CN219038883U - Scanning electron microscope block-shaped sample table - Google Patents
Scanning electron microscope block-shaped sample table Download PDFInfo
- Publication number
- CN219038883U CN219038883U CN202220929063.5U CN202220929063U CN219038883U CN 219038883 U CN219038883 U CN 219038883U CN 202220929063 U CN202220929063 U CN 202220929063U CN 219038883 U CN219038883 U CN 219038883U
- Authority
- CN
- China
- Prior art keywords
- circular
- sample
- scanning electron
- electron microscope
- concave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model belongs to the technical field of scanning electron microscope sample tables, in particular to a scanning electron microscope block-shaped sample table, which aims at solving the problems that the existing scanning electron microscope sample block-shaped sample table is irregular in shape, magnetic blocks and low in practicality of non-conductive materials. The sample preparation is simple and convenient, special treatment is not needed for the sample, and the sample can be recycled.
Description
Technical Field
The utility model relates to the technical field of scanning electron microscope sample tables, in particular to a scanning electron microscope block-shaped sample table.
Background
Scanning electron microscopes are precision test instruments that bombard the surface of a sample with a steady and adjustable electron beam emitted by an electron gun, thereby exciting various signals, and collecting and processing the signals by different detection devices to characterize the sample information. Scanning electron microscopy involves a number of fields including biology, medicine, minerals, materials, basic physics and chemistry.
The existing scanning electron microscope sample block-shaped sample table is generally fixed from the side face of a block-shaped sample by adopting a clamp, and the practicality of the sample block-shaped sample table for some irregular shapes, magnetic blocks and non-conductive materials is to be improved. For example, bulk samples are generally irregularly shaped, and cutting or polishing out flat sides is relatively cumbersome. The direct fixation by the screw is inconvenient, and the contact area is small, and the conductive adhesive is generally adopted to be stuck on the side surface of the sample, and then the screw is used for fixation. However, the conductive adhesive is deformed in vacuum, so that the conductive adhesive is peeled off from the sample, and the contact resistance is increased; if the magnetic block is fixed only by the side face and the bottom face, the dangerous situation that the magnetic block is adsorbed to the pole shoe of the electron microscope still exists; the block with poor electric conduction performance only depends on the side surface and the bottom and can not transfer electrons well, and an electric conduction adhesive tape is required to be adhered on the observation surface to increase the contact surface and improve the electric conductivity. However, the conductive tape may contaminate the sample, which is detrimental to sample recovery for subsequent testing.
Disclosure of Invention
The utility model aims to solve the defects of irregular shapes, magnetic blocks and low practicality of non-conductive materials of the existing scanning electron microscope sample block-shaped sample stage.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the utility model provides a cubic sample platform of scanning electron microscope, includes sample platform base, spill round platform and circular grid piece, spill round platform fixed mounting is at the top of sample platform base, circular grid piece is located the top of spill round platform, the screw hole that two symmetries set up has been seted up at spill round platform top, and threaded hole threaded connection has the screw, and screw and circular grid piece mutually support.
Preferably, the sample stage base and the concave round stage are made of aluminum alloy materials.
Preferably, the circular grid plates are made of aluminum base or copper base alloy, and the diameter of the circular grid plates is the same as that of the concave round table.
Preferably, the outer diameter of the concave round table is 20mm, the inner diameter of the concave round table is 15mm, the outer diameter of the circular grating piece is consistent with the outer diameter of the concave round table, and the inner diameter of the circular grating piece is consistent with the inner diameter of the concave round table.
Preferably, the circular grid plate is in a circular lamellar shape, and the thickness of the circular grid plate is 0.5-1mm.
Compared with the prior art, the utility model has the advantages that:
the sample preparation is simple and convenient, special treatment is not needed for the sample, and the sample can be recycled.
Drawings
FIG. 1 is a schematic diagram of a block sample stage of a scanning electron microscope according to the present utility model;
fig. 2 is a schematic top view of a block sample stage of a scanning electron microscope according to the present utility model;
fig. 3 is a schematic bottom view of a block-shaped sample stage of a scanning electron microscope according to the present utility model.
In the figure: 1. a sample stage base; 2. concave round table; 3. round grid plates; 4. and (5) a screw.
Detailed Description
The technical solutions of the present embodiment will be clearly and completely described below with reference to the drawings in the present embodiment, and it is apparent that the described embodiments are only some embodiments of the present embodiment, not all embodiments.
Example 1
Referring to fig. 1-3, a scanning electron microscope block-shaped sample stage comprises a sample stage base 1, a concave circular truncated cone 2 and a circular grating sheet 3, wherein the concave circular truncated cone 2 is fixedly arranged at the top of the sample stage base 1, the circular grating sheet 3 is positioned above the concave circular truncated cone 2, two symmetrically arranged threaded holes are formed in the top of the concave circular truncated cone 2, screws 4 are connected in the threaded holes in a threaded manner, and the screws 4 are matched with the circular grating sheet 3.
In this embodiment, the inside of the concave round table 2 is not limited to a circle, but may be square, and a suitable shape may be selected according to the actual shape requirement of the block sample.
In the embodiment, the outer diameter of the concave round table 2 is 20mm, the inner diameter is 15mm, the outer diameter of the circular grating sheet 3 is consistent with the outer diameter of the concave round table 2, and the inner diameter size of the circular grating sheet 3 is consistent with the inner diameter size of the concave round table 2.
In this embodiment, the pattern of the hollow center of the circular grating sheet 3 is not uniform, and may be a regular lattice, a cross, a fan, or a hollow.
In this embodiment, the circular grid plate 3 is made of copper material, the circular grid plate 3 is in a circular lamellar shape, the thickness of the circular grid plate 3 is 0.5-1mm, and the circular grid plate 3 has certain hardness and is not easy to deform.
According to the working principle, a sample does not need special treatment, a round grid fixed by a screw can tightly compact a block in the concave round table 2, the round grid is applicable to blocks of various different types, because the block is fixed between the inside of the concave round table 2 and the round grid 3, even the block with stronger magnetism can be put into a scanning electron microscope for testing, when scanning electron beams of the scanning electron microscope scan the sample, the magnetic block cannot be adsorbed on a pole shoe of a scanning electron microscope lens barrel, because the block is tightly fixed between the inside of the concave round table 2 and the round grid 3, the upper part of the block is tightly connected with the round grid 3, the lower part of the block is connected with the bottom of the concave round table 2, so that the contact resistance of the block is reduced, the conductivity of the sample is increased, and especially, the round grid 3 is made of copper material with better heat conducting performance, and the round grid 3 made of copper material can conduct heat, so that the round grid 3 is especially applicable to blocks which cannot resist electron beam bombardment of the scanning electron microscope and have radiation damage.
Example two
Referring to fig. 1-3, a scanning electron microscope block-shaped sample stage comprises a sample stage base 1, a concave circular truncated cone 2 and a circular grating sheet 3, wherein the concave circular truncated cone 2 is fixedly arranged at the top of the sample stage base 1, the circular grating sheet 3 is positioned above the concave circular truncated cone 2, two symmetrically arranged threaded holes are formed in the top of the concave circular truncated cone 2, screws 4 are connected in the threaded holes in a threaded manner, and the screws 4 are matched with the circular grating sheet 3.
In this embodiment, the inside of the concave round table 2 is not limited to a circle, but may be square, and a suitable shape may be selected according to the actual shape requirement of the block sample.
In the embodiment, the outer diameter of the concave round table 2 is 20mm, the inner diameter is 15mm, the outer diameter of the circular grating sheet 3 is consistent with the outer diameter of the concave round table 2, and the inner diameter size of the circular grating sheet 3 is consistent with the inner diameter size of the concave round table 2.
In this embodiment, the pattern of the hollow center of the circular grating sheet 3 is not uniform, and may be a regular lattice, a cross, a fan, or a hollow.
In this embodiment, the circular grid plate 3 is made of copper material, the circular grid plate 3 is in a circular lamellar shape, the thickness of the circular grid plate 3 is 0.5-1mm, and the circular grid plate 3 has certain hardness and is not easy to deform.
The working principle is that the concave round table 2 is wiped by alcohol or cleaned by ultrasonic in advance before use. The sample is processed in advance according to the size which can be contained by the concave round table 2, a carbon conductive adhesive tape can be attached to the bottom of the groove of the concave round table 2 of the scanning electron microscope in advance, and the surface to be tested of the sample is placed in the concave groove of the concave round table 2 upwards. After that, the circular grating sheet 3 is placed over the concave circular truncated cone 2, the block-shaped sample is tightly fixed between the groove and the circular grating sheet 3 by the screw 4, and the circular grating sheet 3 is ensured to be in contact with the block-shaped sample, so that the conductivity thereof is increased.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art will be able to apply equally to the technical solution of the present utility model and the inventive concept thereof, within the scope of the present utility model.
Claims (5)
1. The utility model provides a cubic sample platform of scanning electron microscope, includes sample platform base (1), spill round platform (2) and circular grid piece (3), its characterized in that, spill round platform (2) fixed mounting is at the top of sample platform base (1), circular grid piece (3) are located the top of spill round platform (2), the screw hole that two symmetries set up has been seted up at spill round platform (2) top, and threaded hole threaded connection has screw (4), and screw (4) mutually support with circular grid piece (3).
2. The scanning electron microscope block-shaped sample stage according to claim 1, wherein the sample stage base (1) and the concave round table (2) are made of aluminum alloy.
3. A scanning electron microscope block sample stage according to claim 1 characterized in that the circular grid plate (3) is made of aluminium base or copper base alloy, and the diameter of the circular grid plate (3) is the same as the diameter of the concave round table (2).
4. The scanning electron microscope block-shaped sample table according to claim 1, wherein the outer diameter of the concave circular table (2) is 20mm, the inner diameter is 15mm, the outer diameter of the circular grating sheet (3) is consistent with the outer diameter of the concave circular table (2), and the inner diameter size of the circular grating sheet (3) is consistent with the inner diameter size of the concave circular table (2).
5. A scanning electron microscope block sample stage according to claim 1 characterized in that the circular grid plate (3) is circular lamellar with a thickness of 0.5-1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220929063.5U CN219038883U (en) | 2022-04-21 | 2022-04-21 | Scanning electron microscope block-shaped sample table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220929063.5U CN219038883U (en) | 2022-04-21 | 2022-04-21 | Scanning electron microscope block-shaped sample table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219038883U true CN219038883U (en) | 2023-05-16 |
Family
ID=86272845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220929063.5U Active CN219038883U (en) | 2022-04-21 | 2022-04-21 | Scanning electron microscope block-shaped sample table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219038883U (en) |
-
2022
- 2022-04-21 CN CN202220929063.5U patent/CN219038883U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10739377B2 (en) | Numerically controlled rotary probe switching device based on environment-controllable atomic force microscope | |
| CN107607394A (en) | 4 angle couplings tool and its loading method for the loading of thin plate high stress | |
| JPWO2014199737A1 (en) | Ion milling equipment | |
| CN219038883U (en) | Scanning electron microscope block-shaped sample table | |
| CN201465986U (en) | Block-shaped metal material scanning electron microscope sample stable | |
| CN220340092U (en) | Special clamp for scanning electron microscope for circular titanium sheet section fracture sample | |
| CN108535298A (en) | A kind of micro slide and application method for the bad powder of SEM electric conductivities | |
| CN213278008U (en) | Scanning electron microscope sample stage of ballast network sample | |
| CN109342475B (en) | FIB sample holder | |
| CN210307283U (en) | Clamping device for grinding and polishing section of thin slice sample | |
| CN215525562U (en) | Sample holder for observing arc-shaped samples | |
| CN208358574U (en) | A kind of manual clamper device of metallographic rubbing down quick-clamping | |
| CN213278009U (en) | Scanning electron microscope sample stage convenient to loading and unloading net sample | |
| CN109470730A (en) | One kind complementary type loading net used in transmission electron microscope | |
| CN210136839U (en) | Sample stage for field emission scanning electron microscope | |
| CN113484545A (en) | Transmission electron microscope multi-sample grid, matched sample preparation table thereof, preparation method and use method | |
| CN208155902U (en) | A kind of sample base device for scanning electron microscope field trash statistical analysis | |
| CN217405365U (en) | Scanning electron microscope sample stage convenient to loading and unloading irregular sample | |
| CN220400530U (en) | Sample stage for FIB | |
| CN206546811U (en) | A kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample | |
| JP2016100316A (en) | Sample table | |
| CN212540193U (en) | A sample anchor clamps for TKD characterization test | |
| CN208771458U (en) | Analyze the sample shelf apparatus of surface and cross-sectional sample simultaneously for EBSD | |
| CN217901602U (en) | Scanning electron microscope sample table for rapidly positioning transmission electron microscope sample | |
| CN220306207U (en) | Scanning electron microscope sample stage for magnetic block/sheet sample |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |