CN210692478U - Multifunctional sample table for scanning electron microscope - Google Patents
Multifunctional sample table for scanning electron microscope Download PDFInfo
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- CN210692478U CN210692478U CN201922118164.5U CN201922118164U CN210692478U CN 210692478 U CN210692478 U CN 210692478U CN 201922118164 U CN201922118164 U CN 201922118164U CN 210692478 U CN210692478 U CN 210692478U
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Abstract
The utility model belongs to the technical field of sample platform for the scanning electron microscope, specifically a multifunctional sample platform for scanning electron microscope, including main platform, vice platform, cushion, button head fastening bolt, carry appearance bucket, fastening screw, magnetic ring I, magnetic ring II and go up the set screw, the cushion is pasted on vice platform, and main platform and vice platform pass through button head fastening bolt and connect. Surface sample is placed to the upper surface of primary standard, and the section sample is placed to the primary standard side, and the cushion can play the effect of compressing tightly to the section sample homoenergetic of different thickness, carries the appearance bucket to place the cylinder sample and fixed through fastening screw, carries the appearance bucket to pass through the magnetic ring and is connected with the vice platform, and it can be ejecting with carrying the appearance bucket to go up the top screw. The utility model discloses guaranteed the direction of cylindrical sample upper surface, section sample section, surface sample surface place horizontal plane perpendicular to electron beam incident, and various sample homoenergetic are effectively fixed, guaranteed going on smoothly of observing the sample, enlarged the application range of sample platform, be the innovation in the aspect of the sample platform for the scanning electron microscope.
Description
Technical Field
The utility model belongs to the technical field of the sample platform for the scanning electron microscope, especially a multifunctional sample platform for the scanning electron microscope.
Background
The scanning electron microscope (scanning electron microscope) is an important instrument in modern material analysis, has the characteristics of wide adjustable range of magnification, high imaging resolution, large depth of field and the like, is widely applied to the fields of metallurgy, materials science, biology, medicine and the like, and promotes the rapid development of various related subjects. An important feature of a scanning electron microscope is that the depth of field is large, and the depth of focus of a scanning electron microscope is tens of times greater than that of a transmission electron microscope and hundreds of times greater than that of an optical microscope. Because the depth of field of the image is large, the obtained scanning electronic image has stereoscopic impression and three-dimensional form, can provide more information than other microscopes, and has great use value. The appearance of a sample displayed by a scanning electron microscope plays an irreplaceable role in teaching, scientific research and production of other electron microscopes.
The sample stage is one of the key parts of the scanning electron microscope, and is used for bearing a sample and characterizing the characteristics of the sample through electronic system imaging. Due to the structural characteristics of the scanning electron microscope, a sample to be observed needs to be stably arranged on the sample table, and the observed surface needs to be perpendicular to the incident direction of the electron beam.
When using sample stations in research and production processes, the following problems are commonly encountered by technicians:
1) the function is single. The sample platform that uses at present function singleness, some can only place the surface sample, some can only place the section sample, some though can place section sample and surface sample simultaneously, the sample type that every sample platform advances the evacuation of observation storehouse is few, scanning electron microscope's low-usage, and scientific research is with high costs.
2) The cylindrical sample easily fell off. When observing the section of cylindrical sample, the upper surface and the lower surface of cylindrical sample make two surfaces parallel after polishing, need stable placing just can observe on the sample bench, do not have the sample platform that specially bore cylindrical sample at present temporarily. The methods generally adopted by the skilled person are: and adhering a conductive adhesive tape or conductive glue on the surface of the sample table, fixing the lower surface of the cylindrical sample on the conductive adhesive tape or conductive glue, and observing and analyzing. In the operation process, the cylindrical sample is easy to fall off from the sample table, the observation of the sample is influenced, the bin body of the scanning electron microscope is polluted, the machine has to be stopped for maintenance, and the working efficiency is low.
3) It is not guaranteed that the electron beam is perpendicular to the sample cross section. When the section of a sheet sample, especially a film sample, is observed, the sample cannot be stably placed on a common sample table, and the section of the sample is difficult to ensure to be in a horizontal direction, so that an electron beam vertically emitted cannot be perpendicular to a plane where the section of the sample is located, which is also the case when the section of a cylindrical sample is observed.
4) The section samples with different thicknesses are not easy to fix. When a sheet sample, particularly a sample with different thicknesses, is fixed, because the side surface of the sample perpendicular to the section is tightly attached to the vertical surface of the sample table by the viscosity of the conductive adhesive tape, the sample to be measured is easy to incline or even fall off in the observation process.
The patent of application No. 201920434354.5 discloses a sample stage for a scanning electron microscope for observing sample fractures, which has the problems that ① has single function, only a sample of a fracture (surface) to be observed can be placed, ② can only place 6 samples, the quantity is small, the working efficiency is low, a cylindrical sample can be placed in a first groove, and if the cylindrical sample is placed by a second groove and a third groove, the sample is difficult to fasten by fastening screws, so that the sample is easy to deviate or incline.
The patent of application No. 201720326350.6 discloses a clamping type sample stage for a scanning electron microscope for observing the section of a sample, and has the problems that a cylindrical sample cannot be placed at ①, only two section samples can be placed at a time if no conductive adhesive tape is used at ②, and when a plurality of samples adhered to the vertical surface of the sample stage are clamped at ③ by using the conductive adhesive tape, the thickness of the samples is required to be consistent, the application range is narrow, and the working difficulty is high.
The patent of application No. 201320330613.2 discloses a clamping type scanning electron microscope sample stage for section and surface samples, which has the problems that a cylindrical sample cannot be placed at ①, only 8 section samples can be placed at a time if no conductive adhesive tape is used at ②, and when a plurality of samples adhered to the vertical surface of the sample stage are clamped at ③ by using the conductive adhesive tape, the thickness of the samples is required to be consistent, the application range is narrow, and the working difficulty is high.
How to solve the above problems is a matter of urgency for those skilled in the art to work.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a multi-functional sample platform for scanning electron microscope solves following technical problem, ① how to accomplish once can place cylindrical sample, section sample and surface sample simultaneously, improve scanning electron microscope sample platform's utilization ratio and technical staff's work efficiency, ② how to guarantee that section sample places on the sample platform steadily, and guarantee that the plane that the section of sample was located is perpendicular to the incident direction of electron beam, ③ how to guarantee that a plurality of section samples of different thickness can both be effectively fixed, make its in-process that observes can not incline and more can not drop, ④ how to guarantee that cylindrical sample can be effectively fixed and the plane that its section was located is perpendicular to the incident direction of electron beam, make it in the in-process of observing can not incline and more can not drop.
The utility model adopts the following technical scheme: the utility model provides a scanning electron microscope uses multi-functional sample platform, includes main platform, vice platform, cushion, button head fastening bolt, carries appearance bucket, fastening screw, magnetic ring I, magnetic ring II and goes up a screw, its characterized in that: the elastic pad is adhered to the auxiliary table, and the main table is connected with the auxiliary table.
The lower half part of the main platform is circular, the upper half part of the main platform is semicircular and comprises a plane platform, a supporting platform, a positioning groove and a stepped through hole, the positioning groove is located on one side of the plane platform, a large hole of the stepped through hole is located on one side of the cambered surface of the plane platform, and a small hole of the stepped through hole penetrates through the plane platform to connect the positioning groove with the large hole of the stepped through hole.
The auxiliary platform is in an arc shape and comprises an arc-shaped block, a positioning bulge, a threaded hole, a fixing sleeve hole and a screw hole I, wherein the positioning bulge is positioned on one side of the plane of the arc-shaped block, the threaded hole is formed in the positioning bulge, the fixing sleeve hole is positioned on the upper half part of the arc-shaped block, the screw hole I is positioned on the lower half part of the arc-shaped block, the screw hole I is a stepped hole consisting of a large hole and a small hole with internal threads, the magnetic ring I is positioned at the bottom of the fixing sleeve hole, and the magnetic;
the upper top screw is arranged in the screw hole I of the auxiliary table.
The sample carrying barrel is arranged in a fixed sleeve hole of the auxiliary platform, a magnetic ring II is embedded at the bottom of the sample carrying barrel, a screw hole II is formed in the wall of the sample carrying barrel, and a fastening screw rod is arranged on the screw hole II.
The positioning groove of the main platform is matched and connected with the positioning bulge of the auxiliary platform, and the main platform and the auxiliary platform are installed together.
The height of the positioning protrusion is 0.2mm less than the depth of the positioning groove.
The round head fastening bolt penetrates through the stepped through hole of the main platform and is matched and connected with the threaded hole of the auxiliary platform to fasten the main platform and the auxiliary platform together, and when the auxiliary platform is installed on the supporting surface platform of the main platform, the upper surface of the auxiliary platform and the upper surface of the plane platform of the main platform are positioned in the same horizontal plane.
The thickness of the elastic cushion is 0.5mm-1.5 mm.
The fastening screw rod is full thread, and one end is equipped with a word recess.
The round head fastening bolt consists of a rod body and a round end, wherein the rod body end is provided with an external thread, and the round end is provided with a straight groove.
The upper top screw consists of a rod body and a circular cap, the rod body is full-thread, and the end head of the rod body is provided with a straight groove.
The utility model discloses following beneficial technological effect has:
1) the surface sample that needs observation surface can be placed to the plane mesa surface of main platform, and the main platform side can be placed and need observe sectional sample, can place in the fixed cover hole of vice platform and need observe sectional cylindrical sample, and the function is various, has improved scanning electron microscope sample platform's utilization ratio, has reduced operating personnel's working strength.
2) The round head fastening bolt is screwed through the rotary straight-line-shaped groove, the main platform and the auxiliary platform are connected together, the auxiliary platform plays a role in compressing a section sample adhered to the side face of the main platform, the section sample can be stably placed on the sample platform, the direction of incidence of a horizontal plane perpendicular to an electron beam at the position of a sample section is well guaranteed, and smooth observation of the section sample is guaranteed.
3) Through pasting the cushion on vice bench, make the cushion all play the effect of compressing tightly to pasting the section sample of different thickness in the main stand side, relaxed the requirement to section sample thickness, enlarged the application range of sample platform, reduced the work degree of difficulty.
4) Through placing cylindrical sample in carrying the thing bucket and utilizing fastening screw to fix it, then will carry the thing bucket and put into fixed cover downthehole, utilize the suction of two magnetic rings will carry the appearance bucket and link together with bow-shaped piece, effectively guaranteed the incident direction of the plane perpendicular to electron beam that cylindrical sample section was located to make it can not incline at the in-process of observing and more can not drop.
Drawings
FIG. 1 is a main sectional view of a multifunctional sample stage for a scanning electron microscope of the present invention;
FIG. 2 is an enlarged view of a portion A of FIG. 1;
FIG. 3 is an enlarged view of a portion B of FIG. 1;
FIG. 4 is a top view of the multifunctional sample stage for a scanning electron microscope of the present invention;
fig. 5 is a left side view of the multifunctional sample stage for a scanning electron microscope of the present invention;
fig. 6 is a main sectional view of a main stage of a multifunctional sample stage for a scanning electron microscope according to the present invention;
fig. 7 is a top view of a main stage of a multifunctional sample stage for a scanning electron microscope according to the present invention;
fig. 8 is a left side view of a main platform of the multifunctional sample platform for a scanning electron microscope of the present invention;
fig. 9 is a right side view of a main platform of the multifunctional sample stage for a scanning electron microscope of the present invention;
fig. 10 is a main sectional view of an auxiliary table of the multifunctional sample table for a scanning electron microscope of the present invention;
fig. 11 is a top view of an auxiliary stage of the multifunctional sample stage for a scanning electron microscope of the present invention;
FIG. 12 is an enlarged view at C of FIG. 11;
fig. 13 is a left side view of an auxiliary table of the multifunctional sample table for a scanning electron microscope of the present invention;
fig. 14 is a main sectional view of a sample carrying barrel (with a magnetic ring ii and a fastening screw) of the multifunctional sample stage for a scanning electron microscope according to the present invention;
FIG. 15 is an enlarged view at D of FIG. 14;
fig. 16 is a top view of a sample loading barrel of the multifunctional sample stage for a scanning electron microscope according to the present invention;
fig. 17 is a bottom view of the sample carrying barrel of the multifunctional sample stage for scanning electron microscope.
Description of reference numerals: 1. the device comprises a main platform, 1-1 parts of a plane platform, 1-2 parts of a surface supporting platform, 1-3 parts of a positioning groove, 1-4 parts of a stepped through hole 2, an auxiliary platform, 2-1 parts of an arc block, 2-2 parts of a positioning protrusion, 2-3 parts of a threaded hole, 2-4 parts of a fixing sleeve hole, 2-5 parts of a screw hole I, 3 parts of an elastic pad, 4 parts of a round head fastening bolt, 5 parts of a sample carrying barrel, 5-1 parts of a screw hole II, 6 parts of a fastening screw rod, 7 parts of a magnetic ring I, 8 parts of a magnetic ring II, 9 parts of an upper jacking screw, 10 parts of a conductive adhesive I, 11 parts of a section sample, 12 parts of a conductive adhesive II, 13 parts of a surface.
Note: in the drawings of the present invention, the cylindrical sample is not shown, and only one surface sample is shown.
Detailed Description
The technical solution of the present invention is described in further detail below with reference to the accompanying drawings, but the scope of the present invention is not limited to the following description.
As shown in fig. 1 to 17, a multifunctional sample stage for a scanning electron microscope comprises a main stage 1, an auxiliary stage 2, an elastic pad 3, a round head fastening bolt 4, a sample carrying barrel 5, a fastening screw rod 6, a magnetic ring i 7, a magnetic ring ii 8 and an upper top screw 9, and is characterized in that: the elastic pad 3 is adhered to the auxiliary table 2, and the main table 1 is connected with the auxiliary table 2.
The lower half part of the main platform 1 is circular, the upper half part of the main platform 1 is semicircular and comprises a plane platform 1-1, a supporting surface platform 1-2, a positioning groove 1-3 and a stepped through hole 1-4, the positioning groove 1-3 is positioned on one side of the plane platform 1-1, a large hole of the stepped through hole 1-4 is positioned on one side of the cambered surface of the plane platform 1-1, and a small hole of the stepped through hole 1-4 penetrates through the plane platform 1-1 to connect the positioning groove 1-3 with the large hole of the stepped through hole 1-4.
The auxiliary table 2 is in an arc shape and comprises an arc-shaped block 2-1, a positioning protrusion 2-2, a threaded hole 2-3, a fixing sleeve hole 2-4 and a screw hole I2-5, the positioning protrusion 2-2 is located on one side of the plane of the arc-shaped block 2-1, the threaded hole 2-3 is formed in the positioning protrusion 2-2, the fixing sleeve hole 2-4 is located in the upper half portion of the arc-shaped block 2-1, the screw hole I2-5 is located in the lower half portion of the arc-shaped block 2-1, the screw hole I2-5 is a stepped hole formed by a large hole and a small hole with internal threads, a magnetic ring I7 is located at the bottom of the fixing sleeve hole 2-4, and the magnetic ring I7 is embedded into.
The upper top screw 9 is arranged in the screw hole I2-5 of the auxiliary table 2.
The sample carrying barrel 5 is arranged in a fixing sleeve hole 2-4 of the auxiliary platform 2, a magnetic ring II 8 is embedded at the bottom of the sample carrying barrel 5, a screw hole II 5-1 is formed in the wall of the sample carrying barrel 5, and a fastening screw 6 is arranged on the screw hole II 5-1.
The positioning groove 1-3 of the main platform 1 is matched and connected with the positioning bulge 2-2 of the auxiliary platform 2, and the main platform 1 and the auxiliary platform 2 are installed together.
The height of the positioning bulge 2-2 is 0.2mm less than the depth of the positioning groove 1-3, so that when the elastic pad 3 on the auxiliary table 2 falls off, under the condition of no sample section sample 11, the external threads of the threaded hole 2-3 and the round head fastening bolt 4 cannot be damaged when the auxiliary table 2 is connected with the main table 1 through the round head fastening bolt 4.
The round head fastening bolt 4 penetrates through the stepped through hole 1-4 of the main platform 1 and is matched and connected with the threaded hole 2-3 of the auxiliary platform 2 to fasten the main platform 1 and the auxiliary platform 2 together to form an integral cylinder, and when the auxiliary platform 2 is installed on the supporting surface platform 1-2 of the main platform 1, the upper surface of the auxiliary platform 2 and the upper surface of the plane platform 1-1 of the main platform 1 are in the same horizontal plane.
The thickness of the elastic cushion 3 is 0.5mm-1.5 mm.
The round-head fastening bolt 4 consists of a rod body and a round end, wherein the rod body is provided with external threads, the round end is provided with a straight groove, and the straight groove can be rotated by a straight screwdriver to drive the fastening bolt 4 to rotate.
The fastening screw 6 is full thread, and one end is provided with a straight groove.
The upper top screw 9 consists of a rod body and a circular cap, the rod body is full-thread, and the end head of the rod body is provided with a straight groove.
Use the utility model relates to a during scanning electron microscope uses multi-functional sample platform, according to the following step operation:
1) a conductive tape I10 is stuck over the side surface of the main table 1.
2) The conductive adhesive tape I10 in the step 1) is adhered with a section sample 11, one side surface of the section sample 11 is adhered with the conductive adhesive tape I10, and the section of the section sample 11 is in the same horizontal plane and slightly higher than the upper surface of the plane platform 1-1.
3) The auxiliary table 2 is pushed towards the middle along the surface supporting table 1-2 of the main table 1, and the auxiliary table 2 is installed by utilizing the matching of the positioning groove 1-3 of the main table 1 and the positioning bulge 2-2 of the auxiliary table 2.
4) The round-head fastening bolt 4 is inserted into the stepped through hole 1-4 of the main platform 1, the straight-line groove of the round-head fastening bolt 4 is rotated by a straight-line screwdriver, the main platform 1 and the auxiliary platform 2 are connected together and compress the section sample 11 adhered on the conductive adhesive tape I10 on the side surface of the main platform 1 by utilizing the matching of the external thread of the round-head fastening bolt 4 and the threaded hole 2-3 of the auxiliary platform 2, the elastic pad 3 adhered with the auxiliary platform 2 is contacted with the side surface of the section sample 11 at the moment, and the elastic pad 3 can compress the section samples 11 with different thicknesses at the same time under the elastic action.
5) And a conductive adhesive tape II 12 is adhered on the upper surface of the main platform 1.
6) The surface sample 13 was attached to the conductive tape II 12 described in 5).
7) The cylindrical sample is placed into the sample carrying barrel 5, the linear groove of the fastening screw 6 on the barrel wall of the sample carrying barrel 5 is rotated to fix the cylindrical sample, the sample carrying barrel 5 filled with the cylindrical sample is placed into the fixing sleeve hole 2-4 of the auxiliary platform 2, and the sample carrying barrel 5 and the bow-shaped block 2-1 are connected together by means of the mutual attraction of the magnetic ring I7 and the magnetic ring II 8.
8) And (4) placing the sample stage into a sample stage bracket, fastening, feeding into an observation bin of a scanning electron microscope, and vacuumizing.
9) The high voltage was turned on and the electron beam was injected to begin the observation of the sample.
10) And (5) after the observation is finished, turning off the high pressure, taking out the sample table bracket, and detaching the sample table.
11) And (3) rotating the linear groove of the round head fastening bolt 4 by using a linear screwdriver to detach the main table 1 from the auxiliary table 2.
12) The straight-line-shaped groove of the top screw 9 is rotated by a straight-line-shaped screwdriver, and the carrying barrel 5 is ejected by the rising of the top screw 9.
13) And (3) rotating the linear groove of the fastening screw 6 by using a linear screwdriver to loosen the cylindrical sample, and taking out the cylindrical sample.
14) The conductive adhesive I10, the section sample 11, the conductive adhesive II 12 and the surface sample 13 were removed by tweezers.
15) And returning the components of the sample table.
The above embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention are all included in the scope of the present invention.
Claims (7)
1. The utility model provides a scanning electron microscope is with multi-functional sample platform, includes main platform (1), vice platform (2), cushion (3), button head fastening bolt (4), carries appearance bucket (5), fastening screw (6), magnetic ring I (7), magnetic ring II (8) and goes up top screw (9), its characterized in that: the elastic pad (3) is adhered to the auxiliary table (2), and the main table (1) and the auxiliary table (2) are connected together;
the lower half part of the main platform (1) is circular, the upper half part of the main platform (1) is semicircular and comprises a plane platform (1-1), a surface supporting platform (1-2), a positioning groove (1-3) and a step through hole (1-4), the positioning groove (1-3) is positioned on one side of the plane platform (1-1), a large hole of the step through hole (1-4) is positioned on one side of the cambered surface of the plane platform (1-1), and a small hole of the step through hole (1-4) penetrates through the plane platform (1-1) to connect the positioning groove (1-3) with the large hole of the step through hole (1-4);
the auxiliary table (2) is arc-shaped and comprises an arc-shaped block (2-1) and a positioning bulge (2-2), the positioning device comprises a threaded hole (2-3), a fixing sleeve hole (2-4) and a screw hole I (2-5), wherein the positioning protrusion (2-2) is positioned on one side of the plane of the arched block (2-1), the threaded hole (2-3) is formed in the positioning protrusion (2-2), the fixing sleeve hole (2-4) is positioned in the upper half part of the arched block (2-1), the screw hole I (2-5) is positioned in the lower half part of the arched block (2-1), the screw hole I (2-5) is a stepped hole consisting of a large hole and a small hole with internal threads, a magnetic ring I (7) is positioned at the bottom of the fixing sleeve hole (2-4), and the magnetic ring I (7) is embedded into the arched block (2-1);
the upper top screw (9) is arranged in a screw hole I (2-5) of the auxiliary table (2);
the sample carrying barrel (5) is arranged in a fixed sleeve hole (2-4) of the auxiliary table (2), a magnetic ring II (8) is embedded at the bottom of the sample carrying barrel (5), a screw hole II (5-1) is formed in the wall of the sample carrying barrel (5), and a fastening screw rod (6) is arranged on the screw hole II (5-1);
the positioning groove (1-3) of the main platform (1) is matched and connected with the positioning bulge (2-2) of the auxiliary platform (2), and the main platform (1) and the auxiliary platform (2) are installed together.
2. The multifunctional sample stage for a scanning electron microscope according to claim 1, characterized in that: the height of the positioning bulge (2-2) is 0.2mm less than the depth of the positioning groove (1-3).
3. The multifunctional sample stage for a scanning electron microscope according to claim 1, characterized in that: the round-head fastening bolt (4) penetrates through a stepped through hole (1-4) of the main platform (1) and is matched and connected with a threaded hole (2-3) of the auxiliary platform (2) to fasten the main platform (1) and the auxiliary platform (2) together, and the upper surface of the auxiliary platform (2) and the upper surface of the plane platform (1-1) of the main platform (1) are located in the same horizontal plane.
4. The multifunctional sample stage for a scanning electron microscope according to claim 1, characterized in that: the thickness of the elastic cushion (3) is 0.5mm-1.5 mm.
5. The multifunctional sample stage for a scanning electron microscope according to claim 1, characterized in that: the fastening screw rod (6) is full thread, and one end of the fastening screw rod is provided with a straight groove.
6. The multifunctional sample stage for a scanning electron microscope according to claim 1, characterized in that: the round-head fastening bolt (4) is composed of a rod body and a round end head, wherein the rod body end is provided with an external thread, and the round end head is provided with a straight groove.
7. The multifunctional sample stage for a scanning electron microscope according to claim 1, characterized in that: the upper top screw (9) consists of a rod body and a circular cap, the rod body is full-thread, and the end head of the rod body is provided with a straight groove.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201922118164.5U CN210692478U (en) | 2019-12-02 | 2019-12-02 | Multifunctional sample table for scanning electron microscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201922118164.5U CN210692478U (en) | 2019-12-02 | 2019-12-02 | Multifunctional sample table for scanning electron microscope |
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| CN210692478U true CN210692478U (en) | 2020-06-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111933504A (en) * | 2020-08-13 | 2020-11-13 | 蚌埠中光电科技有限公司 | Vertical combined scanning electron microscope sample platform in plane |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111933504A (en) * | 2020-08-13 | 2020-11-13 | 蚌埠中光电科技有限公司 | Vertical combined scanning electron microscope sample platform in plane |
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Granted publication date: 20200605 Termination date: 20201202 |