CN115440642A - Support plate bearing device suitable for crystal grain transfer - Google Patents
Support plate bearing device suitable for crystal grain transfer Download PDFInfo
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- CN115440642A CN115440642A CN202211133855.2A CN202211133855A CN115440642A CN 115440642 A CN115440642 A CN 115440642A CN 202211133855 A CN202211133855 A CN 202211133855A CN 115440642 A CN115440642 A CN 115440642A
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- 230000001360 synchronised effect Effects 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 16
- 239000011521 glass Substances 0.000 claims description 15
- 230000000712 assembly Effects 0.000 claims description 10
- 238000000429 assembly Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 16
- 238000005516 engineering process Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000003190 augmentative effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Abstract
The invention discloses a carrier plate bearing device suitable for crystal grain transfer, which comprises a driving component and a bearing component, wherein the driving component is horizontally arranged and comprises longitudinal output power and transverse output power in a horizontal plane; the bearing assembly is connected to the driving assembly and is driven by the driving assembly to linearly move along the longitudinal direction and/or the transverse direction in the horizontal plane; a bearing space is horizontally arranged in the bearing assembly, and one side of the bearing space is an open surface; the bearing component is provided with a through hole along the vertical direction, and the through hole penetrates through the bearing space up and down. The invention has the functions of position and angle adjustment, realizes the position or angle adjustment of the carrier plate before crystal grain transfer and the position movement in the transfer process, adopts a horizontal cavity type bearing space with an opening at one side for supporting the bearing carrier plate, realizes the position limitation of the upper part, the lower part and the side part of the carrier plate, ensures the position stability of the carrier plate, adopts a flexible connection mode, realizes flexible contact and effectively reduces the damage of the carrier plate.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing equipment, in particular to a carrier plate bearing device suitable for crystal grain transfer.
Background
In the field of display technology, micro display technologies currently in mass production include HTPS TFT LCD based on crystal glass, DLP based on silicon wafer, and the like. Since the OLED technology has the limitation defects of light emitting efficiency, operating temperature range, and lifetime, the inorganic Micro LED will be the main technology of the future Micro display in the long term. As the conventional flat panel display technology and application gradually enter the mature period, the development of display application will step forward to the fields of wearing or virtual reality and augmented reality, and the micro display technology based on wafer process is more suitable for emerging applications due to the influence of factors such as contrast value, panel precision and power saving. The technology for manufacturing Micro LED arrays on a wafer is mature, so that a Micro display adopting the technology is expected to be put into mass production, but when the technology is expanded to the application of general flat panel display, the huge transfer efficiency of crystal grains becomes the biggest technical bottleneck. How to effectively transfer the LED crystal grains to the glass or plastic substrate becomes a key factor for the large-scale development and popularization of the Micro LED technology.
In the process of developing a crystal grain transfer automation device (production line), a crystal grain to be transferred is generally placed on a carrier plate with a blue film horizontally clamped in the middle, the crystal grain needs to be transferred onto a horizontal glass or plastic carrier plate, and the problems of automatic bearing of the carrier plate and automatic coordination between the carrier plate and the carrier plate taking and placing actions need to be solved in the crystal grain transfer process; meanwhile, the crystal grain transfer process requires accurate transfer of the crystal grains on the blue film carrier plate to the glass carrier plate, so that automatic adjustment of the relative position or angle of the two carrier plates needs to be solved before the crystal grains are transferred to ensure the accuracy of crystal grain transfer; in addition, when the crystal grains are transferred, the blue film carrier plate and the glass carrier plate need to be tightly attached to each other so as to reduce the moving path of the crystal grains transferred between the two carrier plates and improve the position precision, and the glass carrier plate is made of a fragile material, so that the problem that the surfaces of the two carrier plates are scratched or damaged due to contact is solved.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a carrier plate carrying device having a position and angle adjusting function, which can adjust the position or angle of the carrier plate before the crystal grain is transferred and move the carrier plate during the transfer process, and which uses a horizontal cavity type carrying space with an opening at one side for supporting the carrier plate, and can limit the upper, lower and lateral positions of the carrier plate, thereby ensuring the position stability of the carrier plate, and at the same time, using a flexible connection mode to achieve flexible contact, thereby effectively reducing the damage of the carrier plate.
The technical scheme adopted by the invention is as follows: a carrier plate bearing device suitable for grain transfer is horizontally arranged and correspondingly arranged above a transfer platform, the transfer platform is loaded with an empty glass carrier plate and comprises a driving component and a bearing component, wherein,
the transfer platform moves linearly in the longitudinal direction and the transverse direction in the horizontal plane;
the driving assembly is horizontally arranged and comprises longitudinal output power and transverse output power in a horizontal plane;
the bearing assembly is connected to the driving assembly and is driven by the driving assembly to linearly move in the horizontal plane along the longitudinal direction and/or the transverse direction;
a bearing space is horizontally arranged in the bearing component, and one side of the bearing space is an open surface so that a blue film carrier plate loaded with crystal grains can slide in;
a through hole is formed in the bearing assembly along the vertical direction, and the through hole vertically penetrates through the bearing space; when the blue film carrier plate is in the bearing space, the blue film bearing the crystal grains corresponds to the through holes up and down, so that the blue film is propped against the probe above the through holes, and the crystal grains on the blue film are transferred to the empty glass carrier plate on the transfer platform.
Preferably, the device also comprises a bearing slide rail, and the bearing slide rail is horizontally arranged; the driving assembly comprises a longitudinal driving component and a transverse driving component, wherein the transverse driving component comprises at least two groups, and the at least two groups of transverse driving components are slidably connected to the bearing slide rail; the output end of the longitudinal driving component is connected with the transverse driving component so as to drive the transverse driving component to do longitudinal linear motion.
Preferably, the bearing assemblies comprise at least two groups, and the at least two groups of bearing assemblies are connected to the transverse driving component in a sliding manner along the transverse direction, are driven by the transverse driving component to move transversely and linearly, and are arranged corresponding to the transfer platform up and down.
Preferably, the bearing assembly comprises a bearing support member, a bearing rotating member, a bearing support plate and a bearing member, wherein the bearing support member is slidably connected to the output end of the transverse linear module; the bearing rotating component is arranged at the lower part of the bearing supporting component and can rotate in a horizontal plane; the bearing support plate is horizontally arranged at the lower part of the bearing rotating component and is driven by the bearing rotating component to rotate; the bearing part is connected to the lower part of the bearing support plate and is flexibly connected with the bearing support plate along the vertical direction, and the bearing space is arranged in the bearing part.
Preferably, the bearing support part comprises a bearing support and a bearing rotating seat, wherein the bearing support is connected to the output end of the transverse linear module, a through hole is formed in the middle of the bearing support, the through hole penetrates through the bearing support from top to bottom, and a downward-recessed annular step surface is arranged on the upper portion of the through hole.
Preferably, the bearing rotary seat is of a cylindrical structure, the bearing rotary seat is inserted into the through hole, a support ring surface extending horizontally outwards is arranged at the top of the bearing rotary seat, the outer diameter of the support ring surface is not larger than the inner diameter of the annular step surface, and the support ring surface is placed on the annular step surface and supported by the annular step surface; the outer wall of the bearing rotary seat extending to the lower part of the bearing support is provided with synchronous teeth.
Preferably, the bearing rotating component comprises a bearing rotating motor, a synchronous belt and a tension roller, wherein the bearing rotating motor is arranged on a supporting plate horizontally connected with one side of the bearing support, an output shaft of the bearing rotating motor downwards extends to the lower part of the bearing support, and the output shaft is sleeved with the synchronous wheel; the tension roller is rotatably disposed at the bottom of the support plate.
Preferably, the synchronous belt is sleeved on the synchronous teeth and a synchronous wheel on an output shaft of the bearing rotating motor and is tensioned through a tensioning roller; the bearing rotary motor drives the bearing rotary seat to rotate through the synchronous belt; the bearing support plate is horizontally connected to the lower part of the bearing rotary seat.
Preferably, the bearing part comprises a bearing seat, a bearing plate and a spring column, wherein the bearing seat is horizontally arranged below the bearing support plate and is connected with the bearing support plate through at least two supporting rods, and the at least two supporting rods are movably connected with the bearing support plate along the vertical direction; the spring columns comprise at least two spring columns, and the spring columns are vertically connected between the bearing seat and the bearing support plate; a supporting frame body protruding downwards is arranged at the lower part of the bearing seat along the side direction, and one side of the supporting frame body close to the discharging space is of an open structure; the bearing plate is horizontally arranged below the bearing seat, and a bearing space is formed between the bearing plate and the supporting frame body; the through hole penetrates through the bearing support plate, the bearing seat and the bearing plate from top to bottom.
Preferably, a material taking notch is formed in one side, close to the material discharging space, of the bearing seat and the bearing plate, and the material taking notch penetrates through the bearing seat and the bearing plate up and down so as to clamp the bearing plate in the bearing space.
The invention has the beneficial effects that:
the invention designs a carrier plate bearing device which has a position and angle adjusting function, realizes the position or angle adjustment of a carrier plate before crystal grain transfer and the position movement in the transfer process, adopts a horizontal cavity type bearing space with an opening at one side for supporting the carrier plate, realizes the position limitation of the upper, lower and side parts of the carrier plate, ensures the position stability of the carrier plate, adopts a flexible connecting mode to realize flexible contact, and effectively reduces the damage of the carrier plate, and is suitable for crystal grain transfer. The invention is suitable for bearing and supporting the carrier plate of the crystal grain to be transferred in the crystal grain transfer process, automatically taking and placing the carrier plate, and automatically adjusting the position or the angle of the carrier plate.
Specifically, the present invention includes multiple sets of carrier assemblies according to the specific station configuration of the die transfer device, where the multiple sets of carrier assemblies are disposed corresponding to the die transfer mechanism so as to complete multi-station synchronous die transfer on the same device, and the multiple sets of carrier assemblies are driven by the longitudinal driving part and the transverse driving part in the horizontal plane respectively to move linearly so as to complete position adjustment in the horizontal plane. The bearing component takes a horizontally arranged bearing support as a bearing part, a circular through hole is formed in the middle of the bearing support, and the through hole vertically penetrates through the bearing support, so that a crystal grain transfer mechanism enters the through hole to push and transfer crystal grains. The invention utilizes the pushing requirement of the crystal grain transfer process to set the through hole, simultaneously utilizes the structure of the through hole creatively, the inner side of the upper part of the through hole is provided with a downward sunken annular step surface, a cylindrical bearing rotary seat is embedded in the annular step surface in a sliding way, the top of the bearing rotary seat is provided with a supporting ring surface which extends horizontally and outwards, and the supporting ring surface can be movably placed on the annular step surface, thereby realizing the requirements of inverted hanging and rotating of the bearing rotary seat; the outer wall of the bearing rotary seat extending to the lower part of the bearing support is sleeved with a synchronizing wheel, the bearing rotary seat drives the synchronizing wheel to drive the synchronizing wheel to rotate through a bearing rotating motor arranged on one side of the bearing support, and drives a bearing support plate horizontally arranged at the bottom of the bearing rotary seat to rotate, so that the angle rotation control of the support plate is realized, and the accuracy of crystal grain transfer is ensured. The supporting plate is connected with a bearing seat through a plurality of vertically arranged spring columns below the bearing supporting plate, the elastic characteristics of the spring columns are utilized to realize flexible connection between the bearing supporting plate and the bearing seat along the vertical direction, and when the bearing seat is vertically close to a transfer platform below which a glass carrier plate is placed, the flexible characteristics are utilized to effectively avoid surface scratching or damage when the upper and lower supporting plates are contacted with each other. Particularly, the lower part of the bearing support plate is provided with a downward convex support frame body along the side direction, one side of the support frame body is of an open structure, the bottom surface of the support frame body is horizontally provided with a bearing plate, a bearing space which is horizontally arranged and has an open surface is formed between the bearing plate and the support frame body, the bearing plate of the crystal grain to be transferred is horizontally inserted into the bearing space, when the horizontal bearing of the bearing plate is completed, the guide limit in the two side directions and the blocking and positioning of the end part in the process of inserting the bearing plate are realized through the single-side open bearing space, so that the blue film part in the middle of the bearing plate is accurately aligned to the through hole, and the crystal grain transfer mechanism passes through the through hole and downwards pushes the crystal grain loaded on the blue film to transfer the crystal grain to the glass bearing plate. Meanwhile, a material taking notch is formed in the open surface of the bearing space and is of a U-shaped notch structure and is recessed inwards along the open side of the bearing space, and the loading device is characterized in that the material taking notch is respectively provided with an inclined plane from outside to inside, and the upper inner side wall and the lower inner side wall are of a horn-shaped notch structure, so that a carrier plate can slide in; simultaneously get the setting of material notch and form and keep away empty space, the support plate is got and is put outside clamping jaw of in-process and press from both sides tight support plate to the support plate of being convenient for.
Drawings
Fig. 1 is a schematic perspective view of a carrier loading mechanism according to an embodiment of the present invention.
Fig. 2 is a schematic perspective view of a second embodiment of the carrier loading mechanism of the present invention.
Fig. 3 is a schematic perspective view of a load bearing assembly according to the present invention.
Fig. 4 is a second perspective view of the bearing assembly of the present invention.
Fig. 5 is a third schematic perspective view of the load bearing member of the present invention.
Fig. 6 is a schematic perspective view of the hidden part of the load bearing assembly of the present invention.
Fig. 7 is a second schematic perspective view of the hidden part of the load-bearing assembly of the present invention.
Fig. 8 is an enlarged schematic view of the structure at the point I in fig. 6.
Detailed Description
The invention will be further described with reference to the accompanying drawings in which:
as shown in fig. 1 to 8, the technical solution adopted by the present invention is as follows: a carrier device for transferring crystal grains is horizontally arranged and correspondingly arranged above a transfer platform, the transfer platform is loaded with empty glass carriers and comprises a driving component and a carrier component 622, wherein,
the transfer platform moves linearly in the longitudinal direction and the transverse direction in the horizontal plane;
the driving component is horizontally arranged and comprises longitudinal output power and transverse output power in a horizontal plane;
the carrier assembly 622 is connected to the driving assembly and is driven by the driving assembly to move linearly in the longitudinal and/or transverse directions in the horizontal plane;
a loading space G is horizontally disposed in the loading assembly 622, and one side of the loading space G is an open surface for the blue film carrier loaded with the die to slide in;
a through hole F is formed in the bearing component 622 along the vertical direction, and the through hole F vertically penetrates through the bearing space G; when the blue film carrier plate is in the bearing space G, the blue film bearing the crystal grains corresponds to the through hole F up and down, so that the blue film is supported by the probe above the through hole F, and the crystal grains on the blue film are transferred to the empty glass carrier plate on the transfer platform.
The device also comprises a bearing slide rail 621, wherein the bearing slide rail 621 is horizontally arranged; the driving assembly comprises a longitudinal driving part and a transverse driving part, wherein the transverse driving part comprises at least two groups, and the at least two groups of transverse driving parts are slidably connected to the bearing slide rail 621; the output end of the longitudinal driving component is connected with the transverse driving component so as to drive the transverse driving component to do longitudinal linear motion.
The bearing components 622 comprise at least two groups, and the at least two groups of bearing components 622 are slidably connected to the transverse driving component along the transverse direction, driven by the transverse driving component to move transversely and linearly and are arranged corresponding to the transfer platform up and down.
The bearing assembly 622 comprises a bearing support member, a bearing rotating member, a bearing support plate 629 and a bearing member, wherein the bearing support member is slidably connected to the output end of the transverse linear module; the bearing rotating component is arranged at the lower part of the bearing supporting component and can rotate in a horizontal plane; the bearing support plate 629 is horizontally arranged at the lower part of the bearing rotating component and is driven by the bearing rotating component to rotate; the bearing part is connected to the lower part of the bearing support plate 629 and is flexibly connected with the bearing support plate 629 along the vertical direction, and the bearing space G is arranged in the bearing part.
The bearing support component comprises a bearing support 623 and a bearing rotating seat 624, wherein the bearing support 623 is connected to the output end of the transverse linear module, a through hole F is formed in the middle of the bearing support 623, the through hole F vertically penetrates through the bearing support 623, and a downward-recessed annular step surface is formed in the upper portion of the through hole F.
The bearing rotary seat 624 is of a cylindrical structure, the bearing rotary seat 624 is inserted into the through hole F, a support ring surface extending horizontally outwards is arranged at the top of the bearing rotary seat 624, the outer diameter of the support ring surface is not larger than the inner diameter of the annular step surface, and the support ring surface is placed on the annular step surface and supported by the annular step surface; the outer wall of the bearing rotary seat 624 extending to the lower part of the bearing support 623 is provided with a synchronizing tooth 628.
The bearing rotating component comprises a bearing rotating motor 625, a synchronous belt 626 and a tensioning roller 627, wherein the bearing rotating motor 625 is arranged on a supporting plate horizontally connected with one side of the bearing support 623, and an output shaft of the bearing rotating motor 625 downwards extends to the lower part of the bearing support 623 and is sleeved with a synchronous wheel; the tension roller 627 is rotatably provided at the bottom of the support plate.
The synchronous belt 626 is sleeved on a synchronous tooth 628 and a synchronous wheel on an output shaft of the bearing rotating motor 625 and is tensioned through a tensioning roller 627; the bearing rotary motor 625 drives the bearing rotary seat 624 to rotate through a synchronous belt 626; the supporting plate 629 is horizontally connected to the lower portion of the supporting rotary base 624.
The bearing part comprises a bearing seat 6210, a bearing plate 6211 and a spring column 6212, wherein the bearing seat 6210 is horizontally arranged below the bearing support plate 629 and is connected with the bearing support plate 629 through at least two supporting rods, and the at least two supporting rods are movably connected with the bearing support plate 629 along the vertical direction; the spring columns 6212 comprise at least two spring columns 6212, and the spring columns 6212 are vertically connected between the bearing seat 6210 and the bearing support plate 629; a supporting frame body protruding downwards is arranged at the lower part of the bearing seat 6210 along the side direction, and one side of the supporting frame body close to the discharging space is an open structure; the bearing plate 6211 is horizontally disposed below the bearing seat 6210, and a bearing space G is formed between the bearing plate 6211 and the supporting frame; the through hole F passes through the supporting plate 629, the supporting base 6210 and the supporting plate 6211 from top to bottom.
A material taking notch H is formed in one side of the bearing seat 6210 and the bearing plate 6211 close to the material discharging space, and the material taking notch H vertically penetrates through the bearing seat 6210 and the bearing plate 6211 so as to clamp the bearing plate in the bearing space.
Furthermore, the invention designs a carrier plate bearing device which has the functions of position and angle adjustment, realizes the position or angle adjustment of a carrier plate before crystal grain transfer and the position movement in the transfer process, adopts a horizontal cavity type bearing space with an opening at one side for supporting the carrier plate, realizes the position limitation of the upper part, the lower part and the side part of the carrier plate, ensures the position stability of the carrier plate, adopts a flexible connection mode, realizes flexible contact and effectively reduces the damage of the carrier plate, and is suitable for crystal grain transfer. The invention is suitable for bearing and supporting the carrier plate of the crystal grain to be transferred in the crystal grain transfer process, automatically taking and placing the carrier plate, and automatically adjusting the position or the angle of the carrier plate. Specifically, the present invention includes multiple sets of carrier assemblies according to the specific station configuration of the die transfer device, the multiple sets of carrier assemblies are configured corresponding to the die transfer mechanism so as to complete the multi-station synchronous die transfer on the same device, and the multiple sets of carrier assemblies are driven by the longitudinal driving component and the transverse driving component in the horizontal plane to move linearly, so as to complete the position adjustment in the horizontal plane. The bearing component takes a horizontally arranged bearing support as a bearing part, a circular through hole is formed in the middle of the bearing support, and the through hole vertically penetrates through the bearing support, so that a crystal grain transfer mechanism enters the through hole to push and transfer crystal grains. The invention utilizes the pushing requirement of the crystal grain transfer process to set the through hole, simultaneously utilizes the structure of the through hole creatively, the inner side of the upper part of the through hole is provided with a downward sunken annular step surface, a cylindrical bearing rotary seat is embedded in the annular step surface in a sliding way, the top of the bearing rotary seat is provided with a supporting ring surface which extends horizontally and outwards, and the supporting ring surface can be movably placed on the annular step surface, thereby realizing the requirements of inverted hanging and rotating of the bearing rotary seat; the outer wall of the bearing rotary seat extending to the lower part of the bearing support is sleeved with a synchronizing wheel, the bearing rotary seat drives the synchronizing wheel to drive the synchronizing wheel to rotate through a bearing rotating motor arranged on one side of the bearing support, and drives a bearing support plate horizontally arranged at the bottom of the bearing rotary seat to rotate, so that the angle rotation control of the support plate is realized, and the accuracy of crystal grain transfer is ensured. The lower part of the bearing support plate is connected with a bearing seat through a plurality of vertically arranged spring columns, the bearing support plate and the bearing seat are flexibly connected in the vertical direction by utilizing the elastic characteristics of the spring columns, and when the bearing seat is vertically close to a transfer platform for placing glass support plates below, the surface scratching or damage of the upper support plate and the lower support plate when the upper support plate and the lower support plate are contacted with each other is effectively avoided by utilizing the flexible characteristics. Particularly, the lower part of the bearing support plate is provided with a support frame body protruding downwards along the side edge direction, one side of the support frame body is of an open structure, the bottom surface of the support frame body is horizontally provided with a bearing plate, a bearing space which is horizontally arranged and one side of the bearing space is an open surface is formed between the bearing plate and the support frame body, the bearing plate of the crystal grain to be transferred is horizontally inserted into the bearing space, and when the horizontal bearing of the bearing plate is completed, the guide limit in the two side directions and the blocking positioning of the end part in the process of inserting the bearing plate are realized through the bearing space with the single side open type, so that the blue film part in the middle of the bearing plate is accurately aligned to the through hole, and the crystal grain transfer mechanism penetrates through the through hole to downwards push the crystal grain carried on the blue film to transfer the crystal grain to the glass bearing plate. Meanwhile, a material taking notch is formed in the open surface of the bearing space and is of a U-shaped notch structure and is recessed inwards along the open side of the bearing space, and the loading device is characterized in that the material taking notch is respectively provided with an inclined plane from outside to inside, and the upper inner side wall and the lower inner side wall are of a horn-shaped notch structure, so that a carrier plate can slide in; meanwhile, a clearance space is formed by the arrangement of the material taking groove openings, so that the support plate is clamped by the external clamping jaws in the process of taking and placing the support plate conveniently.
The examples of the present invention are merely illustrative of specific embodiments thereof and are not intended to limit the scope thereof. Since the present invention can be modified by a person skilled in the art, the present invention is not limited to the embodiments described above.
Claims (10)
1. The utility model provides a support plate bears device suitable for crystalline grain shifts, the level sets up to correspond and set up in the transfer platform top, the last empty glass support plate that is loaded of transfer platform, its characterized in that: comprises a driving component and a bearing component (622), wherein,
the transfer platform moves linearly in the longitudinal direction and the transverse direction in the horizontal plane;
the driving assembly is horizontally arranged and comprises longitudinal output power and transverse output power in a horizontal plane;
the bearing assembly (622) is connected to the driving assembly and is driven by the driving assembly to move linearly in the horizontal plane along the longitudinal direction and/or the transverse direction;
a carrying space (G) is horizontally arranged in the carrying component (622), and one side of the carrying space (G) is an open surface so that a blue film carrier plate loaded with crystal grains can slide in;
a through hole (F) is formed in the bearing component (622) along the vertical direction, and the through hole (F) penetrates through the bearing space (G) up and down; when the blue film carrier plate is in the bearing space (G), the blue film bearing the crystal grains corresponds to the through hole (F) up and down, so that the blue film is supported under the probe above the through hole (F) and the crystal grains on the blue film are transferred to the empty glass carrier plate on the transfer platform.
2. The carrier-board carrying apparatus for die transfer as claimed in claim 1, wherein: the device also comprises a bearing slide rail (621), wherein the bearing slide rail (621) is horizontally arranged; the driving assembly comprises a longitudinal driving part and a transverse driving part, wherein the transverse driving part comprises at least two groups, and the at least two groups of transverse driving parts are slidably connected to the bearing slide rail (621); the output end of the longitudinal driving component is connected with the transverse driving component so as to drive the transverse driving component to do longitudinal linear motion.
3. The carrier substrate carrying apparatus for die transfer as claimed in claim 2, wherein: the bearing assemblies (622) comprise at least two groups, and the at least two groups of bearing assemblies (622) are connected to the transverse driving component in a sliding mode along the transverse direction, driven by the transverse driving component to move transversely and linearly and arranged corresponding to the transfer platform up and down.
4. The carrier substrate carrying apparatus for die transfer as claimed in claim 2, wherein: the bearing assembly (622) comprises a bearing support part, a bearing rotating part, a bearing support plate (629) and a bearing part, wherein the bearing support part is slidably connected to the output end of the transverse linear module; the bearing rotating component is arranged at the lower part of the bearing supporting component and can rotate in a horizontal plane; the bearing support plate (629) is horizontally arranged at the lower part of the bearing rotating component and is driven by the bearing rotating component to rotate; the bearing part is connected to the lower portion of the bearing support plate (629) and is flexibly connected with the bearing support plate (629) in the vertical direction, and the bearing space (G) is arranged in the bearing part.
5. The carrier substrate carrying apparatus for die transfer as claimed in claim 4, wherein: the bearing support component comprises a bearing support (623) and a bearing rotating seat (624), wherein the bearing support (623) is connected to the output end of the transverse linear module, a through hole (F) is formed in the middle of the bearing support (623), the through hole (F) penetrates through the bearing support (623) from top to bottom, and a downward-recessed annular step surface is arranged on the upper portion of the through hole (F).
6. The carrier substrate carrying apparatus for die transfer as claimed in claim 5, wherein: the bearing rotary seat (624) is of a cylindrical structure, the bearing rotary seat (624) is inserted into the through hole (F), a supporting ring surface extending horizontally outwards is arranged at the top of the bearing rotary seat (624), the outer diameter of the supporting ring surface is not larger than the inner diameter of the annular step surface, and the supporting ring surface is placed on the annular step surface and supported by the annular step surface; the outer wall of the bearing rotating seat (624) extending to the lower part of the bearing support (623) is provided with synchronous teeth (628).
7. The carrier substrate carrying apparatus for die transfer as claimed in claim 6, wherein: the bearing rotating component comprises a bearing rotating motor (625), a synchronous belt (626) and a tensioning roller (627), wherein the bearing rotating motor (625) is arranged on a supporting plate which is horizontally connected with one side of a bearing support (623), an output shaft of the bearing rotating motor extends downwards to the lower part of the bearing support (623), and the bearing rotating motor is sleeved with the synchronous wheel; the tension roller 627 is rotatably provided at a bottom of the support plate.
8. The carrier substrate carrying apparatus for die transfer as claimed in claim 7, wherein: the synchronous belt (626) is sleeved on synchronous teeth (628) and a synchronous wheel on an output shaft of a bearing rotating motor (625) and is tensioned through a tensioning roller (627); the bearing rotary motor (625) drives the bearing rotary seat (624) to rotate through a synchronous belt (626); the bearing support plate (629) is horizontally connected with the lower part of the bearing rotary seat (624).
9. The carrier-board carrying apparatus for die transfer as claimed in claim 8, wherein: the bearing part comprises a bearing seat (6210), a bearing plate (6211) and a spring column (6212), wherein the bearing seat (6210) is horizontally arranged below the bearing support plate (629) and is connected with the bearing support plate (629) through at least two supporting rods, and the at least two supporting rods are movably connected with the bearing support plate (629) along the vertical direction; the number of the spring columns (6212) is at least two, and the spring columns (6212) are vertically connected between the bearing seat (6210) and the bearing support plate (629); a supporting frame body protruding downwards is arranged at the lower part of the bearing seat (6210) along the side direction, and one side of the supporting frame body close to the discharging space is of an open structure; the bearing plate (6211) is horizontally arranged below the bearing seat (6210), and a bearing space (G) is formed between the bearing plate (6211) and the supporting frame body; the through hole (F) penetrates through the bearing support plate (629), the bearing seat (6210) and the bearing plate (6211) from top to bottom.
10. The carrier-board carrying apparatus for die transfer as claimed in claim 9, wherein: a material taking notch (H) is formed in one side, close to the material discharging space, of the bearing seat (6210) and the bearing plate (6211), and the material taking notch (H) penetrates through the bearing seat (6210) and the bearing plate (6211) up and down so as to clamp the bearing plate in the bearing space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211133855.2A CN115440642A (en) | 2022-09-19 | 2022-09-19 | Support plate bearing device suitable for crystal grain transfer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211133855.2A CN115440642A (en) | 2022-09-19 | 2022-09-19 | Support plate bearing device suitable for crystal grain transfer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115440642A true CN115440642A (en) | 2022-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211133855.2A Pending CN115440642A (en) | 2022-09-19 | 2022-09-19 | Support plate bearing device suitable for crystal grain transfer |
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| CN (1) | CN115440642A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117199198A (en) * | 2023-08-10 | 2023-12-08 | 深圳市优界科技有限公司 | Chip transfer device |
-
2022
- 2022-09-19 CN CN202211133855.2A patent/CN115440642A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117199198A (en) * | 2023-08-10 | 2023-12-08 | 深圳市优界科技有限公司 | Chip transfer device |
| CN117199198B (en) * | 2023-08-10 | 2024-04-26 | 深圳市优界科技有限公司 | Chip transfer device |
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