CN217280722U - Turntable device for various wafers - Google Patents
Turntable device for various wafers Download PDFInfo
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- CN217280722U CN217280722U CN202221193363.8U CN202221193363U CN217280722U CN 217280722 U CN217280722 U CN 217280722U CN 202221193363 U CN202221193363 U CN 202221193363U CN 217280722 U CN217280722 U CN 217280722U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a carousel technical field specifically is a can supply carousel device of multiple wafer. It comprises a turntable base; the turntable is arranged on the upper surface of the turntable base and is rotationally connected with the turntable base; a plurality of wafer storage positions for placing wafers are formed on the upper surface of the rotary table; the driving motor is fixedly arranged on the turntable base, is in transmission connection with the turntable and is used for driving the turntable to rotate; the positioning and pressing mechanisms are arranged on the turntable, and a group of positioning and pressing mechanisms are arranged at each wafer storage position and are used for positioning and pressing the wafers. Compared with the prior art, the utility model provides a can supply the carousel device of multiple wafer to realize the rotatory switching of a plurality of wafer storage bits, the rotatory aversion of wafer is favored, and the chip of being convenient for is got the material. Meanwhile, a plurality of groups of wafers are stored on the rotary table, so that the feeding requirements of different chips can be met, and the manual replacement frequency is reduced, thereby improving the utilization rate of equipment.
Description
Technical Field
The utility model relates to a carousel technical field specifically is a can supply carousel device of multiple wafer.
Background
Wafer refers to a silicon wafer used for making silicon semiconductor circuits, the starting material of which is silicon. And after dissolving the high-purity polycrystalline silicon, doping silicon crystal seed crystals, and then slowly pulling out to form cylindrical monocrystalline silicon. After the silicon crystal bar is ground, polished and sliced, a silicon wafer, namely a wafer, is formed.
The chips are semi-finished products of the cut wafer, the wafer is a carrier of the chips, and the chips are cut into a block after the wafer is fully utilized to etch a certain number of chips.
The existing wafer loading device can only store one wafer, and cannot meet the requirement that a direct-display MiniLED screen needs three chips. Meanwhile, only one wafer is stored, and the manual replacement frequency is high, so that the utilization rate of equipment is reduced.
Based on this, the utility model discloses in, provide a novel carousel device that can supply multiple wafer to solve above-mentioned problem.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a turntable device for a plurality of wafers, which realizes the rotary switching of a plurality of wafer storage positions and is beneficial to material taking; meanwhile, the manual replacement frequency is reduced, so that the utilization rate of the equipment is improved.
The utility model adopts the following technical scheme: a turntable device for multiple wafers, comprising:
a turntable base;
the turntable is arranged on the upper surface of the turntable base and is rotationally connected with the turntable base; a plurality of wafer storage positions for placing wafers are formed on the upper surface of the rotary table;
the driving motor is fixedly arranged on the turntable base, is in transmission connection with the turntable and is used for driving the turntable to rotate;
the positioning and pressing mechanisms are arranged on the rotary table, and each wafer storage position is provided with one group of positioning and pressing mechanisms for positioning and pressing the wafer.
Further, the driving motor is connected with the turntable through a belt transmission mechanism;
the belt transmission mechanism includes:
the synchronous wheel is arranged at the output end of the driving motor;
one end of the synchronous belt is in meshing transmission connection with the synchronous wheel, and the other end of the synchronous belt is in meshing transmission connection with the outer ring of the turntable and drives the turntable to rotate;
the belt tensioning assembly is installed on the rotary table base and is arranged on the synchronous wheel and between the rotary tables, and the outer side of the synchronous belt is used for adjusting the tension of the synchronous belt.
Further, the outer edge of the lower surface of the rotary table extends downwards to form an annular flange, and a V-shaped guide rail is arranged on the inner wall side of the annular flange;
four corners of the turntable base are respectively provided with a guide roller; the outer peripheral surface of the guide roller is provided with a groove matched with the V-shaped guide rail, and the groove is in rolling contact with the V-shaped guide rail of the turntable, so that the turntable is supported.
Furthermore, a supporting column is vertically arranged at each of four corners of the turntable base, and the guide rollers are connected with the top ends of the supporting columns through rolling bearings.
Furthermore, a plurality of first through holes are uniformly distributed on the rotary table along the circumferential direction of the rotary table, and the first through holes are the wafer storage positions;
a second through hole is formed in the turntable base, and the diameter of the second through hole is larger than that of the first through hole; when any first through hole on the turntable rotates to the position above the second through hole, the first through hole and the second through hole are completely overlapped.
Further, the positioning and pressing mechanism comprises:
the limiting columns are arranged at the outer edge of one side of the first through hole of the turntable at intervals;
the ejection rod supporting seat is fixedly arranged at the outer edge of the other side of the first through hole of the rotary table and is opposite to the two limiting columns;
the ejection rod is slidably mounted on the ejection rod supporting base and can slide towards the position close to the center of the first through hole along the position far away from the first through hole, and positioning and pressing of the wafer are achieved.
Furthermore, the top of the limiting column is in an inverted frustum shape;
and one side of the ejector rod, which is close to the wafer, is provided with a chamfer.
Further, the turntable device further comprises:
the cross sliding module comprises an X-axis sliding module and a Y-axis sliding module arranged on the X-axis sliding module, and the sliding direction of the X-axis sliding module is perpendicular to that of the Y-axis sliding module; the rotary table base is fixedly arranged on the Y-axis sliding module and drives the rotary table base to slide along the XY directions.
Furthermore, the X-axis sliding module and the Y-axis sliding module are linear motor sliding modules.
Compared with the prior art, the utility model discloses in can supply the carousel device of multiple wafer beneficial effect does:
1) during operation, the wafer is placed at the wafer storage position on the turntable, and positioning and pressing of the wafer are achieved by adjusting the positioning and pressing mechanism. And the drive motor drives the turntable to rotate, so that the rotation switching of a plurality of wafer storage positions is realized, the rotation and the displacement of the wafers are facilitated, and the chip taking is facilitated. Meanwhile, a plurality of groups of wafers are stored on the turntable, so that the feeding requirements of different chips can be met, and the manual replacement frequency is reduced, thereby improving the utilization rate of equipment.
2) And the turntable base is fixedly arranged on the Y-axis sliding module and is driven to slide along the XY directions, so that a plurality of wafers are conveniently moved to required material taking positions respectively, and the material taking of chips at different positions on the wafers is facilitated.
3) Because the inside bearing that has of guide roller, frictional resistance when can greatly reduced carousel rotates.
4) When the rapid clamping device is used, a wafer is placed in the wafer storage position, the ejector rod is pushed to slide towards the center of the first through hole, positioning and pressing of the wafer are achieved, and rapid clamping and positioning of the wafer can be achieved. However, due to the production and manufacturing errors and the like of the wafers with the same specification, the sizes of the wafers may have certain deviation, and the ejector rods are arranged in a sliding mode, so that the size of the stored position of the wafer can be finely adjusted conveniently, and the problem that the wafer cannot be placed due to the production and manufacturing errors is solved.
Drawings
For a clearer explanation of the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an embodiment of a turntable device for accommodating a plurality of wafers according to the present invention;
FIG. 2 is a schematic structural view of the cross-shaped sliding module shown in FIG. 1 with the cross-shaped sliding module removed;
FIG. 3 is a schematic view of the structure of FIG. 2 with the wafer removed;
FIG. 4 is a cross-sectional view of the overall structure of FIG. 3;
FIG. 5 is a cross-sectional view of the partial structure of FIG. 3;
in the figure: the racket comprises a turntable base 1, a racket board part 10, a racket handle part 11, a guide roller 12, a support column 13 and a second through hole 14;
the rotary table comprises a rotary table 2, a wafer storage position 20, an annular flange 21, a V-shaped guide rail 22 and a first through hole 23;
a drive motor 3;
the device comprises a positioning and pressing mechanism 4, a limiting column 40, an ejector rod supporting seat 41 and an ejector rod 42;
a cross sliding module 5, an X-axis sliding module 50 and a Y-axis sliding module 51;
the belt transmission mechanism 6, a synchronous pulley 60, a synchronous belt 61, a belt tensioning assembly 62, a tensioning pulley support seat 621 and a tensioning pulley 622;
and (7) a wafer.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the present application, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The present invention will be discussed in detail below with reference to fig. 1 to 5 and specific embodiments:
as shown in fig. 1-5, the present invention provides a turntable device for multiple wafers, which includes:
a turntable base 1;
the turntable 2 is arranged on the upper surface of the turntable base 1, and is rotationally connected with the turntable base 1; a plurality of wafer storage positions 20 for placing wafers are formed on the upper surface of the turntable 2; in this embodiment, three wafer storage locations 20 are provided, which can be used for storing three wafers, and meet the requirement that the direct display MiniLED screen needs three chips;
the driving motor 3 is fixedly arranged on the turntable base 1, is in transmission connection with the turntable 2, and is used for driving the turntable 2 to rotate for 360 degrees;
and a plurality of groups of positioning and pressing mechanisms 4 are arranged on the turntable 2, and a group of positioning and pressing mechanisms 4 are arranged at each wafer storage position 20 and are used for positioning and pressing the wafer.
During operation, a wafer is placed at the wafer storage position 20 on the turntable 2, and the positioning and pressing of the wafer are realized by adjusting the positioning and pressing mechanism 4. And the driving motor 3 drives the turntable 2 to rotate, so that the rotation switching of the plurality of wafer storage positions 20 is realized, the rotation and the displacement of the wafer are facilitated, and the chip taking is facilitated. Meanwhile, a plurality of groups of wafers are stored on the turntable 2, so that the feeding requirements of different chips can be met, and the manual replacement frequency is reduced, thereby improving the utilization rate of equipment.
Of course, in some embodiments, the turntable device may further include:
the cross sliding module 5 comprises an X-axis sliding module 50 and a Y-axis sliding module 51 arranged on the X-axis sliding module 50, and the sliding direction of the X-axis sliding module 50 is perpendicular to that of the Y-axis sliding module 51; and will carousel base 1 fixed mounting will the Y axle slides on the module 51, drive carousel base 1 slides along XY direction, is convenient for remove a plurality of wafers respectively to required material position of getting, does benefit to the chip of the different positions on the wafer and gets the material. Simultaneously, with the 360 degrees rotations of X axle sliding module 50, Y axle sliding module 51 and carousel 2, can be accurate carry the wafer to the position department that needs transported, do benefit to the accurate material of getting.
Of course, the utility model discloses in slide module 50 and Y axle to this X axle and slide the concrete structure of module 51 and do not do the injecing, can belt formula moving mechanism, also can be for lead screw formula moving mechanism etc. all can, as long as can realize that the X axle slides module 50 and Y axle and slide module 51 respectively along the removal of X axle direction with the Y axle direction can, all belong to the utility model discloses a protection scope. Preferably, however, the X-axis sliding module 50 and the Y-axis sliding module 51 are linear motor sliding modules, so that the transmission speed is high, and the transmission accuracy is high.
Further, in some embodiments, the driving motor 3 is connected to the turntable 2 through a belt transmission mechanism 6 to drive the turntable 2 to rotate.
This belt drive mechanism 6 includes:
a synchronizing wheel 60, wherein the synchronizing wheel 60 is arranged at the output end of the driving motor 3;
one end of the synchronous belt 61 is in meshing transmission connection with the outer ring of the synchronous wheel 60, and the other end of the synchronous belt 61 is in meshing transmission connection with the outer ring of the turntable 2 to drive the turntable 2 to rotate;
In some more preferred embodiments, the turntable base 1 is designed to be a table tennis bat, and includes a bat portion 10 and a bat handle portion 11, and correspondingly, the driving motor 3 is disposed at the bat handle portion 11, the turntable 2 is mounted on the upper surface of the bat portion 10 in parallel, and the wafer storage bits 20 are triangular and uniformly distributed on the upper surface of the turntable 1, so that the overall structural design is compact and the space is saved.
Further, in some embodiments, the outer edge of the lower surface of the turntable 2 extends downward to form an annular flange 21, and a V-shaped guide rail 22 is formed on the inner wall side of the annular flange 21.
Four corners of the turntable base 1 are respectively provided with a guide roller 12; the outer peripheral surface of the guide roller 12 is provided with a groove matched with the V-shaped guide rail 22, the groove is in rolling contact with the V-shaped guide rail 22 of the turntable 2, the support of the turntable 2 is realized through the matching of the V-shaped guide rail 22 and the guide roller 12, and the support stability is good.
In some more preferred embodiments, the turntable base 1 and the turntable 2 are both horizontally arranged. Meanwhile, supporting columns 13 which are vertically arranged are arranged at four corners of the turntable base 1, and the guide rollers 12 are connected with the top ends of the supporting columns 13 through rolling bearings; because the guide roller 12 is internally provided with the bearing, the friction resistance of the rotary table 2 during rotation can be greatly reduced.
Further, in some embodiments, a plurality of first through holes 23 uniformly distributed along the circumferential direction of the rotary table 2 may be formed in the rotary table 2, where the first through holes 23 are the wafer storage locations 20.
Meanwhile, a second through hole 14 is formed in the turntable base 1, and the diameter of the second through hole 14 is larger than that of the first through hole 23. When any one of the first through holes 23 on the turntable 2 rotates to the position above the second through hole 14, the first through hole 23 and the second through hole 14 are completely overlapped, that is, when the turntable base 1 and the turntable 2 are overlooked from top to bottom, the first through hole 23 completely falls into the circle of the second through hole 14, which is convenient for processing wafers or loading and unloading.
On this basis, can also carry out further refining design to the mechanism 4 of said location, have the design as follows, the mechanism 4 of this location includes:
the limiting columns 40 are arranged at the outer edge of one side of the first through hole 23 of the turntable 2 at intervals;
the ejection rod supporting seat 41 is fixedly installed at the outer edge of the other side of the first through hole 23 of the turntable 2 and is right opposite to the two limiting columns 40;
the ejector rod 42 is slidably mounted on the ejector rod supporting base 41, and the ejector rod 42 can slide towards the position close to the center of the first through hole 23 along the position far away from the first through hole 23, so that the positioning and pressing of the wafer are realized. When the wafer clamping device is used, a wafer is placed in the wafer storage position 20, the ejector rod 42 is pushed to slide towards the center of the first through hole 23, positioning and pressing of the wafer are achieved, and rapid clamping and positioning of the wafer can be achieved. However, the size of the wafer with the same specification may have a certain deviation due to production and manufacturing errors, and the ejector pins 42 are slidably arranged, so that the fine adjustment of the size of the wafer storage bit 20 is facilitated, and the problem that the wafer cannot be placed due to the production and manufacturing errors is solved. The ejector rod 42 can be driven to slide by an air cylinder and can also be driven manually, preferably, the ejector rod 42 is driven manually, a spring is arranged at the position of the positioning and pressing mechanism 4, one end of the spring is fixedly connected with the ejector rod supporting seat 41, and the other end of the spring is connected with the ejector rod 42, so that the manual adjustment of the ejector rod is realized; by manually pulling the ejector pins 42, a quick replacement of the wafer can be achieved.
In some more preferred embodiments, the top of the limiting column 40 is designed to be an inverted frustum, and the wafer is limited by the inclined surface of the inverted frustum when the wafer is placed in the wafer storage position 20.
Meanwhile, one side of the ejector rod 42, which is close to the wafer, is provided with a chamfer, and the chamfer can press the outer frame of the wafer; a toggle bulge can be formed on the upper surface of the ejector rod 42, so that the ejector rod 42 can be conveniently pulled manually, and manual adjustment can be realized.
The present invention has been further described with reference to specific embodiments, but it should be understood that the specific description herein should not be construed as limiting the spirit and scope of the present invention, and that various modifications to the above-described embodiments, which would occur to persons skilled in the art after reading this specification, are within the scope of the present invention.
Claims (9)
1. A kind of rotary table apparatus that can supply many kinds of wafers, characterized by that: it comprises the following steps:
a turntable base;
the turntable is arranged on the upper surface of the turntable base and is rotationally connected with the turntable base; a plurality of wafer storage positions for placing wafers are formed on the upper surface of the rotary table;
the driving motor is fixedly arranged on the turntable base, is in transmission connection with the turntable and is used for driving the turntable to rotate;
the positioning and pressing mechanisms are arranged on the rotary table, and each wafer storage position is provided with one group of positioning and pressing mechanisms for positioning and pressing the wafer.
2. The apparatus as claimed in claim 1, wherein:
the driving motor is connected with the turntable through a belt transmission mechanism;
the belt transmission mechanism includes:
the synchronous wheel is arranged at the output end of the driving motor;
one end of the synchronous belt is in meshing transmission connection with the synchronous wheel, and the other end of the synchronous belt is in meshing transmission connection with the outer ring of the turntable and drives the turntable to rotate;
the belt tensioning assembly is installed on the rotary table base and is arranged on the synchronous wheel and between the rotary tables, and the outer side of the synchronous belt is used for adjusting the tension of the synchronous belt.
3. The apparatus as claimed in claim 1, wherein:
the outer edge of the lower surface of the rotary table extends downwards to form an annular flange, and a V-shaped guide rail is arranged on the inner wall side of the annular flange;
four corners of the turntable base are respectively provided with a guide roller; the outer peripheral surface of the guide roller is provided with a groove matched with the V-shaped guide rail, and the groove is in rolling contact with the V-shaped guide rail of the turntable, so that the turntable is supported.
4. The apparatus as claimed in claim 3, wherein:
the four corners of the turntable base are vertically provided with a support column, and the guide roller is connected with the top end of the support column through a rolling bearing.
5. The apparatus as claimed in claim 1, wherein:
a plurality of first through holes are uniformly distributed on the rotary table along the circumferential direction of the rotary table, and the first through holes are the wafer storage positions;
a second through hole is formed in the turntable base, and the diameter of the second through hole is larger than that of the first through hole; when any first through hole on the turntable rotates to the position above the second through hole, the first through hole and the second through hole are completely overlapped.
6. The apparatus as claimed in claim 5, wherein:
the positioning and pressing mechanism comprises:
the limiting columns are arranged at the outer edge of one side of the first through hole of the turntable at intervals;
the ejection rod supporting seat is fixedly arranged at the outer edge of the other side of the first through hole of the rotary table and is opposite to the two limiting columns;
the ejection rod is slidably mounted on the ejection rod supporting base and can slide towards the position close to the center of the first through hole along the position far away from the first through hole, and positioning and pressing of the wafer are achieved.
7. The turntable device for multiple wafers according to claim 6, wherein:
the top of the limiting column is in an inverted frustum shape;
one side of the ejector rod, which is close to the wafer, is provided with a chamfer plane.
8. The apparatus as claimed in claim 1, wherein:
the turntable device further comprises:
the cross sliding module comprises an X-axis sliding module and a Y-axis sliding module arranged on the X-axis sliding module, and the sliding direction of the X-axis sliding module is perpendicular to that of the Y-axis sliding module; the rotary table base is fixedly arranged on the Y-axis sliding module and drives the rotary table base to slide along the XY directions.
9. The apparatus as claimed in claim 8, wherein:
the X-axis sliding module and the Y-axis sliding module are linear motor sliding modules.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221193363.8U CN217280722U (en) | 2022-05-17 | 2022-05-17 | Turntable device for various wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221193363.8U CN217280722U (en) | 2022-05-17 | 2022-05-17 | Turntable device for various wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217280722U true CN217280722U (en) | 2022-08-23 |
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ID=82885691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221193363.8U Active CN217280722U (en) | 2022-05-17 | 2022-05-17 | Turntable device for various wafers |
Country Status (1)
| Country | Link |
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| CN (1) | CN217280722U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116525515A (en) * | 2023-05-30 | 2023-08-01 | 苏州天准科技股份有限公司 | Carrier device with circumferential positioning function |
-
2022
- 2022-05-17 CN CN202221193363.8U patent/CN217280722U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116525515A (en) * | 2023-05-30 | 2023-08-01 | 苏州天准科技股份有限公司 | Carrier device with circumferential positioning function |
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