CN211014834U - Object stage - Google Patents
Object stage Download PDFInfo
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- CN211014834U CN211014834U CN201922398529.4U CN201922398529U CN211014834U CN 211014834 U CN211014834 U CN 211014834U CN 201922398529 U CN201922398529 U CN 201922398529U CN 211014834 U CN211014834 U CN 211014834U
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- cover plate
- sample
- working surface
- sample holder
- object table
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Abstract
The utility model provides an object stage, which is applied to a microscope and comprises a sample support, a cover plate and a guide structure, wherein the sample support comprises a working surface for placing samples, the working surface is provided with a plurality of lower concave parts, and the plurality of lower concave parts are used for accommodating a plurality of samples; the cover plate is detachably covered on the working surface of the sample support and comprises a plurality of observation holes, the observation holes correspond to the concave parts one by one, and the area of each observation hole is smaller than that of the corresponding concave part; the guide structure is arranged on the sample support and the cover plate. When an operator observes a sample, the sample is prevented from falling off, and on the other hand, no conductive adhesive or other viscous agents are additionally introduced due to the fact that the sample is placed in the concave portion, so that nondestructive clean observation is achieved.
Description
Technical Field
The utility model discloses generally relate to sample observation technical field, particularly, relate to an objective table.
Background
The observation of samples is widely used in the field of material preparation. The traditional sample stage can only fix the sample through conductive adhesive or other viscous agents, and the method can lead the sample to be incapable of being reused, for example, the current scanning electron microscope stage is only a simple metal stage on which the sample needs the conductive adhesive to be fixed and tested. However, the method is damaged for a thin and soft sample, and residual glue can remain on the surface of the sample to influence the reuse of the sample.
The above information disclosed in this background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not constitute prior art that is already known to a person of ordinary skill in the art.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a main aim at overcomes above-mentioned prior art's at least defect, provides the objective table of location and harmless sign sample, realizes used repeatedly and the clean sign of sample.
In order to realize the purpose of the utility model, the utility model adopts the following technical scheme:
according to an aspect of the present invention, there is provided an object stage for a microscope, the object stage comprising a sample holder, a cover plate and a guide structure, the sample holder comprising a working surface for placing a sample, the working surface having a plurality of concave portions for accommodating a plurality of samples; the cover plate is detachably covered on the working surface of the sample support and comprises a plurality of observation holes, the observation holes correspond to the concave parts one by one, and the area of each observation hole is smaller than that of the corresponding concave part; the guide structure is arranged on the sample support and the cover plate.
According to an embodiment of the present invention, the sample holder is in a shape of a cylinder, a square, a rectangle, or a triangular prism.
According to the utility model discloses an embodiment, the periphery that the sample held in the palm is equipped with an annular arch, the protruding perpendicular to of annular the working face just outwards extends, the annular arch delimits a space, works as the apron cover in when the working face that the sample held in the palm, the protruding cladding of annular is at least partial the lateral wall of apron.
According to the utility model discloses an embodiment, the working face still has a plurality ofly gets and puts the groove, and is a plurality of get put groove and a plurality of lower concave part one-to-one intercommunication.
According to an embodiment of the present invention, each of the lower concave portions has a cylindrical shape, a square shape, a rectangular shape, or a triangular prism shape; the depth of the lower concave part is 0.01 mm-2 mm, and the area of the lower concave part is 0.01cm2To 2cm2。
According to the utility model discloses an embodiment, the concave part is cylindrically down, the observation hole is circular, every the diameter of observation hole is less than rather than corresponding the diameter of concave part down, and the difference is between 0.02mm to 10 mm.
According to the utility model discloses an embodiment, guide structure includes:
the guide column is arranged on one of the sample holder and the cover plate; and
and the guide hole is arranged on the other one of the sample holder and the cover plate.
According to the utility model discloses an embodiment, guide structure includes four guide post and four the guiding hole, the height of guide post is between 0.1mm to 5mm, four the guide post is located the sample hold in the palm and outstanding in the working face that the sample held in the palm, four the guiding hole is located the apron.
According to the utility model discloses an embodiment still includes the sign structure, the sign structure includes:
the identification hole is arranged on one of the sample holder and the cover plate; and
the identification block is arranged on the sample support and the other cover plate, and when the cover plate covers the working surface of the sample support, the identification block is matched with the identification hole.
According to the utility model discloses an embodiment, the identification block is the triangular prism shape.
According to the above technical scheme, the utility model discloses an advantage and positive effect of objective table lie in:
when the device is used, a plurality of samples are correspondingly placed in a plurality of lower concave portions of the sample support, the cover plate covers the working surface of the sample support, the area of the observation hole is smaller than that of the corresponding lower concave portion, the observation hole plays a role in positioning the samples, and when an operator observes the samples, the samples are prevented from falling off on one hand, and on the other hand, because the samples are arranged in the lower concave portions and no conductive adhesive or other viscous agents are additionally introduced, the nondestructive clean observation is realized.
Drawings
The above and other features and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.
Fig. 1 is a schematic view of a first embodiment of a sample holder according to the present invention.
Fig. 2 is a plan view of a first embodiment of the cover plate of the present invention.
Fig. 3 is a schematic view of a second embodiment of the sample holder of the present invention.
Fig. 4 is a plan view of a second embodiment of the cover plate of the present invention.
Wherein the reference numerals are as follows:
10. sample holder
110. Working surface
111. Lower concave part
111a, concave part I
111b, recess No. two
111c, concave part III
112. Taking and placing groove
120. Annular protrusion
130. Guide post
140. Identification block
20. Cover plate
210. Observation hole
220. Guide hole
230. Identification hole
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed description will be omitted.
Although relative terms, such as "upper" and "lower," may be used in this specification to describe one element of an icon relative to another, these terms are used in this specification for convenience only, e.g., in accordance with the orientation of the examples described in the figures. It will be appreciated that if the device of the icon were turned upside down, the element described as "upper" would become the element "lower". Other relative terms, such as "top", "bottom", and the like, are also intended to have similar meanings. The terms "a," "an," "the," and "said" are used to indicate the presence of one or more elements/components/etc.; the terms "comprising" and "having" are intended to be inclusive and mean that there may be additional elements/components/etc. other than the listed elements/components/etc.; the terms "first," "second," "third," and "fourth," etc. are used merely as labels, and are not limiting as to the number of their objects.
The utility model provides an objective table, which comprises a sample support, a cover plate and a guide structure, wherein the sample support comprises a working surface for placing samples, the working surface is provided with a plurality of lower concave parts, and the plurality of lower concave parts are used for accommodating a plurality of samples; the cover plate is detachably covered on the working surface of the sample support and comprises a plurality of observation holes, the observation holes correspond to the concave parts one by one, and the area of each observation hole is smaller than that of the corresponding concave part; the guide structure is arranged on the sample support and the cover plate.
When the device is used, a plurality of samples are correspondingly placed in a plurality of lower concave portions of the sample support, the cover plate covers the working surface of the sample support, the area of the observation hole is smaller than that of the corresponding lower concave portion, the observation hole plays a role in positioning the samples, and when an operator observes the samples, the samples are prevented from falling off on one hand, and on the other hand, because the samples are arranged in the lower concave portions and no conductive adhesive or other viscous agents are additionally introduced, the nondestructive clean observation is realized.
The structure, connection mode and functional relationship of the main components of the objective table according to the present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1 and 2, fig. 1 is a schematic view of a first embodiment of a sample holder according to the present invention, and fig. 2 is a plan view of a first embodiment of a cover plate according to the present invention. The utility model discloses a first embodiment provides an objective table, hold in the palm 10 and apron 20 including the sample, the sample holds in the palm 10 and is used for placing a plurality of samples, and apron 20 detachably covers on sample holds in the palm 10. The utility model discloses an objective table can place under an electron microscope for observe the sample.
As shown in fig. 1, in an exemplary embodiment, the sample holder 10 is cylindrical. Of course, in other embodiments, the sample holder 10 may have a rectangular parallelepiped shape, a triangular prism shape, or other suitable shapes, which is not limited in the present invention.
The sample holder 10 includes a working surface 110 for placing a sample and a bottom surface disposed opposite to the working surface 110, the working surface 110 has a plurality of concave portions 111, each concave portion 111 is formed by sinking from the working surface 110 to the bottom surface, and the plurality of concave portions 111 are used for accommodating a plurality of samples, such as small pieces of copper foil, small pieces of silicon wafers or other thin and soft samples.
The sample holder 10 is provided with an annular protrusion 120 at a periphery thereof, the annular protrusion 120 is perpendicular to the working surface 110 and extends outward from the working surface 110, and the annular protrusion 120 defines a space in which at least a portion of the cover plate 20 is accommodated when the cover plate 20 covers the working surface 110 of the sample holder 10, so that the annular protrusion 120 covers at least a portion of a side wall of the cover plate 20.
In the present embodiment, by the design of the annular protrusion 120, on the one hand, the positioning effect of the cover plate 20 and the sample holder 10 is ensured, so that the sample is firmly fixed in each lower recess 111; on the other hand, the annular protrusion 120 covers at least part of the sidewall of the cover plate 20, so that the sealing performance of the sample holder 10 and the cover plate 20 is enhanced, and the external pollution source is prevented from entering the region to be observed from the joint of the sample holder 10 and the cover plate 20 to affect the observation result.
In an exemplary embodiment, the working surface 110 of the sample holder 10 further has a plurality of taking and placing grooves 112, the taking and placing grooves 112 are formed by being recessed from the working surface 110 toward the bottom surface, and the taking and placing grooves 112 are in one-to-one correspondence with the recessed portions 111. When an operator uses a tool (e.g., tweezers) to pick and place a sample, the pick-and-place slot 112 is used to provide a space for the tool, so that the tool can easily extend into the lower recess 111 to pick and place the sample, and avoid damaging or wrinkling the thin and soft sample. In some embodiments, the access slot 112 may have a rectangular shape, a circular shape, or other suitable shapes, which are not limited in this disclosure.
In an exemplary embodiment, each of the lower recesses 111 has a cylindrical shape, a square shape, a triangular prism shape, or other suitable shapes, which are not particularly limited by the present invention.
The depth of the lower recess 111 is between 0.01mm and 2mm, for example 0.2mm, 0.4mm, 0.5mm, 0.6mm, 0.8mm, 1mm, 1.2mm, 1.5mm, 1.8 mm.
The area of the lower recess 111 is between 0.01cm2To 2cm2E.g. 1.1cm2、1.2cm2、1.5cm2、1.6cm2、1.8cm2、1.9cm2。
With continued reference to fig. 1 and 2, in an exemplary embodiment, the stage further includes a guide structure for guiding the cover plate 20 during the process of covering the cover plate 20 on the sample holder 10.
In an exemplary embodiment, the guiding structure includes a guiding post 130 and a guiding hole 220, the guiding post 130 is disposed on the working surface 110 of the sample holder 10 and extends outward from the working surface 110, and the guiding hole 220 is disposed on the cover plate 20. When it is desired to cover the cover plate 20, the guide posts 130 are aligned with the guide holes 220. Of course, in another embodiment, the guiding column 130 may be disposed on the cover plate 20, and the guiding hole 220 is disposed on the sample holder 10.
In some embodiments, the guiding structure comprises four guiding posts 130 and four guiding holes 220, and the four guiding posts 130 are disposed on the working surface 110 of the sample holder 10 and are uniformly distributed along the circumference of the sample holder 10. Of course, in other embodiments, two, three, five, or other numbers of guide posts 130 and guide holes 220 may be included.
In some embodiments, the height of the guide posts 130 is between 0.1mm to 5mm, e.g., 2mm, 3mm, 4 mm.
In some embodiments, the guide posts 130 may be cylindrical, and accordingly, the guide holes 220 are circular holes, and when the cover plate 20 and the sample holder 10 are assembled, the cylindrical guide posts 130 and the guide holes 220 are matched, so that the assembly is more convenient, and the guide posts 130 can be conveniently aligned with the guide holes 220. Of course, in other embodiments, the guiding column 130 may also be a cuboid shape or other suitable shapes.
Of course, in other embodiments, the guiding structure of the stage may adopt other suitable structures, which are not listed here.
As shown in fig. 2, in an exemplary embodiment, the cover plate 20 is detachably covered on the working surface 110 of the sample holder 10, the cover plate 20 includes a plurality of observation holes 210, the plurality of observation holes 210 correspond to the plurality of lower concave portions 111 of the sample holder 10 one by one, and the area of each observation hole 210 is smaller than the area of the corresponding lower concave portion 111.
An operator can conveniently observe a plurality of samples accommodated in the plurality of lower concave parts 111 of the sample tray 10 through the plurality of observation holes 210, and meanwhile, through the design that the area of each observation hole 210 is smaller than that of the corresponding lower concave part 111, the samples can be limited in the lower concave parts 111 by the edges of the observation holes 210, and the accidental separation of the samples caused by the rotation of the sample tray 10 in the observation process is avoided.
As shown in fig. 1 and 2, in an exemplary embodiment, the stage further includes a mark structure including a mark hole 230 and a mark block 140, the mark block 140 is disposed on the sample holder 10, and the mark hole 230 is disposed on the cover plate 20.
Of course, in another embodiment, the identification block 140 may be disposed on the cover plate 20, and the identification hole 230 may be disposed on the sample holder 10.
When the sample holder 10 and the cover plate 20 are in a shape of a square or a cylinder, which is symmetrical, the operator may rotate the sample holder 10, which may make it impossible to distinguish the serial numbers of the plurality of samples on the sample holder 10. In this embodiment, by providing the identification structure, the operator can still accurately find the sequence of the plurality of samples after rotating the sample holder 10 at will.
Specifically, as shown in fig. 1, when the operator places a sample in the sample tray 10, the lower concave portion 111 closest to the marker block 140 is defined as a first lower concave portion 111a, the operator places a sample No. one in the first lower concave portion 111a, and so on, and the operator places a sample No. two and a sample No. three in the second lower concave portion 111b and the third lower concave portion 111c in the same row as the first lower concave portion 111a in sequence. After the sample holder 10 is rotated, since the first concave portion 111a (i.e., the first sample) is fixed by the identification block 140, the operator can find the first sample by positioning the identification block 140, and can find the sequence of the samples according to the sequence set by the concave portion.
Of course, the present invention is not limited to the position of the identification block 140, and a person skilled in the art can select the specific position of the identification block 140 according to the arrangement of the sample holder 10 and the plurality of lower recesses 111, which will not be described in detail herein.
In addition, in other embodiments, the identification structure of the object stage may also adopt other manners, which are not described one by one here.
In one embodiment, the identification block 140 has a triangular prism shape, and the concave portion 111 directed at one corner of the triangular prism shape may be defined as the first concave portion 111 a.
As shown in fig. 3 and 4, fig. 3 is a schematic view of a second embodiment of the sample holder of the present invention, and fig. 4 is a plan view of a second embodiment of the cover plate of the present invention. In an exemplary embodiment, the recessed portions 111 are cylindrical and the apertures 210 are circular, each aperture 210 having a diameter less than the diameter of its corresponding recessed portion 111 by a difference of 0.2mm to 10mm, e.g., 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9 mm.
To sum up, the utility model discloses an advantage and the beneficial effect of objective table lie in:
when the sample holder is used, a plurality of samples are correspondingly placed in the plurality of lower concave parts 111 of the sample holder 10, the cover plate 20 covers the working surface 110 of the sample holder 10, and the area of the observation hole 210 is smaller than that of the corresponding lower concave part 111, so that the observation hole 210 plays a role in positioning the samples, and when an operator observes the samples, the samples are prevented from falling off, and on the other hand, because the samples are arranged in the lower concave parts 111, no conductive adhesive or other viscous agents are additionally introduced, so that nondestructive clean observation is realized.
It should be noted here that the stage shown in the drawings and described in this specification is only one example of the use of the principles of the present invention. It should be clearly understood by those skilled in the art that the principles of the present invention are not limited to any of the details or any of the components of the apparatus shown in the drawings or described in the specification.
It is to be understood that the invention is not limited in its application to the details of construction and the arrangement of components set forth in the description. The present invention is capable of other embodiments and of being practiced and carried out in a variety of ways. The foregoing variations and modifications fall within the scope of the present invention. It will be understood that the invention disclosed and defined in this specification extends to all alternative combinations of two or more of the individual features mentioned or evident from the text and/or drawings. All of these different combinations constitute various alternative aspects of the present invention. The embodiments set forth herein explain the best modes known for practicing the invention and will enable others skilled in the art to utilize the invention.
Claims (10)
1. An object table for use with a microscope, the object table comprising:
the sample holder comprises a working surface for placing samples, the working surface is provided with a plurality of lower concave parts, and the lower concave parts are used for accommodating a plurality of samples;
the cover plate is detachably covered on the working surface of the sample support and comprises a plurality of observation holes, the observation holes correspond to the concave parts one by one, and the area of each observation hole is smaller than that of the corresponding concave part; and
and the guide structure is arranged on the sample support and the cover plate.
2. The object table of claim 1, wherein the sample holder is cylindrical, square, rectangular, or triangular prism shaped.
3. The object table of claim 1, wherein the periphery of the sample holder is provided with an annular protrusion, the annular protrusion extends outward and is perpendicular to the working surface, the annular protrusion defines a space, and when the cover plate covers the working surface of the sample holder, the annular protrusion covers at least a part of the side wall of the cover plate.
4. The object table of claim 1, wherein the working surface further comprises a plurality of pick-and-place grooves, and the plurality of pick-and-place grooves are in one-to-one correspondence with the plurality of lower concave portions.
5. The object table of claim 1, wherein each of the lower recesses has a cylindrical shape, a square shape, a rectangular parallelepiped shape, or a triangular prism shape; the depth of the lower concave part is 0.01 mm-2 mm, and the area of the lower concave part is 0.01cm2To 2cm2。
6. The object table of claim 1, wherein the recessed portion is cylindrical, the observation holes are circular, each observation hole has a diameter smaller than the diameter of the corresponding recessed portion, and the difference is 0.02mm to 10 mm.
7. The object table of claim 1, wherein the guide structure comprises:
the guide column is arranged on one of the sample holder and the cover plate; and
and the guide hole is arranged on the other one of the sample holder and the cover plate.
8. The object table of claim 7, wherein the guiding structure comprises four guiding posts and four guiding holes, the height of the guiding posts is between 0.1mm and 5mm, the four guiding posts are disposed on the sample holder and protrude from the working surface of the sample holder, and the four guiding holes are disposed on the cover plate.
9. The object table of claim 1, further comprising an identification structure, the identification structure comprising:
the identification hole is arranged on one of the sample holder and the cover plate; and
the identification block is arranged on the sample support and the other cover plate, and when the cover plate covers the working surface of the sample support, the identification block is matched with the identification hole.
10. The object table of claim 9, wherein the identifier block is in the shape of a triangular prism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922398529.4U CN211014834U (en) | 2019-12-27 | 2019-12-27 | Object stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922398529.4U CN211014834U (en) | 2019-12-27 | 2019-12-27 | Object stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211014834U true CN211014834U (en) | 2020-07-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922398529.4U Active CN211014834U (en) | 2019-12-27 | 2019-12-27 | Object stage |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211014834U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114113182A (en) * | 2021-10-22 | 2022-03-01 | 合肥国轩高科动力能源有限公司 | Positioning processing method for silicon-based negative electrode material shot by scanning electron microscope |
-
2019
- 2019-12-27 CN CN201922398529.4U patent/CN211014834U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114113182A (en) * | 2021-10-22 | 2022-03-01 | 合肥国轩高科动力能源有限公司 | Positioning processing method for silicon-based negative electrode material shot by scanning electron microscope |
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