RO84411B - Procedeu pentru tratarea deseurilor rezultate la fabricarea elementelelor semiconductoare - Google Patents
Procedeu pentru tratarea deseurilor rezultate la fabricarea elementelelor semiconductoareInfo
- Publication number
- RO84411B RO84411B RO109183A RO10918382A RO84411B RO 84411 B RO84411 B RO 84411B RO 109183 A RO109183 A RO 109183A RO 10918382 A RO10918382 A RO 10918382A RO 84411 B RO84411 B RO 84411B
- Authority
- RO
- Romania
- Prior art keywords
- mixture
- stable
- treating waste
- semiconducting elements
- nh4cl
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000002699 waste material Substances 0.000 title abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 4
- 239000000203 mixture Substances 0.000 abstract 4
- 229910052757 nitrogen Inorganic materials 0.000 abstract 3
- 239000007787 solid Substances 0.000 abstract 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 abstract 2
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 abstract 2
- 235000019270 ammonium chloride Nutrition 0.000 abstract 2
- 229910052785 arsenic Inorganic materials 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 229910052698 phosphorus Inorganic materials 0.000 abstract 2
- 230000001681 protective effect Effects 0.000 abstract 2
- 229910005267 GaCl3 Inorganic materials 0.000 abstract 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 abstract 1
- 238000005119 centrifugation Methods 0.000 abstract 1
- 229910052801 chlorine Inorganic materials 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000010908 decantation Methods 0.000 abstract 1
- 238000001914 filtration Methods 0.000 abstract 1
- 229910052733 gallium Inorganic materials 0.000 abstract 1
- UPWPDUACHOATKO-UHFFFAOYSA-K gallium trichloride Chemical compound Cl[Ga](Cl)Cl UPWPDUACHOATKO-UHFFFAOYSA-K 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 229910001629 magnesium chloride Inorganic materials 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910017604 nitric acid Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 238000004062 sedimentation Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
Landscapes
- Manufacture And Refinement Of Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Treating Waste Gases (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
Abstract
Inventia se refera la un procedeu pentru tratarea deseurilor rezultate în procesul de fabricare a elementelor semiconductoare. procedeul conform inventiei consta în separarea substantelor cu ajutorul decantarii si/sau al sedimentarii si/sau al filtrarii si/sau al centrifugarii, în asa fel ca un amestec din GaAs si/sau GaP si/sau GaAs1-xPx si/sau GaCl3 si/sau GaN si/sa Aa2O3 si/sau P2O5 si/sau NH4Cl si/sau arsen si/sau fosfor sa fie transformat chimic cu H2O si/sau HNO3 si HCL si H2O2 si, dupa aceea, sa fie adus în combinatie cu NH3 si/sau NH4Cl si MgCl2, pentru producerea unui amestec de substante solide stabil. drept gaz de protectie se utilizeaza azot, iar amestecul de substante solide stabil. Drept gaz de protectie se utilizeaza azot, iar amestecul de substante solide, stabil si capabil de afi depozitat, consta din compusi cu continut de Ga, As, P, Cl, H si N.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD81235308A DD210809A3 (de) | 1981-12-02 | 1981-12-02 | Aufbereitung von bei der herstellung elektronischer halbleiterbauelemente anfallenden abprodukten |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RO84411A RO84411A (ro) | 1984-06-21 |
| RO84411B true RO84411B (ro) | 1984-08-30 |
Family
ID=5535057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RO109183A RO84411B (ro) | 1981-12-02 | 1982-11-30 | Procedeu pentru tratarea deseurilor rezultate la fabricarea elementelelor semiconductoare |
Country Status (5)
| Country | Link |
|---|---|
| BG (1) | BG43909A1 (ro) |
| CS (1) | CS245745B1 (ro) |
| DD (1) | DD210809A3 (ro) |
| RO (1) | RO84411B (ro) |
| SU (1) | SU1308653A1 (ro) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5972073A (en) * | 1997-10-02 | 1999-10-26 | The University Of Dayton | Recovery of the components of group III-V material aqueous wastes |
-
1981
- 1981-12-02 DD DD81235308A patent/DD210809A3/de not_active IP Right Cessation
-
1982
- 1982-09-29 BG BG5812482A patent/BG43909A1/xx unknown
- 1982-09-29 SU SU827772645A patent/SU1308653A1/ru active
- 1982-10-05 CS CS827086A patent/CS245745B1/cs unknown
- 1982-11-30 RO RO109183A patent/RO84411B/ro unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SU1308653A1 (ru) | 1987-05-07 |
| DD210809A3 (de) | 1984-06-20 |
| CS245745B1 (en) | 1986-10-16 |
| RO84411A (ro) | 1984-06-21 |
| BG43909A1 (en) | 1988-09-15 |
| CS708682A1 (en) | 1985-06-13 |
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