CN218647908U

CN218647908U - Double-fixing-part suction nozzle mounting jig

Info

Publication number: CN218647908U
Application number: CN202223220676.0U
Authority: CN
Inventors: 黄金良; 刘磊; 袁强; 王鑫
Original assignee: Jiangsu Union Semiconductor Co Ltd
Current assignee: Jiangsu Union Semiconductor Co Ltd
Priority date: 2022-12-02
Filing date: 2022-12-02
Publication date: 2023-03-17
Anticipated expiration: 2032-12-02

Abstract

The utility model discloses a two fixed part suction nozzle installation tools in the semiconductor chip packaging technology field, include: the clamping part is internally provided with a vertical vacuum channel; the base is internally provided with a flow equalizing cavity, and the upper side of the flow equalizing cavity is communicated with the vacuum channel; two fixed parts, the interval symmetry sets up the base downside, the fixed part is inside all to be provided with the through-hole, the through-hole with the chamber downside intercommunication that flow equalizes, two the outer wall of fixed part all overlaps and is equipped with the suction nozzle. The utility model discloses can reduce and inhale brilliant defective rate, reduce the board and repair quick-witted number of times, improve personnel work efficiency.

Description

Double-fixing-part suction nozzle mounting jig

Technical Field

The utility model belongs to the technical field of the semiconductor chip encapsulation, in particular to two fixed part suction nozzle installation tools.

Background

In the prior art, a wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the wafer has a circular shape. Various circuit device structures can be fabricated on a silicon wafer to form an IC product with specific electrical functions. The wafer is cut into a plurality of IC crystal grains, each crystal grain (or called chip) is in a complete separation state through a crystal adhering process and is adhered to an adhesive film with viscosity respectively and independently, and then the crystal grains are sucked by a vacuum suction nozzle and placed on a crystal carrying box. The disadvantages are that: the current suction nozzle mounting jig is characterized in that only 1 suction nozzle can be mounted on a single fixing part, the suction nozzle can only adsorb Bump on the surface of the middle area of a crystal grain, the stress position of the crystal grain is single, the crystal grain is unstable in the horizontal direction and uneven in stress easily in the picking and placing process of the crystal grain, the defect rate of crystal grain placement caused by crystal grain absorption is high, the machine repairing times of a machine table are increased, the waiting time of personnel is prolonged, and the working efficiency is low.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a two fixed part suction nozzle installation tool can install two suction nozzles additional and realize that the crystalline grain is picking up and the in-process of placing, keeps better horizontal direction stable and atress balanced, reduces and inhales the brilliant defective rate of putting, reduces personnel latency.

The purpose of the utility model is realized like this: the utility model provides a two fixed part suction nozzle installation tool which characterized in that includes: the clamping part is internally provided with a vertical vacuum channel; the base is internally provided with a flow equalizing cavity, and the upper side of the flow equalizing cavity is communicated with the vacuum channel; two fixed parts, the interval sets up the base downside, the inside through-hole that all is provided with of fixed part, the through-hole with the chamber downside intercommunication that flow equalizes, two the outer wall of fixed part all overlaps and is equipped with the suction nozzle.

The utility model discloses during the use, select corresponding tool according to the crystalline grain size, install two suction nozzles respectively on two fixed parts of tool, the suction nozzle distributes along the long limit direction of crystalline grain, and two suction nozzles adsorb crystalline grain atress position symmetry, picking up and placing the in-process of crystalline grain, can better remain stable and the atress is balanced at the horizontal direction, compare with prior art, the beneficial effects of the utility model reside in that: the crystal sucking and placing effects of the two suction nozzles are less influenced by the single-step action speed of picking and placing the crystal grains, the UPH (production per hour) of machine operation can be increased, and finally the productivity is improved.

As a further improvement of the utility model, the clamping part is a cylindrical structure, the fixed part is the square structure, two distance between the fixed part is D.

As a further improvement of the utility model, D is 5mm. The method is suitable for crystal grains with the long side dimension of more than 14mm and less than or equal to 27 mm.

As a further improvement of the utility model, D is 10mm. The method is suitable for crystal grains with the long side dimension larger than 27 mm.

As a further improvement, the suction nozzle includes the installation department, seted up in the installation department with the mounting groove of fixed part adaptation, installation department downside an organic whole is connected with the absorption portion, correspond in the absorption portion the air vent has been seted up to the through-hole, absorption portion below is opened and is equipped with and dodges the groove, dodge the groove with the air vent intercommunication.

As a further improvement, the tool is installed in the one end of swing arm, the other end of swing arm is rotationally established in the pivot, corresponds the suction nozzle below is provided with the wafer, the wafer is pasted on the blue membrane, the blue membrane below is provided with thimble mechanism to the pivot as the center with the opposite side of wafer symmetry is provided with the brilliant box of carrying, carry on the brilliant box on the equidistant a plurality of brilliant caves that are covered with, the size and the crystalline grain adaptation in brilliant cave.

Drawings

Fig. 1 is a plan view of the present invention in use.

Fig. 2 is a schematic structural view of the suction nozzle when performing a pick-up action.

Fig. 3 is a schematic view of the three-dimensional structure of the present invention.

Fig. 4 is a cross-sectional view of the present invention.

Fig. 5 is a cross-sectional view of the mouthpiece.

Fig. 6 is a bottom view of the suction nozzle.

The device comprises a jig 1, a clamping part 101, a vacuum channel 102, a base 103, a flow equalizing cavity 104, a fixing part 105, a through hole 106, a suction nozzle 2, a mounting part 201, a mounting groove 202, a suction part 203, an air vent 204, an avoiding groove 205, a swing arm 3, a rotating shaft 4, a wafer 5, a crystal grain 501, a blue film 6, an ejector pin mechanism 7, a crystal carrying box 8 and a crystal cavity 801.

Detailed Description

As shown in fig. 3 and 4, a dual-fixing-part nozzle mounting fixture includes: the vacuum device comprises a clamping part 101 with a cylindrical structure, wherein a vertical vacuum channel 102 is formed in the clamping part 101; the base 103 is arranged on the lower end face of the clamping portion 101, a flow equalizing cavity 104 is arranged in the base 103, and the upper side of the flow equalizing cavity 104 is communicated with the vacuum channel 102; the fixed part 105 of two square structures, the interval sets up in base 103 downside, and fixed part 105 is inside all to be provided with through-hole 106, through-hole 106 and the chamber 104 downside intercommunication that flow equalizes, and the outer wall of two fixed parts 105 all overlaps and is equipped with suction nozzle 2.

The suction nozzle 2 is described in detail with reference to fig. 5 and 6, the suction nozzle 2 includes an installation portion 201, an installation groove 202 adapted to the fixing portion 105 is formed in the installation portion 201, a suction portion 203 is integrally connected to a lower side of the installation portion 201, an air vent 204 is formed in the suction portion 203 corresponding to the through hole 106, an avoiding groove 205 is formed in a lower side of the suction portion 203 and can reduce a contact area between the suction nozzle 2 and the crystal grain 501, the avoiding groove 205 is communicated with the air vent 204, in order to reduce the volume and weight of the suction nozzle 2, the upper portion of the installation portion 201 is reduced from top to bottom, and an inclined trapezoidal side face which is symmetrical left and right is also formed on the upper portion of the installation portion 201.

The distance between the two fixing parts 105 is D, so that the best effect can be achieved when the suction nozzle 2 sucks the crystal grain 501, and when the long side size of the crystal grain 501 is larger than 14mm and smaller than or equal to 27mm, the tool 1 with the D of 5mm is selected; when the long side size of the crystal grain 501 is larger than 27mm, the tool 1 with the D of 10mm is selected.

As shown in fig. 1 and fig. 2, the fixture 1 is installed at one end of the swing arm 3, the other end of the swing arm 3 is rotatably sleeved on the rotating shaft 4, and in order to ensure the effect of sucking the crystal grain 501 by the suction nozzle 2, the upper side of the fixture 1 can be connected with a vacuum generator with an electromagnetic valve through a vacuum tube; a wafer 5 is arranged below the corresponding suction nozzle 2, the wafer 5 is adhered to a blue film 6, an ejector pin mechanism 7 is arranged below the blue film 6, a crystal carrying box 8 is arranged on the other side which is symmetrical to the wafer 5 by taking the rotating shaft 4 as the center, a plurality of crystal holes 801 are distributed on the crystal carrying box 8 at equal intervals, and the sizes of the crystal holes 801 are matched with those of the crystal grains 501.

When the utility model is used, the thimble below the wafer 5 is jacked to separate the crystal grain 501 from the blue film 6, the vacuum generator works, negative pressure is generated in the two suction nozzles 2 through the vacuum tube and the jig 1, the two suction nozzles 2 are attached with the Bump on the surface of the crystal grain 501, the number of thimbles below the crystal grain 501 can be matched according to the size of the long edge of the crystal grain 501, so that the crystal grain 501 is more easily separated from the blue film 6 when the thimble is jacked; after the picking action of the crystal grain 501 is completed, the swing arm 3 rotates 180 degrees to convey the crystal grain 501 adsorbed by the suction nozzle 2 to the upper part of the crystal cavity 801 of the crystal carrying box 8, and then the electromagnetic valve is adjusted to enable the crystal grain 501 to be separated from the suction nozzle 2, and finally the placement of the crystal grain 501 is completed. The utility model has the advantages that: the picking work of crystal grains 501 with various sizes can be realized; the two suction nozzles 2 are symmetrical in stress position for adsorbing the crystal grains 501, so that good stability and balanced stress can be kept in the horizontal direction in the picking and placing processes of the crystal grains 501, the crystal adsorbing and placing reject ratio is reduced, the machine repairing times are reduced, and the working efficiency of personnel is improved; the crystal sucking and placing effects of the two suction nozzles 2 are less affected by the single-step action rate of picking and placing the crystal particles 501, and the UPH (throughput per hour) of machine operation can be increased, so that the productivity is improved.

The present invention is not limited to the above embodiments, and based on the technical solutions disclosed in the present invention, those skilled in the art can make some replacements and transformations for some technical features without creative labor according to the disclosed technical contents, and these replacements and transformations are all within the protection scope of the present invention.

Claims

1. The utility model provides a two fixed part suction nozzle installation tool which characterized in that includes:

the clamping part is internally provided with a vertical vacuum channel;

the base is internally provided with a flow equalizing cavity, and the upper side of the flow equalizing cavity is communicated with the vacuum channel;

two fixed parts, the interval symmetry sets up the base downside, the inside through-hole that all is provided with of fixed part, the through-hole with the chamber downside intercommunication that flow equalizes, two the outer wall of fixed part all overlaps and is equipped with the suction nozzle.

2. The tool as claimed in claim 1, wherein the holding portion is a cylindrical structure, the fixing portions are a cubic structure, and a distance between the two fixing portions is D.

3. The dual fixture nozzle mounting fixture of claim 2, wherein D is 5mm.

4. The fixture according to claim 2, wherein D is 10mm.

5. The double-fixing-part suction nozzle mounting jig as claimed in claim 3 or 4, wherein the suction nozzle comprises a mounting part, a mounting groove matched with the fixing part is formed in the mounting part, a suction part is integrally connected to the lower side of the mounting part, an air vent is formed in the suction part corresponding to the through hole, an avoiding groove is formed in the lower side of the suction part and communicated with the air vent.

6. The tool for installing the suction nozzle with the double fixed parts as claimed in claim 5, wherein the tool is installed at one end of a swing arm, the other end of the swing arm is rotatably sleeved on a rotating shaft, a wafer is arranged below the suction nozzle, the wafer is adhered to a blue film, an ejector pin mechanism is arranged below the blue film, a crystal carrying box is arranged at the other side of the rotating shaft, which is symmetrical to the wafer, the crystal carrying box is provided with a plurality of crystal cavities at equal intervals, and the size of the crystal cavities is matched with the crystal grains.