CN109192688A - Wafer charging/discharging device and integrated circuit wafer labeling apparatus - Google Patents
Wafer charging/discharging device and integrated circuit wafer labeling apparatus Download PDFInfo
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- CN109192688A CN109192688A CN201811017955.2A CN201811017955A CN109192688A CN 109192688 A CN109192688 A CN 109192688A CN 201811017955 A CN201811017955 A CN 201811017955A CN 109192688 A CN109192688 A CN 109192688A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67282—Marking devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to technical field of integrated circuits.Wafer charging/discharging device, including lifting support, first movement line rail assembly, the first feed screw nut seat, the first vertical bearing, the first lead screw, synchronous pulley, the second motor, wafer feeding rack and adjusting clamping component.The advantages of wafer charging/discharging device is using lifting wafer feeding rack wafer work capacity to be greatly improved, and drawing and pulling type loading and unloading are simple and efficient, high in machining efficiency.
Description
Technical field
The present invention relates to technical field of integrated circuits, the especially equipment of wafer labeling.
Background technique
Wafer refers to silicon wafer used in silicon semiconductor production of integrated circuits, can be carved on wafer by special technique
Transistors millions of out is lost, the manufacture of integrated circuit is widely used in.After wafer completes the process, need again thereon
Labelled, existing labeling mode of operation is: first wafer is fixed, then pre-printed label is pasted on wafer,
Labeled wafer is removed to continue to be packed into wafer to be labelled, repetitive operation.Deficiency existing for existing equipment is: 1. are arranged
Standby to be operated for a kind of wafer of size, when wafer size difference, can not be compatible with, and lead to high production cost；2. pre-
The label first printed is pasted on wafer, can not temporarily change label, and the percent of automatization that label is pasted is low；3. material list above and below wafer
Solely operation, leads to that processing efficiency is low；4. wafer is small in size, clamping and positioning are inconvenient, cause processing efficiency and yield rate low.
Summary of the invention
It is an object of the present invention to provide a kind of wafer that wafer input and output material is convenient and wafer input and output material effect is high disengaging
Expect device；It is a further object to provide a kind of processing efficiencies and machining yield height, can be adapted for different sizes
Wafer carries out the integrated circuit wafer labeling apparatus of labeling operation.
To achieve the goals above, the technical solution used in the present invention is: wafer charging/discharging device, including lifting are propped up
Seat, first movement line rail assembly, the first feed screw nut seat, the first vertical bearing, the first lead screw, synchronous pulley, the second motor, crystalline substance
Circle feeding rack and adjusting clamping component；First movement line rail assembly includes the sliding rail and slide connected by prismatic pair；First
Thick stick nut seat and the first lead screw form screw pair and are cooperatively connected, and the first feed screw nut seat is fixedly connected with lifting support；Two
A synchronous pulley is separately mounted on the first lead screw and the second motor output end；Wafer feeding rack is the square box of rear and front end perforation
Shape is provided on wafer feeding rack or so inner wall for being layered the multiple horizontal grooves for placing wafer, above and below multiple horizontal grooves
It is equidistant regularly arranged；It adjusts clamping component to be mounted on lifting support, wafer feeding rack is connected to liter by adjusting clamping component
On descending branch seat；
Adjusting clamping component includes the second lead screw, clamping plate, the second feed screw nut and adjusting knob；Second lead screw is vertical by second
Bearing is mounted on lifting support, and the second lead screw two sides screw rod is oppositely oriented；Adjusting knob is fixedly mounted on second lead screw one end；
Second feed screw nut corresponding matching is connected on the second lead screw, and the second feed screw nut is connect with Boards wall, and clamping plate is located at lifting
In the slot of support, section is used to clamp wafer feeding rack anyhow for clamping plate upper end.
Integrated circuit wafer labeling apparatus, label charging/discharging device including rack and thereon, label move label apparatus,
Wafer mounting apparatus, labeling detection device, wafer board migration device and above-mentioned wafer charging/discharging device；Lifting support passes through first
Portable cord rail assembly connects on the rack, and the first lead screw is connected on the rack by the first vertical bearing, and the second motor passes through the
Two motor mounts are mounted on the rack.
Preferably, label charging/discharging device is used for charging, the coding of label and the recycling of waste paper of blank tag；Wafer
Charging/discharging device for realizing wafer to be labelled feeding and processing finished product blanking；Label moves label apparatus for drawing wafer
Label in charging/discharging device, and be affixed on the wafer in wafer mounting apparatus；Wafer mounting apparatus for it is fixed to
The wafer of processing；Labeling detection device is used to detect the labeling situation of wafer；Wafer board migration device is used for wafer to be processed
Movement complete feeding into wafer mounting apparatus, and by the processing finished product movement in wafer mounting apparatus to wafer input and output material
Blanking is completed in device.
Preferably, wafer board migration device include the 6th motor, lead screw transmission component, the mobile mould group of third, cantilevered leg and
Wafer gripping body；6th motor is fixedly mounted on the rack by the 6th motor fixing seat, the 6th motor output shaft and lead screw
The lead screw of transmission component is connected；Lead screw transmission component and the mobile mould group side by side parallel of third are mounted on the rack, and cantilevered leg connects
It connects on lead screw transmission component and the mobile mould group of third；Wafer gripping body for clamping wafer and compression label is mounted on outstanding
On semi-girder；Wafer gripping body includes connection sheet metal component, third cylinder, finger cylinder, upper grip, lower collet, anti-dazzling screen and red
Outer sensor；It connects sheet metal component to be arranged in cantilevered leg, connection sheet metal component is in U-shape, and it is left that third cylinder is mounted on connection sheet metal component
On vertical plate, infrared sensor is mounted in connection sheet metal component right risers；Finger cylinder is horizontally arranged at the moving portion of third cylinder
On, upper grip is mounted on the upper mobile terminal of finger cylinder, and lower collet is mounted on the bottom end of finger cylinder；Anti-dazzling screen is mounted on hand
Refer on cylinder, anti-dazzling screen position aligns with infrared sensor.
Using the wafer charging/discharging device of above-mentioned technical proposal, advantage is to make wafer work using lifting wafer feeding rack
It is greatly improved as capacity, drawing and pulling type loading and unloading are simple and efficient, high in machining efficiency；It adjusts clamping component and sets material for fixing wafer
Frame solves the compatibling problem that different size wafers are placed, so that wafer feeding rack facilitates pick-and-place.Using above-mentioned technical proposal
Integrated circuit wafer labeling apparatus, label charging/discharging device is convenient for changing label information, only need to control printer,
No replacement is required label tape；Using wafer charging/discharging device wafer work capacity is greatly improved, improves high in machining efficiency；Mark
Label move the removing and stickup that label apparatus is automatically performed label；Wafer mounting apparatus not only can be moved but also can be fixed, and be convenient for wafer
Loading and unloading and labeling；Labeling detection device ensures the accuracy of labeling, improves qualification rate；Wafer board migration device not only can be with
Label and wafer are further clamped, wafer can also be driven to move back and forth, it is efficient to realize feeding and blanking；The integrated circuit is used
The advantages of wafer labeling apparatus is that processing efficiency and machining yield are high, can be adapted for various sizes of wafer and carries out entirely certainly
Dynamic labeling.
Detailed description of the invention
Fig. 1 is the configuration schematic diagram of the embodiment of the present invention.
Fig. 2 is the configuration schematic diagram of label charging/discharging device.
Fig. 3 is the configuration schematic diagram of guide rod positioning component.
Fig. 4 is the configuration schematic diagram of wafer charging/discharging device.
Fig. 5 is the configuration schematic diagram for adjusting clamping component.
Fig. 6 is the configuration schematic diagram that label moves label apparatus.
Fig. 7 is the configuration schematic diagram of wafer adsorption mechanism.
Fig. 8 is the configuration schematic diagram of wafer carrier mechanism.
Fig. 9 is the configuration schematic diagram for labelling detection device.
Figure 10 is the configuration schematic diagram of wafer board migration device.
Figure 11 is the configuration schematic diagram of wafer gripping body.
Specific embodiment
The present invention is described further with embodiment with reference to the accompanying drawings of the specification.
Embodiment 1
Wafer charging/discharging device as shown in Figure 4 and Figure 5, including lifting support 21, first movement line rail assembly 22, the first lead screw
Nut seat 23, the first vertical bearing 24, the first lead screw 25, synchronous pulley 26, the second motor 27, wafer feeding rack 28 and adjusting folder
Tight component 29；First movement line rail assembly 22 includes the sliding rail and slide connected by prismatic pair；First feed screw nut seat 23 with
First lead screw 25 forms screw pair and is cooperatively connected, and the first feed screw nut seat 23 is fixedly connected with lifting support 21；Two same
Step belt wheel 26 is separately mounted on 27 output end of the first lead screw 25 and the second motor, realizes power transmitting by synchronous belt；Wafer
Feeding rack 28 is the square box shaped of rear and front end perforation, is provided on 28 or so inner wall of wafer feeding rack and places wafer for being layered
Multiple horizontal grooves 281, multiple horizontal grooves are equidistant regularly arranged up and down；It adjusts clamping component 29 and is mounted on lifting support 21
On, wafer feeding rack 28 is connected on lifting support 21 by adjusting clamping component 29.Clamping component 29 is adjusted for adjusting folder
Tight wafer feeding rack 28 is allowed to fixed, needs the wafer feeding rack 28 using different length to various sizes of wafer labeling, by
It adjusts clamping component 29 to be adjusted, increases the range used.
Wafer charging/discharging device 2 drives the first lead screw 25 to rotate at work, by the second motor 27, realizes lifting support 21
Lifting, the revolving speed by controlling second motor 27 controls the height that lifting support 21 rises or falls horizontal groove every time；
For placing wafer in horizontal groove in wafer feeding rack 28, successively stack up and down, once by lifting wafer feeding rack 28
Operation, until processing all workpiece in wafer feeding rack 28.The effect of wafer charging/discharging device sets material using lifting wafer
Frame 28 greatly improves wafer work capacity, and drawing and pulling type loading and unloading are simple and efficient, high in machining efficiency.
Adjusting clamping component 29 includes the second lead screw 291, clamping plate 292, the second feed screw nut 293 and adjusting knob 294；The
Two lead screws 291 are mounted on lifting support 21 by the second vertical bearing 295, and 291 two sides screw rod of the second lead screw is oppositely oriented；It adjusts
Section knob 294 is fixedly mounted on 291 one end of the second lead screw；Second feed screw nut, 293 corresponding matching is connected to the second lead screw 291
On, the second feed screw nut 293 is fixedly connected with clamping plate 292, and clamping plate 292 is located in the slot of lifting support 21, and 292 upper end of clamping plate is horizontal
Straight section is for clamping wafer feeding rack 28.
Clamping component 29 is adjusted at work, by rotating adjusting knob 294, so that two 293 phases of the second feed screw nut
To movement or mutually from movement, so that the wafer feeding rack 28 that clamping and release are arranged on lifting support 21 is realized, convenient for more
Change wafer feeding rack 28.Clamping component 29 is adjusted for fixing wafer feeding rack, solves the problems, such as that different size wafers are placed, makes
It obtains wafer feeding rack and facilitates pick-and-place.
Embodiment 2
Integrated circuit as shown in Figure 1-Figure 11 wafer labeling apparatus, label charging/discharging device including rack 7 and thereon
1, wafer charging/discharging device 2, label move label apparatus 3, wafer mounting apparatus 4, labeling detection device 5 and wafer board migration device 6.
Wafer charging/discharging device 2 moves label apparatus 3 by label and is connected with wafer mounting apparatus 4, wafer mounting apparatus 4 and crystalline substance
Circle 2 phase of charging/discharging device linking, labeling detection device 5 are located at right above wafer mounting apparatus 4,6 position pair of wafer board migration device
Answer wafer charging/discharging device 2 and wafer mounting apparatus 4.
Label charging/discharging device 1 is used for charging, the coding of label and the recycling of waste paper of blank tag.Wafer input and output material dress
2 are set for realizing the blanking of the feeding and processing finished product of wafer to be labelled.Label moves label apparatus 3 for drawing wafer input and output material
Label in device 2 is affixed on the wafer in wafer mounting apparatus 4.Wafer mounting apparatus 4 is to be processed for fixing
Wafer.Labeling detection device 5 is used to detect the labeling situation of wafer.Wafer board migration device 6 is used for the shifting of wafer to be processed
It transports in wafer mounting apparatus 4 and completes feeding, and the processing finished product movement in wafer mounting apparatus 4 to wafer input and output material is filled
It sets and completes blanking in 2.
As shown in Figures 2 and 3, label charging/discharging device 1 include barrel mounting plate 11, rewinding barrel 12, charging barrel 13,
First motor 14, guide rod 15, ink jet printer 16, guide rod positioning component 17, ink jet printer fixing seat 18, discharging slanted bar 19
With charging detector 110；Barrel mounting plate 11 is fixedly mounted in rack 7, feeds barrel 13 and rewinding barrel 12 is rotatablely connected
On barrel mounting plate 11, rewinding barrel 12 is used to wind the material strip of recycling, and charging barrel 13 is used to wind the blank to coding
Label, charging barrel 13 are located at 12 lower section of rewinding barrel.First motor 14 is mounted on barrel mounting plate 11, and first motor 14 is defeated
Shaft is connected with 12 shaft of rewinding barrel, and first motor 14 drives rewinding barrel 12 to rotate, so that charging barrel 13 is by turn
Get up.Guide rod 15 is connected on barrel mounting plate 11, for being oriented to the trend of label tape；Ink jet printer 16 is fixedly mounted on
In ink jet printer fixing seat 18, ink jet printer fixing seat 18 is fixed in rack 7, and the label on rewinding barrel 12 passes through spray
Code printer 16.16 feed inlet of ink jet printer is right side, and discharge port is to spray and contain in the blank tag of charging at a of left side
The bar code of relevant information waits label to move label apparatus 3 at the discharge port a of left side and pipettes.Guide rod positioning component 17, discharging slanted bar 19
It being mounted in ink jet printer fixing seat 18 with charging detector 110, guide rod positioning component 17 is used to being oriented to and limiting label tape,
Guide rod positioning component 17 is equipped at the inlet port and outlet port of ink jet printer 16, discharging 19 position of slanted bar corresponds to coding printing
The discharge port a of machine 16；Charging 110 position of detector corresponds to wafer mounting apparatus 4, drives label to move after detecting wafer in place
Label apparatus 3 works.
Label charging/discharging device 1 drives 12 rotated stepwise of rewinding barrel at work, by first motor 14, so that
The passive feeding of label tape；It is successively pasted with blank tag on label tape, sprays bar code after initially entering ink jet printer 16, is going out
Material mouth moves label apparatus 3 by label and realizes removing and movement；Material strip waste material after removing, which enters, to be completed to collect in rewinding barrel 12.Mark
The effect of label charging/discharging device 1 is charging using blank tag, carries out live coding to blank tag, advantage is to be convenient for changing mark
Information is signed, only need to control printer, no replacement is required label tape.
Guide rod positioning component 17 includes guide rod 171, shaft end transposase 11 72 and holding paper ear mount 173；Guide rod 171 is rotatably connected on
On shaft end transposase 11 72, shaft end transposase 11 72 is arranged in ink jet printer fixing seat 18；Two holding paper ear mounts 173 are movably connected in
On guide rod 171, adjustable distance between the two is then fixed with holding screw；173 section of holding paper ear mount is L-shaped, holding paper
173 bottom of ear mount is equipped with the supporting plate 1731 that inwardly stretches out, between supporting plate 1731 and guide rod 171 there are passing through for label paper b between
Gap.Two holding paper ear mounts 173 are oppositely arranged.
Guide rod 171 for being oriented to label paper b, label paper b between guide rod 171 and supporting plate 1731, supporting plate 1731 with lead
Gap between bar 171 prevents label paper b fold, and the distance between two holding paper ear mounts 173 are of same size with label paper b's,
Two holding paper ear mounts 173 have the function that positioning for preventing label paper b or so play.
As shown in Figure 4 and Figure 5, wafer charging/discharging device 2 includes lifting support 21, first movement line rail assembly 22, first
Feed screw nut seat 23, the first vertical bearing 24, the first lead screw 25, synchronous pulley 26, the second motor 27, wafer feeding rack 28 and tune
Save clamping component 29；Lifting support 21 is connected in rack 7 by first movement line rail assembly 22, first movement line rail assembly 22
Including the sliding rail and slide connected by prismatic pair；First lead screw 25 is connected in rack 7 by the first vertical bearing 24, and first
Feed screw nut seat 23 and the first lead screw 25 form screw pair and are cooperatively connected, and the first feed screw nut seat 23 and lifting support 21 are solid
Fixed connection；Second motor 27 is mounted in rack 7 by the second motor mount 210；Two synchronous pulleys 26 are separately mounted to
On 27 output end of first lead screw 25 and the second motor, power transmitting is realized by synchronous belt；Wafer feeding rack 28 is rear and front end
The square box shaped of perforation is provided on 28 or so inner wall of wafer feeding rack for being layered the multiple horizontal grooves 281 for placing wafer, more
A horizontal groove is equidistant regularly arranged up and down；It adjusts clamping component 29 to be mounted on lifting support 21, wafer feeding rack 28 passes through
Clamping component 29 is adjusted to be connected on lifting support 21.It adjusts clamping component 29 and is allowed to solid for adjusting clamping wafer feeding rack 28
It is fixed, the wafer feeding rack 28 using different length is needed to various sizes of wafer labeling, is adjusted by adjusting clamping component 29
Section, increases the range used.
Wafer charging/discharging device 2 drives the first lead screw 25 to rotate at work, by the second motor 27, realizes lifting support 21
Lifting, the revolving speed by controlling second motor 27 controls the height that lifting support 21 rises or falls horizontal groove every time；
For placing wafer in horizontal groove in wafer feeding rack 28, successively stacks up and down, the wafer on upper layer is passed through into wafer first
6 movement of board migration device is processed into wafer mounting apparatus 4, and completion of processing, which moves back, transports original position back, sets material by going up and down wafer
28 once-through operation of frame, until processing all workpiece in wafer feeding rack 28.The effect of wafer charging/discharging device 2 is using lifting
Wafer feeding rack 28 greatly improves wafer work capacity, and drawing and pulling type loading and unloading are simple and efficient, high in machining efficiency.
Adjusting clamping component 29 includes the second lead screw 291, clamping plate 292, the second feed screw nut 293 and adjusting knob 294；The
Two lead screws 291 are mounted on lifting support 21 by the second vertical bearing 295, and 291 two sides screw rod of the second lead screw is oppositely oriented；It adjusts
Section knob 294 is fixedly mounted on 291 one end of the second lead screw；Second feed screw nut, 293 corresponding matching is connected to the second lead screw 291
On, the second feed screw nut 293 is fixedly connected with clamping plate 292, and clamping plate 292 is located in the slot of lifting support 21, and 292 upper end of clamping plate is horizontal
Straight section is for clamping wafer feeding rack 28.
Clamping component 29 is adjusted at work, by rotating adjusting knob 294, so that two 293 phases of the second feed screw nut
To movement or mutually from movement, so that the wafer feeding rack 28 that clamping and release are arranged on lifting support 21 is realized, convenient for more
Change wafer feeding rack 28.Clamping component 29 is adjusted for fixing wafer feeding rack, solves the problems, such as that different size wafers are placed, makes
It obtains wafer feeding rack and facilitates pick-and-place.
As shown in fig. 6, it includes installation support base 31, third motor 32, cursor 33, the first cylinder that label, which moves label apparatus 3,
34 and draw block 35；Support base 31 is installed to be arranged in rack 7, the cantilever that third motor 32 is mounted on installation support base 31 is right
Side；Cursor 33 is connected with the output shaft of third motor 32；Cursor 33 is L-shaped, is convenient for feeding and stickup；First cylinder
34 are fixed on cursor 33, draw block 35 and are connected with the telescopic end of the first cylinder 34.Draw the corresponding spray in 35 position of block
The discharge port of code printer 16 draws 35 right side of block and is equipped with a row for drawing 16 discharge outlet label of ink jet printer
Suction hole.
Label moves label apparatus 3 at work, drives cursor 33 to rotate by third motor 32, is driven and inhaled by the first cylinder 34
Take block 35 flexible；After drawing block 35 and drawing label, the first cylinder 34, which is shunk back, to be come, and third motor 32 is by 33 up time of cursor
Needle rotates 90 degree, and then the first cylinder 34 extends, and label is pasted on the wafer in wafer mounting apparatus 4.Label moves attachment
The removing and stickup of 3 completion labels are set, a rotation combines movement, so that the motion profile for drawing block 35 is rich and varied, reaches
Optimal removing and sticking effect.
As shown in Figure 7, Figure 8 and Figure 9, wafer mounting apparatus 4 includes wafer adsorption mechanism 41 and wafer carrier mechanism 42；It is brilliant
Circle microscope carrier mechanism 42 and wafer adsorption mechanism 41 are mounted in rack 7, and wafer carrier mechanism 42 is used to accept the wafer of processing, can
To adjust its size, to adapt to different size of wafer；Wafer adsorption mechanism 41 is located at 42 center of wafer carrier mechanism, for inhaling
The wafer being fixed in wafer carrier mechanism 42 is taken, guarantees the stabilization in process.Wafer mounting apparatus 4 can not only move but also
It can fix, be convenient for wafer loading and unloading and labeling.
Wafer adsorption mechanism 41 includes circular magnetic chuck 411, cylindrical optical axis 412, mounting plate 413 and the second cylinder 414；Peace
Loading board 413 is fixed in rack 7, and cylindrical optical axis 412 is fixed on 411 bottom of circular magnetic chuck, and cylindrical optical axis 412 passes through straight line
On mounting plate 413, circular magnetic chuck 411 is equipped with multiple for wafer in wafer carrier mechanism 42 to be sucked bearing mobile connection
Suction hole；Second cylinder 414 is fixed on mounting plate 413, and 414 telescopic end of the second cylinder is connected with circular magnetic chuck 411.
Wafer adsorption mechanism 41 jacks up circular magnetic chuck 411 at work, by the second cylinder 414, is inhaled by circular magnetic chuck 411
Aspiration lives the wafer in wafer carrier mechanism 42, is allowed to fixed.Wafer adsorption mechanism 41 can be gone up and down, for realizing wafer workpiece
Fixation with separate.
Wafer carrier mechanism 42 includes wafer clamp bar 421, first movement mould group 422, the 4th motor 423, third lead screw spiral shell
Mother 424 and third lead screw 425；Wafer clamp bar 421 and first movement mould group 422 are two respectively, and each wafer clamp bar 421 passes through
One first movement mould group 422 is connected in rack 7；Wafer clamping bar 4212 of the wafer clamp bar 421 including pedestal 4211 and thereon,
Pedestal is connected in first movement mould group 422, and L v notch v is equipped on the inside of wafer clamping bar, and two wafer clamp bars 421 are oppositely arranged,
So that wafer is between two wafer clamp bars 421, wafer clamp bar 421 moves back and forth along first movement mould group 422；Third silk
Thick stick 425 is mounted in rack 7 by third vertical bearing 426, and 423 output shaft of the 4th motor is connected with third lead screw 425；The
Three lead screws, 425 two sides lead screw is oppositely oriented；The corresponding cooperation of third feed screw nut 424 is in 425 both ends of third lead screw, two thirds
Feed screw nut 424 is connected respectively two wafer clamp bars 421.
Wafer carrier mechanism 42 drives third lead screw 425 to rotate at work, by the 4th motor 423, thus two wafers
Clamp bar 421 is close to each other or is located remotely from each other, and to place various sizes of wafer, wafer can be sliding along wafer clamp bar 421
It is dynamic, it is fixed by wafer adsorption mechanism 41.By adjusting wafer carrier mechanism 42 to adapt to place various sizes of wafer, increase
The range of work；L v notch v of the wafer on the inside of wafer clamping bar moves back and forth, and becomes a track of feeding and blanking, solves
Connection problem of the workpiece from upper material position to machining position.
As shown in Figure 10, labeling detection device 5 includes camera fixing support 51, the 4th motor 52, rotary shaft 53, platform sling
54, the mobile mould group 56 of the 5th motor 55, second, toothed belt transmission component 57 and detection camera 58；Camera fixing support 51 is fixed
In rack 7, the 4th motor 52 is mounted on camera fixing support 51, and rotary shaft 53 is rotatably connected on camera fixing support 51
On, the 4th motor 52 drives rotary shaft 53 to rotate by internal transmission mechanism.The intermediate position of platform sling 54 is connected to rotary shaft 53
On, the 5th motor 55 is mounted on platform sling 54.It detects camera 58 and passes through the second mobile 56 mobile connection of mould group on platform sling 54；Together
Walking V belt translation component 57 includes active synchronization wheel, driven synchronizing wheel, synchronous belt and belt gripping block, and toothed belt transmission component 57 connects
It connects on platform sling 54, the 5th motor 55 is by 57 connecting detection camera 58 of toothed belt transmission component, by the rotation of the 5th motor 55
Output is changed into the movement of detection camera 58；Detection camera 58 is in the top of wafer in circular magnetic chuck 411.
Label detection device 5 at work, detection camera 58 be in the top of wafer mounting apparatus 4, and detecting camera 58 can be with
Cover all positions of wafer；Platform sling 54 is driven by the 4th motor 52 and is rotated；Detection camera 58 is driven by the 5th motor 55, edge
Second mobile 56 guide rail direction of mould group is mobile, the full scope of wafer can be covered, by detection camera 58 to the labeling shape of label
Condition carries out photograph detection.The movement of labeling detection device 5 is formed by rotating and moving, and wherein moving track is the radius of rotation,
When rotation axis and the wafer center of circle are located on same axis, camera can cover the area of whole wafer；Compared to two degrees of freedom
Mobile mechanism, it is simple and compact for structure, convenient for control.
As shown in figure 11, wafer board migration device 6 include the 6th motor 61, lead screw transmission component 62, the mobile mould group 63 of third,
Cantilevered leg 64 and wafer gripping body 65；6th motor 61 is fixedly mounted in rack 7 by the 6th motor fixing seat 66, and the 6th
61 output shaft of motor is connected with the lead screw of lead screw transmission component 62；Lead screw transmission component 62 and the mobile mould group 63 of third are put down side by side
Row is mounted in rack 7, and cantilevered leg 64 is connected on lead screw transmission component 62 and the mobile mould group 63 of third；For clamp wafer and
The wafer gripping body 65 for compressing label is mounted in cantilevered leg 64.
Wafer board migration device 6 drives lead screw transmission component 62 to work at work, by the 6th motor 61, so that cantilevered leg 64
Mould group 63 is moved along third to move；Wafer is clamped by wafer gripping body 65, by wafer movement to be processed after clamping
It waits and labelling to right end, or right end processing finished product is transported in left end wafer charging/discharging device 2, the track of movement is two wafers
Track composed by clamp bar 421.Wafer board migration device 6 not only can further clamp label and wafer, can also drive wafer
Move back and forth, realizes the power drive of feeding and blanking.
Wafer gripping body 65 include connection sheet metal component 651, third cylinder 652, finger cylinder 653, upper grip 654, under
Collet 655, anti-dazzling screen 656 and infrared sensor 657；It connects sheet metal component 651 to be arranged in cantilevered leg 64, connects sheet metal component 651
It is in U-shape, third cylinder 652 is mounted in connection 651 left risers of sheet metal component, and infrared sensor 657 is mounted on connection sheet metal component 651
In right risers.Finger cylinder 653 is horizontally arranged in the moving portion of third cylinder 652, and upper grip 654 is mounted on finger cylinder
On 653 upper mobile terminal, lower collet 655 is mounted on the bottom end of finger cylinder 653；Anti-dazzling screen 656 is mounted on finger cylinder 653
On, 656 position of anti-dazzling screen aligns with infrared sensor 657, and 656 position of anti-dazzling screen and infrared sensor 657 are for controlling the
The collapsing length of three cylinders 652.
Wafer gripping body 65 drives the downward collet 655 of upper grip 654 close at work, by finger cylinder 653, thus
Clamp the wafer being disposed therein；If being pasted with label on wafer, pass through third after upper grip 654 and the clamping of lower collet 655
Cylinder 652 is flexible, label is pressed on wafer, movement is to wafer charging/discharging device 2 again after compression, when wafer charging/discharging device
Wafer in 2 all processes rear manual handling and goes out.
When work, label roll is realized by circulation circulation by label charging/discharging device 1, by ink jet printer 16 by bar code
It prints in blank tag, label moves label apparatus 3 by label in the discharge port of ink jet printer 16 and removed.Wafer movement dress
6 are set by be transported to wafer mounting apparatus 4 medium to be added for unprocessed wafer in wafer feeding rack 28 in wafer charging/discharging device 2
Work, label move label apparatus 3 and paste the label after removing on the wafer in wafer mounting apparatus 4, by labelling detection device 5
Detection confirmation, then the wafer movement that labeling is completed is completed to collect into wafer charging/discharging device 2 by wafer board migration device 6.
Claims (4)
1. wafer charging/discharging device, it is characterised in that including lifting support (21), first movement line rail assembly (22), the first lead screw
Nut seat (23), the first vertical bearing (24), the first lead screw (25), synchronous pulley (26), the second motor (27), wafer feeding rack
(28) and clamping component (29) are adjusted；First movement line rail assembly (22) includes the sliding rail and slide connected by prismatic pair；The
One feed screw nut seat (23) and the first lead screw (25) form screw pair and are cooperatively connected, the first feed screw nut seat (23) and lifting
Support (21) is fixedly connected；Two synchronous pulleys (26) are separately mounted to the first lead screw (25) and the second motor (27) output end
On；Wafer feeding rack (28) is the square box shaped of rear and front end perforation, is provided on the inner wall of wafer feeding rack (28) left and right for dividing
Layer places multiple horizontal grooves (281) of wafer, and multiple horizontal grooves are equidistant regularly arranged up and down；Adjust clamping component (29) peace
On lifting support (21), wafer feeding rack (28) is connected on lifting support (21) by adjusting clamping component (29)；
Adjusting clamping component (29) includes the second lead screw (291), clamping plate (292), the second feed screw nut (293) and adjusting knob
(294)；Second lead screw (291) is mounted on lifting support (21) by the second vertical bearing (295), the second lead screw (291) two
Lateral filament bar is oppositely oriented；Adjusting knob (294) is fixedly mounted on the second lead screw (291) one end；Second feed screw nut (293) is corresponding
It is cooperatively connected on the second lead screw (291), the second feed screw nut (293) is fixedly connected with clamping plate (292), and clamping plate (292) is located at
In the slot of lifting support (21), section is used to clamp wafer feeding rack (28) anyhow for clamping plate (292) upper end.
2. integrated circuit wafer labeling apparatus, it is characterised in that label charging/discharging device including rack (7) and thereon
(1), label moves label apparatus (3), wafer mounting apparatus (4), labeling detection device (5), wafer board migration device (6) and claim
Wafer charging/discharging device (2) described in 1；Lifting support (21) is connected on rack (7) by first movement line rail assembly (22),
First lead screw (25) is connected on rack (7) by the first vertical bearing (24), and the second motor (27) is installed by the second motor
Seat (210) is mounted on rack (7).
3. integrated circuit according to claim 2 wafer labeling apparatus, it is characterised in that label charging/discharging device (1)
For the charging of blank tag, the recycling of the coding of label and waste paper；Wafer charging/discharging device (2) is for realizing crystalline substance to be labelled
The blanking of round feeding and processing finished product；Label moves label apparatus (3) and is used to draw the label in wafer charging/discharging device (2), and
It is affixed on the wafer in wafer mounting apparatus (4)；Wafer mounting apparatus (4) is for fixing wafer to be processed；Labeling
Detection device (5) is used to detect the labeling situation of wafer；Wafer board migration device (6) is used for the movement of wafer to be processed to crystalline substance
Complete feeding in circle fixed device (4), and by the processing finished product movement in wafer mounting apparatus (4) to wafer charging/discharging device
(2) blanking is completed in.
4. integrated circuit according to claim 2 wafer labeling apparatus, it is characterised in that wafer board migration device (6) packet
Include the 6th motor (61), lead screw transmission component (62), third mobile mould group (63), cantilevered leg (64) and wafer gripping body
(65)；6th motor (61) is fixedly mounted on rack (7) by the 6th motor fixing seat (66), the 6th motor (61) output shaft
It is connected with the lead screw of lead screw transmission component (62)；Lead screw transmission component (62) and mobile mould group (63) the side by side parallel installation of third
On rack (7), cantilevered leg (64) is connected on lead screw transmission component (62) and third mobile mould group (63)；For clamping wafer
It is mounted on cantilevered leg (64) with the wafer gripping body (65) for compressing label；Wafer gripping body (65) includes connection sheet metal component
(651), third cylinder (652), finger cylinder (653), upper grip (654), lower collet (655), anti-dazzling screen (656) and infrared biography
Sensor (657)；It connects sheet metal component (651) to be arranged on cantilevered leg (64), connection sheet metal component (651) is in U-shape, third cylinder
(652) it is mounted in connection sheet metal component (651) left risers, infrared sensor (657) is mounted on connection sheet metal component (651) right risers
On；Finger cylinder (653) is horizontally arranged in the moving portion of third cylinder (652), and upper grip (654) is mounted on finger cylinder
(653) on upper mobile terminal, lower collet (655) is mounted on the bottom end of finger cylinder (653)；Anti-dazzling screen (656) is mounted on finger
On cylinder (653), anti-dazzling screen (656) position aligns with infrared sensor (657).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811017955.2A CN109192688A (en) | 2018-09-03 | 2018-09-03 | Wafer charging/discharging device and integrated circuit wafer labeling apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811017955.2A CN109192688A (en) | 2018-09-03 | 2018-09-03 | Wafer charging/discharging device and integrated circuit wafer labeling apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109192688A true CN109192688A (en) | 2019-01-11 |
Family
ID=64917779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811017955.2A Withdrawn CN109192688A (en) | 2018-09-03 | 2018-09-03 | Wafer charging/discharging device and integrated circuit wafer labeling apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109192688A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109712919A (en) * | 2019-02-15 | 2019-05-03 | 山东才聚电子科技有限公司 | A kind of device for wafer filling glass powder |
| CN112678293A (en) * | 2020-12-28 | 2021-04-20 | 深圳格芯集成电路装备有限公司 | Wafer disc labeling equipment and method |
| CN115384847A (en) * | 2022-08-27 | 2022-11-25 | 郑州轨道交通信息技术研究院 | Loading and unloading device and method of automatic wafer film sticking machine |
-
2018
- 2018-09-03 CN CN201811017955.2A patent/CN109192688A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109712919A (en) * | 2019-02-15 | 2019-05-03 | 山东才聚电子科技有限公司 | A kind of device for wafer filling glass powder |
| CN109712919B (en) * | 2019-02-15 | 2024-05-28 | 山东才聚电子科技有限公司 | Device for filling glass powder for wafer |
| CN112678293A (en) * | 2020-12-28 | 2021-04-20 | 深圳格芯集成电路装备有限公司 | Wafer disc labeling equipment and method |
| CN115384847A (en) * | 2022-08-27 | 2022-11-25 | 郑州轨道交通信息技术研究院 | Loading and unloading device and method of automatic wafer film sticking machine |
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| PB01 | Publication | ||
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Application publication date: 20190111 |