances 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 7
- 231100000331 toxic Toxicity 0.000 claims abstract description 6
- 230000002588 toxic effect Effects 0.000 claims abstract description 6
- 230000008021 deposition Effects 0.000 claims abstract description 5
- 230000003647 oxidation Effects 0.000 claims abstract description 4
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 4
- 230000001681 protective effect Effects 0.000 claims abstract description 4
- 239000007787 solid Substances 0.000 claims abstract description 4
- 239000000126 substance Substances 0.000 claims abstract description 4
- 150000001495 arsenic compounds Chemical class 0.000 claims abstract description 3
- 239000012298 atmosphere Substances 0.000 claims abstract description 3
- 239000006227 byproduct Substances 0.000 claims abstract description 3
- 229940093920 gynecological arsenic compound Drugs 0.000 claims abstract description 3
- 239000008247 solid mixture Substances 0.000 claims abstract description 3
- 239000010414 supernatant solution Substances 0.000 claims abstract description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 10
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052698 phosphorus Inorganic materials 0.000 claims description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 8
- 239000002253 acid Substances 0.000 claims description 8
- 239000011574 phosphorus Substances 0.000 claims description 8
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims description 5
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052733 gallium Inorganic materials 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 5
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 claims description 4
- 239000005708 Sodium hypochlorite Substances 0.000 claims description 4
- 229910021529 ammonia Inorganic materials 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 claims description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 229910017604 nitric acid Inorganic materials 0.000 claims description 3
- 239000007800 oxidant agent Substances 0.000 claims description 3
- 235000019270 ammonium chloride Nutrition 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims description 2
- 229910001629 magnesium chloride Inorganic materials 0.000 claims description 2
- 239000002910 solid waste Substances 0.000 claims description 2
- 239000002341 toxic gas Substances 0.000 claims description 2
- 239000003643 water by type Substances 0.000 claims description 2
- 230000001376 precipitating effect Effects 0.000 claims 1
- 239000002351 wastewater Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 abstract description 4
- 230000002378 acidificating effect Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 150000002259 gallium compounds Chemical class 0.000 abstract description 2
- WQYVRQLZKVEZGA-UHFFFAOYSA-N hypochlorite Chemical compound Cl[O-] WQYVRQLZKVEZGA-UHFFFAOYSA-N 0.000 abstract 2
- 239000003344 environmental pollutant Substances 0.000 abstract 1
- 231100000719 pollutant Toxicity 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 description 8
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 6
- 229910052785 arsenic Inorganic materials 0.000 description 6
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 3
- 231100000614 poison Toxicity 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000011010 flushing procedure Methods 0.000 description 2
- 239000013505 freshwater Substances 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- 239000002574 poison Substances 0.000 description 2
- 239000003440 toxic substance Substances 0.000 description 2
- 239000010891 toxic waste Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000010908 decantation Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000001784 detoxification Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910021513 gallium hydroxide Inorganic materials 0.000 description 1
- DNUARHPNFXVKEI-UHFFFAOYSA-K gallium(iii) hydroxide Chemical compound [OH-].[OH-].[OH-].[Ga+3] DNUARHPNFXVKEI-UHFFFAOYSA-K 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000008237 rinsing water Substances 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 231100000167 toxic agent Toxicity 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
Landscapes
- Manufacture And Refinement Of Metals (AREA)
- Treating Waste Gases (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD81235308A DD210809A3 (de) | 1981-12-02 | 1981-12-02 | Aufbereitung von bei der herstellung elektronischer halbleiterbauelemente anfallenden abprodukten |
| SU827772645A SU1308653A1 (ru) | 1981-12-02 | 1982-09-29 | Способ переработки отходов,возникающих при производстве полупроводниковых приборов |
| BG5812482A BG43909A1 (en) | 1981-12-02 | 1982-09-29 | Method for preparing repeated use of wastes from manufacture of semi- conductor instruments |
| CS827086A CS245745B1 (en) | 1981-12-02 | 1982-10-05 | Method of chemical processing of wastes produced in production of semiconductor elements |
| RO109183A RO84411B (ro) | 1981-12-02 | 1982-11-30 | Procedeu pentru tratarea deseurilor rezultate la fabricarea elementelelor semiconductoare |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD81235308A DD210809A3 (de) | 1981-12-02 | 1981-12-02 | Aufbereitung von bei der herstellung elektronischer halbleiterbauelemente anfallenden abprodukten |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD210809A3 true DD210809A3 (de) | 1984-06-20 |
Family
ID=5535057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD81235308A DD210809A3 (de) | 1981-12-02 | 1981-12-02 | Aufbereitung von bei der herstellung elektronischer halbleiterbauelemente anfallenden abprodukten |
Country Status (5)
| Country | Link |
|---|---|
| BG (1) | BG43909A1 (cs) |
| CS (1) | CS245745B1 (cs) |
| DD (1) | DD210809A3 (cs) |
| RO (1) | RO84411B (cs) |
| SU (1) | SU1308653A1 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999018041A1 (en) * | 1997-10-02 | 1999-04-15 | The University Of Dayton | Recovery of the components of group iii-v material aqueous wastes |
-
1981
- 1981-12-02 DD DD81235308A patent/DD210809A3/de not_active IP Right Cessation
-
1982
- 1982-09-29 BG BG5812482A patent/BG43909A1/xx unknown
- 1982-09-29 SU SU827772645A patent/SU1308653A1/ru active
- 1982-10-05 CS CS827086A patent/CS245745B1/cs unknown
- 1982-11-30 RO RO109183A patent/RO84411B/ro unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999018041A1 (en) * | 1997-10-02 | 1999-04-15 | The University Of Dayton | Recovery of the components of group iii-v material aqueous wastes |
Also Published As
| Publication number | Publication date |
|---|---|
| RO84411B (ro) | 1984-08-30 |
| SU1308653A1 (ru) | 1987-05-07 |
| CS245745B1 (en) | 1986-10-16 |
| BG43909A1 (en) | 1988-09-15 |
| CS708682A1 (en) | 1985-06-13 |
| RO84411A (ro) | 1984-06-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ENJ | Ceased due to non-payment of renewal fee |