CS312189A2 - Method of silicon nitride production with high alpha-phase content - Google Patents

Method of silicon nitride production with high alpha-phase content

Info

Publication number
CS312189A2
CS312189A2 CS893121A CS312189A CS312189A2 CS 312189 A2 CS312189 A2 CS 312189A2 CS 893121 A CS893121 A CS 893121A CS 312189 A CS312189 A CS 312189A CS 312189 A2 CS312189 A2 CS 312189A2
Authority
CS
Czechoslovakia
Prior art keywords
silicon nitride
phase content
high alpha
nitride production
production
Prior art date
Application number
CS893121A
Other languages
English (en)
Other versions
CS274772B2 (en
Inventor
Alexandr Grigorjevic Merzanov
Inna Petrovna Borovinskaja
Leonid Sergejevic Popov
Nikolaj Sergejevic Machonin
Lidia Vasiljevna Kustova
Original Assignee
Inst Struktur Oj Makrokinetiki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Struktur Oj Makrokinetiki filed Critical Inst Struktur Oj Makrokinetiki
Publication of CS312189A2 publication Critical patent/CS312189A2/cs
Publication of CS274772B2 publication Critical patent/CS274772B2/cs

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682Preparation by direct nitridation of silicon
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/591Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Products (AREA)
  • Silicon Compounds (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CS312189A 1988-05-24 1989-05-24 Method of silicon nitride production with high alpha-phase content CS274772B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU884422423A SU1696385A1 (ru) 1988-05-24 1988-05-24 Способ получени нитрида кремни

Publications (2)

Publication Number Publication Date
CS312189A2 true CS312189A2 (en) 1990-10-12
CS274772B2 CS274772B2 (en) 1991-10-15

Family

ID=21373743

Family Applications (1)

Application Number Title Priority Date Filing Date
CS312189A CS274772B2 (en) 1988-05-24 1989-05-24 Method of silicon nitride production with high alpha-phase content

Country Status (10)

Country Link
US (1) US5032370A (cs)
EP (1) EP0377751A4 (cs)
JP (1) JPH03500640A (cs)
CN (1) CN1017609B (cs)
CS (1) CS274772B2 (cs)
DD (1) DD283792A5 (cs)
HU (1) HU202451B (cs)
SU (1) SU1696385A1 (cs)
WO (1) WO1989011447A1 (cs)
YU (1) YU46271B (cs)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2001877C1 (ru) * 1992-01-30 1993-10-30 Малое предпри тие "ДЖИПЛА ЛИМИТЕД" Способ получени нитридов
JPH0733411A (ja) * 1993-07-16 1995-02-03 Shin Etsu Chem Co Ltd 高α型窒化ケイ素粉末の製造方法
ES2116154B1 (es) * 1994-06-04 1999-04-01 Shs Prometheus Espana A I E Procedimiento de obtencion de fibras mono y policristalinas de nitruro de silicio mediante tecnologia de sintesis autopropagada a alta temperatura.
ES2188298B1 (es) * 1999-06-15 2004-08-16 Fundacion Inasmet Procedimiento continuo de fabricacion de materiales en polvo por combustion y reactor para la puesta en practica del mismo.
EP1452578A1 (de) * 2003-02-28 2004-09-01 von Görtz & Finger Techn. Entwicklungs Ges.m.b.H. Verfahren zur Reduzierung des Stickstoffgehaltes in Brenngasen
RU2257338C1 (ru) * 2004-03-23 2005-07-27 Томский научный центр СО РАН Способ получения нитрида кремния
CN101229916B (zh) * 2007-01-26 2011-01-12 中国科学院理化技术研究所 以聚四氟乙烯为添加剂燃烧合成氮化硅粉体的方法
RU2461090C1 (ru) * 2010-12-23 2012-09-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Кабардино-Балкарский государственный университет им. Х.М. Бербекова" (КБГУ) Способ изготовления полупроводниковой структуры
RU2550882C1 (ru) * 2014-03-26 2015-05-20 Федеральное государственное бюджетное учреждение науки Институт структурной макрокинетики и проблем материаловедения Российской академии наук Способ получения альфа-фазы нитрида кремния методом свс
CN104671795B (zh) * 2015-02-05 2016-09-28 武汉科技大学 一种单相α-Si3N4超细粉体及其制备方法
JP7240800B2 (ja) * 2015-12-24 2023-03-16 エルジー・ケム・リミテッド α窒化ケイ素の製造方法
CN112028655A (zh) * 2020-09-16 2020-12-04 江苏隆达超合金航材有限公司 一种高温合金钢锭模用模底砖的制备方法
CN115072677A (zh) * 2022-06-22 2022-09-20 大连理工大学 一种高质量氮化硅粉体合成方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3726643A (en) * 1970-04-09 1973-04-10 I Khim Fiz Akademii Nauk Method of producing refractory carbides,borides,silicides,sulfides,and nitrides of metals of groups iv,v,and vi of the periodic system
GB1448915A (en) * 1973-10-30 1976-09-08 Ford Motor Co Process for making silicon nitride articles
US4122220A (en) * 1977-09-06 1978-10-24 Rosenthal Aktiengesellschaft Method for reducing the gas permeability of a sintered porous silicon nitride body
JPS57175711A (en) * 1981-04-21 1982-10-28 Asahi Glass Co Ltd Synthesis of silicon nitride
JPS5884108A (ja) * 1981-11-16 1983-05-20 Denki Kagaku Kogyo Kk 高純度α型窒化珪素の製法
US4579699A (en) * 1983-09-29 1986-04-01 The Boeing Company Method for making α-Si3 N4 whiskers and articles therefrom
JPS63170202A (ja) * 1987-01-07 1988-07-14 Shin Etsu Chem Co Ltd α型窒化けい素の製造方法

Also Published As

Publication number Publication date
YU46271B (sh) 1993-05-28
SU1696385A1 (ru) 1991-12-07
CN1038250A (zh) 1989-12-27
EP0377751A1 (de) 1990-07-18
HU893400D0 (en) 1990-07-28
YU100089A (en) 1990-06-30
EP0377751A4 (en) 1990-12-12
WO1989011447A1 (en) 1989-11-30
DD283792A5 (de) 1990-10-24
JPH03500640A (ja) 1991-02-14
CS274772B2 (en) 1991-10-15
HUT52737A (en) 1990-08-28
HU202451B (en) 1991-03-28
US5032370A (en) 1991-07-16
CN1017609B (zh) 1992-07-29

Similar Documents

Publication Publication Date Title
AU586071B2 (en) Method of manufacture of formed article
GB2210501B (en) Semiconductor device and method of manufacturing the same
GB2198584B (en) Semiconductor device and method of making the same
EP0265834A3 (en) Sensor and method of producing same
EP0227283A3 (en) High-purity silicon nitride fibers and process for producing same
GB2207809B (en) Method of manufacturing polycrystalline silicon
SG124092G (en) Production of semiconductor devices
DE3568032D1 (en) A silicon nitride sintered body and method of producing the same
CS312189A2 (en) Method of silicon nitride production with high alpha-phase content
DE3572469D1 (en) High toughness silicon nitride sintered body and process for producing the same
EP0260906A3 (en) Method of producing semiconductor device and semiconductor device
EP0260909A3 (en) Semiconductor light-emitting device and method of manufacturing the same
DE3662391D1 (en) Process for preparation of sintered silicon nitride
EP0202899A3 (en) A silicon nitride sintered body and a method of producing the same
AU604234B2 (en) Semiconductor device and method of making
EP0377758A4 (en) Silicon nitride type sintered body and process for its production
AU7780687A (en) Immunogens and improved methods of making immunogens
EP0259490A4 (en) Semiconductor device and a method of producing the same
EP0277753A3 (en) Silicon nitride sintered body and process for preparation thereof
EP0240869A3 (en) Process for the preparation of silicon nitride
EP0244226A3 (en) Silicon nitride sintered body and method for producing same
EP0206795A3 (en) Method of producing silicon nitride powders
EP0219764A3 (en) Silicon nitride and process for its preparation
DE3572799D1 (en) Method for production of sintered article of silicon nitride
EP0234905A3 (en) Production of silicon nitride sintered body