CN218826948U - Scanning electron microscope sample stage capable of simultaneously observing cross sections of grid-loaded sample and cylindrical sample - Google Patents

Abstract

The utility model belongs to the technical field of sample platform for the scanning electron microscope, specifically can observe the sectional scanning electron microscope sample platform of carrier net sample and cylindrical sample simultaneously, including the main station, go up vice platform, fastening screw, steel ball, spring, positioning base, connecting screw, clamp plate, U type clamp, U type card pipe, fastening screw down, the main station passes through connecting screw with vice platform down and connects, goes up vice platform and passes through fastening screw with vice platform down and connect. The main table, the U-shaped clamps and the U-shaped clamp pipes are connected together through fastening screws, the compression rings on the compression plates can compress the carrier net with the samples, the steel balls can fix cylindrical samples with different diameters under the action of the springs, and the height of the sections of the cylindrical samples with different lengths can be adjusted by the positioning base. The utility model discloses both guaranteed the fixed stability of year net sample, can load the cylindrical sample of different diameters or different length again, enlarged the application range of sample platform, be the innovation in the aspect of the sample platform for the scanning electron microscope.

Description

Scanning electron microscope sample stage capable of simultaneously observing cross sections of grid-loaded sample and cylindrical sample

Technical Field

The utility model belongs to the technical field of the scanning electron microscope sample platform, in particular to can observe the scanning electron microscope sample platform of carrier net sample and cylindrical sample section simultaneously.

Background

Scanning electron microscopy is a large analytical instrument that characterizes the morphology and composition of surface ultrastructures of various substances. The working principle of the scanning electron microscope is that a high-energy electron beam is used for bombarding the surface of a sample, various electron signals can be generated due to the interaction between the electron beam and the sample, and then corresponding signals are collected by various probes, so that the analysis of the surface appearance and the micro-area components of the sample is realized. The scanning electron microscope has the advantages of simple sample preparation, large field depth, large visual field, good imaging stereo effect, and magnification which covers most of the range from an optical microscope to a transmission electron microscope, and can analyze the appearance, components, crystal forms and the like of the sample, so the scanning electron microscope is widely applied to various fields of materials, chemistry, physics, biology, medicine, engineering mechanics and the like.

The sample stage is one of the key components of the scanning electron microscope, the observed sample needs to be stably fixed on the sample stage, and the surface of the observed sample needs to be perpendicular to the incident direction of the electron beam, so that the sample can be represented by imaging under the coordination of other systems of the scanning electron microscope.

When using the sample stage in scientific research and production life, the following problems are commonly encountered:

1) The number of samples which can be placed at one time is small, the function is single, only one type of sample can be placed generally, the utilization rate of a scanning electron microscope is low, and the working efficiency is low;

2) The grid-carrying sample can not be subjected to other tests after being observed by a scanning electron microscope. The carrier net is fixed on the surface of the sample table through the conductive adhesive, the carrier net can be damaged in the process of taking off the carrier net, and meanwhile, a part of the conductive adhesive is remained to pollute a sample, so that the sample can not be subjected to other tests;

3) The cylindrical sample cannot be stably placed on a common sample table, is easy to incline or fall off in the observation process, and when a plurality of cylindrical samples with different diameters and lengths are placed at one time, the observation distances among different samples are greatly different, so that the section of the sample is difficult to be ensured to be in the horizontal direction;

4) The conductivity of the conductive adhesive is low, and the conductive adhesive often remains on the sample table to pollute the sample table, so that a subsequently pasted sample is polluted.

The above problems have seriously hindered the use of scanning electron microscopes in a wider range, and there is an urgent need for those skilled in the art to solve the problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a can observe the sectional scanning electron microscope sample platform of carrier net sample and cylindrical sample simultaneously, solve following technical problem: (1) how to simultaneously place a plurality of grid-carrying samples and cylindrical samples at one time, and improve the utilization rate of a scanning electron microscope and the working efficiency of technicians; (2) how to enable the net-carrying sample to be continuously applied to other tests after the test of the scanning electron microscope; (3) how to ensure that a plurality of cylindrical samples with different diameters and lengths can be simultaneously fixed on a sample table, and the plane of the section of the sample table is vertical to the incident direction of an electron beam; (4) how to avoid the pollution of the conductive adhesive and ensure the consistency of the sample.

The utility model adopts the following technical scheme: the scanning electron microscope sample stage capable of simultaneously observing the cross sections of a grid-carrying sample and a cylindrical sample comprises a main stage, an upper auxiliary stage, a lower auxiliary stage, fastening studs, steel balls, springs, a positioning base, connecting studs, a pressing plate, a U-shaped clamp, a U-shaped clamping tube and fastening screws.

The main platform lower half be cylindrical, the first half be the cross-section for excellent bow-shaped cylinder, including stage body I, year appearance boss, U type clamp groove, rotation axis groove, screw hole I, screw hole II, ladder through-hole, positioning groove and vice platform installation face, year appearance boss be provided with 3, evenly distributed on stage body I, year appearance boss include the sample groove, carry appearance groove, clamp plate groove, the sample groove be located the outside edge of year appearance boss, the degree of depth of sample groove equals with the height of year appearance boss, year appearance groove be located the center of carrying the appearance boss, the diameter is 3.6 mm, clamp plate trench be located the inboard edge of carrying the appearance boss, U type clamp groove be located the inboard of carrying the appearance boss, the rotation axis trench be located the inboard of U type clamp groove, screw hole I be in the bilateral symmetry distribution of rotation axis groove, screw hole II be located the bottom of U type clamp groove, the ladder through-hole run through the main platform, the location recess be located one side of the plane of main platform the installation face of main platform, the boss of vice platform lower half is located the boss.

Go up the auxiliary table be the cylinder that the cross-section is inferior bow-shaped, including stage II, objective hole I and screw hole III, objective hole I have 7, run through last auxiliary table, the diameter is 3mm, screw hole III have 3, evenly distributed on stage II.

Lower balcony be the cylinder that the cross-section is inferior bow-shaped, including stage body III, objective hole II, spring groove, positioning base screw hole, fastening screw hole, location arch and connecting screw hole, objective hole II be located the upper portion of lower balcony, the diameter is 3mm, positioning base screw hole be located the lower part of lower balcony and with II concentric circles in objective hole, the spring groove be located the upper end circumference of objective hole II, every objective hole II has 4 spring grooves, fastening screw hole have 3, be located the upper portion of lower balcony, the protruding plane one side that is located lower balcony of location, highly little 1mm than positioning groove's the degree of depth, connecting screw hole be located the location arch.

Fastening stud include nut I, polished rod I, screw thread I and a word recess I, nut I and screw thread I be located fastening stud's both ends, polished rod I be located fastening stud's centre, nut I on be equipped with a word recess I.

The positioning base comprises a round cap, a screw rod and a straight groove II, the round cap is located on the upper portion of the positioning base, the diameter of the round cap is 0.01mm smaller than that of the object carrying hole II, the screw rod is located on the lower portion of the positioning base, and the straight groove II is formed in the tail end of the screw rod.

The connecting stud comprises a nut II, a polished rod II, a thread II and a straight groove III.

The clamp plate include clamping ring, connecting plate and rotation axis, clamping ring and rotation axis be located the both ends of connecting plate, the thickness of clamping ring is less than 0.01mm than the degree of depth that carries the appearance groove.

The U type press from both sides including chuck, clamping piece and mounting hole I, the chuck be located the upper portion that the U type pressed from both sides, the chuck is the halfcylinder, the clamping piece be located the lower part that the U type pressed from both sides, the clamping piece is the U type, mounting hole I be located the bottom center that the U type pressed from both sides.

The U-shaped clamp pipe comprises a clamp, connecting pieces and mounting holes II, wherein the connecting pieces are symmetrically distributed on two sides of the clamp, and the mounting holes II are located in the centers of the connecting pieces.

The fastening screw comprises a screw cap III, a polished rod III, a thread III and a straight groove IV.

The fastening screw bolt penetrates through the threaded hole III of the upper auxiliary platform to be matched and connected with the fastening threaded hole of the lower auxiliary platform, the upper auxiliary platform and the lower auxiliary platform are installed together, and the steel ball and the spring are installed in the spring groove of the lower auxiliary platform.

The lower auxiliary platform is arranged on an auxiliary platform mounting surface of the main platform, the positioning groove of the main platform is matched and connected with the positioning bulge of the lower auxiliary platform, and the connecting stud penetrates through the stepped through hole of the main platform to be matched with the connecting threaded hole of the lower auxiliary platform, so that the main platform and the lower auxiliary platform are mounted together.

The position adjusting base is connected with the threaded hole of the position adjusting base in a threaded fit mode.

The U-shaped clamp is installed in the U-shaped clamp groove, fastening screws penetrate through installation holes I to be connected with screw holes II in a matched mode, the U-shaped clamp is fixed on the main platform, the pressing plate is installed in the pressing plate groove, the rotating shaft is located in the rotating shaft groove, the U-shaped clamping pipes are located right above the rotating shaft groove, the fastening screws penetrate through the installation holes II to be connected with the screw holes I in a matched mode, and the U-shaped clamping pipes are fixed on the main platform.

The utility model discloses following beneficial technological effect has:

1) The sample carrying groove of the main platform can be used for placing a net carrying sample, and the carrying holes of the upper auxiliary platform and the lower auxiliary platform can be used for placing cylindrical samples of sections to be observed, so that the utilization rate of the sample platform of the scanning electron microscope is improved;

2) After the sample on the grid is observed under a scanning electron microscope, the sample can be continuously used for other tests (such as transmission electron microscope tests), so that the sample can be recycled for multiple times;

3) The cylindrical sample table is placed in the object carrying holes of the upper sub-table and the lower sub-table, cylindrical samples with different diameters can be fastened through the interaction of the spring and the steel ball, and the samples are prevented from inclining and falling off in the observation process;

4) Rotating the positioning base to move up and down to drive the cylindrical sample to move up and down, so that the height of the cylindrical sample is adjusted, the section of the cylindrical sample is ensured to be in the same horizontal plane, and the plane of the section is vertical to the incident direction of the electron beam;

5) The pressure-bearing net is pressed through the pressure ring to fix the net-bearing sample, and the steel balls and the springs also have the combined action of the positioning base to fix the cylindrical sample, so that the use of conductive adhesive and the pollution to the sample are avoided.

Drawings

FIG. 1 is a top view of a scanning electron microscope sample stage for simultaneously observing the cross section of a grid sample and a cylindrical sample;

FIG. 2 is an enlarged view of a portion A of FIG. 1;

FIG. 3 is an enlarged view of a portion B of FIG. 1;

FIG. 4 isbase:Sub>A cross-sectional view taken along line A-A of FIG. 1;

FIG. 5 is an enlarged view of a portion of FIG. 4 at C;

FIG. 6 is an enlarged view of a portion of FIG. 4 at D;

FIG. 7 is an enlarged view of a portion E of FIG. 4;

FIG. 8 is a cross-sectional view taken along line B-B of FIG. 1;

FIG. 9 is an enlarged view of a portion of FIG. 8 at F;

FIG. 10 is a top view of the scanning electron microscope stage for simultaneously observing the cross-section of the grid sample and the cylindrical sample;

FIG. 11 is an enlarged view of a portion of FIG. 10 at G;

FIG. 12 is a cross-sectional view C-C of FIG. 10;

FIG. 13 is a cross-sectional view taken along line D-D of FIG. 10;

FIG. 14 is a cross-sectional view E-E of FIG. 10;

FIG. 15 is a top view of the upper sub-stage of the SEM sample stage for simultaneously observing the cross-section of the grid sample and the cylindrical sample;

FIG. 16 is a cross-sectional view F-F of FIG. 15;

fig. 17 is a left side view of the upper sub-stage of the scanning electron microscope sample stage of the present invention capable of simultaneously observing the cross-section of the grid sample and the cylindrical sample;

FIG. 18 is a top view of the lower sub-stage of the SEM sample stage for simultaneously observing the cross-section of the grid sample and the cylindrical sample;

FIG. 19 is a sectional view taken along line G-G of FIG. 18;

FIG. 20 is a left side view of the lower sub-stage of the SEM sample stage for simultaneously observing the cross-section of the grid sample and the cylindrical sample;

fig. 21 is a front view of a fastening stud of a scanning electron microscope sample stage of the present invention capable of simultaneously observing the cross-section of a grid sample and a cylindrical sample;

fig. 22 is a top view of the fastening stud of the sample stage of the scanning electron microscope of the present invention for simultaneously observing the cross-section of the grid sample and the cylindrical sample;

FIG. 23 is a front view of the positioning base of the SEM sample stage for simultaneously observing the cross-section of the grid sample and the cylindrical sample;

FIG. 24 is a top view of the positioning base of the SEM sample stage for simultaneously observing the cross-section of the grid sample and the cylindrical sample;

FIG. 25 is a front view of a connecting stud of a SEM sample stage for simultaneously observing the cross-section of a grid sample and a cylindrical sample;

FIG. 26 is a left side view of the connecting stud of the SEM sample stage for simultaneously observing the cross-section of the grid sample and the cylindrical sample;

FIG. 27 is a top view of the pressing plate of the SEM sample stage for simultaneously observing the cross-section of the grid sample and the cylindrical sample;

FIG. 28 is a sectional view taken at H-H in FIG. 27;

FIG. 29 is a sectional view taken along line J-J of FIG. 27;

FIG. 30 is a front view of the pressing plate of the SEM sample stage for simultaneously observing the cross-section of the grid sample and the cylindrical sample;

FIG. 31 is a front view of a U-shaped clamp of a scanning electron microscope sample stage of the present invention for simultaneously observing the cross-section of a grid-carrying sample and a cylindrical sample;

FIG. 32 is a cross-sectional view taken at K-K of FIG. 31;

FIG. 33 is a front view of a U-shaped clamp tube of a scanning electron microscope sample stage of the present invention capable of simultaneously observing the cross-section of a grid-carrying sample and a cylindrical sample;

FIG. 34 is a top view of a U-shaped clamping tube of a scanning electron microscope sample stage of the present invention capable of simultaneously observing the cross-section of a grid-carrying sample and a cylindrical sample;

FIG. 35 is a front view of a fastening screw of a SEM sample stage for simultaneously observing the cross-section of a grid sample and a cylindrical sample;

fig. 36 is a top view of the fastening screw of the scanning electron microscope sample stage capable of observing the grid sample and the cylindrical sample section simultaneously.

Description of the reference numerals: 1. a main platform, 1-1, a platform body I, 1-2, a sample loading boss, 1-2-1 sampling grooves, 1-2-2 sample loading grooves, 1-2-3 pressing plate grooves, 1-3U-shaped clamping grooves, 1-4 rotating shaft grooves, 1-5 threaded holes I, 1-6 threaded holes II, 1-7 stepped through holes, 1-8 positioning grooves, 1-9 auxiliary platform mounting surfaces, 2, an upper auxiliary platform, 2-1, a platform body II, 2-2, object carrying holes I, 2-3 threaded holes III, 3, a lower auxiliary platform, 3-1, a platform body III, 3-2, object carrying holes II, 3-3, a spring groove, 3-4, a positioning base threaded hole, 3-5, a fastening threaded hole, 3-6 positioning bulges, 3-7 connecting threaded holes, 4, fastening studs, 4-1, nuts I, 4-2, polish rods I, 4-3, threads I, 4-4, straight grooves I, 5, steel balls, 6, springs 7, positioning bases, 7-1, round caps, 7-2, screws, 7-3, straight grooves II, 8, connecting studs, 8-1, nuts II, 8-2, polish rods II, 8-3, threads II, 8-4, straight grooves III, 9, pressing plates, 9-1, pressing rings, 9-2, connecting plates, 9-3, rotating shafts, 10, U-shaped clamps, 10-1, chucks, 10-2, clamping pieces, 10-3, mounting holes I, 11, U-shaped clamping pipes, 11-1, clamping hoops, 11-2, connecting pieces, 11-3, mounting holes II, 12, fastening screws 12-1, screw caps III, 12-2, polished rods III, 12-3, threads III, 12-4 and straight grooves IV.

Note: in the drawings of the present invention, the grid sample and the cylindrical sample are not shown.

Detailed Description

The technical solution of the present invention is described in further detail below with reference to the accompanying drawings, but the scope of the present invention is not limited to the following description.

As shown in fig. 1 to 36, the scanning electron microscope sample stage capable of simultaneously observing the cross sections of a grid-carrying sample and a cylindrical sample comprises a main stage 1, an upper sub-stage 2, a lower sub-stage 3, fastening studs 4, steel balls 5, springs 6, a positioning base 7, connecting studs 8, a pressing plate 9, a U-shaped clamp 10, a U-shaped clamp tube 11 and fastening screws 12.

The lower half part of the main platform 1 is cylindrical, the upper half part of the main platform 1 is a cylinder with a section of a superior arch shape and comprises a platform body I1-1, sample carrying bosses 1-2, U-shaped clamping grooves 1-3, rotating shaft grooves 1-4, threaded holes I1-5, threaded holes II 1-6, stepped through holes 1-7, positioning grooves 1-8 and an auxiliary platform mounting surface 1-9, the sample carrying bosses 1-2 are uniformly distributed on the platform body I1-1, 3 sample carrying bosses 1-2 are arranged, the sample carrying bosses 1-2 comprise sampling grooves 1-2-1, sample carrying grooves 1-2-2 and pressure plate grooves 1-2-3, the sampling grooves 1-2-1 are positioned on the outer side edge of the sample carrying bosses 1-2, and the cross sections of the sampling grooves 1-2-1 are rectangular, the depth of the sampling groove 1-2-1 is equal to the height of the sample loading boss 1-2, the sample loading groove 1-2-2 is positioned in the center of the sample loading boss 1-2, the diameter of the sample loading groove 1-2-2 is 3.6 mm, the pressure plate groove 1-2-3 is positioned at the inner side edge of the sample loading boss 1-2, the cross section of the pressure plate groove 1-2-3 is rectangular, the U-shaped clamping groove 1-3 is positioned at the inner side of the sample loading boss 1-2, the rotating shaft groove 1-4 is positioned at the inner side of the U-shaped clamping groove 1-3, the threaded holes I1-5 are symmetrically distributed at two sides of the rotating shaft groove 1-4, the threaded holes II 1-6 are positioned at the bottom of the U-shaped clamping groove 1-3, the stepped through hole 1-7 penetrates through the main table 1, the positioning groove 1-8 is positioned at one side of the plane of the main table 1, the large hole of the stepped through hole 1-7 is located on the arc-shaped side of the main platform 1, the small hole of the stepped through hole 1-7 penetrates through the platform body I1-1 to connect the positioning groove 1-8 with the large hole of the stepped through hole 1-7, and the auxiliary platform mounting surface 1-9 is located on the boss on the lower half portion of the main platform 1.

The upper secondary table 2 is a cylinder with a cross section in a shape of a trapezoid arch and comprises a table body II 2-1, object carrying holes I2-2 and threaded holes III 2-3, the object carrying holes I2-2 penetrate through the upper secondary table 2, the number of the object carrying holes I2-2 is 7, the diameter of the object carrying holes I2-2 is 3mm, the threaded holes III 2-3 are uniformly distributed on the table body II 2-1, and the number of the threaded holes III 2-3 is 3.

The lower auxiliary table 3 is a cylinder with a cross section in a shape of a trapezoid arch and comprises a table body III 3-1, object carrying holes II 3-2, spring grooves 3-3, position adjusting base threaded holes 3-4, fastening threaded holes 3-5, positioning bulges 3-6 and connecting threaded holes 3-7, the object carrying holes II 3-2 are located on the upper portion of the lower auxiliary table 3, the position adjusting base threaded holes 3-4 are located on the lower portion of the lower auxiliary table 3 and are concentric with the object carrying holes II 3-2, the spring grooves 3-3 are located on the upper end circumference of the object carrying holes II 3-2, 4 spring grooves 3-3 are arranged in each object carrying hole II 3-2, the cross section of each spring groove 3-3 is semicircular, the fastening threaded holes 3-5 are located on the upper portion of the lower auxiliary table 3, the fastening threaded holes 3-5 are provided with 3, the positioning bulges 3-6 are located on one side of the plane of the lower auxiliary table 3, and the connecting threaded holes 3-7 are located on the positioning bulges 3-6.

The fastening stud 4 comprises a nut I4-1, a polished rod I4-2, threads I4-3 and a straight-line groove I4-4, the nut I4-1 and the threads I4-3 are located at two ends of the fastening stud 4, the polished rod I4-2 is located in the middle of the fastening stud 4, the nut I4-1 is provided with the straight-line groove I4-4, and a straight-line screwdriver can be used for rotating the straight-line groove I4-4 to drive the fastening stud 4 to rotate.

The steel ball 5 and the spring 6 are arranged in the spring groove 3-3 of the lower auxiliary table 3, and the steel ball 5 and the spring 6 are matched with each other, so that a cylindrical sample can be effectively fixed.

The positioning base 7 comprises a round cap 7-1, a screw rod 7-2 and a linear groove II 7-3, the round cap 7-1 is located on the upper portion of the positioning base 7, the diameter of the round cap 7-1 is 0.01mm smaller than that of the object carrying hole II 3-2, so that the positioning base 7 can move smoothly in the object carrying hole II 3-2, the screw rod 7-2 is located on the lower portion of the positioning base 7, the linear groove II 7-3 is formed in the tail end of the screw rod 7-2, and the linear groove II 7-3 is rotated by a linear screwdriver, so that the positioning base 7 can move up and down, and the height of a sample is adjusted.

The connecting stud 8 comprises a nut II 8-1, a polish rod II 8-2, a thread II 8-3 and a straight groove III 8-4.

The pressing plate 9 comprises a pressing ring 9-1, a connecting plate 9-2 and a rotating shaft 9-3, the pressing ring 9-1 and the rotating shaft 9-3 are located at two ends of the connecting plate 9-2, the thickness of the pressing ring 9-1 is 0.01mm smaller than the depth of the sample loading groove 1-2-2, the pressing ring 9-1 is guaranteed to flatly press the loading net, the rotating shaft 9-3 is tightly attached to a rotating shaft groove 1-4 of the main table 1, the rotating shaft 9-3 is prevented from moving radially, and the pressing ring 9-1 and the connecting plate 9-2 are the same in thickness.

The U-shaped clamp 10 comprises a clamping head 10-1, a clamping piece 10-2 and a mounting hole I10-3, wherein the clamping head 10-1 is located at the upper portion of the U-shaped clamp 10, the clamping head 10-1 is a semi-cylinder, the clamping piece 10-2 is located at the lower portion of the U-shaped clamp 10, the clamping piece is U-shaped, the clamping head 10-1 and the clamping piece 10-2 are integrally formed, and the mounting hole I10-3 is located at the center of the bottom of the U-shaped clamp 10.

The U-shaped clamp pipe 11 comprises a clamp 11-1, connecting pieces 11-2 and mounting holes II 11-3, the cross section of the clamp 11-1 is semicircular, the connecting pieces 11-2 are symmetrically distributed on two sides of the clamp 11-1, and the mounting holes II 11-3 are located in the centers of the connecting pieces 11-2.

The fastening screw 12 comprises a nut III 12-1, a polish rod III 12-2, a thread III 12-3 and a straight groove IV 12-4.

And a fastening stud 4 passes through a threaded hole III 2-3 of the upper auxiliary table 2 to be matched and connected with a fastening threaded hole 3-5 of the lower auxiliary table 3, so that the upper auxiliary table 2 and the lower auxiliary table 3 are installed together.

The lower auxiliary table 3 is arranged on an auxiliary table mounting surface 1-9 of the main table 1, positioning grooves 1-8 of the main table 1 are matched and connected with positioning protrusions 3-6 of the lower auxiliary table 3, connecting studs 8 penetrate through stepped through holes 1-7 of the main table 1 to be matched with connecting threaded holes 3-7 of the lower auxiliary table 3, the main table 1 and the lower auxiliary table 3 are mounted together, and the height of the positioning protrusions 3-6 is 1mm smaller than the depth of the positioning grooves 1-8, so that threads II 8-3 of the connecting threaded holes 3-7 and the connecting studs 8 are not damaged.

The positioning base 7 is connected with the threaded hole 3-4 of the positioning base in a threaded fit mode.

The U-shaped clamp 10 is installed in a U-shaped clamp groove 1-3, a fastening screw 12 penetrates through an installation hole I10-3 to be connected with a threaded hole II 1-6 in a matched mode, the U-shaped clamp 10 is fixed on the main platform 1, the pressing plate 9 is installed in a pressing plate groove 1-2-3, the rotating shaft 9-3 is located in a rotating shaft groove 1-4, the U-shaped clamping pipe 11 is located right above the rotating shaft groove 1-4, the fastening screw 12 penetrates through the installation hole II 11-3 to be connected with the threaded hole I1-5 in a matched mode, and the U-shaped clamping pipe 11 is fixed on the main platform 1.

Use the utility model discloses can observe simultaneously and carry the net sample and cylindrical sample sectional scanning electron microscope sample platform during, according to the following step operation:

1) After the main table 1 is flatly placed, the tweezers are inserted into the U-shaped clamping grooves 1-3 to clamp the connecting plate 9-2, so that the end of the pressing ring 9-1 of the pressing plate 9 is lifted;

2) Clamping the carrying net by using tweezers, and putting the carrying net into the sample carrying groove 1-2-2 along the sampling groove 1-2-1;

3) Inserting tweezers into the U-shaped clamping groove 1-3, clamping the connecting plate 9-2, and pressing down the end of the pressing ring 9-1 of the pressing plate 9 to enable the clamping head 10-1 of the U-shaped clamp 10 to clamp the connecting plate 9-2 of the pressing plate 9, so that the pressing ring 9-1 presses the carrier net;

4) Inserting a fastening stud 4 into a fastening threaded hole 3-5 of a lower auxiliary table 3 through a threaded hole II 2-3 of an upper auxiliary table 2, rotating a straight-line groove I4-4 of the fastening stud 4 by using a straight-line screwdriver, and connecting the upper auxiliary table 2 and the lower auxiliary table 3 together by utilizing the matching of a thread I4-3 of the fastening stud 4 and a fastening threaded hole 3-5 of the lower auxiliary table 3;

5) Putting a cylindrical sample into a cylindrical sample carrying barrel formed by matching a carrying hole I2-2 of an upper auxiliary table 2 and a carrying hole II 3-2 of a lower auxiliary table 3, fixing the sample by utilizing the mutual matching of a steel ball 5 and a spring 6, and rotating a linear groove II 7-3 of a positioning base 7 by using a linear screwdriver to vertically move the positioning base 7, so that the sample is vertically moved and the height of the sample is adjusted;

6) Inserting the connecting stud 8 into a stepped through hole 1-7 of the main platform 1, rotating a linear groove III 8-4 of the connecting stud 8 by using a linear screwdriver, and connecting the main platform 1 and the lower auxiliary platform 3 together by utilizing the matching of a thread II 8-3 of the connecting stud 8 and a connecting threaded hole 3-5 of the lower auxiliary platform 3;

7) Placing the sample stage into a sample stage bracket, fastening, feeding into an observation bin of a scanning electron microscope, and vacuumizing;

8) Opening high voltage, enabling high-energy electron beams to be incident to the surface of the sample, and beginning to observe the sample;

9) After the observation is finished, the high pressure is closed, the bracket of the sample table is taken out, and the sample table is detached;

10 A straight screwdriver is used for rotating the straight groove III 8-4 of the connecting stud 8 to detach the main table 1 and the lower auxiliary table 3;

11 A linear screwdriver is used for rotating the linear groove II 7-3 of the positioning base 7, and the cylindrical sample is ejected by the ascending of the positioning base 7;

12 Inserting tweezers into the U-shaped clamping groove 1-3, clamping and lifting the connecting plate 9-2 to separate the end of the pressing ring 9-1 of the pressing plate 9 from the sample loading groove 1-2-2;

13 Take the net out of the loading groove 1-2-2 along the sampling groove 1-2-1 with tweezers;

14 Component parts of the sample stage are repositioned.

The above embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention are all included in the scope of the present invention.

Claims (5)

1. Can observe year net sample and cylindrical sample sectional scanning electron microscope sample platform simultaneously, including main stand (1), go up vice platform (2), vice platform (3) down, fastening stud (4), steel ball (5), spring (6), positioning base (7), connecting stud (8), clamp plate (9), U type clamp (10), U type card pipe (11) and fastening screw (12), its characterized in that:

the lower half part of the main platform (1) is cylindrical, the upper half part of the main platform (1) is a cylinder with a section of a superior arch shape, and the main platform comprises a platform body I (1-1), a sample loading boss (1-2), a U-shaped clamping groove (1-3), a rotating shaft groove (1-4), a threaded hole I (1-5), a threaded hole II (1-6), a step through hole (1-7), a positioning groove (1-8) and an auxiliary platform mounting surface (1-9), wherein the sample loading boss (1-2) is uniformly distributed on the platform body I (1-1), the sample loading boss (1-2) comprises a sampling groove (1-2-1), a sample loading groove (1-2-2) and a pressure plate groove (1-2-3), the sampling groove (1-2-1) is positioned at the outer side edge of the sample loading boss (1-2), the sample loading groove (1-2-2) is positioned at the center of the sample loading boss (1-2), the pressure plate groove (1-2-3) is positioned at the inner side edge of the sample loading boss (1-2), the U-shaped clamping groove (1-3) is positioned at the inner side of the sample loading boss (1-2), the rotating shaft groove (1-4) is positioned at the inner side of the U-shaped clamping groove (1-3), and the threaded holes I (1-5) are symmetrically distributed at the two sides of the rotating shaft groove (1-4) The threaded holes II (1-6) are positioned at the bottoms of the U-shaped clamping grooves (1-3), the stepped through holes (1-7) penetrate through the main platform (1), the positioning grooves (1-8) are positioned on one side of the plane of the main platform (1), and the auxiliary platform mounting surfaces (1-9) are positioned on a boss on the lower half part of the main platform (1);

the upper auxiliary table (2) is a cylinder with a cross section in a shape of a trapezoid arch and comprises a table body II (2-1), an object carrying hole I (2-2) and a threaded hole III (2-3), the object carrying hole I (2-2) penetrates through the upper auxiliary table (2), and the threaded hole III (2-3) is uniformly distributed on the table body II (2-1);

the lower auxiliary table (3) is a cylinder with an inferior arch-shaped section and comprises a table body III (3-1), an object carrying hole II (3-2), a spring groove (3-3), a position adjusting base threaded hole (3-4), a fastening threaded hole (3-5), a positioning bulge (3-6) and a connecting threaded hole (3-7), wherein the object carrying hole II (3-2) is positioned at the upper part of the lower auxiliary table (3), the position adjusting base threaded hole (3-4) is positioned at the lower part of the lower auxiliary table (3) and is concentric with the object carrying hole II (3-2), the spring groove (3-3) is positioned at the circumference of the upper end of the object carrying hole II (3-2), each object carrying hole II (3-2) is provided with 4 spring grooves (3-3), the fastening threaded hole (3-5) is positioned at the upper part of the lower auxiliary table (3), the positioning bulge (3-6) is positioned at one side of the plane of the lower auxiliary table (3), and the connecting threaded hole (3-7) is positioned at the upper positioning bulge (3-6);

the fastening stud (4) comprises a nut I (4-1), a polished rod I (4-2), a thread I (4-3) and a straight-line groove I (4-4), the nut I (4-1) and the thread I (4-3) are located at two ends of the fastening stud (4), the polished rod I (4-2) is located in the middle of the fastening stud (4), and the nut I (4-1) is provided with the straight-line groove I (4-4);

the positioning base (7) comprises a round cap (7-1), a screw rod (7-2) and a straight-line groove II (7-3), the round cap (7-1) is positioned at the upper part of the positioning base (7), the screw rod (7-2) is positioned at the lower part of the positioning base (7), and the tail end of the screw rod (7-2) is provided with the straight-line groove II (7-3);

the connecting stud (8) comprises a nut II (8-1), a polished rod II (8-2), a thread II (8-3) and a straight groove III (8-4);

the pressing plate (9) comprises a pressing ring (9-1), a connecting plate (9-2) and a rotating shaft (9-3), and the pressing ring (9-1) and the rotating shaft (9-3) are positioned at two ends of the connecting plate (9-2);

the U-shaped clamp (10) comprises a clamping head (10-1), a clamping piece (10-2) and a mounting hole I (10-3), wherein the clamping head (10-1) is positioned at the upper part of the U-shaped clamp (10), the clamping head (10-1) is a semi-cylinder, the clamping piece (10-2) is positioned at the lower part of the U-shaped clamp (10), the clamping piece is U-shaped, and the mounting hole I (10-3) is positioned at the center of the bottom of the U-shaped clamp (10);

the U-shaped clamp pipe (11) comprises a clamp (11-1), connecting pieces (11-2) and mounting holes II (11-3), wherein the connecting pieces (11-2) are symmetrically distributed on two sides of the clamp (11-1), and the mounting holes II (11-3) are positioned in the centers of the connecting pieces (11-2);

the fastening screw (12) comprises a screw cap III (12-1), a polished rod III (12-2), a thread III (12-3) and a straight groove IV (12-4);

the fastening screw (4) penetrates through a threaded hole III (2-3) of the upper auxiliary table (2) to be matched and connected with a fastening threaded hole (3-5) of the lower auxiliary table (3), the upper auxiliary table (2) and the lower auxiliary table (3) are installed together, and the steel ball (5) and the spring (6) are installed in a spring groove (3-3) of the lower auxiliary table (3);

the lower auxiliary table (3) is arranged on an auxiliary table mounting surface (1-9) of the main table (1), a positioning groove (1-8) of the main table (1) is matched and connected with a positioning bulge (3-6) of the lower auxiliary table (3), and the connecting stud (8) penetrates through a stepped through hole (1-7) of the main table (1) to be matched with a connecting threaded hole (3-7) of the lower auxiliary table (3) so as to install the main table (1) and the lower auxiliary table (3) together;

the positioning base (7) is connected with the threaded hole (3-4) of the positioning base in a threaded fit manner;

the U-shaped clamp (10) is arranged in a U-shaped clamp groove (1-3), a fastening screw (12) penetrates through a mounting hole I (10-3) to be matched and connected with a threaded hole II (1-6), the U-shaped clamp (10) is fixed on the main platform (1), the pressing plate (9) is arranged in a pressing plate groove (1-2-3), the rotating shaft (9-3) is located in a rotating shaft groove (1-4), the U-shaped clamp pipe (11) is located right above the rotating shaft groove (1-4), the fastening screw (12) penetrates through the mounting hole II (11-3) to be matched and connected with the threaded hole I (1-5), and the U-shaped clamp pipe (11) is fixed on the main platform (1).

2. A scanning electron microscope sample stage capable of simultaneously observing the cross section of a mesh-loaded sample and a cylindrical sample according to claim 1, characterized in that: the sample loading bosses (1-2) are provided with 3 sample loading bosses, the depth of the sample loading grooves (1-2-1) is equal to the height of the sample loading bosses (1-2), the diameter of the sample loading grooves (1-2-2) is 3.6 mm, and the depth is 0.01mm greater than the thickness of the compression ring (9-1).

3. A scanning electron microscope sample stage capable of simultaneously observing the cross section of a mesh-loaded sample and a cylindrical sample according to claim 1, characterized in that: the number of the carrying holes I (2-2) is 7, the diameters of the carrying holes I (2-2) and the carrying holes II (3-2) are 3mm, and the number of the threaded holes III (2-3) and the number of the fastening threaded holes (3-5) are 3.

4. A scanning electron microscope sample stage capable of simultaneously observing the cross section of a mesh-loaded sample and a cylindrical sample according to claim 1, characterized in that: the diameter of the round cap (7-1) is 0.01mm smaller than that of the object carrying hole II (3-2).

5. A scanning electron microscope sample stage capable of simultaneously observing the cross section of a mesh-loaded sample and a cylindrical sample according to claim 1, characterized in that: the height of the positioning protrusion (3-6) is 1mm less than the depth of the positioning groove (1-8).

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