CN220400530U - Sample stage for FIB - Google Patents
Sample stage for FIB Download PDFInfo
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- CN220400530U CN220400530U CN202321499962.7U CN202321499962U CN220400530U CN 220400530 U CN220400530 U CN 220400530U CN 202321499962 U CN202321499962 U CN 202321499962U CN 220400530 U CN220400530 U CN 220400530U
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- fib
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- 239000002184 metal Substances 0.000 claims description 4
- 230000001154 acute effect Effects 0.000 claims description 3
- 230000001788 irregular Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 238000012360 testing method Methods 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001531 micro-dissection Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Sampling And Sample Adjustment (AREA)
Abstract
The utility model relates to a sample stage for FIB, comprising: the sample platform body, the sample platform body is the cylinder column structure, be provided with first backup pad and second backup pad on the sample platform body, first backup pad with sample platform body fixed connection, the second backup pad with sample platform body swing joint, first backup pad with second backup pad symmetrical arrangement is in on the sample platform body. The sample stage related to the utility model can observe samples without large-angle inclination, and the sample stage cannot easily slip or fall off in the moving or testing process. The risk of collision with the pole shoe of the electron microscope is reduced when the sample table is operated in the FIB chamber; for samples with irregular surfaces and larger thickness, the samples can be easily fixed and are convenient to observe.
Description
Technical Field
The utility model relates to a sample stage for FIB, belonging to the field of failure analysis in semiconductor chip manufacturing and packaging industry.
Background
With the continuous development and progress of semiconductor technology, the device development size in the field of semiconductor chip manufacturing and packaging is smaller and smaller, and the requirement for failure analysis of corresponding devices is also urgent. A focused ion beam (FIB for short) is a microdissection instrument that uses an electro-lens to focus the ion beam into a very small size and then sputter it onto the sample surface. According to the working principle of the FIB system, when the FIB is operated, the angle between the sample and the incident electron beam is 52 degrees, so that the sample table is required to be inclined at a large angle, and the sample is ensured not to slip or fall in the test process. Meanwhile, the risk of collision between the sample and the pole shoe of the electron microscope is increased in the tilting process of the sample table. In addition, for samples with irregular surfaces and large thickness, observation is generally difficult, and no specific sample stage exists.
Disclosure of Invention
In view of the above technical problems, the present utility model provides a sample stage for FIB, which can observe a sample without large-angle inclination, and the sample stage cannot easily slip or fall during movement or test.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
a sample stage for FIB, comprising:
the sample platform body, the sample platform body is the cylinder column structure, be provided with first backup pad and second backup pad on the sample platform body, first backup pad with sample platform body fixed connection, the second backup pad with sample platform body swing joint, first backup pad with second backup pad symmetrical arrangement is in on the sample platform body.
The sample stage for the FIB preferably has a groove formed in the sample stage body, an elastic member is disposed in the groove, a first end of the elastic member is fixedly connected with the second support plate, and a second end of the elastic member is fixed at one end of the groove.
Preferably, the elastic member is a spring.
Preferably, the first support plate is obliquely fixed on the sample table body, and an included angle between the first support plate and the horizontal plane of the sample table body is 45-90 degrees.
Preferably, the second support plate is also obliquely and movably arranged on the sample table body, and an included angle between the second support plate and the horizontal plane of the sample table body is 52 degrees.
Preferably, the included angle between the first support plate and the second support plate is an acute angle.
The sample stage for FIB preferably further comprises a support column, and the support column is disposed on the lower end surface of the sample stage body.
The sample stage for FIB is preferably made of a non-magnetic conductive metal plate, and the first support plate, the second support plate and the sample stage body are preferably made of non-magnetic conductive metal plates.
Due to the adoption of the technical scheme, the utility model has the following advantages:
the sample stage related to the utility model can observe samples without large-angle inclination, and the sample stage cannot easily slip or fall off in the moving or testing process. The risk of collision with the pole shoe of the electron microscope is reduced when the sample table is operated in the FIB chamber; for samples with irregular surfaces and larger thickness, the samples can be easily fixed and are convenient to observe.
Drawings
FIG. 1 is a schematic diagram of a sample stage for FIB according to one embodiment of the present utility model;
FIG. 2 is a top view of a sample stage provided in this embodiment of the utility model;
FIG. 3 is a front view of a sample stage provided in this embodiment of the utility model;
FIG. 4 is a cross-sectional view of the second portion of the present utility model at the junction with the body of the sample stage;
the figures are marked as follows:
1-a first support plate; 2-a second support plate; 3-an elastic member; 4-supporting columns; 5-sample stage body.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions in the present utility model will be clearly and completely described below, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are intended to be within the scope of the present disclosure.
Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this utility model belongs. The terms "first," "second," "third," "fourth," and the like as used herein do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect.
At present, according to the working principle of an FIB system, when the FIB is operated, the angle between a sample and an incident electron beam is 52 degrees, so that the sample table is required to be inclined at a large angle, and the sample is ensured not to slip or fall in the test process. Meanwhile, the risk of collision between the sample and the pole shoe of the electron microscope is increased in the tilting process of the sample table. In addition, for samples with irregular surfaces and large thickness, observation is generally difficult, and no specific sample stage exists.
In view of the problem, the utility model provides a sample stage for FIB, which can observe a sample without large-angle inclination, and which cannot easily slip or fall during movement or test.
The technical scheme of the utility model is described in detail below with reference to specific examples.
As shown in fig. 1, a sample stage for FIB according to the present utility model includes: the sample platform body 5, sample platform body 5 are cylinder column structure, are provided with first backup pad 1 and second backup pad 2 on the sample platform body 5, first backup pad 1 and sample platform body 5 fixed connection, second backup pad 2 and sample platform body 5 swing joint, first backup pad 1 and second backup pad 2 symmetrical arrangement are on sample platform body 5.
In some preferred embodiments, as shown in fig. 1 and 2, a groove is provided on the sample stage body 5, an elastic member 3 is provided in the groove, and a first end of the elastic member 3 is fixedly connected with the second support plate 2, and a second end is fixed at one end of the groove. More preferably, the elastic member 3 is a spring. In the use, place the sample that awaits measuring between first backup pad 1 and second backup pad 2, elastic component 3 can be according to the size of sample size, and passive flexible or diastole, and then the sample can stabilize the card between first backup pad 1 and second backup pad 2, is difficult for dropping.
Further, the first support plate 1 is obliquely fixed on the sample stage body 5, and an included angle between the first support plate 1 and the horizontal plane of the sample stage body 5 is 45-90 degrees. The second support plate 2 is also obliquely and movably arranged on the sample table body 5, and the included angle between the second support plate 2 and the horizontal plane of the sample table body 5 is 52 degrees.
Specifically, as shown in fig. 1, an included angle between the first support plate 1 and the second support plate 2 is an acute angle. The support column 4 is provided on the lower end face of the sample stage body 5. The first support plate 1, the second support plate 2 and the sample stage body 5 are each made of a non-magnetic conductive metal plate.
The working principle and the using flow of the sample platform related by the utility model are as follows: as shown in fig. 1, the inclined plane in the first support plate 1 and the inclined plane in the second support plate 2 can fix the sample through conductive adhesive, and the sample can be observed at different angles according to actual needs; the vertical surfaces in the first support plate 1 and the second support plate 2 can be used for placing irregular or thicker samples, the second support plate 2 is pulled leftwards, the samples are placed in the middle of the vertical surfaces in the first support plate 1 and the second support plate 2, the second support plate 2 is clamped rightwards by the springs in the elastic pieces 3, and the samples are fixed. The sample table disclosed by the utility model is reasonable in design, safe to use, convenient to assemble and disassemble, good in sample placement stability, easy to operate and use, suitable for conventional samples and irregular samples, and capable of fully and reasonably utilizing the limited space on the sample table.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.
Claims (8)
1. A sample stage for FIB comprising:
sample platform body (5), sample platform body (5) are cylinder column structure, be provided with first backup pad (1) and second backup pad (2) on sample platform body (5), first backup pad (1) with sample platform body (5) fixed connection, second backup pad (2) with sample platform body (5) swing joint, first backup pad (1) with second backup pad (2) symmetrical arrangement is in on sample platform body (5).
2. The sample stage for FIB as claimed in claim 1, wherein a groove is provided in the sample stage body (5), an elastic member (3) is provided in the groove, a first end of the elastic member (3) is fixedly connected with the second support plate (2), and a second end is fixed at one end of the groove.
3. A sample stage for FIB as claimed in claim 2, wherein the resilient member (3) is a spring.
4. The sample stage for FIB as claimed in claim 1, wherein the first support plate (1) is fixed to the sample stage body (5) in an inclined manner, and an angle between the first support plate (1) and a horizontal plane of the sample stage body (5) is 45 ° to 90 °.
5. The sample stage for FIB as claimed in claim 4, wherein the second support plate (2) is also arranged on the sample stage body (5) in an inclined movement, and the angle between the second support plate (2) and the horizontal plane of the sample stage body (5) is 52 °.
6. Sample stage for FIB as claimed in claim 1, characterized in that the angle between the first support plate (1) and the second support plate (2) is an acute angle.
7. The sample stage for FIB as claimed in claim 1, further comprising a support column (4), the support column (4) being provided on a lower end face of the sample stage body (5).
8. The sample stage for FIB as claimed in claim 1, wherein the first support plate (1), the second support plate (2) and the sample stage body (5) are each made of a non-magnetic conductive metal plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321499962.7U CN220400530U (en) | 2023-06-13 | 2023-06-13 | Sample stage for FIB |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321499962.7U CN220400530U (en) | 2023-06-13 | 2023-06-13 | Sample stage for FIB |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220400530U true CN220400530U (en) | 2024-01-26 |
Family
ID=89601421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321499962.7U Active CN220400530U (en) | 2023-06-13 | 2023-06-13 | Sample stage for FIB |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220400530U (en) |
-
2023
- 2023-06-13 CN CN202321499962.7U patent/CN220400530U/en active Active
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