CN115424967A - Grain transfer equipment and grain transfer process thereof - Google Patents

Grain transfer equipment and grain transfer process thereof Download PDF

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Publication number
CN115424967A
CN115424967A CN202211133978.6A CN202211133978A CN115424967A CN 115424967 A CN115424967 A CN 115424967A CN 202211133978 A CN202211133978 A CN 202211133978A CN 115424967 A CN115424967 A CN 115424967A
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carrier plate
transfer
bearing
storage
moving
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卢国强
郑灿升
王勇
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Shenzhen Yougen Technology Co ltd
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Shenzhen Yougen Technology Co ltd
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Priority to CN202211133978.6A priority Critical patent/CN115424967A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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    • H01L33/005Processes
    • H01L33/0095Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
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    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
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Abstract

The invention discloses a grain transfer device and a grain transfer process thereof, and the grain transfer device comprises a machine table, a support erected on the machine table, a material storage part, a transfer platform and a grain transfer part, wherein the support is of a U-shaped structure and divides the upper space of the machine table into a discharge space and a feed back space, and a gap space is formed between the bottom of the support and the surface of the machine table; the material storage part is arranged on the side part of the machine table and comprises a material discharge storage part and a material return storage part; the transfer platform is positioned in the gap space; the transfer moving part comprises a discharging moving mechanism and a material returning moving mechanism; the crystal grain transfer part comprises a carrier plate bearing mechanism and a crystal grain transfer mechanism. The invention realizes the multi-level and multi-layer large-capacity storage of the carrier plate, the slide-in type taking and placing carrying of the carrier plate, the automatic rotation transfer and the synchronous negative pressure adsorption and fixation of the carrier plate, effectively improves the transfer stability of the carrier plate, realizes the limit limitation of the probe transfer top thorn limit and the auxiliary blue film adsorption, and ensures the position accuracy and the stability of the crystal grains in the crystal grain transfer process.

Description

Grain transfer equipment and grain transfer process thereof
Technical Field
The invention relates to the field of semiconductor manufacturing equipment, in particular to crystal grain transfer equipment and a crystal grain transfer process thereof.
Background
In the field of display technology, micro display technologies that are currently in mass production include HTPS TFT LCDs based on crystal glass, DLPs based on silicon wafers, and the like. Since the OLED technology has the limitation defects of light emitting efficiency, operating temperature range, and lifetime, the inorganic Micro LED will be the main technology of the future Micro display in the long term. As the conventional flat panel display technology and application gradually enter the mature period, the development of display application will step to the fields of wearing or virtual reality and augmented reality, and the micro display technology based on the wafer process is more suitable for emerging applications due to the influence of factors such as contrast value, panel precision and power saving. The technology for manufacturing Micro LED arrays on wafers is mature, so that mass production of Micro displays using the technology is expected, but when the technology is expanded to be applied to general flat panel displays, the huge transfer efficiency of crystal grains becomes the biggest technical bottleneck. How to effectively transfer the LED crystal grains to the glass or plastic substrate becomes a key factor for the large-scale development and popularization of the Micro LED technology.
In the process of developing a production line of a crystal grain transfer automation device, a carrier plate is required to load crystal grains to adapt to material transfer and loading and unloading in the automatic production process, and a single carrier plate is used for bearing a plurality of crystal grains to ensure the efficiency in the production process. Therefore, the problems of automatic storage of the carrier plate, cooperative action of carrier plate storage and taking and placing actions, and guiding limitation and fixation in the carrier plate storage process need to be solved in the crystal grain transfer process, so as to ensure the stability of the crystal grain position.
In addition, the problems of transfer and taking and placing of the carrier plate need to be solved in the production process; meanwhile, as the situation that the incoming and outgoing directions of the carrier plate are inconsistent possibly exists between the storage part and the crystal grain transfer production part, the problem of position or angle adjustment during transfer between different stations of the carrier plate needs to be solved; in addition, since the carrier is loaded with a plurality of crystal grains, the problems of position stability and accuracy of the carrier during the transfer process need to be solved.
In the process of developing a production line of a crystal grain transfer automation device, a carrier plate is required to load crystal grains to adapt to material transfer and loading and unloading in the automatic production process, and a single carrier plate is used for bearing a plurality of crystal grains to ensure the efficiency in the production process. The core process section in the grain transfer equipment is a grain transfer process, and the following technical problems need to be solved aiming at the grain transfer process: 1. the crystal grain to be transferred is generally placed on a carrier plate with a blue film horizontally clamped in the middle, the crystal grain needs to be transferred to a horizontal glass or plastic carrier plate, and the automatic bearing problem of the carrier plate and the automatic coordination problem between the taking and placing actions of the carrier plate and the carrier plate need to be solved in the crystal grain transfer process. 2. The crystal grain transfer process requires that the crystal grains on the blue film carrier plate are accurately transferred to the glass carrier plate, so that the automatic adjustment of the relative position or angle of the two carrier plates needs to be solved before the crystal grains are transferred, and the accuracy of the crystal grain transfer is ensured. 3. When the crystal grains are transferred, the blue film carrier plate and the glass carrier plate are required to be tightly adhered to each other so as to reduce the moving path of the crystal grains transferred between the two carrier plates and improve the position precision, and the glass carrier plate is made of easily damaged materials, so that the problem that the surfaces of the two carrier plates are scratched or damaged due to contact is required to be solved. 4. The damage of the crystal grain, the blue film or the lower glass carrier plate caused by excessive pushing is easy to occur in the downward probing process of the probe. 5. The blue film carrier of the crystal grain to be transferred is made of a flexible material and has certain internal elasticity, when the probe pushes one crystal grain on the blue film, the acting force of the probe received by the crystal grain is transmitted to the blue film, so that the blue film is partially protruded and deformed downwards from the original plane state along the crystal grain, and the situation can cause the position of other crystal grains around the crystal grain to deviate, or the position of other crystal grains around the crystal grain can not be completely restored to the original plane state after the blue film is deformed, so that the situation that the crystal grains drop is caused. 6. Based on the above situation, the blue film is upwards adsorbed by adopting vacuum negative pressure in the probe downward probing process, and the problem of cooperation between the movable probe and the adsorption cavity needs to be solved. 7. In addition, because the probe moves the crystal grains down at high speed in batches, the probe needs to be replaced frequently, and therefore the problem of rapid disassembly and assembly of the probe needs to be solved.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a crystal grain transfer apparatus and a crystal grain transfer process thereof, which can realize multi-level multi-layer large-capacity storage of a carrier plate, slide-in type picking and placing bearing of the carrier plate, automatic rotation transfer and synchronous negative pressure adsorption fixing of the carrier plate, effectively improve the stability of carrier plate transfer, realize probe transfer top piercing limit limiting and auxiliary adsorption of a blue film, and ensure the accuracy and stability of the position of a crystal grain in the crystal grain transfer process.
The technical scheme adopted by the invention is as follows: a grain transfer device comprises a horizontally arranged machine table, a bracket erected on the machine table, a material storage part, a transfer platform and a grain transfer part, wherein,
the bracket is of a U-shaped structure, is inversely arranged in the middle of the machine table, divides the upper space of the machine table into a discharging space and a feeding back space, and forms a gap space between the bottom of the bracket and the surface of the machine table;
the material storage part is arranged on the side part of the machine table and comprises a material discharge storage part and a material return storage part, and the material discharge storage part and the material return storage part are respectively and correspondingly arranged on one side of the material discharge space and one side of the material return space;
the transfer platforms comprise at least two transfer platforms, and the at least two transfer platforms are arranged on the machine platform in parallel at intervals and are positioned in the gap space;
the transfer part comprises a discharging moving mechanism and a material returning moving mechanism, and the discharging moving mechanism and the material returning moving mechanism are respectively arranged in the discharging space and the material returning space;
the crystal grain transfer part comprises a carrier plate bearing mechanism and a crystal grain transfer mechanism, wherein the carrier plate bearing mechanism is inversely hung at the bottom of the bracket and is correspondingly arranged above the transfer platform; the crystal grain transfer mechanism is correspondingly arranged above the carrier plate bearing mechanism.
Preferably, the discharging storage part and the returning storage part comprise two storage mechanisms, and the two storage mechanisms respectively correspond to the discharging space and the returning space and are arranged on the side part of the machine table; the material storage mechanism comprises a material storage linear module, a material storage sliding seat and a material storage assembly, wherein the material storage linear module is vertically arranged; the material storage sliding seat is movably arranged on the material storage linear module along the vertical direction and is connected with the output end of the material storage linear module; the storage assembly is arranged on the storage sliding seat.
Preferably, the material storage assembly comprises a material storage bracket and a material storage box, wherein the material storage bracket is connected to the side wall of the material storage sliding seat, at least two storage spaces are arranged on the material storage bracket along the vertical direction, and one side of each storage space, which is close to the machine table, is an open surface; the storage boxes are correspondingly arranged in the storage space and slide in or out through the open surface of the storage space; above-mentioned storage support includes that at least two sets of spacing block the subassembly, and at least two sets of spacing block the subassembly and correspond and set up in each storage space, and the storage case is spacing and blockking through spacing block the subassembly when sliding in storage space.
Preferably, the transfer platform comprises a platform support plate, a platform slide rail, a platform slide seat, a platform limit column, a support plate top block and a platform suction hole, wherein the platform support plate is horizontally arranged on the machine platform; the platform slide rail is horizontally arranged on the platform support plate; the platform sliding seat is slidably embedded on the platform sliding rail and is driven by a cylinder or a linear motor to linearly move, a carrying seat is arranged on the platform sliding seat, a through groove is formed in the carrying seat, and the through groove vertically penetrates through the carrying seat and the platform sliding seat; the air channel is arranged in the carrier seat and is connected with an external vacuum generating device through an air nozzle arranged on the side part of the carrier seat; the platform limiting columns comprise at least two, the platform limiting columns are arranged on the carrier plate along the side edges of the through grooves and protrude upwards, and limiting spaces are formed among the platform limiting columns so as to limit the carrier plate placed on the carrier seat; the platform suction holes are arranged on the carrier seat, are positioned between the inner side wall of the through groove and the platform limiting column and are communicated with an air passage in the carrier seat so as to adsorb and fix the carrier plate placed on the carrier seat; the carrier plate top block is arranged on the carrier seat, protrudes above the carrier seat and is connected with the carrier seat through a spring, so that the carrier seat is pushed up by the elasticity of the spring after the crystal grains are transferred.
Preferably, the discharging moving mechanism comprises a discharging linear module and a moving assembly, wherein the discharging linear module is arranged in the discharging space along the side direction of the machine platform; the moving component is slidably arranged on the discharging linear module and is connected with the output end of the discharging linear module; the discharging linear module drives the moving component to move back and forth linearly between the discharging storage part and the carrier plate bearing mechanism along a linear direction, and the moving component takes out the carrier plate from the discharging storage part and moves the carrier plate into the carrier plate bearing mechanism.
Preferably, the moving assembly comprises a rotating component, a moving support, a support plate limiting and supporting component and a clamping plate component, wherein the rotating component is horizontally arranged, and the output end of the rotating component is upwards arranged; the moving support is horizontally arranged on the output end of the rotating component and is driven by the rotating component to rotate in the horizontal plane; the support plate limiting and supporting components comprise two sets, the two sets of support plate limiting and supporting components are respectively arranged on two sides of the moving support, each support plate limiting and supporting component comprises a sliding groove, one end of each sliding groove is opened, the other end of each sliding groove is sealed, and the support plate horizontally slides in through one end of each sliding groove and is limited and supported through the sliding groove; the clamping plate component is arranged between the two sets of support plate limiting support components and moves linearly back and forth along the direction of the sliding-in groove, and the clamping plate component clamps the support plate after moving to the outside of one end of the sliding-in groove and drives the support plate to move towards the direction of the other end of the sliding-in groove, so that the support plate horizontally slides into the sliding-in groove.
Preferably, the material returning and moving mechanism comprises a carrier plate moving arm and a material returning and moving arm, wherein the carrier plate moving arm is arranged in the material returning space and extends in a linear direction above the transfer platform so as to move the empty board at the previous station onto the transfer platform; the feed back moving arm is arranged between the transfer platform and the feed back storage part, after the carrier plate on the transfer platform is filled with the crystal grains, the carrier plate is moved to the feed back moving arm by the carrier plate moving arm, and the carrier plate is moved to the feed back storage part by the feed back moving arm; the material returning and moving arm comprises a material returning linear module and a moving assembly, wherein the material returning linear module is arranged along the side direction of the machine platform; the moving component is arranged on the output end of the material returning linear module and is driven by the material returning linear module to move back and forth between the transfer platform and the material returning storage part.
Preferably, the carrier plate bearing mechanism comprises a bearing slide rail, a longitudinal driving assembly, a transverse driving assembly and a bearing assembly, wherein the bearing slide rail is horizontally arranged; the device comprises at least two groups of transverse driving components which are connected on a bearing slide rail in a sliding way; the output end of the longitudinal driving component is connected with the transverse driving component so as to drive the transverse driving component to do longitudinal linear motion; the bearing components comprise at least two groups, and the at least two groups of bearing components are connected to the transverse driving component in a sliding way along the transverse direction, are driven by the transverse driving component to move transversely and linearly and are arranged corresponding to the transfer platform up and down; the carrier assembly is internally provided with a bearing space which is horizontally arranged and is positioned above the transfer platform, one side of the carrier assembly, which is close to the discharge space, is an open notch, and the carrier plate loaded with the crystal grains slides into the bearing space through the open notch.
Preferably, the bearing assembly comprises a bearing support member, a bearing rotating member, a bearing support plate and a bearing member, wherein the bearing support member is slidably connected to the output end of the transverse linear module; the bearing rotating component is arranged at the lower part of the bearing supporting component and can rotate in a horizontal plane; the bearing support plate is horizontally arranged at the lower part of the bearing rotating component and is driven by the bearing rotating component to rotate; the bearing part is connected to the lower part of the bearing support plate and is flexibly connected with the bearing support plate along the vertical direction, and the bearing space is arranged in the bearing part.
Preferably, the crystal grain transfer mechanism comprises a transfer support plate, a transfer lifting motor and a crystal grain transfer assembly, wherein the transfer support plate is vertically connected to the crystal grain transfer support; the crystal grain transfer bracket is vertically arranged at the top of the bracket; the transfer lifting motor is arranged on the transfer support plate, and the output end of the transfer lifting motor is arranged downwards; the crystal grain transferring assembly is connected to the transferring support plate in a sliding mode along the vertical direction and is connected with the output end of the transferring lifting motor.
A crystal grain transfer process of crystal grain transfer equipment comprises the following process steps:
s1, loading a carrier plate: the blue film loaded with the crystal grains is clamped by a carrier plate with a circular through hole in the middle part, so that the blue film part loaded with the crystal grains is positioned at the position of the circular through hole of the carrier plate, and the carrier plates are inserted into a material storage box of a discharging storage part one by one;
s2, loading a storage box: after the material storage box in the step S1 is filled with the carrier plates, the material storage box integrally slides into a storage space of a material storage bracket of a material discharging storage part;
s3, discharging the carrier plate: after the storage space is loaded with the storage box in the step S2, the storage linear module of the discharging storage part drives the storage bracket to integrally lift, so that the storage box to be discharged is horizontally aligned with the discharging moving mechanism, the discharging linear module of the discharging moving mechanism drives the moving assembly to be close to the storage box, and the moving assembly horizontally clamps the support plate in the storage box and then drives the support plate to horizontally slide out of the storage box; after the carrier plate at the position of the storage box corresponding to the height of the moving assembly is taken out, the storage linear module drives the storage bracket to move up and down, so that the other layer of carrier plate of the storage box is aligned with the moving assembly;
s4, discharging and moving the carrier plate: after the moving assembly in the step S3 takes out the carrier plate from the material storage box, the discharging linear module drives the moving assembly to move to one side of a bearing assembly of the carrier plate bearing mechanism, and the carrier plate is horizontally inserted into a bearing space of the bearing assembly after the clamped carrier plate rotates by 90 degrees; after the crystal grains on the carrier plate in the carrier assembly are transferred, the moving assembly clamps the empty carrier plate from the outer side, pulls out the carrier space and moves the lower carrier plate;
s5, circularly discharging the carrier plate: repeating the steps S1 to S4, and completing the cyclic loading, discharging, moving and discharging of the carrier plates in the discharging space;
s6, detecting and adjusting a carrier plate: step S4 or S5, after the carrier plate is inserted into the bearing space, a detection mechanism arranged below the transfer platform shoots and detects the position of the carrier plate upwards and transmits information to the industrial personal computer, and the industrial personal computer controls the bearing assembly to adjust the position or angle of the carrier plate;
s7, empty plate feeding: the empty glass carrier plate to be loaded with the crystal grains is moved by a carrier plate moving arm and is placed on a transfer platform, and the transfer platform limits and clamps the empty glass carrier plate and then downwards adsorbs and fixes the empty glass carrier plate by using vacuum negative pressure; the fixed empty glass carrier plate is driven by the transfer platform to slide into the lower part of the bearing component in a linear way, so that the empty glass carrier plate corresponds to the carrier plate in the bearing space in the step S6 up and down;
s8, adjusting the position of the crystal grain transfer assembly: the carrier assembly in the step S6 loads the carrier plate of the crystal grains to be transferred, and after the empty glass carrier plate in the step S7 correspondingly moves to the position below the carrier plate of the crystal grains to be transferred, the crystal grain transfer assembly of the crystal grain transfer mechanism passes through the through hole of the carrier assembly from the upper mounting station and descends to the working station;
s9, grain point position transfer: after the position of the crystal grain transfer assembly is lowered and adjusted to the working station in the step S8, the absorption plane at the bottom of the probe cap of the crystal grain transfer assembly props against a carrier blue film of the fixed crystal grain on the carrier plate of the bearing space, and the crystal grain transfer assembly is upwards absorbed through auxiliary absorption holes distributed on the absorption plane of the probe cap so as to fix the blue film locally; a conical lower probe part of the probe downwards penetrates through a probe hole in the middle of the probe cap to push crystal grains which are locally fixed at the middle of the blue film downwards onto a hollow glass carrier plate below;
s10, crystal grain plane position transfer: after the crystal grains at the single-point position are transferred in the step S9, the bearing component and the transfer platform synchronously move linearly, so that the probe is aligned to the point of the next crystal grain to be transferred in the vertical direction, and the probe cap repeat the step S9 until the crystal grains on the surface of the blue film are completely transferred to the empty glass carrier plate below;
s11, returning the carrier plate: after the empty glass carrier plate in the step S9 is filled with the crystal grains, the transfer platform linearly slides out from the lower part of the bearing assembly, the vacuum negative pressure on the transfer platform stops adsorbing the carrier plate, the carrier plate is upwards jacked by a carrier plate jacking block and then upwards adsorbed and fixed by a carrier plate moving arm, the carrier plate is moved to a material return moving arm, a moving assembly of the material return moving arm clamps the carrier plate and then is driven to a material storage mechanism of a material return storage part through a material return linear module, and the carrier plate loaded with the crystal grains is horizontally pushed into a material storage box of the material storage mechanism by the moving assembly of the material return moving arm;
s12, crystal grain cyclic transfer and feed back: and repeating the steps S9 to S11, continuously transferring the crystal grains to the empty glass carrier plate, moving the glass carrier plate feed back loaded with the crystal grains to the storage box, and simultaneously, lifting the storage box along the vertical direction to enable the layers with different heights to be inserted into the full-loading carrier plate.
The invention has the beneficial effects that:
aiming at the defects and shortcomings in the prior art, the invention independently develops and designs the crystal grain transfer equipment and the crystal grain transfer process thereof, which realize the multi-level and multi-layer large-capacity storage of the carrier plate, the slide-in type picking and placing bearing of the carrier plate, the automatic rotation transfer and the synchronous negative pressure adsorption fixation of the carrier plate, effectively improve the transfer stability of the carrier plate, realize the limit of the top piercing limit of probe transfer and the auxiliary adsorption of a blue film, and ensure the position accuracy and stability of crystal grains in the crystal grain transfer process. The invention realizes integrated grain transfer of an automatic production line, a machine table is used as a bearing part, the inverted U-shaped marble bracket is arranged on the machine table, a gap space is formed between the bracket and the surface of the machine table, transfer platforms are horizontally arranged in the gap space, the transfer platforms comprise a plurality of groups to form a plurality of transfer stations, single-machine multi-station grain transfer is realized, and the production capacity of grain transfer is improved. The crystal grain transferring mechanism is arranged at the upper part of the bracket and vertically corresponds to the carrier plate bearing mechanism. The support divides the space on the upper part of the machine table into a discharging space and a feeding back space, and the side part of the machine table is provided with a storing mechanism corresponding to the discharging space and the feeding back space respectively. And a support plate moving arm is linearly arranged on the side wall of the support in the material returning space. The discharging moving mechanism and the returning moving arm are respectively arranged in the discharging space and the returning space corresponding to the storing mechanism, the discharging moving mechanism and the returning moving arm adopt moving components with the same structure, and the discharging moving mechanism and the returning moving arm are different in function inconsistency in the whole machine process. After crystal grains to be transferred are loaded by a blue film in a supplied material state, the blue film clamp is fixed on a carrier plate with a planar structure, the carrier plate is stored in a storage box with a multilayer carrier plate storage space in a horizontal sliding-in mode, and then the storage box is stored on a storage bracket with a multilayer storage space in a horizontal sliding-in mode; before crystal grain transfer, the discharging moving mechanism drives the moving assembly to move to the side part of the storage mechanism on one side of the discharging storage space, the carrier plate in the storage box is clamped and then horizontally pulled out, the pulled carrier plate is horizontally supported and supported, meanwhile, the carrier plate is driven to move to one side of the carrier plate bearing mechanism after being downwards adsorbed and fixed through vacuum negative pressure, the carrier plate is horizontally inserted into the carrier plate bearing mechanism after rotating for 90 degrees, and in the carrier plate taking process, the storage mechanism correspondingly drives the storage box to move up and down, so that the carrier plates in different height layers can be taken out one by one. A carrier plate moving arm in the feed back space sucks the glass carrier plate led out from the previous station and then moves the glass carrier plate to a transfer platform, and after the glass carrier plate is limited and fixed by the transfer platform and is adsorbed and fixed by vacuum negative pressure, the transfer platform moves to the position below a carrier plate transfer mechanism, so that the glass carrier plate is vertically aligned with the blue film carrier plate; the crystal grain transfer mechanism extends downwards into the carrier plate transfer mechanism, and crystal grains on the blue film carrier plate are downwards ejected and transferred onto a lower glass carrier plate in a probe cap combination mode; after the glass carrier plate is loaded with the crystal grains, the transfer platform linearly slides out to the position below the carrier plate moving arm, the carrier plate moving arm moves the carrier plate to the material return moving arm, the material return moving arm supports the carrier plate through the moving assembly and drives the carrier plate to move to the material storage mechanism on one side of the material return space, and the carrier plates are pushed into the material storage box of the material storage mechanism one by one.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic perspective view of the second embodiment of the present invention.
Fig. 3 is a third schematic perspective view of the present invention.
FIG. 4 is a fourth schematic view of the three-dimensional structure of the present invention.
Fig. 5 is a schematic perspective view of a hidden component according to the present invention.
Fig. 6 is a schematic perspective view of a second embodiment of the hidden component according to the present invention.
Fig. 7 is a schematic perspective view of the storing mechanism according to the present invention.
Fig. 8 is a schematic perspective view of a second storing mechanism according to the present invention.
Fig. 9 is a schematic perspective view of the magazine assembly of the present invention.
Fig. 10 is a schematic perspective view of the second magazine assembly of the present invention.
Fig. 11 is a schematic perspective view of the magazine assembly of the present invention after the components thereof are hidden.
Fig. 12 is a schematic perspective view showing a second embodiment of the magazine according to the present invention after the components thereof are hidden.
FIG. 13 is a third schematic perspective view of the magazine with hidden components according to the present invention.
Fig. 14 is a schematic perspective view of the discharging and moving mechanism of the present invention.
Fig. 15 is a schematic perspective view of the second discharging and moving mechanism of the present invention.
Fig. 16 is a schematic perspective view of the moving assembly according to one embodiment of the present invention.
Fig. 17 is a second perspective view of the moving assembly of the present invention.
Fig. 18 is a third perspective view of the moving assembly of the present invention.
FIG. 19 is a fourth perspective view of the moving assembly of the present invention.
FIG. 20 is a fifth perspective view of the moving assembly of the present invention.
Fig. 21 is a schematic perspective view of a transfer platform according to an embodiment of the present invention.
Fig. 22 is a second perspective view of the transfer platform of the present invention.
Fig. 23 is a schematic perspective view of a die transfer portion according to one embodiment of the present invention.
Fig. 24 is a second schematic perspective view of a die transfer portion according to the present invention.
FIG. 25 is a third schematic view of a three-dimensional structure of a die transfer portion according to the present invention.
Fig. 26 is a schematic perspective view of a carrier loading mechanism according to an embodiment of the present invention.
Fig. 27 is a second schematic perspective view of a carrier loading mechanism according to the present invention.
Fig. 28 is a schematic perspective view of the load bearing assembly of the present invention.
Fig. 29 is a second perspective view of the load bearing assembly of the present invention.
Fig. 30 is a third perspective view of the load bearing member of the present invention.
Fig. 31 is a schematic perspective view of a hidden part of the load bearing assembly of the present invention.
Fig. 32 is a second perspective view of the hidden part of the load-bearing assembly of the present invention.
Fig. 33 is an enlarged view of the structure at I in fig. 31.
Fig. 34 is a schematic perspective view of a die transfer mechanism according to an embodiment of the present invention.
Fig. 35 is a second schematic perspective view of the die transfer mechanism of the present invention.
Fig. 36 is a schematic perspective view of a die transfer assembly according to one embodiment of the present invention.
Fig. 37 is a second perspective view of a die transfer assembly according to the present invention.
Fig. 38 is a third schematic perspective view of a die transfer device according to the present invention.
Fig. 39 is a schematic perspective view of a die transfer device with hidden components according to an embodiment of the present invention.
Fig. 40 is a second schematic perspective view of the die transfer device with hidden components according to the present invention.
Fig. 41 is an enlarged schematic view of fig. 40 at II.
FIG. 42 is a perspective view of a probe and a probe cap according to the present invention.
FIG. 43 is a second schematic perspective view of a probe and a probe cap according to the present invention.
Fig. 44 is an enlarged schematic view of fig. 42 at III.
Fig. 45 is a schematic perspective view of a carrier arm according to an embodiment of the present invention.
FIG. 46 is a second schematic perspective view of a carrier arm according to the present invention.
Fig. 47 is a schematic perspective view of the detecting mechanism of the present invention.
FIG. 48 is a second perspective view of the detecting mechanism of the present invention.
Detailed Description
The invention will be further described with reference to the accompanying drawings in which:
as shown in fig. 1 to 48, the technical solution adopted by the present invention is as follows: a grain transfer device comprises a machine table 1 horizontally arranged, a bracket 5 erected on the machine table 1, a material storage part, a transfer platform 4 and a grain transfer part, wherein,
the support 5 is of a U-shaped structure, is inversely arranged in the middle of the machine table 1, divides the upper space of the machine table 1 into a discharging space and a feeding back space, and forms a gap space between the bottom of the support and the surface of the machine table 1;
the material storage part is arranged on the side part of the machine table 1 and comprises a material discharge storage part and a material return storage part, and the material discharge storage part and the material return storage part are respectively and correspondingly arranged on one side of the material discharge space and one side of the material return space; the discharging storage part stores the carrier plate loaded with the crystal grains, and the feeding back storage part stores the carrier plate loaded with the crystal grains;
the transfer platforms 4 comprise at least two transfer platforms 4, and the at least two transfer platforms 4 are arranged on the machine table 1 in parallel at intervals and are positioned in the gap space;
the transfer part comprises a discharging moving mechanism and a material returning moving mechanism, and the discharging moving mechanism and the material returning moving mechanism are respectively arranged in the discharging space and the material returning space;
the die transfer part 6 comprises a carrier plate carrying mechanism 62 and a die transfer mechanism 63, wherein the carrier plate carrying mechanism 62 and the die transfer mechanism 63 comprise at least two groups, wherein the carrier plate carrying mechanism is inversely hung at the bottom of the bracket 5 and is correspondingly arranged above the transfer platform 4; the crystal grain transfer mechanism 63 is correspondingly arranged above the carrier plate carrying mechanism 62;
the discharging and moving mechanism takes out the carrier plate loaded with the crystal grains in the discharging storage part from the discharging storage part and moves the carrier plate into a carrier plate bearing mechanism 62, and the carrier plate bearing mechanism 62 suspends the carrier plate in the air;
the return material moving mechanism moves the unloaded plate to the transfer platform 4; the crystal grain transfer mechanism 63 transfers the crystal grains on the carrier plate in the bearing mechanism 62 to the empty carrier plate through the lower top of the probe;
the material return moving mechanism moves the carrier loaded with the die from the transfer platform 4 to the material return storage part.
As shown in fig. 1 to 8, the discharging storage part and the feeding back storage part include two storing mechanisms 2, each storing mechanism 2 includes two sets, and the two storing mechanisms 2 are respectively arranged at the side of the machine table 1 corresponding to the discharging space and the feeding back space; the material storage mechanism 2 comprises a material storage linear module 21, a material storage sliding seat 22 and a material storage assembly, wherein the material storage linear module 21 is vertically arranged; the material storage sliding seat 22 is movably arranged on the material storage linear module 21 along the vertical direction and is connected with the output end of the material storage linear module 21; the magazine assembly is disposed on the magazine carriage 22.
As shown in fig. 9 to 13, the magazine assembly includes a magazine rack 23 and a magazine box 24, wherein the magazine rack 23 is connected to the side wall of the magazine slide 22, at least two storage spaces are vertically arranged on the magazine rack 23, and one side of the storage space close to the machine table 1 is an open surface; the storage boxes 24 comprise at least two storage boxes 24, and the storage boxes 24 are correspondingly arranged in the storage space and slide in or out through the open surface of the storage space; the storage bracket 23 comprises at least two groups of limiting blocking components, the at least two groups of limiting blocking components are correspondingly arranged in each storage space, and the storage box 24 is limited and blocked by the limiting blocking components when sliding in the storage space.
The storage rack 23 further comprises a storage rack body 231 and a storage partition 232, wherein the storage rack body 231 is of a rectangular rack body structure, and one side and the top of the storage rack body 231 close to the machine table 1 are open surfaces; the storage partition plates 232 comprise at least two storage partition plates 232, and the at least two storage partition plates 232 are horizontally arranged in the storage frame body 231 at intervals along the vertical direction to divide the space in the storage frame body 231 into at least two storage spaces;
the limiting and blocking assembly comprises limiting guide strips 234 and a blocking seat 233, wherein the limiting guide strips 234 comprise two strips which are respectively arranged at two sides of the storage space, the cross section of each limiting guide strip 234 is of an L-shaped structure, a sliding-in space A is formed between the top horizontal plane of the limiting guide strip 234 and the storage partition plate 232, and two sides of the storage box 24 are embedded into the sliding-in space A and are guided to limit through the limiting guide strips 234; the blocking seats 233 comprise two blocks, two blocking seats 233 are arranged on one side of the machine table 1 corresponding to the limiting guide strips 234, the blocking seats 233 are provided with a blocking groove B which is concave on the side wall corresponding to the sliding-in space a, and the storage box 24 slides into the blocking groove B and is limited by the blocking seats 233.
The material storage box 24 comprises a material storage lower support plate 241, a material storage side plate 242, a material storage upper support plate 243 and a limiting column 244, wherein the material storage upper support plate 243 and the material storage lower support plate 241 are arranged at intervals up and down along the vertical direction; the two material storage side plates 242 are vertically connected between the material storage lower support plate 243 and the material storage upper support plate 241 respectively, so that a support plate storage space with two open sides is formed between the material storage lower support plate 241 and the material storage upper support plate 243; at least two mounting strip grooves C are formed in the inner side walls of the material storage side plates 242 at intervals in the vertical direction, and the carrier plate water is inserted into the mounting strip grooves C of the two material storage side plates 242 and slides in or out in the linear direction; the limiting columns 244 include at least two, and the limiting columns 244 are vertically and movably disposed between the material storage lower supporting plate 241 and the material storage upper supporting plate 243 and located at the open surface of the carrier storage space so as to limit the carrier therein.
As shown in fig. 21 to 22, the transfer platform 4 includes a platform support plate 41, a platform slide rail 42, a platform slide 43, a platform limiting column 44, a carrier plate top block 45 and a platform suction hole 46, wherein the platform support plate 41 is horizontally disposed on the machine platform 1; the platform slide rail 42 is horizontally arranged on the platform support plate 41; the platform sliding seat 43 is slidably embedded on the platform sliding rail 42 and is driven by an air cylinder or a linear motor to move linearly, a carrying seat is arranged on the platform sliding seat 43, a through groove E is formed in the carrying seat, and the through groove E penetrates through the carrying seat and the platform sliding seat 43 up and down; the air channel is arranged in the carrying seat and is connected with an external vacuum generating device through an air nozzle arranged on the side part of the carrying seat; the platform limiting columns 44 comprise at least two, the platform limiting columns 44 are arranged on the carrier plate along the side edge of the through groove E and protrude upwards, and a limiting space is formed between the platform limiting columns 44 so as to limit the carrier plate placed on the carrier seat; the platform suction holes 46 are arranged on the carrier seat, are positioned between the inner side wall of the through groove E and the platform limiting column 44 and are communicated with an air passage in the carrier seat so as to adsorb and fix the carrier plate placed on the carrier seat; the carrier plate top block 45 is disposed on the carrier seat, protrudes above the carrier seat, and is connected to the carrier seat through a spring, so that the carrier seat is pushed up by the spring force after the transfer of the die is completed.
As shown in fig. 14 to 15, the discharging and moving mechanism 3 includes a discharging linear module 31 and a moving component 32, wherein the discharging linear module 31 is disposed in the discharging space along the side direction of the machine 1; the moving component 32 is slidably disposed on the discharging linear module 31 and connected to the output end of the discharging linear module 31; the discharging linear module 31 drives the moving component 32 to move linearly back and forth along a linear direction between the discharging storage portion and the carrier plate loading mechanism, and the moving component 32 takes out the carrier plate from the discharging storage portion and moves the carrier plate to the carrier plate loading mechanism.
As shown in fig. 16 to 20, the moving assembly 32 includes a rotating member, a moving support 324, a carrier limiting support member, and a clamping member, wherein the rotating member is disposed horizontally, and an output end of the rotating member is disposed upward; the moving support 324 is horizontally arranged on the output end of the rotating component and is driven by the rotating component to rotate in the horizontal plane; the two sets of support plate limiting and supporting components are respectively arranged on two sides of the moving support 324, each support plate limiting and supporting component comprises a sliding groove D, one end of the sliding groove D is open, the other end of the sliding groove D is sealed, and the support plate horizontally slides in through one end of the sliding groove D and is limited and supported through the sliding groove D; the clamping plate component is arranged between the two sets of support plate limiting support components and moves linearly back and forth along the direction of the sliding groove D, and the clamping plate component clamps the support plate after moving to the outside of one end of the sliding groove D and drives the support plate to move towards the direction of the other end of the sliding groove D, so that the support plate horizontally slides into the sliding groove D.
The rotating component comprises a moving base 321, a moving rotating cylinder 322 and a moving rotating support 323, wherein the moving base 321 is horizontally arranged; the moving rotary cylinder 322 is disposed on the moving base 321, and the output end is disposed upward; the transfer rotating support 323 is vertically arranged and connected with the output end of the transfer rotating cylinder 322, and is driven by the transfer rotating cylinder 322 to rotate; the carrying support 324 is horizontally disposed on the carrying rotary support 322.
The carrier limiting and supporting component comprises a carrier supporting seat 325, a carrier limiting plate 326, a carrier stopper 327 and a vacuum joint 328, wherein the carrier supporting seat 325 is vertically arranged along the side direction of the moving support 324 and extends upwards, a supporting step surface with an L-shaped cross section is arranged at the upper part of the carrier supporting seat 325, and the supporting step surface is an open surface close to the inner side of the moving support 324; the carrier plate limiting plate 326 is horizontally disposed on the carrier plate supporting seat 325, the carrier plate limiting plate 326 seals the supporting step surface from above, and a slide-in groove D with an open inner side and two open ends is formed between the carrier plate limiting plate 326 and the supporting step surface; the inner wall of one end of the sliding groove D is provided with a transition inclined plane extending towards the outer direction of the groove so that the carrier plate can slide in; the carrier block 327 is disposed at the other end of the sliding slot D to seal the port; an air path is distributed in the support plate support seat 325, at least two vacuum suction holes are arranged on the step support surface, and the vacuum suction holes are communicated with the air path in the support plate support seat 325; the vacuum connector 328 is disposed on the support plate support base 325, one end of the vacuum connector 328 is connected to the internal air path of the support plate support base 325, and the other end is connected to an external vacuum generating device, so that the vacuum suction holes on the bottom surface of the slide-in groove D generate negative pressure to downwardly suck and fix the support plate in the slide-in groove D.
The clamping plate component comprises a clamping plate support 3210, a clamping plate motor 3211, a clamping plate transmission belt 3212, a clamping plate slide 3213, a clamping plate cylinder 3214 and a clamping plate claw 3215, wherein the clamping plate support 3210 is arranged between the two sets of support plate limit support components, extends vertically upwards, and is lower than the sliding groove D in height; the clamping plate motor 3211 is disposed on a side wall of the clamping plate holder 3210, and an output shaft of the clamping plate motor 3210 passes through the clamping plate holder 3210 and horizontally extends to the other side of the clamping plate holder 3210, and is sleeved with a synchronizing shaft; one end of the clamp plate transmission belt 3212 is sleeved on the synchronizing shaft, and the other end is sleeved on another synchronizing shaft which is rotatably arranged on the other side wall of the clamp plate support 3210; the clamping plate slide 3213 is slidably disposed on the moving slide 329 on the moving support 324, and is connected to the clamping plate driving belt 3212 through a connecting block, and the clamping plate driving belt 3212 drives the clamping plate slide 3213 to move linearly back and forth; the clamping plate cylinder 3214 is horizontally arranged on the clamping plate sliding seat 3213; the clamp claw 3215 is horizontally connected to an output end of the clamp cylinder 3214.
As shown in fig. 1 to fig. 6, the material returning and moving mechanism includes a carrier moving arm 7 and a material returning and moving arm 8, wherein the carrier moving arm 7 is disposed in the material returning space and extends in a linear direction above the transferring platform 4 so as to move the empty board of the previous station onto the transferring platform 4; the feed back moving arm 8 is arranged between the transfer platform 4 and the feed back storage part, after the carrier plate on the transfer platform 4 is filled with the crystal grains, the carrier plate moving arm 7 moves the crystal grains to the feed back moving arm 8, and the feed back moving arm 8 moves the carrier plate to the feed back storage part; the material returning and moving arm 8 comprises a material returning linear module and a moving component 32, wherein the material returning linear module is arranged along the side direction of the machine table 1; the moving component 32 is disposed at the output end of the material returning linear module, and is driven by the material returning linear module to move back and forth linearly between the transferring platform 4 and the material returning storage part.
As shown in fig. 45 to 46, the carrier plate moving arm 7 includes a moving arm linear module 71, a moving arm sliding base 72, a moving arm lifting cylinder 73, a moving arm carrying base 74 and a moving arm suction nozzle 75, wherein the moving arm linear module 71 is disposed on the sidewall of the support 5 along the side direction of the machine 1 and above the transfer platform 4; the arm-moving slide 72 is connected to the output end of the arm-moving linear module 71 and is driven by the arm-moving linear module 71 to move linearly; the arm-moving lifting cylinder 73 is arranged on the arm-moving slide 72, and the output end is arranged downward; the arm-carrying seat 74 is connected to the output end of the arm-carrying lifting cylinder 73, and is connected to the arm-carrying lifting cylinder 73 through a spring, so that a buffering force is provided by the spring when the carrier plate is taken and placed, and a supporting plane is formed at the lower part of the arm-carrying seat 74; the arm suction nozzles 75 include at least two, and the arm suction nozzles 75 are vertically disposed on the arm carrier base 74 and located at two sides of the carrier plate, so as to suck and fix the carrier plate from the outer edge of the carrier plate where no die is located by vacuum negative pressure.
As shown in fig. 26 to fig. 27, the carrier plate carrying mechanism 62 includes a carrying slide rail 621, a longitudinal driving assembly, a transverse driving assembly and a carrying assembly 622, wherein the carrying slide rail 621 is disposed horizontally; the device comprises at least two groups, wherein the at least two groups of transverse driving assemblies are slidably connected to the bearing slide rails 621; the output end of the longitudinal driving component is connected with the transverse driving component so as to drive the transverse driving component to do longitudinal linear motion; the bearing components 622 include at least two groups, and the at least two groups of bearing components 622 are slidably connected to the transverse driving component along the transverse direction, are driven by the transverse driving component to transversely move linearly, and are arranged corresponding to the transfer platform 4 up and down; the carrying assembly 622 is provided with a carrying space G, the carrying space G is horizontally disposed above the transferring platform 4, and one side of the carrying space G close to the discharging space is an open notch through which the carrier plate 0 loaded with the crystal grains slides into the carrying space G.
As shown in fig. 28 to 33, the bearing assembly 622 includes a bearing support member, a bearing rotation member, a bearing support plate 629 and a bearing member, wherein the bearing support member is slidably connected to the output end of the transverse linear module; the bearing rotating component is arranged at the lower part of the bearing supporting component and can rotate in a horizontal plane; the bearing support plate 629 is horizontally arranged at the lower part of the bearing rotating component and is driven by the bearing rotating component to rotate; the bearing part is connected to the lower part of the bearing support plate 629 and is flexibly connected with the bearing support plate 629 along the vertical direction, and the bearing space G is arranged in the bearing part.
The bearing support component comprises a bearing support 623 and a bearing rotating seat 624, wherein the bearing support 623 is connected to the output end of the transverse linear module, a through hole F is formed in the middle of the bearing support 623, the through hole F vertically penetrates through the bearing support 623, and a downward-recessed annular step surface is formed in the upper part of the through hole F; the bearing rotary seat 624 is of a cylindrical structure, the bearing rotary seat 624 is inserted into the through hole F, a support ring surface extending horizontally outwards is arranged at the top of the bearing rotary seat 624, the outer diameter of the support ring surface is not larger than the inner diameter of the annular step surface, and the support ring surface is placed on the annular step surface and supported by the annular step surface; the outer wall of the bearing rotary seat 624 extending to the lower part of the bearing support 623 is provided with a synchronizing tooth 628.
The bearing rotating component comprises a bearing rotating motor 625, a synchronous belt 626 and a tensioning roller 627, wherein the bearing rotating motor 625 is arranged on a supporting plate horizontally connected with one side of the bearing support 623, and an output shaft of the bearing rotating motor 625 downwards extends to the lower part of the bearing support 623 and is sleeved with a synchronous wheel; the tension roller 627 is rotatably provided at the bottom of the support plate; the synchronous belt 626 is sleeved on a synchronous tooth 628 and a synchronous wheel on an output shaft of a bearing rotating motor 625 and is tensioned through a tensioning roller 627; the bearing rotary motor 625 drives the bearing rotary seat 624 to rotate through a synchronous belt 626; the supporting plate 629 is horizontally connected to the lower portion of the supporting rotary base 624.
The bearing part comprises a bearing seat 6210, a bearing plate 6211 and a spring column 6212, wherein the bearing seat 6210 is horizontally arranged below the bearing support plate 629 and is connected with the bearing support plate 629 through at least two supporting rods, and the at least two supporting rods are movably connected with the bearing support plate 629 along the vertical direction; the spring columns 6212 comprise at least two spring columns, and the spring columns 6212 are vertically connected between the bearing seat 6210 and the bearing support plate 629; a supporting frame body protruding downwards is arranged at the lower part of the bearing seat 6210 along the side direction, and one side of the supporting frame body close to the discharging space is an open structure; the bearing plate 6211 is horizontally disposed below the bearing seat 6210, and a bearing space G is formed between the bearing plate 6211 and the supporting frame; the through hole F penetrates the supporting plate 629, the supporting seat 6210 and the supporting plate 6211 from top to bottom; a material taking notch H is formed in one side of the bearing seat 6210 and the bearing plate 6211 close to the material discharging space, and the material taking notch H vertically penetrates through the bearing seat 6210 and the bearing plate 6211 so as to clamp the bearing plate in the bearing space.
As shown in fig. 23 to fig. 25, the die transfer mechanisms 63 are disposed on the sidewalls of the die transfer supports 61 at intervals; the crystal grain transfer bracket 61 is vertically arranged at the top of the bracket 5; the top surface of the bracket 5 is provided with at least two mounting through holes at intervals; the die transfer support 61 is located at one side of the mounting through hole; the die transfer support 61 extends downward through the mounting through hole and is inserted into the carrier 62.
As shown in fig. 34 to fig. 35, the die transfer mechanism 63 includes a transfer support plate 631, a transfer lift motor 632, and a die transfer assembly, wherein the transfer support plate 631 is vertically connected to the die transfer support 61; the transfer lifting motor 632 is arranged on the transfer support plate 631, and the output end of the transfer lifting motor faces downwards; the die transfer assembly is slidably connected to the transfer plate 631 in the vertical direction and is connected to the output of the transfer lift motor 632.
As shown in fig. 36 to 44, the die transfer assembly includes a transfer support 633, a driving component, an absorbing component, a probe 6311, and a probe cap 638, wherein the transfer support 633 is slidably disposed on a transfer support 631 along a vertical direction and is connected to an output end of a transfer lift motor 632 through a screw cap and a screw, the transfer lift motor 632 drives the screw cap to move up and down by driving the screw cap to rotate, and the screw cap drives the transfer support 633 to move up and down; the driving member is disposed on the transfer support 633 and outputs downward power; the adsorption part is arranged below the driving part, an adsorption cavity is arranged in the adsorption part, the adsorption cavity is connected with an external vacuum sending device, the bottom of the adsorption cavity is an open surface, and the output end of the driving part penetrates into the adsorption cavity and extends downwards; the probe 6311 is connected to the lower part of the output end of the driving member, and a tapered lower probe part 6313 is arranged at the lower part of the probe; the probe cap 638 is of a cap body structure with an open upper part, and the probe cap 638 is detachably connected to the lower part of the adsorption cavity to seal the open bottom surface of the adsorption cavity; the bottom surface of the probe cap 638 is an adsorption plane 6314, a probing hole 6315 penetrating up and down is arranged in the middle of the adsorption plane 6314, the inner diameter of the probing hole 6315 is not larger than the outer diameter of the probe 6311, and a tapered downward probing part 6313 of the probe 6311 penetrates through the probing hole 6315 downwards to transfer the top of the crystal grain; at least two auxiliary suction holes 6316 are formed along the periphery of the probe hole 6315, and the auxiliary suction holes 6316 generate a negative pressure suction plane at the periphery of the probe hole 6315, so as to suck the die carrier around the downward probing die.
The driving component includes a driving motor 634 and a driving shaft 635, wherein the driving motor 634 is vertically disposed on a sidewall of the transfer support 633, and an output end of the driving motor 634 faces downward; the driving shaft 635 is vertically connected to an output end of the driving motor 634 and extends downward.
The adsorption part comprises a connecting seat 636 and an adsorption seat 637, wherein the connecting seat 636 is arranged below the driving motor 634 and fixed on the side wall of the transfer support 633, a jack which is vertically through is arranged in the connecting seat 636, the inner diameter of the jack is not less than the outer diameter of the driving shaft 635, and the driving shaft 635 penetrates through the jack from top to bottom; the adsorption seat 637 is connected to the bottom of the connection seat 636, an adsorption cavity is arranged inside the adsorption seat 637, the upper part of the adsorption cavity is communicated with the insertion hole, the driving shaft 635 is inserted into the adsorption cavity from top to bottom, and the connection part with the adsorption seat 637 is sealed by a sealing ring; an air hole 639 is opened on a side wall of the adsorption seat 637, and a vacuum joint is connected to the air hole 639 so as to be connected to an external vacuum generating device.
A probe mounting seat 6310 is arranged at the bottom of the driving shaft 635; the middle of the probe installation seat 6310 is provided with an installation hole, a partition groove is formed in the side wall of the probe installation seat 6310, the partition groove extends from the outer wall of the probe installation seat 6310 to the installation hole to partition the probe installation seat 6310 into at least two installation clamping blocks along the circumferential direction, after the probe 6311 is inserted into the installation hole, a snap ring is sleeved from the outside, and the inward pressure of the snap ring enables the probe 6311 to be clamped inwards according to the clamping blocks.
The transfer platform is characterized by further comprising detection mechanisms 9, wherein the detection mechanisms 9 comprise at least two groups, and the at least two groups of detection mechanisms 9 are correspondingly arranged below the transfer platform 4; the detecting mechanism 9 includes a detecting support 91, a detecting slide 92, a CCD93 and a light source 94, wherein the detecting support 91 is connected to the bottom surface of the machine 1, and the side wall thereof extends vertically downward; the detection slide 92 is connected to the side wall of the detection support 91 in a slidable manner in the vertical direction and is driven by a power unit to move up and down; the CCD93 is disposed on the detection slide 92, and the lens direction is upward; the light sources 94 include at least two light sources 94, the at least two light sources 94 are disposed on the side wall of the detecting support 91 and are located at the upper side of the CCD93, and the light sources 94 emit vertical and/or oblique light sources from bottom to top.
A crystal grain transfer process of crystal grain transfer equipment comprises the following process steps:
s1, loading a carrier plate: the blue film loaded with the crystal grains is clamped by a carrier plate with a circular through hole in the middle part, so that the blue film part loaded with the crystal grains is positioned at the position of the circular through hole of the carrier plate, and the carrier plates are inserted into the material storage boxes of the discharging storage part one by one;
s2, loading a storage box: after the material storage box in the step S1 is fully loaded with the carrier plates, the whole material storage box slides into the storage space of the material storage bracket of the discharging storage part;
s3, discharging the carrier plate: after the storage space is loaded with the storage box in the step S2, the storage linear module of the discharging storage part drives the storage bracket to integrally lift, so that the storage box to be discharged is horizontally aligned with the discharging moving mechanism, the discharging linear module of the discharging moving mechanism drives the moving assembly to be close to the storage box, and the moving assembly horizontally clamps the support plate in the storage box and then drives the support plate to horizontally slide out of the storage box; after the carrier plates at the height positions of the material storage boxes corresponding to the moving assemblies are taken out, the material storage linear module drives the material storage support to move up and down, so that the other layer of carrier plates of the material storage boxes are aligned to the moving assemblies;
s4, discharging and moving the carrier plate: after the moving assembly in the step S3 takes out the carrier plate from the material storage box, the discharging linear module drives the moving assembly to move to one side of a bearing assembly of the carrier plate bearing mechanism, and the carrier plate is horizontally inserted into a bearing space of the bearing assembly after the clamped carrier plate rotates by 90 degrees; after the crystal grains on the carrier plate in the carrier assembly are transferred, the moving assembly clamps the empty carrier plate from the outer side, pulls out the carrier space and moves the lower carrier plate;
s5, circularly discharging the carrier plate: repeating the steps S1 to S4, and completing the cyclic loading, discharging, moving and discharging of the carrier plates in the discharging space;
s6, detecting and adjusting a carrier plate: after the carrier plate is inserted into the bearing space in the step S4 or S5, a detection mechanism arranged below the transfer platform shoots and detects the position of the carrier plate upwards and transmits information to an industrial personal computer, and the industrial personal computer controls the bearing assembly to adjust the position or angle of the carrier plate;
s7, blank plate feeding: the empty glass carrier plate to be loaded with the crystal grains is moved by a carrier plate moving arm and is placed on a transfer platform, and the transfer platform limits and clamps the empty glass carrier plate and then downwards adsorbs and fixes the empty glass carrier plate by using vacuum negative pressure; the fixed empty glass carrier plate is driven by the transfer platform to slide into the lower part of the bearing component in a linear way, so that the empty glass carrier plate corresponds to the carrier plate in the bearing space in the step S6 up and down;
s8, adjusting the position of the crystal grain transfer assembly: the carrier assembly in the step S6 loads the carrier plate of the crystal grains to be transferred, and after the empty glass carrier plate in the step S7 correspondingly moves to the position below the carrier plate of the crystal grains to be transferred, the crystal grain transfer assembly of the crystal grain transfer mechanism passes through the through hole of the carrier assembly from the upper mounting station and descends to the working station;
s9, grain point position transfer: after the position of the crystal grain transfer assembly is lowered and adjusted to the working station in the step S8, the absorption plane at the bottom of the probe cap of the crystal grain transfer assembly props against a carrier blue film of the fixed crystal grain on the carrier plate of the bearing space, and the crystal grain transfer assembly is upwards absorbed through auxiliary absorption holes distributed on the absorption plane of the probe cap so as to fix the blue film locally; a conical lower probe part of the probe downwards penetrates through a probe hole in the middle of the probe cap to push crystal grains which are locally fixed at the middle of the blue film downwards onto a hollow glass carrier plate below;
s10, crystal grain plane position transfer: after the crystal grains at the single-point position are transferred in the step S9, the bearing component and the transfer platform synchronously move linearly, so that after the probe is aligned to the point of the next crystal grain to be transferred in the vertical direction, the probe and the probe cap repeat the step S9 until the crystal grains on the surface of the blue film are completely transferred to the empty glass carrier plate below;
s11, returning the carrier plate: after the empty glass carrier plate in the step S9 is filled with the crystal grains, the transfer platform linearly slides out from the lower part of the bearing assembly, the vacuum negative pressure on the transfer platform stops adsorbing the carrier plate, the carrier plate is upwards jacked by a carrier plate jacking block and then upwards adsorbed and fixed by a carrier plate moving arm, the carrier plate is moved to a material return moving arm, a moving assembly of the material return moving arm clamps the carrier plate and then is driven to a material storage mechanism of a material return storage part through a material return linear module, and the carrier plate loaded with the crystal grains is horizontally pushed into a material storage box of the material storage mechanism by the moving assembly of the material return moving arm;
s12, crystal grain circulating transfer and material return: and repeating the steps S9 to S11, continuously transferring the crystal grains to the empty glass carrier plate, moving the glass carrier plate feed back loaded with the crystal grains to the storage box, and simultaneously, lifting the storage box along the vertical direction to enable the layers with different heights to be inserted into the full-loading carrier plate.
Furthermore, the storage mechanism provided by the invention adopts a bipolar multilayer storage structure, the storage capacity of crystal grains is greatly improved, a slide-in type taking and placing mode is adopted, and the storage mechanism has the functions of limiting, guiding, blocking and positioning, effectively improves the carrier plate taking and placing efficiency and the position accuracy in the taking and placing process, and is suitable for automatic production. The storage mechanism is suitable for storing the carrier plates in the crystal grain transfer process, and can be used for storing the blue film carrier plates before the crystal grains are transferred and the glass carrier plates after the crystal grains are transferred at the same time; meanwhile, the technical scheme adopted by the invention is also suitable for storing the plate-shaped materials or carriers in the automatic production process. Storage mechanism passes through storage sharp module drive storage component along vertical direction elevating movement to get in coordination with the support plate and put the action, go up and down storage component to different heights, so that the support plate is got in the storage plate space of different heights in it. The storage assembly of the storage mechanism comprises a storage support and storage boxes, the storage support is used for storing a plurality of storage boxes, the storage boxes are used for storing a plurality of support plates, and the support plates are used for loading a plurality of crystal grains. The storage rack of the storage mechanism takes a storage rack body with the top and one side as an open surface as a bearing structure, and a plurality of storage partition plates are horizontally arranged in the storage rack body at intervals along the vertical direction and divide the internal space of the storage rack body into a plurality of storage spaces; the two sides of the storage space are provided with limiting guide strips with L-shaped cross sections, a sliding-in space is formed between the top horizontal plane of each limiting guide strip and the storage partition plate, and the storage box is guided and limited from the two sides and the upper part through the sliding-in space when being automatically taken and placed on the storage partition plate, so that the position accuracy in the taking and placing process is ensured; meanwhile, the end part of the sliding-in space is also provided with a blocking seat, the side wall of the blocking seat is correspondingly provided with a blocking groove which is concave in the sliding-in space, and the material storage box is blocked and clamped by the blocking groove after the sliding-in of the material storage box is completed, so that the material storage box is automatically taken and placed, guided, limited and fixed. The material storage box of the material storage mechanism takes a material storage upper support plate and a material storage lower support plate which are arranged at intervals up and down as carriers, a material storage side plate is vertically connected between the material storage upper support plate and the material storage lower support plate, and a space is reserved between the material storage side plate and the side edges of the material storage upper support plate and the material storage lower support plate, so that the free positions at two sides of the material storage upper support plate and the material storage lower support plate are inserted into the sliding-in space; a plurality of concave mounting strip grooves are formed in the inner side wall of each material storage side plate at intervals along the vertical direction, so that a multi-layer material storage plate structure along the vertical direction is formed in the material storage box, and a plurality of carrier plates are stored at the same time; meanwhile, the support plate on the storage and the support plate under the processing are detachably inserted with a limiting column, and the support plate in the storage box is limited through the limiting column.
The discharging moving assembly or the feed back moving arm is integrated with the functions of integral linear motion, automatic rotation and linear driving of the clamping plate, has the functions of bearing guide and adsorption fixing in the carrier plate moving process, effectively improves the carrier plate taking and placing transfer efficiency, and ensures the position stability and accuracy in the carrier plate transferring process. The moving assembly is suitable for automatic taking, placing and moving transfer of a carrier plate loaded with crystal grains in the crystal grain transferring process, and is also suitable for automatic taking, placing and moving of a plate-shaped material or a carrier in the automatic production process. The linear module is used as an integral linear driving power output part of the moving assembly, and the linear module drives the moving assembly to move linearly, so that the moving assembly can be moved back and forth between different stations. The moving assembly takes the moving base as a bearing structure, and the moving support above the moving assembly is driven to rotate by the moving rotating cylinder, so that the position or angle change control of the clamped carrier plate is realized. Meanwhile, two sides of the moving support are provided with support plate supporting seats which vertically extend upwards, and the two support plate supporting seats are arranged in parallel at intervals; the tops of the two carrier plate supporting seats are respectively provided with a supporting platform step surface with an L-shaped cross section, the inner side of the supporting step surface close to the moving support is an open surface, a carrier plate limiting plate is horizontally arranged on the supporting step surface, and a sliding groove with the inner side and two open ends is formed between the carrier plate limiting plate and the supporting step surface; the inner wall of one end of the sliding groove is provided with an excessive inclined plane extending towards the outside direction of the groove, when the carrier plate is taken and placed, the carrier plate horizontally slides in or slides out of the sliding groove through the excessive inclined plane, the horizontal support of the sliding groove is used for ensuring the position stability in the taking and placing process, and the position accuracy of the carrier plate is ensured by the sliding groove from two sides and up-down guiding and limiting; meanwhile, the end part of the sliding groove is blocked and limited by a support plate stop block, so that excessive sliding-out is avoided; after the carrier plate slides into the sliding groove, the carrier plate is adsorbed and fixed downwards by utilizing vacuum negative pressure through a plurality of vacuum adsorption holes arranged at intervals on the bottom surface of the sliding groove, so that the carrier plate is prevented from freely sliding in the sliding groove in the transfer process, and the position stability of the carrier plate in the transfer process is effectively ensured. A clamping plate support and a moving slide rail are arranged in the space between the two support plate support seats of the moving assembly, the height of the clamping plate support is lower than that of the sliding groove so as to avoid movement interference in the sliding-in process of the support plates, the clamping plate support is used for mounting a clamping plate motor, a clamping plate slide seat is slidably arranged on the moving slide rail, and a clamping plate cylinder and a clamping plate claw are arranged on the clamping plate slide seat; simultaneously, the clamping plate sliding seat is connected with the output end of the clamping plate motor through a clamping plate driving belt, and the clamping plate motor drives the clamping plate sliding seat to linearly slide through driving the clamping plate driving belt, so that a clamping plate claw arranged on the clamping plate cylinder extends into or out of the work station, is close to a clamping plate storage position or uses a plate bearing position, and automatic clamping of the support plate is realized.
The crystal grain transfer mechanism and the carrier plate bearing mechanism have the position and angle adjusting function, the position or the angle of the carrier plate is adjusted before the crystal grains are transferred, and the position is moved in the transferring process, the horizontal cavity type bearing space with an opening at one side is used for supporting the carrier plate, the upper position, the lower position and the lateral position of the carrier plate are limited, the position stability of the carrier plate is ensured, meanwhile, a flexible connection mode is adopted, flexible contact is realized, the damage of the carrier plate is effectively reduced, the conical downward probing part is matched with the probing hole, the inner diameter of the probing hole is larger than the outer diameter of the conical downward probing part and smaller than the outer diameter of the probe, the limiting position of the downward probing limit of the probe is realized through the probing hole, an adsorption cavity is formed through the probing cap, the auxiliary suction holes are distributed around the probe, the blue membrane crystal is upwards sucked by utilizing the vacuum negative pressure formed by the auxiliary suction holes after the probing cap is contacted with the blue membrane, the deformation condition of the blue membrane around the downward probing part is prevented, and the position stability of the crystal grains is effectively ensured, and the falling is avoided.
The crystal grain transfer mechanism and the carrier plate bearing mechanism are used for executing a crystal grain transfer process and are arranged above the transfer platform, and the glass carrier plate to be received by the crystal grains is horizontally borne on the transfer platform; the carrier plate bearing mechanism is used for horizontally bearing the blue film carrier plate of the crystal grain to be transferred out, and horizontally supporting the blue film carrier plate and then approaching the lower glass carrier plate in a flexible contact manner; the crystal grain transfer mechanism is vertically arranged and correspondingly extends into the carrier plate bearing mechanism, and a probe in the crystal grain transfer mechanism moves along the vertical direction to push the crystal grains on the blue film carried in the carrier plate bearing mechanism so as to transfer the crystal grains to the glass carrier plate.
Aiming at carrying and adjusting a carrier plate of a crystal grain to be transferred in a crystal grain transfer process, the invention designs a carrier plate carrying mechanism, wherein the carrier plate carrying mechanism comprises a plurality of groups of carrying components according to the specific station setting of crystal grain transfer equipment, the plurality of groups of carrying components are arranged corresponding to the crystal grain transfer mechanism so as to finish multi-station synchronous crystal grain transfer on the same equipment, and the plurality of groups of carrying components are driven by a longitudinal driving part and a transverse driving part in a horizontal plane respectively to do linear motion so as to finish the adjustment of the position in the horizontal plane. The bearing component of the carrier plate bearing mechanism takes a horizontally arranged bearing support as a bearing part, a circular through hole is formed in the middle of the bearing support, and the through hole penetrates through the bearing support up and down so that the crystal grain transfer mechanism can enter the through hole to push and transfer the crystal grains. The invention sets the through hole by utilizing the pushing requirement of the crystal grain transfer process, and simultaneously utilizes the structure of the through hole, the inner side of the upper part of the through hole is provided with a downward sunken annular step surface, a cylindrical bearing rotary seat is slidably embedded in the annular step surface, the top of the bearing rotary seat is provided with a supporting ring surface which extends horizontally and outwards, and the supporting ring surface can be movably placed on the annular step surface, thereby realizing the requirements of inverted hanging and rotation of the bearing rotary seat; the outer wall of the bearing rotary seat extending to the lower part of the bearing support is sleeved with a synchronizing wheel, the bearing rotary seat drives the synchronizing wheel to rotate by driving the synchronizing belt to drive the synchronizing wheel on the bearing rotary seat through a bearing rotary motor arranged on one side of the bearing support, and drives a bearing support plate horizontally arranged at the bottom of the bearing rotary seat to rotate, so that the angular rotation control of the support plate is realized, and the accuracy of crystal grain transfer is ensured. The supporting plate is connected with a bearing seat through a plurality of vertically arranged spring columns below the bearing supporting plate, the elastic characteristics of the spring columns are utilized to realize flexible connection between the bearing supporting plate and the bearing seat along the vertical direction, and when the bearing seat is vertically close to a transfer platform below which a glass carrier plate is placed, the flexible characteristics are utilized to effectively avoid surface scratching or damage when the upper and lower supporting plates are contacted with each other. Particularly, the lower part of the bearing support plate is provided with a downward convex support frame body along the side direction, one side of the support frame body is of an open structure, the bottom surface of the support frame body is horizontally provided with a bearing plate, a bearing space which is horizontally arranged and has an open surface is formed between the bearing plate and the support frame body, the bearing plate of the crystal grain to be transferred is horizontally inserted into the bearing space, when the horizontal bearing of the bearing plate is completed, the guide limit in the two side directions and the blocking and positioning of the end part in the process of inserting the bearing plate are realized through the single-side open bearing space, so that the blue film part in the middle of the bearing plate is accurately aligned to the through hole, and the crystal grain transfer mechanism passes through the through hole and downwards pushes the crystal grain loaded on the blue film to transfer the crystal grain to the glass bearing plate. Meanwhile, a material taking notch is formed in the open surface of the bearing space, the material taking notch is of a U-shaped notch structure and is recessed inwards along the open side of the bearing space, and the material taking notch is characterized in that the upper inner side wall and the lower inner side wall of the material taking notch from outside to inside are respectively inclined planes and are of a horn-shaped notch structure so that the carrier plate can slide in; meanwhile, a clearance space is formed by the arrangement of the material taking groove openings, so that the support plate is clamped by the external clamping jaws in the process of taking and placing the support plate conveniently.
Aiming at the requirements of a crystal grain transfer execution process, the invention designs a crystal grain transfer mechanism, the crystal grain transfer mechanism drives a crystal grain transfer component to move up and down by a transfer lifting motor through a screw rod and a screw rod cap so that the crystal grain transfer component descends and approaches to a carrier plate bearing mechanism, the crystal grain transfer component takes a vertically arranged transfer support as a bearing structure, a driving motor is arranged on the side wall of the transfer support plate, the driving motor is used for driving a driving shaft to move up and down, the driving shaft downwards passes through a connecting seat to be inserted into an adsorption seat, the connecting seat is fixed on the side wall of the transfer support plate, the interior of the adsorption seat is of a cavity structure, air holes are formed in the side wall of the adsorption seat so as to be connected with external vacuum generation loading, the bottom of the adsorption seat is an open surface and is detachably connected with a probe cap, and the driving shaft passes through the adsorption seat to extend into the probe cap. Particularly, the bottom of the adsorption seat is provided with a probe installation seat, the middle of the probe installation seat is provided with an installation hole, the side wall of the probe installation seat is provided with a dividing groove, the dividing groove extends from the outer wall of the probe installation seat to the installation hole, the probe installation seat is divided into at least two installation clamping blocks along the circumferential direction, after the probe is inserted into the installation hole, a clamping ring is sleeved from the outside, and the inward pressure of the clamping ring enables the probe to be clamped inwards according to the clamping blocks, so that the rapid installation of the probe is realized. In addition, the bottom surface of the probe cap is an adsorption plane with a plane structure, and the middle part of the adsorption plane is provided with a probe hole which is communicated up and down; the probe is arranged in the probe cap and is driven by the power mechanism to move up and down along the vertical direction. Particularly, the lower part of the probe adopts a conical structure, the outer diameter of the conical downward probing part is smaller than the probing hole so as to be pushed to the crystal grain on the blue film below through the probing hole, meanwhile, the inner diameter of the probing hole is not larger than the outer diameter of the probe, and the probing hole is used for limiting the position of the probe in the downward probing process of the probe, so that the situation that the probe penetrates through the blue film or damages the crystal grain and the glass carrier plate due to excessive downward probing is avoided. Meanwhile, auxiliary suction holes are distributed around the probe hole, a negative pressure space is formed by utilizing an adsorption cavity inside the probe cap, and the blue film is upwards adsorbed and fixed through the auxiliary suction holes, so that the phenomenon that the blue film is deformed due to the fact that the probe pushes grains in the downward probing process of the probe is avoided, and the positions of other grains around are influenced or the grains fall off is caused.
The examples of the present invention are merely illustrative of specific embodiments thereof and are not intended to limit the scope thereof. Since the present invention can be modified by a person skilled in the art, the present invention is not limited to the embodiments described above.

Claims (11)

1. The utility model provides a crystal grain transfer equipment, includes board (1) and the support (5) of erectting on board (1) that the level set up, its characterized in that: also comprises a material storage part, a transfer platform (4) and a crystal grain transfer part, wherein,
the support (5) is of a U-shaped structure, is inversely erected in the middle of the machine table (1), divides the upper space of the machine table (1) into a discharging space and a feeding back space, and forms a gap space between the bottom of the support and the surface of the machine table (1);
the material storage part is arranged on the side part of the machine table (1), and comprises a material discharge storage part and a material return storage part which are respectively and correspondingly arranged on one sides of the material discharge space and the material return space;
the transfer platforms (4) comprise at least two, and the at least two transfer platforms (4) are arranged on the machine table (1) in parallel at intervals and are positioned in the gap space;
the transfer moving part comprises a discharging moving mechanism and a return moving mechanism, and the discharging moving mechanism and the return moving mechanism are respectively arranged in the discharging space and the return space;
the crystal grain transfer part (6) comprises a carrier plate bearing mechanism (62) and a crystal grain transfer mechanism (63), wherein the carrier plate bearing mechanism is inversely hung at the bottom of the bracket (5) and is correspondingly arranged above the transfer platform (4); the die transfer mechanism (63) is correspondingly disposed above the carrier mechanism (62).
2. A grain transfer apparatus according to claim 1, wherein: the discharging storage part and the return storage part comprise storage mechanisms (2), each storage mechanism (2) comprises two sets, and the two sets of storage mechanisms (2) are arranged on the side part of the machine table (1) respectively corresponding to the discharging space and the return space; the material storage mechanism (2) comprises a material storage linear module (21), a material storage sliding seat (22) and a material storage assembly, wherein the material storage linear module (21) is vertically arranged; the material storage sliding seat (22) is movably arranged on the material storage linear module (21) along the vertical direction and is connected with the output end of the material storage linear module (21); the magazine assembly is arranged on a magazine carriage (22).
3. A grain transfer apparatus according to claim 2, characterized in that: the storage assembly comprises a storage support (23) and a storage box (24), wherein the storage support (23) is connected to the side wall of the storage sliding seat (22), at least two storage spaces are arranged on the storage support (23) in the vertical direction, and one side of each storage space, which is close to the machine table (1), is an open surface; the storage bins (24) are arranged in the storage space correspondingly, and the storage bins (24) slide in or out through the open surface of the storage space; the storage bracket (23) comprises at least two groups of limiting blocking assemblies, the at least two groups of limiting blocking assemblies are correspondingly arranged in each storage space, and the storage box (24) is limited and blocked by the limiting blocking assemblies when sliding in the storage spaces.
4. A grain transfer apparatus as defined in claim 1, wherein: the transfer platform (4) comprises a platform support plate (41), a platform slide rail (42), a platform slide seat (43), a platform limiting column (44), a support plate top block (45) and a platform suction hole (46), wherein the platform support plate (41) is horizontally arranged on the machine platform (1); the platform slide rail (42) is horizontally arranged on the platform support plate (41); the platform sliding seat (43) is slidably embedded on the platform sliding rail (42) and is driven by a cylinder or a linear motor to move linearly, a carrying seat is arranged on the platform sliding seat (43), a through groove (E) is formed in the carrying seat, and the through groove (E) penetrates through the carrying seat and the platform sliding seat (43) vertically; the air channel is arranged in the carrier seat and is connected with an external vacuum generating device through an air nozzle arranged on the side part of the carrier seat; the platform limiting columns (44) comprise at least two, the platform limiting columns (44) are arranged on the carrier plate along the side edge of the through groove (E) and protrude upwards, and a limiting space is formed between the platform limiting columns (44) so as to limit the carrier plate placed on the carrier seat; the platform suction holes (46) are arranged on the carrier seat, are positioned between the inner side wall of the through groove (E) and the platform limiting column (44), and are communicated with an air passage in the carrier seat so as to adsorb and fix the carrier plate placed on the carrier seat; the carrier plate top block (45) is arranged on the carrier seat, protrudes above the carrier seat and is connected with the carrier seat through a spring, so that the carrier seat is pushed up by the elasticity of the spring after the crystal grains are transferred.
5. A grain transfer apparatus as defined in claim 1, wherein: the discharging and moving mechanism (3) comprises a discharging linear module (31) and a moving assembly (32), wherein the discharging linear module (31) is arranged in the discharging space along the side direction of the machine table (1); the moving component (32) is slidably arranged on the discharging linear module (31) and is connected with the output end of the discharging linear module (31); the discharging linear module (31) drives the moving component (32) to move back and forth linearly between the discharging storage part and the carrier plate bearing mechanism along the linear direction, and the moving component (32) takes out the carrier plate from the discharging storage part and moves the carrier plate into the carrier plate bearing mechanism.
6. A grain transfer apparatus according to claim 5, characterized in that: the moving assembly (32) comprises a rotating component, a moving support (324), a carrier plate limiting and supporting component and a clamping plate component, wherein the rotating component is horizontally arranged, and the output end of the rotating component is upwards arranged; the moving support (324) is horizontally arranged on the output end of the rotating component and is driven by the rotating component to rotate in a horizontal plane; the support plate limiting support components comprise two sets, the two sets of support plate limiting support components are respectively arranged on two sides of the moving support seat (324), each support plate limiting support component comprises a sliding groove (D), one end of each sliding groove (D) is open, the other end of each sliding groove (D) is sealed, and the support plate horizontally slides in through one end of each sliding groove (D) and is limited and supported through the sliding groove (D); the clamping plate component is arranged between the two sets of support plate limiting support components and linearly moves back and forth along the direction of the sliding groove (D), the clamping plate component clamps the support plate after moving to the outside of one end of the sliding groove (D), and drives the support plate to move towards the direction of the other end of the sliding groove (D), so that the support plate horizontally slides into the sliding groove (D).
7. A grain transfer apparatus as defined in claim 1, wherein: the material returning and moving mechanism comprises a carrier plate moving arm (7) and a material returning and moving arm (8), wherein the carrier plate moving arm (7) is arranged in the material returning space and extends above the transfer platform (4) along the linear direction so as to move the idle plate of the previous station to the transfer platform (4); the feed back moving arm (8) is arranged between the transfer platform (4) and the feed back storage part, after the carrier plate on the transfer platform (4) is filled with the crystal grains, the carrier plate moving arm (7) moves the carrier plate to the feed back moving arm (8), and the feed back moving arm (8) moves the carrier plate to the feed back storage part; the material returning and moving arm (8) comprises a material returning linear module and a moving assembly (32), wherein the material returning linear module is arranged along the side direction of the machine table (1); the moving component (32) is arranged on the output end of the feed back linear module and is driven by the feed back linear module to move back and forth linearly between the transfer platform (4) and the feed back storage part.
8. A grain transfer apparatus as defined in claim 1, wherein: the carrier plate bearing mechanism (62) comprises a bearing slide rail (621), a longitudinal driving assembly, a transverse driving assembly and a bearing assembly (622), wherein the bearing slide rail (621) is horizontally arranged; the device comprises at least two groups, wherein at least two groups of transverse driving assemblies are connected on a bearing slide rail (621) in a sliding way; the output end of the longitudinal driving component is connected with the transverse driving component so as to drive the transverse driving component to do longitudinal linear motion; the bearing assemblies (622) comprise at least two groups, and the at least two groups of bearing assemblies (622) are connected to the transverse driving assembly in a sliding manner along the transverse direction, driven by the transverse driving assembly to move transversely and linearly and arranged corresponding to the transfer platform (4) up and down; the bearing assembly (622) is internally provided with a bearing space (G) which is horizontally arranged and is positioned above the transfer platform (4), one side of the bearing space close to the discharging space is an open notch, and the carrier plate (0) loaded with the crystal grains slides into the bearing space (G) through the open notch.
9. A grain transfer apparatus as recited in claim 8, wherein: the bearing assembly (622) comprises a bearing support component, a bearing rotating component, a bearing support plate (629) and a bearing component, wherein the bearing support component is slidably connected to the output end of the transverse linear module; the bearing rotating component is arranged at the lower part of the bearing supporting component and can rotate in a horizontal plane; the bearing support plate (629) is horizontally arranged at the lower part of the bearing rotating component and is driven by the bearing rotating component to rotate; the bearing part is connected to the lower portion of the bearing support plate (629) and is flexibly connected with the bearing support plate (629) in the vertical direction, and the bearing space (G) is arranged in the bearing part.
10. The grain transfer apparatus according to claim 9, wherein: the crystal grain transfer mechanism (63) comprises a transfer support plate (631), a transfer lifting motor (632) and a crystal grain transfer component, wherein the transfer support plate (631) is vertically connected to the crystal grain transfer support (61); the crystal grain transfer support (61) is vertically arranged at the top of the support (5); the transfer lifting motor (632) is arranged on the transfer support plate (631), and the output end of the transfer lifting motor is arranged downwards; the crystal grain transfer component is connected to the transfer support plate (631) in a sliding way along the vertical direction and is connected with the output end of the transfer lifting motor (632).
11. A die transfer process of a die transfer apparatus according to any of claims 1 to 10, comprising the process steps of:
s1, loading a carrier plate: the blue film loaded with the crystal grains is clamped by a carrier plate with a circular through hole in the middle part, so that the blue film part loaded with the crystal grains is positioned at the position of the circular through hole of the carrier plate, and the carrier plates are inserted into a material storage box of a discharging storage part one by one;
s2, loading a storage box: after the material storage box in the step S1 is fully loaded with the carrier plates, the whole material storage box slides into the storage space of the material storage bracket of the discharging storage part;
s3, discharging the carrier plate: after the storage space is loaded with the storage box in the step S2, the storage linear module of the discharging storage part drives the storage bracket to integrally lift, so that the storage box to be discharged is horizontally aligned with the discharging moving mechanism, the discharging linear module of the discharging moving mechanism drives the moving assembly to be close to the storage box, and the moving assembly horizontally clamps the support plate in the storage box and then drives the support plate to horizontally slide out of the storage box; after the carrier plates at the height positions of the material storage boxes corresponding to the moving assemblies are taken out, the material storage linear module drives the material storage support to move up and down, so that the other layer of carrier plates of the material storage boxes are aligned to the moving assemblies;
s4, discharging and moving the carrier plate: after the moving assembly in the step S3 takes out the carrier plate from the material storage box, the discharging linear module drives the moving assembly to move to one side of a bearing assembly of the carrier plate bearing mechanism, and the carrier plate is horizontally inserted into a bearing space of the bearing assembly after the clamped carrier plate rotates by 90 degrees; after the crystal grains on the carrier plate in the carrier assembly are transferred, the moving assembly clamps the empty carrier plate from the outer side, pulls out the carrier space and moves the lower carrier plate;
s5, circularly discharging the carrier plate: repeating the steps S1 to S4, and completing the cyclic loading, discharging, moving and discharging of the carrier plates in the discharging space;
s6, detecting and adjusting a carrier plate: after the carrier plate is inserted into the bearing space in the step S4 or S5, a detection mechanism arranged below the transfer platform shoots and detects the position of the carrier plate upwards and transmits information to an industrial personal computer, and the industrial personal computer controls the bearing assembly to adjust the position or angle of the carrier plate;
s7, blank plate feeding: the empty glass carrier plate to be loaded with the crystal grains is moved by a carrier plate moving arm and is placed on a transfer platform, and the transfer platform is used for limiting and clamping the empty glass carrier plate and then downwards adsorbing and fixing the empty glass carrier plate by using vacuum negative pressure; the fixed empty glass carrier plate is driven by the transfer platform to slide into the lower part of the bearing component in a linear way, so that the empty glass carrier plate corresponds to the carrier plate in the bearing space in the step S6 up and down;
s8, adjusting the position of the crystal grain transfer assembly: after the carrier assembly in the step S6 loads the carrier plate of the crystal grain to be transferred, and the empty glass carrier plate in the step S7 correspondingly moves to the position below the carrier plate of the crystal grain to be transferred, the crystal grain transfer assembly of the crystal grain transfer mechanism passes through the through hole of the carrier assembly from the upper mounting station and descends to the working station;
s9, grain point position transfer: after the position of the crystal grain transfer assembly is lowered and adjusted to the working station in the step S8, the absorption plane at the bottom of the probe cap of the crystal grain transfer assembly props against a carrier blue film of the fixed crystal grain on the carrier plate of the bearing space, and the crystal grain transfer assembly is upwards absorbed through auxiliary absorption holes distributed on the absorption plane of the probe cap so as to fix the blue film locally; a conical lower probe part of the probe downwards penetrates through a probe hole in the middle of the probe cap to push crystal grains which are locally fixed at the middle of the blue film downwards onto a hollow glass carrier plate below;
s10, crystal grain plane position transfer: after the crystal grains at the single-point position are transferred in the step S9, the bearing component and the transfer platform synchronously move linearly, so that the probe is aligned to the point of the next crystal grain to be transferred in the vertical direction, and the probe cap repeat the step S9 until the crystal grains on the surface of the blue film are completely transferred to the empty glass carrier plate below;
s11, returning the carrier plate: after the empty glass carrier plate in the step S9 is filled with the crystal grains, the transfer platform linearly slides out from the lower part of the bearing assembly, the vacuum negative pressure on the transfer platform stops adsorbing the carrier plate, the carrier plate is upwards jacked by a carrier plate jacking block and then is upwards adsorbed and fixed by a carrier plate moving arm, the carrier plate is moved to a return material moving arm, a moving assembly of the return material moving arm clamps the carrier plate and then is driven to a storage mechanism of a return material storage part through a return material linear module, and the carrier plate loaded with the crystal grains is horizontally pushed into a storage box of the storage mechanism by the moving assembly of the return material moving arm;
s12, crystal grain circulating transfer and material return: and repeating the steps S9 to S11, continuously transferring the crystal grains to the empty glass carrier plate, moving the glass carrier plate feed back loaded with the crystal grains to the storage box, and simultaneously, lifting the storage box along the vertical direction to enable the layers with different heights to be inserted into the full-loading carrier plate.
CN202211133978.6A 2022-09-19 2022-09-19 Grain transfer equipment and grain transfer process thereof Pending CN115424967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211133978.6A CN115424967A (en) 2022-09-19 2022-09-19 Grain transfer equipment and grain transfer process thereof

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117038802A (en) * 2023-08-10 2023-11-10 深圳市优界科技有限公司 Working method of chip transfer device
CN117199198A (en) * 2023-08-10 2023-12-08 深圳市优界科技有限公司 Chip transfer device
CN117509480A (en) * 2024-01-04 2024-02-06 苏州希盟科技股份有限公司 Bearing equipment and glass splicing production line
CN117524927A (en) * 2023-11-06 2024-02-06 广东工业大学 Detection device for LED chip thorn crystal transfer process
CN117524927B (en) * 2023-11-06 2024-05-07 广东工业大学 Detection device for LED chip thorn crystal transfer process

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117038802A (en) * 2023-08-10 2023-11-10 深圳市优界科技有限公司 Working method of chip transfer device
CN117199198A (en) * 2023-08-10 2023-12-08 深圳市优界科技有限公司 Chip transfer device
CN117199198B (en) * 2023-08-10 2024-04-26 深圳市优界科技有限公司 Chip transfer device
CN117524927A (en) * 2023-11-06 2024-02-06 广东工业大学 Detection device for LED chip thorn crystal transfer process
CN117524927B (en) * 2023-11-06 2024-05-07 广东工业大学 Detection device for LED chip thorn crystal transfer process
CN117509480A (en) * 2024-01-04 2024-02-06 苏州希盟科技股份有限公司 Bearing equipment and glass splicing production line
CN117509480B (en) * 2024-01-04 2024-03-19 苏州希盟科技股份有限公司 Bearing equipment and glass splicing production line

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