CN217359684U - Scanning electron microscope sample stage - Google Patents
Scanning electron microscope sample stage Download PDFInfo
- Publication number
- CN217359684U CN217359684U CN202220244436.5U CN202220244436U CN217359684U CN 217359684 U CN217359684 U CN 217359684U CN 202220244436 U CN202220244436 U CN 202220244436U CN 217359684 U CN217359684 U CN 217359684U
- Authority
- CN
- China
- Prior art keywords
- sample
- base
- electron microscope
- scanning electron
- sample stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model provides a scanning electron microscope sample platform (1), it includes base (2) and detachably fixed connection to the sample platform body (3) of base, sample platform body (3) have be used for pasting sample (S) paste appearance portion (4) and be used for being connected to cylindrical connecting portion (5) of this sample platform body (3) to this base (2), wherein paste appearance portion (4) by the perpendicular to the straight polygon prism of the up end upward extension of cylindrical connecting portion constitutes to provide at least three vertical plane sample pasting district (40), straight polygon prism with cylindrical connecting portion an organic whole forms. The scanning electron microscope sample stage can vertically paste the sample in the lateral direction, so that the observation amount is more, the pasting area is larger, the effect is more stable, the speed is higher, a large amount of time can be saved, and the observation effect is improved.
Description
Technical Field
The utility model relates to a scanning electron microscope detects sample mounting tool in field, especially relates to a scanning electron microscope sample platform.
Background
A Scanning Electron Microscope (SEM), referred to as scanning electron microscope for short, is an electronic device for observation between a transmission electron microscope and an optical microscope, which scans a sample with a focused very narrow high-energy electron beam, excites various physical information through interaction between the beam and a substance, and collects, amplifies, and re-images the information to achieve the purpose of characterizing the microscopic morphology of the substance.
Scanning electron microscope detection, SEM detection for short, is a test method for detection by using a scanning electron microscope, and has two basic functions: firstly, the surface of the sample can be amplified by 25 times to 100 ten thousand times; and secondly, the qualitative and quantitative analysis of the elements in the micro-area on the surface of the sample can be carried out.
If the sample is placed in a scanning electron microscope device, a fixture that conforms to the standard dimensions of the device is required. The fixing devices currently on the market are not suitable for observing the cross section of the silicon wafer, and therefore there is a need for a fixing device, such as a sample stage, designed to mount a sample to be measured on a more stable, larger area.
At present, a scanning electron microscope sample stage for mounting a sample on the market is mostly a cylinder, and a silicon wafer or powder can be pasted on the circular end face of the cylinder and also can be pasted on the cylindrical side face of the sample stage. The sample stage is not easy to observe a sample stuck on the cylindrical side surface of the sample stage, and the silicon wafer is not easy to stick or the stability is poor after sticking, and the wafer may shake.
Disclosure of Invention
Therefore, the utility model aims at solving the problem among the prior art, provide one kind not only the observed volume is more, the adhesion area is bigger, the effect is more stable, can save plenty of time moreover, improve the scanning electron microscope sample platform of observation effect.
Therefore, the utility model provides a scanning electron microscope sample platform, it includes base and detachably fixed connection to the sample platform body of base, the sample platform body has the cylindrical connecting portion that is used for pasting the sample portion of pasting and is used for this sample platform body coupling to this base, paste the appearance portion by the perpendicular to the straight polygon prism of up extension of cylindrical connecting portion constitutes to provide at least three vertical plane and paste the appearance district, straight polygon prism with cylindrical connecting portion an organic whole forms. In the scanning electron microscope sample stage, by providing the sample attaching part having such a structure, a sample can be attached to a flat sample attaching surface more stably, and a large number of samples can be attached.
In a preferred scheme, the bottom surface of the straight polygonal column is a regular polygon, and the center of the regular polygon is overlapped with the center of the circular upper end surface of the cylindrical connecting part, so that substantially same plane sample application areas can be provided.
In one aspect according to the present invention, the bottom surface of the straight polygon prism is a regular triangle to provide three vertical plane sample application areas. In one alternative, the base of the straight polygonal prism is square to provide four vertical planar sample areas. In yet another alternative, the base of the straight polygonal prism is a regular pentagon to provide five vertical planar sample areas. It should be understood that the number of edges of the straight polygonal prism is merely exemplary and may be selected according to the requirements of the actual application. For example, a right hexagonal prism, i.e., a right polygonal prism with a regular hexagonal base, is also contemplated within the scope of the present application to provide a desired number of planar sample areas.
In a preferred aspect, the base may be configured as a cylindrical base, an internal thread may be provided on an inner circumferential surface of the base, while a corresponding external thread is provided on an outer circumferential surface of the cylindrical connection portion, and the sample stage body is screw-connected to the base by the mating of the external thread and the internal thread. The threaded connection has the advantages of convenience and quickness. It will be appreciated by those skilled in the art that other suitable means of attachment are also contemplated as falling within the scope of the present application.
The utility model discloses in, scanning electron microscope sample platform passes through base detachably fixed connection is to in scanning electron microscope's the sample storehouse.
In an alternative scheme, two mounting holes are formed in the cylindrical side wall of the base and are spare mounting holes, and the spare mounting holes can be matched with fasteners to mount the scanning electron microscope sample stage in a sample bin of a scanning electron microscope.
According to the utility model discloses a scanning electron microscope sample platform can provide more simple sample preparation process, can be with the vertical pasting in the plane sample application district of sample such as silicon wafer, and the observed quantity is more, and the pasting area is bigger, and the effect is more stable, and is fast, can save a large amount of time, improves the observation effect.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. In the drawings:
fig. 1a shows a perspective view of a scanning electron microscope sample stage according to an embodiment of the present invention;
FIG. 1b is a perspective view of the sample stage of the scanning electron microscope in FIG. 1a after being adhered with a sample;
FIG. 2 is a perspective view of a sample stage body of the scanning electron microscope sample stage of FIG. 1;
FIG. 3 is a perspective view of a base of the SEM sample stage of FIG. 1; and
fig. 4 is a top view of the sample stage body in fig. 2.
Detailed Description
A scanning electron microscope sample stage according to an implementation of the present invention will be described below by way of example with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention to those skilled in the art. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. Furthermore, it is to be understood that the invention is not to be limited to the specific embodiments described. Rather, any combination of the following features and elements, whether related to different embodiments or not, is contemplated to implement the present invention.
Fig. 1a shows an embodiment of a scanning electron microscope sample stage 1 according to the present invention. As can be seen from the figure, the scanning electron microscope sample stage 1 comprises a base 2 and a sample stage body 3 positioned at the upper end of the base. The scanning electron microscope sample stage 1 is a split type sample stage, and a sample stage body 3 is detachably and fixedly connected to a base 2.
Referring to fig. 1b and 2, the sample stage body 3 has a sample application portion 4 for applying a sample S and a cylindrical connection portion 5 for connecting the sample stage body 3 to the base 2, and an external thread 51 is provided on an outer circumferential surface of the cylindrical connection portion. In this embodiment, the patch portion (which may also be referred to as a patch member) 4 is constituted by a regular quadrangular prism whose bottom surface is square, that is, a square body extending upward perpendicularly to the circular upper end surface of the cylindrical connecting portion 5, and the center of the square bottom surface coincides with the circular shape of the circular upper end surface to provide four vertical planar patch areas 40, so that the sample S can be stuck on each planar patch area 40 of the patch portion 4 in a vertical orientation for easy observation. In this embodiment, the patch sample portion 4 has a square shape in a plan view (see fig. 4). And the radial extension of the square does not exceed the outer contour of the cylindrical connecting part 5. In addition, the cube is integrally formed with the cylindrical connection part for convenience of manufacture.
In one embodiment, not shown, the base of the straight polygonal prism is regular triangular to provide three vertical planar sample areas. In another embodiment, not shown, the base of the straight polygonal prism is pentagonal to provide five vertical planar sample areas. It will be appreciated by those skilled in the art that other numbers of regular polygonal prisms, such as regular hexagonal prisms, may be provided to provide more planar appliqu e areas, as desired.
Referring to fig. 3, there is shown a perspective view of a base 2 according to the present invention, the sem specimen stage being removably and fixedly connectable to a sem specimen chamber (not shown) via the base 2. As shown in the figure, the base is configured as a cylindrical base, on the inner circumferential surface of which an internal thread 21 is provided, and the sample stage body 3 is screwed to the base by means of the internal thread 21 and a corresponding external thread 51 on the cylindrical connecting portion. Such a threaded connection is relatively simple to implement and a strong connection can be obtained. It will be appreciated by those skilled in the art that other suitable attachment means, such as an interference fit, may be selected as desired and are also within the scope of the present application. Optionally, two mounting holes 20 are provided on the cylindrical side wall of the base, which are spare holes, through which the sem sample can be fixed into the sem sample compartment, if necessary, by cooperating with fasteners.
In the above embodiments of the present invention, the sample stage body 3 and the base 2 may be made of conventional aluminum alloy such as Al-Mg-Si alloy, or other suitable nonmagnetic material may be selected. The choice of materials is familiar to the person skilled in the art and will not be described in further detail here.
Additionally, in the present invention, the size of the sample stage body 3 and the base 2 is selected depending on the model of the scanning electron microscope. In one example, for a scanning electron microscope, for example of type JSM-7610F, the susceptor 2 has an outer diameter of 32mm, an inner diameter of 28mm and a height of 20 mm; the outer diameter of the cylindrical connecting part of the sample table body 3 is 28mm, and the side length of the cube is 20 mm.
For the scanning electron microscope sample stage 1 shown in fig. 1a, and particularly referring to fig. 1b, a sample S, such as a silicon wafer, can be attached to four vertical and planar sample attachment areas 40 of the sample attachment portion 4 by using carbon glue, and then loaded into a sample chamber of a scanning electron microscope to be detected.
Compare with scanning electron microscope sample platform among the prior art, their mode of pasting is different, and present sample platform is pasted the sample on the cylindrical outer peripheral face of sample platform (the contact zone of sample and sample platform is the curved surface) along circumference, according to the utility model discloses a scanning electron microscope sample platform, newly-designed sample portion of pasting has a plurality of vertical plane sample areas of pasting, can paste more sample to because the contact surface of sample and sample platform is the plane, make area of contact bigger, the physical contact is more stable, and observation effect is better.
Although the present invention has been described with reference to the preferred embodiments, the present invention is not limited thereto. Various changes and modifications can be made by one skilled in the art without departing from the spirit and scope of the invention, and the scope of the invention is to be determined by the appended claims.
Claims (7)
1. The scanning electron microscope sample stage (1) is characterized by comprising a base (2) and a sample stage body (3) which is detachably and fixedly connected to the base, wherein the sample stage body (3) is provided with a sample pasting part (4) for pasting a sample (S) and a cylindrical connecting part (5) for connecting the sample stage body (3) to the base (2), the sample pasting part (4) is composed of a straight polygonal column which is perpendicular to the upper circular end face of the cylindrical connecting part and extends upwards so as to provide at least three vertical plane sample pasting areas (40), the straight polygonal column and the cylindrical connecting part are integrally formed, the base (2) is constructed into a cylindrical base, and two mounting holes (20) are formed in the cylindrical side wall of the base (2).
2. Scanning electron microscope sample stage (1) according to claim 1, characterized in that the bottom surface of the straight polygonal prism is a regular polygon, the center of which coincides with the center of the circular upper end surface of the cylindrical connecting part (5).
3. Scanning electron microscope sample stage (1) according to claim 2, characterized in that the base of the straight polygonal prism is regular triangular to provide three vertical flat sample application areas (40).
4. Scanning electron microscope sample stage (1) according to claim 2, characterized in that the bottom surface of the straight polygonal prism is square to provide four vertical planar sample application areas (40).
5. Scanning electron microscope sample stage (1) according to claim 2, characterized in that the base of the straight polygonal prism is regular pentagonal to provide five vertical planar sample areas (40).
6. Scanning electron microscope sample stage (1) according to one of claims 1 to 5, characterized in that an internal thread (21) is provided on the inner circumferential surface of the base; and a corresponding external thread (51) is arranged on the outer peripheral surface of the cylindrical connecting part, and the sample table body (3) is screwed to the base through the matching of the external thread (51) and the internal thread (21).
7. Scanning electron microscope sample stage (1) according to one of claims 1 to 4, characterized in that it is detachably fixedly connected by the base (2) into a sample chamber of a scanning electron microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220244436.5U CN217359684U (en) | 2022-01-27 | 2022-01-27 | Scanning electron microscope sample stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220244436.5U CN217359684U (en) | 2022-01-27 | 2022-01-27 | Scanning electron microscope sample stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217359684U true CN217359684U (en) | 2022-09-02 |
Family
ID=83044259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220244436.5U Active CN217359684U (en) | 2022-01-27 | 2022-01-27 | Scanning electron microscope sample stage |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217359684U (en) |
-
2022
- 2022-01-27 CN CN202220244436.5U patent/CN217359684U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6686207B2 (en) | Manipulating micron scale items | |
| JP2020530909A (en) | Multi-pin solid phase microextraction device | |
| CN113109375B (en) | Thin-film material scanning electron microscope cross section sample preparation clamp and sample preparation method thereof | |
| CN217359684U (en) | Scanning electron microscope sample stage | |
| JP2017506896A (en) | Multiwell separation apparatus and reagent delivery device | |
| CN217112142U (en) | Scanning electron microscope sample stage | |
| CN111077020A (en) | Device for measuring failure strength of flaky ceramic and using method thereof | |
| CN208076247U (en) | A kind of metallographic sample preparation fixture | |
| CN209822591U (en) | Scanning electron microscope sample stage for non-conductive block sample | |
| CN211043432U (en) | Fixing device and nanoprobe detection device | |
| CN216411117U (en) | Sample stage for scanning electron microscope | |
| US20200040295A1 (en) | Cell transfer apparatus | |
| CN214122565U (en) | Fixing device | |
| CN214894956U (en) | Scanning electron microscope sample stage for analyzing cross section of corrosion product on surface of sample | |
| CN104198255B (en) | One kind is based on microscopical cell point device for mark and microscope | |
| CN108760703B (en) | Rotatable general fluorescent cuvette | |
| CN217359954U (en) | Scanning electron microscope sample stage capable of using grid | |
| CN208127136U (en) | A kind of sample platform of scanning electronic microscope for observing odd-shaped cross section sample | |
| CN211741302U (en) | ELISA detects auxiliary reagent box | |
| CN217901602U (en) | Scanning electron microscope sample table for rapidly positioning transmission electron microscope sample | |
| CN206546811U (en) | A kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample | |
| CN220208889U (en) | Support structure of scanning electron microscope sample table and scanning electron microscope | |
| CN219038883U (en) | Scanning electron microscope block-shaped sample table | |
| CN215218237U (en) | Sample filling tool for X-ray fluorescence spectrometer | |
| CN218824020U (en) | Novel multipurpose scanning electron microscope sample stage |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |