CN216335182U - Sapphire wafer micro device is with removing structure - Google Patents
Sapphire wafer micro device is with removing structure Download PDFInfo
- Publication number
- CN216335182U CN216335182U CN202122564673.8U CN202122564673U CN216335182U CN 216335182 U CN216335182 U CN 216335182U CN 202122564673 U CN202122564673 U CN 202122564673U CN 216335182 U CN216335182 U CN 216335182U
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- Prior art keywords
- fixedly connected
- adjusting
- wafer
- sapphire wafer
- limiting
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- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 23
- 239000010980 sapphire Substances 0.000 title claims abstract description 23
- 230000001105 regulatory effect Effects 0.000 claims abstract description 9
- 241000252254 Catostomidae Species 0.000 claims description 6
- 230000029058 respiratory gaseous exchange Effects 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 230000001360 synchronised effect Effects 0.000 abstract description 3
- 230000007257 malfunction Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 45
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
The utility model relates to a moving structure for a sapphire wafer micro device, which comprises a fixed case, wherein the top of the fixed case is fixedly connected with a support frame, one side of the support frame is fixedly connected with a micro device, one side of the support frame is fixedly connected with a controller, and the top of the fixed case is fixedly connected with a fixed sleeve; when observing the wafer, by the drive of adjusting motor, can make spacing carousel drive the regulating plate and rotate the regulation carousel, and then be convenient for rotate the activity fishplate bar, and equipment only rotates ninety degrees at every turn, ensure that the wafer of transferring at every turn is under the micro device, do benefit to going on of observation work, furthermore, after the equipment is adjusted, spacing carousel still can carry on spacingly to the regulation carousel, it is synchronous, the wafer moves the in-process of getting, it places and can fix under the effect of spacing sucking disc, can effectively avoid appearing causing the wafer skew because of staff's malfunction and influence the going on of observation work, the effectual accuracy of surveing of having guaranteed.
Description
Technical Field
The utility model relates to a moving structure for a sapphire wafer micro device, belonging to the technical field of wafer production.
Background
The wafer is one of the main raw materials of the LED, is the luminous component of the LED, the most core part of the LED, the quality of the wafer directly determines the performance of the LED, the wafer is composed of III and V group compound semiconductor substances, when the LED is packaged, the wafer materials are arranged on a wafer film in order, and when a sapphire wafer is produced, a microscopic device is needed to observe and inspect the sapphire wafer, so that the unqualified product caused by the defect of the wafer is prevented.
When observing the inspection to the sapphire wafer, mostly the manual work is moved and is got the wafer, and the manual work is moved and is got the error of placing that can cause the wafer great, often appears the wafer position too skew, can seriously influence the going on of observing inspection work, has seriously influenced the efficiency of work, is unfavorable for people to use, so need a sapphire wafer micro device with moving get the structure to in supply people to use.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a moving structure for a sapphire wafer micro device, when a wafer is observed, a limiting turntable can drive an adjusting plate to rotate the adjusting turntable by the driving of an adjusting motor, so that a movable connecting plate can be conveniently rotated, equipment only rotates ninety degrees every time, the wafer transferred every time is ensured to be positioned under the micro device, the observation work is favorably carried out, after the equipment is adjusted, the limiting turntable can limit the adjusting turntable, the adjusting turntable is synchronous, the placement of the wafer can be fixed under the action of a limiting sucker in the moving process of the wafer, the phenomenon that the wafer is shifted due to misoperation of workers to influence the observation work can be effectively avoided, the observation accuracy is effectively ensured, and the problems in the background technology are solved.
In order to achieve the purpose, the utility model provides the following technical scheme:
the utility model provides a sapphire wafer micro device is with moving structure of getting, includes fixed quick-witted case, the top fixedly connected with support frame of fixed quick-witted case, one side fixedly connected with micro device of support frame, one side fixedly connected with controller of support frame, the top fixedly connected with fixed sleeve of fixed quick-witted case, the outside of fixed sleeve is equipped with movable fishplate bar, the mounting groove has been seted up to the inboard of activity fishplate bar, the inboard of activity fishplate bar has been seted up and has been connected the spout, the mounting groove has been seted up to fixed sleeve's one end inboard, the inboard fixedly connected with vacuum aspirator pump of bottom face of fixed quick-witted case, one side intercommunication of vacuum aspirator pump has the breathing pipe.
Furthermore, the movable connecting plate is rotatably connected to the fixed sleeve, the position of the placing groove is matched with the position of the mounting groove, and a limiting sucker is arranged inside the mounting groove.
Furthermore, the limiting sucker is communicated with the air suction pipe through a connecting pipe, and the limiting sucker is fixedly connected with an electromagnetic valve through the connecting pipe.
Furthermore, the inner side of the bottom end face of the fixed case is rotatably connected with a connecting shaft, the other end of the connecting shaft is fixedly connected with the movable connecting plate, the outer side of the connecting shaft is fixedly connected with an adjusting turntable, and an adjusting sliding groove is formed in the inner side of the adjusting turntable.
Furthermore, the inner side of the bottom end face of the fixed case is fixedly connected with an adjusting motor, a main shaft of the adjusting motor is fixedly connected with a limiting turntable through a coupler, and the bottom of the limiting turntable is fixedly connected with an adjusting plate.
Further, the other end top of regulating plate is equipped with adjusts protrudingly, just the regulating plate is located the below of adjusting the carousel, just the regulating plate is through adjusting protruding sliding connection in adjusting the spout.
Furthermore, one side of adjusting the carousel all is the arc setting with one side of spacing carousel, just spacing carousel sliding connection is in adjusting the carousel.
Furthermore, the number of the limiting suckers and the number of the mounting grooves are four, and the limiting suckers and the mounting grooves are distributed in an annular array.
The utility model has the beneficial effects that:
through the arrangement of the movable joint plate, the limiting sucker, the adjusting turntable, the limiting turntable and the like, when wafers are observed, the limiting turntable can drive the adjusting plate to rotate the adjusting turntable by the driving of the adjusting motor, so that the movable joint plate is convenient to rotate, the equipment only rotates ninety degrees every time, the wafers transferred every time are ensured to be positioned under a microscopic device, the observation work is facilitated, moreover, after the equipment is adjusted, the limiting turntable can limit the adjusting turntable, the equipment is synchronous, the placement of the equipment can be fixed under the action of the limiting sucker in the wafer transferring process, the phenomenon that the wafer is shifted due to misoperation of workers to influence the observation work can be effectively avoided, the observation accuracy is effectively ensured, and in conclusion, when the equipment is used, the adjustment is simple and convenient, the work efficiency is greatly improved, and the wafer position inaccuracy caused by the workers when transferring the wafers is prevented, the influence on the observation result of the wafer is reduced, and the method is beneficial to people to use.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model without limiting the utility model.
FIG. 1 is a schematic view showing the overall structure of a removing structure for a sapphire wafer microdevice according to the present invention;
FIG. 2 is a schematic view showing the structure of the placement groove of the removing structure for a sapphire wafer microdevice according to the present invention;
FIG. 3 is a rear view of FIG. 2 of a removal structure for a sapphire wafer microdevice of the present invention;
FIG. 4 is a schematic view showing the mounting structure of an adjusting plate of a removing structure for a sapphire wafer microdevice according to the present invention;
reference numbers in the figures: 1. fixing the case; 2. a support frame; 3. a microscopic means; 4. a controller; 5. fixing the sleeve; 6. movably connecting a plate; 7. a placing groove; 8. connecting the sliding chute; 9. mounting grooves; 10. a vacuum getter pump; 11. an air intake duct; 12. a limiting sucker; 13. an electromagnetic valve; 14. a connecting shaft; 15. adjusting the turntable; 16. adjusting the sliding chute; 17. adjusting the motor; 18. a limiting turntable; 19. an adjusting plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In embodiment 1, please refer to fig. 1 to 4, the present invention provides a technical solution:
the utility model provides a sapphire wafer micro device is with moving structure of getting, including fixed machine case 1, fixed machine case 1's top fixedly connected with support frame 2, one side fixedly connected with micro device 3 of support frame 2, one side fixedly connected with controller 4 of support frame 2, fixed machine case 1's top fixedly connected with fixed sleeve 5, fixed sleeve 5's the outside is equipped with movable fishplate bar 6, mounting groove 7 has been seted up to movable fishplate bar 6's inboard, connection spout 8 has been seted up to movable fishplate bar 6's inboard, mounting groove 9 has been seted up to fixed sleeve 5's one end inboard, the inboard fixedly connected with vacuum aspirator pump 10 of fixed machine case 1's bottom face, one side intercommunication of vacuum aspirator pump 10 has breathing pipe 11.
As a preferred technical scheme of the utility model, the inner side of the bottom end surface of the fixed case 1 is rotatably connected with a connecting shaft 14, the other end of the connecting shaft 14 is fixedly connected with the movable connecting plate 6, the outer side of the connecting shaft 14 is fixedly connected with an adjusting turntable 15, and the inner side of the adjusting turntable 15 is provided with an adjusting chute 16; the movable connecting plate 6 can be conveniently rotated by the rotation of the adjusting turntable 15, and the wafers can be conveniently moved.
As a preferred technical scheme of the utility model, the inner side of the bottom end surface of the fixed case 1 is fixedly connected with an adjusting motor 17, a main shaft of the adjusting motor 17 is fixedly connected with a limiting turntable 18 through a coupler, and the bottom of the limiting turntable 18 is fixedly connected with an adjusting plate 19; after the limiting turntable 18 is driven by the motor to rotate, the adjusting turntable 15 is rotated by the operation of the adjusting plate 19, so that the moving operation is facilitated.
As a preferred technical scheme of the present invention, an adjusting protrusion is disposed at the top of the other end of the adjusting plate 19, the adjusting plate 19 is located below the adjusting turntable 15, and the adjusting plate 19 is slidably connected to the adjusting chute 16 through the adjusting protrusion; the use of the adjusting equipment is convenient.
As a preferred technical scheme of the utility model, one side of the adjusting turntable 15 and one side of the limiting turntable 18 are both arranged in an arc shape, and the limiting turntable 18 is connected to the adjusting turntable 15 in a sliding manner; the stability of the equipment after being adjusted is ensured, the equipment is prevented from rotating, and the phenomenon that the wafer is deviated due to the misoperation of workers to influence the observation work is avoided.
As a preferred technical scheme of the utility model, the number of the limiting suckers 12 and the number of the mounting grooves 7 are four, and the limiting suckers 12 and the mounting grooves 7 are distributed in an annular array; the wafer is conveniently limited and fixed by the sucker, and observation is facilitated.
the movable connecting plate 6 is rotatably connected to the fixed sleeve 5, the position of the mounting groove 7 is matched with that of the mounting groove 9, a limiting sucker 12 is arranged inside the mounting groove 9, the limiting sucker 12 is communicated with the air suction pipe 11 through a connecting pipe, and the limiting sucker 12 is fixedly connected with an electromagnetic valve 13 through a connecting pipe; the wafer is more firmly placed, the wafer is prevented from deviating due to misoperation of workers, the wafer can be taken out after the follow-up air leakage of the valve, and the use is more convenient.
The working principle of the utility model is as follows: when observing the wafer, place a plurality of wafers in mounting groove 7 after, use through vacuum aspirator pump 10 cooperation breathing pipe 11, can adsorb it fixedly by spacing sucking disc 12, afterwards by adjusting motor 17's drive, can make spacing carousel 18 drive regulating plate 19, adjust protruding in adjusting spout 16 through regulating plate 19 one side and slide, rotatable regulation carousel 15, and then be convenient for rotate movable fishplate bar 6, and equipment only rotates ninety degrees at every turn, ensure that the wafer of transferring at every turn is under the micro device, do benefit to going on of observation work, observe the back, can be breathed in by solenoid valve 13 and take out the wafer after, it is comparatively convenient to use.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (8)
1. The utility model provides a sapphire wafer micro device is with removing structure, includes fixed quick-witted case (1), its characterized in that: the top fixedly connected with support frame (2) of fixed quick-witted case (1), one side fixedly connected with micro device (3) of support frame (2), one side fixedly connected with controller (4) of support frame (2), top fixedly connected with fixed sleeve (5) of fixed quick-witted case (1), the outside of fixed sleeve (5) is equipped with movable fishplate bar (6), mounting groove (7) have been seted up to the inboard of movable fishplate bar (6), connecting chute (8) have been seted up to the inboard of movable fishplate bar (6), mounting groove (9) have been seted up to the one end inboard of fixed sleeve (5), the inboard fixedly connected with vacuum aspiration pump (10) of bottom face of fixed quick-witted case (1), one side intercommunication of vacuum aspiration pump (10) has breathing pipe (11).
2. A removing structure for a sapphire wafer microdevice as claimed in claim 1, wherein: the movable connecting plate (6) is rotatably connected to the fixed sleeve (5), the position of the mounting groove (7) is matched with the position of the mounting groove (9), and a limiting sucker (12) is arranged inside the mounting groove (9).
3. A removing structure for a sapphire wafer microdevice as claimed in claim 2, wherein: the limiting sucker (12) is communicated with the air suction pipe (11) through a connecting pipe, and the limiting sucker (12) is fixedly connected with an electromagnetic valve (13) through the connecting pipe.
4. A removing structure for a sapphire wafer microdevice as claimed in claim 1, wherein: the inner side of the bottom end face of the fixed case (1) is rotatably connected with a connecting shaft (14), the other end of the connecting shaft (14) is fixedly connected with the movable connecting plate (6), the outer side of the connecting shaft (14) is fixedly connected with an adjusting turntable (15), and an adjusting sliding groove (16) is formed in the inner side of the adjusting turntable (15).
5. A removing structure for a sapphire wafer microdevice as set forth in claim 4, wherein: the bottom end face inner side of the fixed case (1) is fixedly connected with an adjusting motor (17), a main shaft of the adjusting motor (17) is fixedly connected with a limiting turntable (18) through a coupler, and the bottom of the limiting turntable (18) is fixedly connected with an adjusting plate (19).
6. A removing structure for a sapphire wafer microdevice as claimed in claim 5, wherein: the other end top of regulating plate (19) is equipped with adjusts protrudingly, just regulating plate (19) are located the below of adjusting carousel (15), just regulating plate (19) are through adjusting protruding sliding connection in adjusting spout (16).
7. The removing structure for a sapphire wafer microdevice as set forth in claim 6, wherein: one side of adjusting carousel (15) and one side of spacing carousel (18) all are the arc setting, just spacing carousel (18) sliding connection is in adjusting carousel (15).
8. A removing structure for a sapphire wafer microdevice as claimed in claim 2, wherein: the number of the limiting suckers (12) and the number of the mounting grooves (7) are four, and the limiting suckers (12) and the mounting grooves (7) are distributed in an annular array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122564673.8U CN216335182U (en) | 2021-10-25 | 2021-10-25 | Sapphire wafer micro device is with removing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122564673.8U CN216335182U (en) | 2021-10-25 | 2021-10-25 | Sapphire wafer micro device is with removing structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216335182U true CN216335182U (en) | 2022-04-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122564673.8U Expired - Fee Related CN216335182U (en) | 2021-10-25 | 2021-10-25 | Sapphire wafer micro device is with removing structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216335182U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115097700A (en) * | 2022-07-06 | 2022-09-23 | 江苏晶杰光电科技有限公司 | Wafer sucker structure for photoetching machine |
-
2021
- 2021-10-25 CN CN202122564673.8U patent/CN216335182U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115097700A (en) * | 2022-07-06 | 2022-09-23 | 江苏晶杰光电科技有限公司 | Wafer sucker structure for photoetching machine |
| CN115097700B (en) * | 2022-07-06 | 2023-10-10 | 江苏晶杰光电科技有限公司 | Wafer sucking disc structure for photoetching machine |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220419 |
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| CF01 | Termination of patent right due to non-payment of annual fee |