CN213278008U - A scanning electron microscope sample stage for ring ballast mesh samples - Google Patents
A scanning electron microscope sample stage for ring ballast mesh samples Download PDFInfo
- Publication number
- CN213278008U CN213278008U CN202022943379.3U CN202022943379U CN213278008U CN 213278008 U CN213278008 U CN 213278008U CN 202022943379 U CN202022943379 U CN 202022943379U CN 213278008 U CN213278008 U CN 213278008U
- Authority
- CN
- China
- Prior art keywords
- groove
- sample
- scanning electron
- ring
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003825 pressing Methods 0.000 claims description 47
- 238000005070 sampling Methods 0.000 claims description 21
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 238000012360 testing method Methods 0.000 abstract description 22
- 230000001066 destructive effect Effects 0.000 abstract 1
- 239000011799 hole material Substances 0.000 description 38
- 239000000853 adhesive Substances 0.000 description 13
- 230000001070 adhesive effect Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- 230000002146 bilateral effect Effects 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001132 ultrasonic dispersion Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
本实用新型属于扫描电镜用样品台技术领域，具体是一种环压载网样品的扫描电镜样品台，包括主台、压板、U型夹、U型卡管、紧固螺钉Ⅰ和紧固螺钉Ⅱ，主台与U型夹通过紧固螺钉Ⅱ连接在一起，主台与U型卡管通过紧固螺钉Ⅰ连接在一起。U型卡管固定压板的旋转轴并通过U型夹的弹性作用，从而使压板上的压环能够压紧载网样品。本实用新型采用压环对载网样品进行环压，保证了载网样品在圆周上受力均匀，防止了载网样品发生一边翘起的情况的发生，增强了载网样品固定的稳定性和导电性，易于装卸样品，实现了载网样品的无损和无污染循环测试使用，提高了科研效率，是扫描电镜用样品台方面的创新。
The utility model belongs to the technical field of sample stages for scanning electron microscopes, in particular to a scanning electron microscope sample stage for ring ballast net samples, comprising a main stage, a pressure plate, a U-shaped clip, a U-shaped clamp tube, a fastening screw I and a fastening screw II, the main table and the U-shaped clip are connected together by the fastening screw II, and the main table and the U-shaped clamp are connected together by the fastening screw I. The U-shaped clamp tube fixes the rotation axis of the pressure plate and through the elastic action of the U-shaped clip, the pressure ring on the pressure plate can press the load net sample. The utility model adopts a pressure ring to perform ring pressure on the carrier mesh sample, which ensures that the carrier mesh sample is uniformly stressed on the circumference, prevents the carrier mesh sample from tilting on one side, and enhances the stability and stability of the carrier mesh sample fixation. Electrical conductivity, easy to load and unload samples, realize the non-destructive and pollution-free cycle testing of the carrier mesh samples, and improve the efficiency of scientific research. It is an innovation in the sample stage for SEM.
Description
Technical Field
The utility model belongs to the technical field of the scanning electron microscope sample platform, in particular to scanning electron microscope sample platform of ballast net sample.
Background
Scanning electron microscope (scanning electron microscope) is a large-scale analytical instrument, and is widely applied to surface morphology and micro-area formation analysis of various solid substances. The working principle of the scanning electron microscope is as follows: the electron gun emits high-energy electron beams, the high-energy electron beams bombard the surface of a sample after being focused, secondary electrons, backscattered electrons, auger electrons and other electronic signals can be generated due to the interaction of the high-energy electron beams and the sample, and then corresponding signals are collected and processed by various detectors, so that the sample is characterized. According to the working principle and the structural characteristics of a scanning electron microscope, the scanning electron microscope generally requires that a sample to be observed has no water, no magnetism and no radioactivity, and the sample is not sensitive to electron beam bombardment. The sample can be firmly fixed on the sample table, if a block-shaped sample with a flat bottom can be directly fixed on the sample table by using a conductive adhesive, a fine powder sample is subjected to ultrasonic dispersion in a solvent, then the fine powder sample is dripped on a silicon wafer or a glass slide to be dried, then the fine powder sample is fixed by using the conductive adhesive, and a powder sample with a large size can be directly coated on the conductive adhesive for observation. For a sample with poor conductivity, a noble metal film layer with a certain thickness is sputtered on the surface of the sample by an ion sputtering method before testing, so as to enhance the conductivity of the surface of the sample. The scanning electron microscope has the characteristics of simple sample preparation, large depth of field, good imaging three-dimensional effect, wide adjustable range of magnification and the like, and is widely applied to microscopic research in various fields of materials, chemistry, electronics, physics, biology, buildings, archaeology and the like.
The sample stage is one of the key parts of the scanning electron microscope and is used for bearing samples in various shapes, so that the samples can be firmly fixed on the sample stage and can be imaged under the coordination of other systems of the scanning electron microscope to represent the samples.
When scanning electron microscopes are used in scientific research and production life, the following problems are commonly encountered:
1) the sample can not be used for other tests (such as transmission electron microscope tests) after being tested by the scanning electron microscope, the sample needs to be fixed on a grid (the common specification is 3.05-3.20mm in diameter and 0.018-0.025mm in thickness), and the grid is generally observed by the scanning electron microscope by adopting the following method: the surface of the sample table is adhered with a conductive adhesive tape or conductive glue to fix the carrier net, so that the carrier net is damaged in the process of taking off the carrier net after the observation of the scanning electron microscope, and other tests can not be carried out on the sample;
2) the conductivity of the conductive adhesive is low, and after the conductive adhesive is observed by a scanning electron microscope, the conductive adhesive often remains on the grid, so that sample pollution is caused. At present, the volume resistivity of most conductive adhesives is low, a grid is fixed by the conductive adhesives during the test of a scanning electron microscope, and when the grid is subjected to the test of a transmission electron microscope, the conductive adhesives often remain on the grid to cause sample pollution, so that high-quality pictures cannot be shot, the consistency of the samples is difficult to ensure, and the test result is unreliable;
3) the grid sample is easily moved. If the grid is not fixed by conductive adhesive during the test of the scanning electron microscope, the grid is easy to move relative to the sample table in the test process, so that the photographed image is blurred. Meanwhile, the unfixed carrier net is easy to fall off in the test, so that the instrument is damaged;
4) the screen sample is warped or deformed. Because the force on the circumference of the net-carrying sample fixed by the common pressing sheet is uneven, the probability of one side of the net-carrying sample tilting or deforming is greatly increased during the test, which not only influences the test result, but also increases the risk of the sample falling.
The above problems have seriously hindered the use of scanning electron microscopes in a wider range, and there is an urgent need for those skilled in the art to solve the problems.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a scanning electron microscope sample platform of ballast net sample solves following technical problem: firstly, how to enable a net-carrying sample to be continuously applied to other tests after the test of a scanning electron microscope; how to avoid the pollution of the conductive adhesive and improve the conductivity between the net-carrying sample and the sample table in the test process; fixing the grid sample without using conductive adhesive; and fourthly, how to ensure that the net-carrying sample is stressed evenly on the circumference, so that the horizontal placement state of the net-carrying sample is better kept in the testing process of the scanning electron microscope.
The utility model adopts the following technical scheme: a scanning electron microscope sample stage of a ballasting net sample comprises a main stage, a pressing plate, a U-shaped clamp, a U-shaped clamping pipe, a fastening screw I and a fastening screw II.
The main platform is cylindrical and comprises a platform body, a sample loading column, a sampling groove, a sample loading groove, a pressure plate groove, a U-shaped clamping groove, a rotating shaft groove, a threaded hole I and a threaded hole II, wherein the sample loading column is uniformly distributed on the upper part of the platform body along the circumference, the sample loading groove is positioned in the center of the sample loading column, the section of the sample loading groove, which is perpendicular to the axis of the sample loading column, is circular, the diameter of the sample loading groove is 3.6mm, the depth of the sample loading groove is 0.01mm larger than the thickness of the pressure ring, the sampling groove is positioned on the outer edge of the sample loading column, the cross section of the sampling groove is rectangular, the center line of the sampling groove points to the axis of the platform body, the depth of the sampling groove is equal to the height of the sample loading column, the length of the sampling groove, which is positioned in the sample loading groove, the pressure plate is positioned on the inner edge of the sample loading column, the cross section of the pressure plate groove is rectangular, the center line of the pressure plate groove points to the axis of, the axis of the directional host computer of central line in U type clamp groove, the degree of depth in U type clamp groove is greater than the nut height of screw II and the clamping piece thickness sum that the U type pressed from both sides, and the U type presss from both sides the groove and is greater than the clamping piece width that the U type pressed from both sides at radial ascending length of stage body, the rotation axis trench be located the inboard in U type clamp groove, the axis of the directional stage body of central line in rotation axis groove, screw hole I in the bilateral symmetry distribution in rotation axis groove, screw hole II be located the bottom in U type clamp groove.
The clamp plate include clamping ring, connecting plate and rotation axis, the clamping ring be located the one end of clamp plate, the thickness of clamping ring is 1.5-2.0mm, the rotation axis be located the other end of clamp plate, the rotation axis closely laminates with the rotation axis groove of primary standard, the rotation axis closely laminates with the clamp of U type card pipe, the connecting plate connect clamping ring and rotation axis, clamping ring, connecting plate and rotation axis integrated into one piece, the connecting plate both sides be semi-circular, the clamping ring with be connected the plate thickness the same.
The U-shaped clamp comprises a clamping head, clamping pieces and a mounting hole I, wherein the two clamping heads are located on the upper portion of the U-shaped clamp, the clamping head is a semi-cylinder, the distance between the two clamping pieces is 0.2-0.5mm smaller than that of a connecting plate, the clamping pieces are located on the lower portion of the U-shaped clamp, the clamping pieces are U-shaped, the clamping head and the clamping pieces are integrally formed, and the mounting hole I is located in the center of the bottom of the U-shaped clamp.
U type card pipe include clamp, connection piece and mounting hole II, the clamp cross section be semicircle annular, the connection piece in the bilateral symmetry distribution of clamp, clamp and connection piece integrated into one piece, mounting hole II be located the center of connection piece.
Fastening screw I include nut, polished rod, threaded rod and a word recess, the nut be located fastening screw I's upper portion, the polished rod be located fastening screw I's middle part, the length of polished rod is less than 0.1mm than the connection piece thickness of U type card pipe, the threaded rod be located fastening screw I's lower part, nut, polished rod and threaded rod integrated into one piece, the nut on be equipped with a word recess.
The length of a polish rod of the screw II is 0.1mm less than the thickness of a clamping piece of the U-shaped clamp.
The utility model discloses a clamping device for U type clamp, including clamp plate, U type clamp, screw hole I, mounting hole I, fastening screw II, mounting hole II, screw thread cooperation connection, the U type clamp is connected with the screw hole II of primary station through screw thread cooperation behind the mounting hole I that the U type pressed from both sides, press from both sides the U type with the primary station together, the rotation axis of clamp plate is located the rotation axis inslot of primary station, mounting hole II of U type card pipe is corresponding with the screw hole I of primary station, fastening screw I pass behind the mounting hole II of U type card pipe and pass through screw thread cooperation connection with the screw hole I of primary station, with U type card pipe together with the primary station installation.
The bottom surface of the pressing plate groove and the lower surface of the connecting plate are in the same horizontal plane.
The utility model discloses following beneficial technological effect has:
1) the sample is fixed by pressing the grid through the pressing ring, the grid sample is well preserved after the scanning electron microscope test, other tests (such as transmission electron microscope test) can be continuously carried out, and the scientific research efficiency is improved;
2) conductive adhesive is not used, so that the pollution of a sample is avoided, the grid is directly contacted with the sample table, and the conductivity between the grid-loaded sample and the sample table in the test process is improved;
3) the connecting plate of the pressing plate is clamped through the U-shaped clamp head, so that the pressing ring on the pressing plate can be ensured to firmly press the net sample;
4) the circular compression ring is used for compressing the grid sample, the stress on the circumference of the grid sample is uniform, the integrity of the grid sample is powerfully guaranteed, the grid sample can be always horizontally placed when being tested by a scanning electron microscope, and therefore the reliability of a test result is better guaranteed.
Drawings
FIG. 1 is a top view of a scanning electron microscope sample stage of a ballasting network sample according to the present invention;
FIG. 2 is an enlarged view of a portion A of FIG. 1;
FIG. 3 is a cross-sectional view taken along line B-B of FIG. 2;
FIG. 4 is a cross-sectional view taken along line A-A of FIG. 1;
FIG. 5 is a partial enlarged view of FIG. 4 at B;
FIG. 6 is an enlarged view of a portion of FIG. 4 at C;
fig. 7 is a left side view of a scanning electron microscope sample stage of a ballasting network sample of the present invention;
FIG. 8 is an enlarged view of a portion of FIG. 7 at D;
fig. 9 is a top view of a main platform of a scanning electron microscope sample stage for a ballasting network sample according to the present invention;
FIG. 10 is an enlarged view of a portion of FIG. 9 at E;
FIG. 11 is a cross-sectional view C-C of FIG. 9;
FIG. 12 is an enlarged view of a portion of FIG. 11 at F;
FIG. 13 is an enlarged view of a portion of FIG. 11 at G;
FIG. 14 is a cross-sectional view taken along line D-D of FIG. 9;
FIG. 15 is a cross-sectional view E-E of FIG. 9;
fig. 16 is a left side view of a main platform of a scanning electron microscope sample stage of a ballasting network sample according to the present invention;
fig. 17 is a top view of a pressing plate of a scanning electron microscope sample stage of a ballasting network sample according to the present invention;
FIG. 18 is a cross-sectional view F-F of FIG. 17;
FIG. 19 is a sectional view taken along line G-G of FIG. 17;
FIG. 20 is a front view of a pressing plate of a sample stage of a scanning electron microscope for a sample of a ballast network according to the present invention;
FIG. 21 is a front view of a U-shaped clamp of a scanning electron microscope sample stage of a ballasting network sample according to the present invention;
FIG. 22 is a sectional view taken at H-H in FIG. 21;
fig. 23 is a top view of a U-shaped clamp of a scanning electron microscope sample stage of a ballasting network sample according to the present invention;
FIG. 24 is a front view of a U-shaped clamp tube of a scanning electron microscope sample stage of a ballasting network sample according to the present invention;
FIG. 25 is a top view of a U-shaped clamp tube of a scanning electron microscope sample stage for a ballasting network sample according to the present invention;
FIG. 26 is a front view of a screw I of a sample stage of a scanning electron microscope for a sample of a ballast network according to the present invention;
fig. 27 is a plan view of the i-shaped screws of the scanning electron microscope sample stage of the ballasting net sample of the utility model.
Description of reference numerals: 1. the sample sampling device comprises a main table 1-1, a table body 1-2, a sample loading column 1-3, a sampling groove 1-4, a sample loading groove 1-5, a pressing plate groove 1-6, a U-shaped clamping groove 1-7, a rotating shaft groove 1-8, a threaded hole I1-9, a threaded hole II, 2, a pressing plate 2-1, a pressing ring 2-2, a connecting plate 2-3, a rotating shaft 3, 3-1 parts of U-shaped clamps, 3-2 parts of chucks, 3-3 parts of clamping pieces, 3-3 parts of mounting holes I, 4 parts of U-shaped clamping tubes, 4-1 parts of clamps, 4-2 parts of connecting pieces, 4-3 parts of mounting holes II, 5 parts of fastening screws I, 5-1 parts of nuts, 5-2 parts of polished rods, 5-3 parts of threaded rods, 5-4 parts of straight grooves, 6 parts of fastening screws II.
Note: in the drawings of the present invention, the grid sample is not shown.
Detailed Description
The technical solution of the present invention is described in further detail below with reference to the accompanying drawings, but the scope of the present invention is not limited to the following description.
As shown in fig. 1 to 27, the scanning electron microscope sample stage of the ring-pressed net sample comprises a main stage 1, a pressing plate 2, a U-shaped clamp 3, a U-shaped clamp tube 4, a fastening screw i 5 and a fastening screw ii 6, and is characterized in that:
the main platform 1 is cylindrical and comprises a platform body 1-1, a sample carrying column 1-2, a sampling groove 1-3, a sample carrying groove 1-4, a pressure plate groove 1-5, a U-shaped clamping groove 1-6, a rotating shaft groove 1-7, a threaded hole I1-8 and a threaded hole II 1-9, wherein the sample carrying column 1-2 is uniformly distributed on the upper part of the platform body 1-1 along the circumference, the sample carrying groove 1-4 is positioned at the center of the sample carrying column 1-2, the section of the sample carrying groove 1-4, which is vertical to the axis of the sample carrying column 1-2, is circular, the sampling groove 1-3 is positioned on the outer edge of the sample carrying column 1-2, the cross section of the sampling groove 1-3 is rectangular, the central line of the sampling groove 1-3 points to the axis of the platform body 1-1, the pressure plate groove 1-5 is positioned on the inner edge of the sample carrying column 1-2, the cross section of the pressure plate groove 1-5 is rectangular, the center line of the pressure plate groove 1-5 points to the axis of the table body 1-1, the U-shaped clamping groove 1-6 is located on the inner side of the sample loading column 1-2, the center line of the U-shaped clamping groove 1-6 points to the axis of the main table 1, the rotating shaft groove 1-7 is located on the inner side of the U-shaped clamping groove 1-6, the center line of the rotating shaft groove 1-7 points to the axis of the table body 1-1, the threaded holes I1-8 are symmetrically distributed on two sides of the rotating shaft groove 1-7, and the threaded holes II 1-9 are located at the bottom of the U-shaped clamping groove 1-6.
The pressing plate 2 comprises a pressing ring 2-1, a connecting plate 2-2 and a rotating shaft 2-3, the pressing ring 2-1 is located at one end of the pressing plate 2, the rotating shaft 2-3 is located at the other end of the pressing plate 2, the connecting plate 2-2 is connected with the pressing ring 2-1 and the rotating shaft 2-3, the pressing ring 2-1, the connecting plate 2-2 and the rotating shaft 2-3 are integrally formed, two sides of the connecting plate 2-2 are semicircular, and the pressing ring 2-1 and the connecting plate 2-2 are the same in thickness.
The U-shaped clamp 3 comprises two clamping heads 3-1, clamping pieces 3-2 and mounting holes I3-3, wherein the two clamping heads 3-1 are positioned at the upper part of the U-shaped clamp 3, the clamping heads 3-1 are semi-cylinders, the clamping pieces 3-2 are positioned at the lower part of the U-shaped clamp 3, the clamping pieces 3-2 are U-shaped, the clamping heads 3-1 and the clamping pieces 3-2 are integrally formed, and the mounting holes I3-3 are positioned at the center of the bottom of the U-shaped clamp 3.
The U-shaped clamp pipe 4 comprises a clamp 4-1, a connecting piece 4-2 and a mounting hole II 4-3, the cross section of the clamp 4-1 is in a semicircular ring shape, the connecting piece 4-2 is symmetrically distributed on two sides of the clamp 4-1, the clamp 4-1 and the connecting piece 4-2 are integrally formed, and the mounting hole II 4-3 is located in the center of the connecting piece 4-2.
The fastening screw I5 comprises a nut 5-1, a polished rod 5-2, a threaded rod 5-3 and a straight groove 5-4, the nut 5-1 is located on the upper portion of the fastening screw I5, the polished rod 5-2 is located in the middle of the fastening screw I5, the threaded rod 5-3 is located on the lower portion of the fastening screw I5, the nut 5-1, the polished rod 5-2 and the threaded rod 5-3 are integrally formed, and the nut 5-1 is provided with the straight groove 5-4.
Mounting holes I3-3 of the U-shaped clamp 3 correspond to threaded holes II 1-9 of the main platform 1, fastening screws II 6 penetrate through the mounting holes I3-3 of the U-shaped clamp 3 and then are connected with the threaded holes II 1-9 of the main platform 1 in a threaded fit mode, the U-shaped clamp 3 and the main platform 1 are mounted together, a rotating shaft 2-3 of the pressing plate 2 is located in a rotating shaft groove 1-7 of the main platform 1, the mounting holes II 4-3 of the U-shaped clamping pipe 4 correspond to threaded holes I1-8 of the main platform 1, the fastening screws I5 penetrate through the mounting holes II 4-3 of the U-shaped clamping pipe 4 and then are connected with the threaded holes I1-8 of the main platform 1 in a threaded fit mode, and the U-shaped clamping pipe 4 and the main platform 1 are mounted together.
The thickness of the press ring 2-1 is 1.5-2.0 mm.
The diameter of the sample loading groove 1-4 is 3.6mm, and the depth is 0.01mm larger than the thickness of the press ring 2-1, so that the press ring 2-1 can flatly press the net sample.
The depth of the sampling groove 1-3 is equal to the height of the loading column 1-2.
The sampling groove 1-3 is positioned in the sample loading groove 1-4 and has the length of 0.9mm, so that the net-carrying sample can be conveniently fed and taken out.
The depth of the U-shaped clamp groove 1-6 is larger than the sum of the height of the nut of the screw II 6 and the thickness of the clamping piece 3-2 of the U-shaped clamp 3, so that the situation that the clamping ring 2-1 cannot compress the net carrying sample due to the fact that the nut of the screw II 6 pushes against the pressing plate 2 is avoided.
The width of the U-shaped clamp groove 1-6 in the radial direction of the table body 1-1 is larger than the width of the clamping piece 3-2 of the U-shaped clamp 3, so that the tweezers can be conveniently inserted into the U-shaped clamp groove 1-6, and the pressing ring 2-1 can be further lifted or pressed down.
The distance between the two clamping pieces 3-2 is 0.2-0.5mm smaller than that of the connecting plate 2-2, so that the clamping heads 3-1 can clamp the connecting plate 2-2.
The rotating shaft 2-3 of the pressure plate 2 is tightly attached to the rotating shaft groove 1-7 of the main table 1, so that the rotating shaft 2-3 is prevented from moving radially.
The rotating shaft 2-3 of the pressing plate 2 is tightly attached to a clamp 4-1 of the U-shaped clamping pipe 4, the number of the U-shaped clamping pipes 4 is two, the two U-shaped clamping pipes are symmetrically arranged at two ends of the rotating shaft 2-3, and the rotating shaft 2-3 is tightly pressed under the action of I5 of the four fastening screws, so that the rotating shaft 2-3 is prevented from axially moving.
The length of a polish rod 5-2 of the screw I5 is 0.1mm less than the thickness of a connecting piece 4-2 of the U-shaped clamping pipe 4, and the fastening screw I5 can be screwed down to fix the U-shaped clamping pipe 4.
The length of a polish rod of the screw II 6 is 0.1mm less than the thickness of a clamping piece 3-2 of the U-shaped clamp 3, and the fastening screw II 6 can be screwed down to fix the U-shaped clamp 3.
The bottom surfaces of the pressing plate grooves (1-5) and the lower surfaces of the connecting plates (2-2) are in the same horizontal plane.
The material of primary standard 1 is brass, when guaranteeing required mechanical properties, electric conductivity is strong, interference immunity is good, fastening screw I5 and fastening screw II 6's material also are brass, the screw is the same with the screw hole material and is favorable to reducing the wearing and tearing of screw thread, U type card pipe 4, clamp plate 2 and U type press from both sides the material of 3 and be the spring steel, good intensity and elasticity have, make U type card pipe 4, clamp plate 2 and U type press from both sides 3 and have certain elastic deformation ability, in order to guarantee to compress tightly and carry the net.
Use the utility model relates to a during scanning electron microscope sample platform of ballast network sample, according to the following step operation:
1) after the main table 1 is flatly placed, the tweezers are inserted into the U-shaped clamping grooves 1-6 to clamp the connecting plate 2-2, so that the end of the pressing ring 2-1 of the pressing plate 2 is lifted;
2) placing the net into the sample loading groove 1-4 along the sampling groove 1-3 by using a pair of tweezers;
3) inserting a nipper into the U-shaped clamping groove 1-6, clamping the connecting plate 2-2, and pressing down the end of the pressing ring 2-1 of the pressing plate 2 so that the clamping head 3-1 of the U-shaped clamp 3 clamps the connecting plate 2-2 of the pressing plate 2, thereby enabling the pressing ring 2-1 to press the carrier net;
4) placing the sample stage into a sample stage bracket, fastening, feeding into an observation bin of a scanning electron microscope, and vacuumizing;
5) opening the high voltage, injecting high-energy electron beams, and observing the sample;
6) after the observation is finished, the high pressure is closed, the bracket of the sample table is taken out, and the sample table is detached;
7) inserting the tweezers into the U-shaped clamping groove 1-6, clamping and lifting the connecting plate 2-2, and separating the end 2-1 of the pressing ring 2 from the sample loading groove 1-4;
8) taking the net out of the sample loading groove 1-4 along the sample loading groove 1-3 by using tweezers;
9) and returning the components of the sample table.
The above embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention are all included in the scope of the present invention.
Claims (10)
1. The utility model provides a scanning electron microscope sample platform of ballast net sample, includes main stand (1), clamp plate (2), U type clamp (3), U type card pipe (4), fastening screw I (5) and fastening screw II (6), its characterized in that:
the main platform (1) is cylindrical and comprises a platform body (1-1), a sample loading column (1-2), a sampling groove (1-3), a sample loading groove (1-4), a pressing plate groove (1-5), a U-shaped clamping groove (1-6), a rotating shaft groove (1-7), a threaded hole I (1-8) and a threaded hole II (1-9), wherein the sample loading column (1-2) is uniformly distributed on the upper part of the platform body (1-1) along the circumference, the sample loading groove (1-4) is positioned in the center of the sample loading column (1-2), the section, perpendicular to the axis of the sample loading column (1-2), of the sample loading groove (1-4) is circular, the sampling groove (1-3) is positioned on the outer edge of the sample loading column (1-2), and the cross section of the sampling groove (1-3) is rectangular, the central line of the sampling groove (1-3) points to the axis of the platform body (1-1), the pressure plate groove (1-5) is positioned at the inner side edge of the sample loading column (1-2), the cross section of the pressure plate groove (1-5) is rectangular, the central line of the pressure plate groove (1-5) points to the axis of the platform body (1-1), the U-shaped clamping groove (1-6) is positioned at the inner side of the sample loading column (1-2), the central line of the U-shaped clamping groove (1-6) points to the axis of the platform body (1-1), the rotating shaft groove (1-7) is positioned at the inner side of the U-shaped clamping groove (1-6), the central line of the rotating shaft groove (1-7) points to the axis of the platform body (1-1), and the threaded holes I (1-8) are symmetrically distributed at two sides of the rotating shaft groove (1-7), the threaded holes II (1-9) are positioned at the bottoms of the U-shaped clamping grooves (1-6);
the pressing plate (2) comprises a pressing ring (2-1), a connecting plate (2-2) and a rotating shaft (2-3), the pressing ring (2-1) and the rotating shaft (2-3) are respectively positioned at two ends of the pressing plate (2), the connecting plate (2-2) is connected with the pressing ring (2-1) and the rotating shaft (2-3), the pressing ring (2-1), the connecting plate (2-2) and the rotating shaft (2-3) are integrally formed, two sides of the connecting plate (2-2) are semicircular, and the pressing ring (2-1) and the connecting plate (2-2) are the same in thickness;
the U-shaped clamp (3) comprises clamping heads (3-1), clamping pieces (3-2) and mounting holes I (3-3), wherein the clamping heads (3-1) are positioned at the upper part of the U-shaped clamp (3) and are symmetrically distributed, the clamping heads (3-1) are semi-cylinders, the clamping pieces (3-2) are positioned at the lower part of the U-shaped clamp (3), the clamping pieces (3-2) are U-shaped, the clamping heads (3-1) and the clamping pieces (3-2) are integrally formed, and the mounting holes I (3-3) are positioned at the center of the bottom of the U-shaped clamp (3);
the U-shaped clamp pipe (4) comprises a clamp (4-1), a connecting piece (4-2) and a mounting hole II (4-3), the cross section of the clamp (4-1) is semicircular, the connecting pieces (4-2) are symmetrically distributed on two sides of the clamp (4-1), the clamp (4-1) and the connecting piece (4-2) are integrally formed, and the mounting hole II (4-3) is located on the connecting piece (4-2);
the fastening screw I (5) comprises a nut (5-1), a polished rod (5-2), a threaded rod (5-3) and a straight-line groove (5-4), the nut (5-1) is positioned at the upper part of the fastening screw I (5), the polished rod (5-2) is positioned in the middle of the fastening screw I (5), the threaded rod (5-3) is positioned at the lower part of the fastening screw I (5), the nut (5-1), the polished rod (5-2) and the threaded rod (5-3) are integrally formed, and the nut (5-1) is provided with the straight-line groove (5-4);
the mounting hole I (3-3) of the U-shaped clamp (3) corresponds to a threaded hole II (1-9) of the main platform (1), a fastening screw II (6) penetrates through the mounting hole I (3-3) of the U-shaped clamp (3) and then is connected with the threaded hole II (1-9) of the main platform (1) in a threaded fit mode, the U-shaped clamp (3) and the main platform (1) are mounted together, a rotating shaft (2-3) of the pressing plate (2) is located in a rotating shaft groove (1-7) of the main platform (1), the mounting hole II (4-3) of the U-shaped clamp pipe (4) corresponds to the threaded hole I (1-8) of the main platform (1), the fastening screw I (5) penetrates through the mounting hole II (4-3) of the U-shaped clamp pipe (4) and then is connected with the threaded hole I (1-8) of the main platform (1) in a threaded fit mode, the U-shaped clamp pipe (4) is installed together with the main table (1), a rotating shaft (2-3) of the pressing plate (2) is tightly attached to a rotating shaft groove (1-7) of the main table (1), the rotating shaft (2-3) of the pressing plate (2) is tightly attached to a hoop (4-1) of the U-shaped clamp pipe (4), and the bottom surface of the pressing plate groove (1-5) and the lower surface of the connecting plate (2-2) are located in the same horizontal plane.
2. A scanning electron microscope sample stage for a ring ballast network sample according to claim 1, wherein: the thickness of the pressure ring (2-1) is 1.5-2.0 mm.
3. A scanning electron microscope sample stage for a ring ballast network sample according to claim 1, wherein: the diameter of the sample loading groove (1-4) is 3.6mm, and the depth of the sample loading groove is 0.01mm larger than the thickness of the compression ring (2-1).
4. A scanning electron microscope sample stage for a ring ballast network sample according to claim 1, wherein: the depth of the sampling groove (1-3) is equal to the height of the sample loading column (1-2).
5. A scanning electron microscope sample stage for a ring ballast network sample according to claim 1, wherein: the length of the sampling groove (1-3) in the sample loading groove (1-4) is 0.9 mm.
6. A scanning electron microscope sample stage for a ring ballast network sample according to claim 1, wherein: the depth of the U-shaped clamp groove (1-6) is greater than the sum of the height of the nut of the screw II (6) and the thickness of the clamping piece (3-2) of the U-shaped clamp (3).
7. A scanning electron microscope sample stage for a ring ballast network sample according to claim 1, wherein: the length of the U-shaped clamp groove (1-6) in the radial direction of the main platform (1) is larger than the width of the clamping piece (3-2) of the U-shaped clamp (3).
8. A scanning electron microscope sample stage for a ring ballast network sample according to claim 1, wherein: the distance between the two clamping pieces (3-2) is 0.2-0.5mm smaller than that of the connecting plate (2-2).
9. A scanning electron microscope sample stage for a ring ballast network sample according to claim 1, wherein: the length of a polish rod (5-2) of the screw I (5) is 0.1mm less than the thickness of a connecting piece (4-2) of the U-shaped clamping pipe (4).
10. A scanning electron microscope sample stage for a ring ballast network sample according to claim 1, wherein: the length of the polish rod of the screw II (6) is 0.1mm less than the thickness of the clamping piece (3-2) of the U-shaped clamp (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022943379.3U CN213278008U (en) | 2020-12-11 | 2020-12-11 | A scanning electron microscope sample stage for ring ballast mesh samples |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022943379.3U CN213278008U (en) | 2020-12-11 | 2020-12-11 | A scanning electron microscope sample stage for ring ballast mesh samples |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213278008U true CN213278008U (en) | 2021-05-25 |
Family
ID=75955291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022943379.3U Expired - Fee Related CN213278008U (en) | 2020-12-11 | 2020-12-11 | A scanning electron microscope sample stage for ring ballast mesh samples |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213278008U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115015301A (en) * | 2022-04-12 | 2022-09-06 | 华东师范大学 | Preparation of FIB sample holder for horizontal carrier grid platform and method of using the same |
| CN115078427A (en) * | 2022-05-23 | 2022-09-20 | 华东师范大学 | Rapid clamping FIB semicircular net carrying device and using method thereof |
-
2020
- 2020-12-11 CN CN202022943379.3U patent/CN213278008U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115015301A (en) * | 2022-04-12 | 2022-09-06 | 华东师范大学 | Preparation of FIB sample holder for horizontal carrier grid platform and method of using the same |
| CN115078427A (en) * | 2022-05-23 | 2022-09-20 | 华东师范大学 | Rapid clamping FIB semicircular net carrying device and using method thereof |
| CN115078427B (en) * | 2022-05-23 | 2024-10-29 | 华东师范大学 | Semi-circular net carrying device for rapidly clamping FIB and application method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107607394A (en) | 4 angle couplings tool and its loading method for the loading of thin plate high stress | |
| EP3423813A2 (en) | Xps and raman sample analysis system and method | |
| CN213278008U (en) | A scanning electron microscope sample stage for ring ballast mesh samples | |
| CN202066807U (en) | Electron collector being suitable for intelligently testing secondary electron emission coefficient of solid material | |
| CN109738288B (en) | Multifunctional modularized particle accelerator material irradiation sample holder | |
| CN106935464A (en) | Instrument and diffraction image imaging method for transmitted electron back scattering diffraction | |
| CN110987995B (en) | Universal sample holder for scanning electron microscope and in-situ mechanical test and three-dimensional atomic probe equipment | |
| CN108709901B (en) | A pressure ring device for direct measurement of atmospheric particles carried by filter membrane using total reflection X-ray fluorescence spectrometer | |
| CN210743907U (en) | Sample stage for scanning electron microscope capable of simultaneously placing multiple section samples and surface samples | |
| CN109346391B (en) | A dual-beam system sample stage for loading near-local electrodes | |
| CN105869987B (en) | A kind of QMS | |
| CN220340092U (en) | Special clamp for scanning electron microscope for circular titanium sheet section fracture sample | |
| CN209198172U (en) | A multifunctional jig for metallographic sample preparation | |
| WO2021128972A1 (en) | Target holder assembly of ion probe, and sample target preparation method | |
| CN210005348U (en) | multifunctional modularized particle accelerator material irradiation sample holder | |
| CN206460940U (en) | A kind of multi-angle sample platform of scanning electronic microscope | |
| CN108535298A (en) | A kind of micro slide and application method for the bad powder of SEM electric conductivities | |
| CN108802129A (en) | A kind of adjustable electro-chemical test electrode holder | |
| CN213278009U (en) | A scanning electron microscope sample stage for easy loading and unloading of mesh samples | |
| CN214844915U (en) | A sample stage capable of carrying micro- and nano-scale samples | |
| CN219038883U (en) | Scanning electron microscope block-shaped sample table | |
| CN216669795U (en) | Clamp for grinding and polishing end face of metal sheet sample and testing scanning electron microscope | |
| CN109884098B (en) | In-situ stretching device for X-ray grazing incidence diffraction and experimental method | |
| CN217405365U (en) | Scanning electron microscope sample stage convenient to loading and unloading irregular sample | |
| CN209447760U (en) | A kind of scanning electron microscope sample stage for observing sample fracture |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210525 Termination date: 20211211 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |