CN217112142U

CN217112142U - Scanning electron microscope sample stage

Info

Publication number: CN217112142U
Application number: CN202220227056.0U
Authority: CN
Inventors: 赵迎新
Original assignee: Heli Photovoltaic Technology Shanghai Co ltd
Current assignee: Heli Photovoltaic Technology Shanghai Co ltd
Priority date: 2022-01-27
Filing date: 2022-01-27
Publication date: 2022-08-02
Anticipated expiration: 2032-01-27

Abstract

The utility model provides a scanning electron microscope sample platform (1), its characterized in that, this scanning electron microscope sample platform include base (2) and detachably fixed connection to the sample platform body (3) of base, sample platform body (3) have be used for pasting sample (S) paste appearance portion (4) and be used for with sample platform body (3) are connected to connecting portion (5) of base (2), wherein paste appearance portion (4) by the perpendicular to the upper end of connecting portion upwards extends and intersects two piece at least boards (6) each other and constitutes to provide eight at least vertical plane sample areas (60), two piece at least boards with connecting portion an organic whole forms. The scanning electron microscope sample stage can vertically paste the sample in the lateral direction, so that the observation amount is more, the pasting area is larger, the effect is more stable, the speed is higher, a large amount of time can be saved, and the observation effect is improved.

Description

Scanning electron microscope sample stage

Technical Field

The utility model relates to a scanning electron microscope detects sample mounting tool in field, especially relates to a scanning electron microscope sample platform.

Background

A Scanning Electron Microscope (SEM), referred to as scanning electron microscope for short, is an electronic device for observation between a transmission electron microscope and an optical microscope, which scans a sample with a focused very narrow high-energy electron beam, excites various physical information through interaction between the beam and a substance, and collects, amplifies, and re-images the information to achieve the purpose of characterizing the microscopic morphology of the substance.

Scanning electron microscope detection, SEM detection for short, is a test method for detection by using a scanning electron microscope, and has two basic functions: firstly, the surface of the sample can be amplified by 25 times to 100 ten thousand times; secondly, the qualitative and quantitative analysis of the elements in the micro-area of the sample surface can be carried out.

If the sample is placed in a scanning electron microscope device, a fixture that conforms to the standard dimensions of the device is required. The fixing devices currently on the market are not suitable for observing the cross section of the silicon wafer, and therefore there is a need for a fixing device, such as a sample stage, designed to mount a sample to be measured on a more stable, larger area.

At present, a scanning electron microscope sample stage for mounting a sample on the market is mostly a cylinder, and a silicon wafer or powder can be pasted on the circular end face of the cylinder and also can be pasted on the cylindrical side face of the sample stage. The sample stage is not easy to observe a sample stuck on the cylindrical side surface of the sample stage, and the silicon wafer is not easy to stick or the stability is poor after sticking, and the wafer may shake.

Disclosure of Invention

Therefore, the utility model aims at solving the problem among the prior art, provide a scanning electron microscope sample platform that not only the observed volume is more, the adhesion area is bigger, the effect is more stable, can save plenty of time moreover, improve the observation effect.

Therefore, the utility model provides a scanning electron microscope sample platform, the sample platform body have be used for pasting sample paste appearance portion and be used for with sample platform body coupling to the connecting portion of base, wherein paste appearance portion by the perpendicular to the upper end of connecting portion upwards extends and crossing two at least boards each other and constitutes to provide eight at least vertical plane sample areas of pasting, two at least boards with connecting portion an organic whole is formed. In the above-described sample stage for a scanning electron microscope, by providing the sample application portion of such a configuration, a sample can be applied more stably on a flat sample application surface, and a larger amount of sample can be applied.

In a preferred embodiment, the plate is a rectangular plate, and the connecting portion of the base is configured as a cylindrical connecting portion.

In a preferred embodiment, at least two rectangular plates may intersect at their intermediate positions, and the intersection line thereof coincides with the central axis of the cylindrical connecting portion, so that substantially the same planar sample area can be provided.

According to the utility model discloses an in the scheme, two piece at least rectangular plates can be three rectangular plates, and the contained angle between two adjacent rectangular plates is 60 to twelve vertical plane sample areas are pasted in the provision. In an alternative, the at least two rectangular plates may be four rectangular plates, and the included angle between two adjacent rectangular plates is 45 ° to provide sixteen vertical planar sample areas. It should be understood that the number of rectangular plates is merely exemplary and may be selected according to the needs of the actual application. Such as two, five rectangular panels, etc., are also contemplated within the scope of the present application to provide a desired number of planar sample areas.

In a preferred aspect, the base may be configured as a cylindrical base, an inner thread may be provided on an inner circumferential surface of the base, and a corresponding outer thread may be provided on an outer circumferential surface of the cylindrical connecting portion, and the sample stage body is screw-coupled to the base by the engagement of the outer thread and the inner thread. The threaded connection has the advantages of convenience and quickness. It will be appreciated by those skilled in the art that other suitable means of attachment are also within the scope of the present application.

The utility model discloses in, scanning electron microscope sample platform passes through base detachably fixed connection is to in scanning electron microscope's the sample storehouse.

In an alternative scheme, two mounting holes are formed in the cylindrical side wall of the base and are spare mounting holes, and the spare mounting holes can be matched with fasteners to mount the scanning electron microscope sample stage in a sample bin of a scanning electron microscope.

According to the utility model discloses a scanning electron microscope sample platform can provide more simple sample preparation process, can be with the vertical pasting in the plane sample application district of sample such as silicon wafer, and the observed quantity is more, and the pasting area is bigger, and the effect is more stable, and is fast, can save a large amount of time, improves the observation effect.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. In the drawings:

fig. 1a shows a perspective view of a scanning electron microscope sample stage according to an embodiment of the present invention;

FIG. 1b is a perspective view of the SEM sample stage of FIG. 1a after sample attachment;

FIG. 2 is a perspective view of a sample stage body of the scanning electron microscope sample stage of FIG. 1;

FIG. 3 is a perspective view of a base of the SEM sample stage of FIG. 1; and

fig. 4 is a top view of the sample stage body in fig. 2.

Detailed Description

A scanning electron microscope sample stage according to an implementation of the present invention will be described below by way of example with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention to those skilled in the art. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. Furthermore, it is to be understood that the invention is not to be limited to the specific embodiments described. Rather, any combination of the following features and elements, whether related to different embodiments or not, is contemplated to implement the invention.

Fig. 1a shows an embodiment of a scanning electron microscope sample stage 1 according to the invention. As can be seen from the figure, the scanning electron microscope sample stage 1 comprises a base 2 and a sample stage body 3 positioned at the upper end of the base. The scanning electron microscope sample stage 1 is a split type sample stage, and a sample stage body 3 is detachably and fixedly connected to a base 2.

Referring to fig. 1b and 2, the sample stage body 3 has a sample application portion 4 for applying a sample S and a cylindrical connection portion 5 for connecting the sample stage body 3 to the base 2, and an external thread 51 is provided on an outer circumferential surface of the cylindrical connection portion. In this embodiment, the patch portion (which may also be referred to as a patch member) 4 is constituted by four identical rectangular plates 6 extending upward perpendicularly to the circular upper end of the cylindrical connecting portion 5 and intersecting each other at their intermediate positions, and the angle between the adjacent two rectangular plates is 45 ° to provide sixteen vertical planar patch areas 60, so that the sample S can be stuck on each planar patch area 60 of the patch portion 4 in a vertical orientation for easy observation. In this embodiment, the patch portion 4 is in a meter-like shape in plan view (see fig. 4). The intersection lines of these rectangular plates coincide with the central axis of the cylindrical connecting part 5, that is to say the projection of the intersection lines of these rectangular plates 6 in plan view coincides with the projection of the central axis of the cylindrical connecting part 5 in plan view. The rectangular plate 6 has a radial extension not exceeding the outer contour of the cylindrical connecting portion 5. In addition, the rectangular plate is integrally formed with the cylindrical connection part for convenience of manufacture.

In one embodiment, not shown, the patch is constructed from two rectangular plates that intersect perpendicularly to provide eight vertical planar patch areas. In another embodiment, not shown, the decal portion is formed from three rectangular plates, with the angle between two adjacent plates being 60 ° to provide twelve vertical planar decal areas. It will be appreciated by those skilled in the art that other numbers of rectangular panels, for example five rectangular panels, may be provided as desired to provide more planar sample areas. In addition, the included angles between the rectangular plates can be the same or different.

Referring to fig. 3, there is shown a perspective view of a base 2 according to the present invention, the sem specimen stage being removably and fixedly connectable to a sem specimen chamber (not shown) via the base 2. As shown in the figure, the base is configured as a cylindrical base, on the inner circumferential surface of which an internal thread 21 is provided, and the sample stage body 3 is screwed to the base by means of the internal thread 21 and a corresponding external thread 51 on the cylindrical connecting portion. Such a threaded connection is relatively simple to implement and a strong connection can be obtained. It will be appreciated by those skilled in the art that other suitable attachment means, such as an interference fit, may be selected as desired and are also within the scope of the present application. Optionally, two mounting holes 20 are provided on the cylindrical side wall of the base, which are spare holes, through which the sem sample can be fixed into the sem sample compartment, if necessary, by cooperating with fasteners.

In the above embodiments of the present invention, the sample stage body 3 and the base 2 may be made of conventional aluminum alloy such as Al-Mg-Si alloy, or other suitable nonmagnetic material may be selected. The choice of materials is familiar to the person skilled in the art and will not be described in further detail here.

Additionally, in the present invention, the size of the sample stage body 3 and the base 2 is selected depending on the model of the scanning electron microscope. In one example, for a scanning electron microscope, for example of type JSM-7610F, the susceptor 2 has an outer diameter of 32mm, an inner diameter of 28mm and a height of 20 mm; the outer diameter of the cylindrical connecting part of the sample table body 3 is 28mm, and the length of the rectangular plate is 22 mm.

For the scanning electron microscope sample stage 1 shown in fig. 1a, and particularly referring to fig. 1b, a sample S, such as a silicon wafer, can be attached to sixteen vertical planar sample attachment areas 60 of the sample attachment portion 4 by carbon glue, and then loaded into a sample chamber of a scanning electron microscope for sample detection.

Compare with scanning electron microscope sample platform among the prior art, their mode of pasting is different, and present sample platform is pasted the sample on the cylindrical outer peripheral face of sample platform (the contact zone of sample and sample platform is the curved surface) along circumference, according to the utility model discloses a scanning electron microscope sample platform, newly-designed sample portion of pasting has a plurality of vertical plane sample district of pasting, can paste more samples to because the contact surface of sample and sample platform is the plane, make area of contact bigger, the physical contact is more stable, and observation effect is better.

Although the present invention has been described with reference to the preferred embodiments, the present invention is not limited thereto. Various changes and modifications can be made by one skilled in the art without departing from the spirit and scope of the invention, and the scope of the invention is to be determined by the appended claims.

Claims

1. The scanning electron microscope sample stage (1) is characterized by comprising a base (2) and a sample stage body (3) which is detachably and fixedly connected to the base, wherein the sample stage body (3) is provided with a sample sticking part (4) for sticking a sample (S) and a connecting part (5) for connecting the sample stage body (3) to the base (2), the sample sticking part (4) is composed of at least two plates (6) which are perpendicular to the upper end surface of the connecting part, extend upwards and intersect with each other, so that at least eight vertical plane sample sticking areas (60) are provided, and the at least two plates are integrally formed with the connecting part.

2. Scanning electron microscope sample stage (1) according to claim 1, characterized in that the plate (6) is a rectangular plate and the connection portion (5) of the base (2) is a cylindrical connection portion.

3. Scanning electron microscope sample stage (1) according to claim 2, characterized in that at least two of the rectangular plates intersect at their middle position with an intersection line coinciding with the central axis of the cylindrical connection part.

4. Scanning electron microscope sample stage (1) according to claim 3, characterized in that the at least two rectangular plates are three rectangular plates, and the angle between two adjacent rectangular plates is 60 ° to provide twelve vertical flat sample application areas (60).

5. Scanning electron microscope sample stage (1) according to claim 3, characterized in that the at least two rectangular plates are four rectangular plates, and the angle between two adjacent rectangular plates is 45 ° to provide sixteen vertical planar sample application areas (60).

6. Scanning electron microscope sample stage (1) according to one of claims 2 to 5, characterized in that the base (2) is configured as a cylindrical base, on the inner circumferential surface of which an internal thread (21) is provided; and a corresponding external thread (51) is arranged on the outer peripheral surface of the cylindrical connecting part, and the sample table body (3) is screwed to the base through the matching of the external thread (51) and the internal thread (21).

7. Scanning electron microscope sample stage (1) according to claim 6, characterized in that two mounting holes (20) are provided on the cylindrical side wall of the base (2).

8. Scanning electron microscope sample stage (1) according to one of claims 1 to 5, characterized in that it is detachably fixedly connected by the base (2) into a sample chamber of a scanning electron microscope.