CN214588793U - High-precision micro-variable-interval sucker device - Google Patents
High-precision micro-variable-interval sucker device Download PDFInfo
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- CN214588793U CN214588793U CN202120648884.7U CN202120648884U CN214588793U CN 214588793 U CN214588793 U CN 214588793U CN 202120648884 U CN202120648884 U CN 202120648884U CN 214588793 U CN214588793 U CN 214588793U
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Abstract
The utility model belongs to the technical field of photovoltaic device, a high accuracy becomes interval sucking disc device a little is disclosed. The variable-pitch sucker mechanism is arranged on the support mechanism, the vacuum mechanism is connected above the variable-pitch sucker mechanism, and one side of the variable-pitch sucker mechanism is connected with the driving mechanism; carry the silicon chip from the flower basket for the circulation to the basket of flowers in-process for the work, through the interval that changes the sucking disc, realize carrying out accurate little variable interval operation to the silicon chip.
Description
Technical Field
The utility model belongs to the technical field of photovoltaic device, the utility model relates to a high accuracy becomes interval sucking disc device a little.
Background
In the field of automation for the photovoltaic industry, the automation requirement of absorption and transportation of silicon wafers exists, the thickness of the current mainstream 210mm large silicon wafer is less than 0.2mm, the distance between two wafers in the flower basket for circulation among all the processes is about 5mm, the wafer distance of the working flower basket used in each process can have certain change according to the requirements of yield and process, and the spacing is rearranged by using a wafer guide machine usually. But this goal can be achieved more quickly and accurately by the variable pitch mechanism. At present, some variable-pitch material sucking structures exist, the working mode and the principle of the variable-pitch material sucking structures are difficult to simultaneously meet the technical requirements of ultra-thin and ultra-large suckers (the thickness of a single wafer is less than 5mm, the number of the single wafers is more than or equal to 50), accurate positioning (+/-0.1 mm) and micro variable pitch (less than 0.7mm) in the operation of automatically carrying silicon wafers:
the utility model provides a variable interval inhales material device, publication no: CN111890399AA, the positioning accuracy and the bearing capacity are insufficient by using the horizontal component of the vertical force through the slotted hole.
A variable-pitch multi-suction-nozzle suction head is disclosed in the specification: CN111071790A, easy over-positioning during ejection and limited maximum number of suction cups.
Variable interval's sucking disc frock, the publication number: CN209999225U, difficult realization when the connecting rod structure sucking disc is too thin, positioning accuracy is difficult to guarantee after the connecting rod warp.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, make this kind of mechanism that becomes interval working method can replace guide piece machine mechanism at the in-process that the automatic silicon chip of absorbing of photovoltaic, the utility model provides a high accuracy becomes interval sucking disc device a little carries the work with the basket of flowers in-process with the silicon chip from the circulation, through the interval that changes the sucking disc, realizes carrying out accurate little variable interval operation to the silicon chip.
The above object of the present invention is achieved by the following technical solutions:
a high-precision micro-variable-pitch sucker device comprises a variable-pitch sucker mechanism, a driving mechanism, a vacuum mechanism and a support mechanism, wherein the variable-pitch sucker mechanism is arranged on the support mechanism, the vacuum mechanism is connected above the variable-pitch sucker mechanism, and one side of the variable-pitch sucker mechanism is connected with the driving mechanism;
the support mechanism comprises a substrate and a side supporting plate; the side supporting plates are arranged below the substrate and fixedly connected with the substrate; the left side and the right side of the substrate are respectively provided with a strip along the long edge of the substrate; the strip is used for arranging the trachea;
the variable-spacing sucker mechanism comprises a sliding positioning plate group, a plurality of guide shafts and a guide shaft back plate; the sliding positioning plate group comprises a plurality of sliding positioning plates; two ends of the guide shaft are respectively provided with a fixed block A and a fixed block B in a penetrating way; fixing the fixing block A and the fixing block B at two ends of the guide shaft through a guide shaft back plate and a screw respectively; the side surfaces of the fixed block A and the fixed block B are respectively connected to the side supporting plates; the sliding positioning plates penetrate through the guide shaft and are arranged between the fixing block A and the fixing block B; the fixed block A is connected with a driving mechanism; the sliding positioning plate adjacent to the fixed block A is the sliding positioning plate at the outermost side of the free end; the sliding positioning plate on the outermost side of the free end is fixedly connected with the fixing block A; the bottom of each sliding positioning plate is provided with a ceramic sucker, and the gas path of the sliding positioning plate is communicated with the gas cavity of the ceramic sucker; the sliding positioning plate can freely slide on the guide shaft;
the upper end and the lower end of each of the two sides of the sliding positioning plate group are respectively connected with a plurality of positioning blocks A, and the middle ends of the two sides of the sliding positioning plate group are respectively connected with a plurality of positioning blocks B; the upper ends and the lower ends of the two sides of one end, close to the driving mechanism, of the sliding positioning plate group are respectively connected with positioning blocks C;
the plurality of sliding positioning plates specifically comprise a plurality of sliding positioning plates A, a plurality of sliding positioning plates B and a plurality of sliding positioning plates C; the sliding positioning plate sequentially penetrates through the guide shaft according to the sliding positioning plate C, the sliding positioning plate A, the sliding positioning plate C and the sliding positioning plate B and can freely slide on the guide shaft;
and a groove is formed in the positioning block B and is used for being connected with the side surface of the sliding positioning plate which is connected with the sliding positioning plate C according to the sequence of the sliding positioning plate C and the sliding positioning plate B. The positioning block A is internally provided with a groove for connecting with the side surface of the sliding positioning plate which is sequentially connected with the sliding positioning plate C, the sliding positioning plate A and the sliding positioning plate C.
A groove is formed in the positioning block C and used for positioning the free end sliding positioning plate; the width of the groove is larger than that of the sliding positioning plate.
The vacuum mechanism comprises a vacuum air cavity and a vacuum generator; the vacuum air cavity is arranged on the substrate, and the side surface of the vacuum air cavity is connected with the vacuum generator; the vacuum generator is arranged on a vacuum generator bracket which is fixedly arranged on the side surface of the substrate, and the vacuum generator is also provided with a silencer; the side surface of the vacuum air cavity is connected with a quick connector B and a quick connector C; the other side of the quick plug C is connected with a vacuum port of a vacuum generator, and the bottom of the quick plug B is connected with a quick plug D; the quick connector D is arranged above the sliding positioning plate and is communicated with the air cavity of the ceramic sucker through the air passage of the sliding positioning plate;
furthermore, the diameters of the interfaces of the quick connector B and the quick connector C are different; the quick connector B is provided with a plurality of quick connectors, and the number of the quick connectors C is two. The quick connector C is used for vacuumizing the vacuum air cavity.
Furthermore, two vacuum generators are arranged and are fixedly connected through a quick connector A, air is uniformly fed through the quick connector A, and air is discharged through the silencer.
The driving mechanism comprises an air cylinder, a floating joint and an air cylinder connecting block, wherein the air cylinder is arranged on an air cylinder support, and the air cylinder support is connected and arranged on one side of the fixing block A; the cylinder is provided with a speed regulating valve for regulating the telescopic speed of the cylinder, the front end of the cylinder is connected with a cylinder connecting block through a floating joint, and the cylinder connecting block is connected with a sliding positioning plate on the outermost side of the free end through a screw; thereby the cylinder can drive the variable-interval sucker mechanism to stretch;
further, the cylinder is a thin cylinder. The speed regulating valve is provided with 2.
Further, the support mechanism comprises a substrate and two side support plates, wherein the two sides of the bottom surface of the substrate are respectively and fixedly connected with the side support plates, the top surface of the substrate is provided with a circle of sealing ring grooves, and the circle of sealing ring grooves are used for sealing by using a sealing ring when the substrate is connected with the vacuum air cavity; the left side and the right side of the substrate are respectively provided with a strip along the long edge of the substrate; the strip is used for arranging an air pipe, and the strip is particularly used for arranging the air pipe connected between a plurality of quick-plug connectors B arranged on the upper side surface of the vacuum air cavity and a quick-plug connector D arranged above the sliding positioning plate.
The two sides of the sliding positioning plate A are of concave structures, and the convex blocks at the upper end and the lower end of the sliding positioning plate A are respectively connected with the grooves of the positioning block A; the convex blocks at the upper end and the lower end of the positioning block A can be movably connected in a translation way in the groove of the positioning block A, so that the positioning is called double positioning; the sliding positioning plate B is of a convex structure, the middle of the sliding positioning plate B is convex, the upper end and the lower end of the sliding positioning plate B are concave, the middle convex block of the sliding positioning plate B is connected with the groove of the positioning block B, and only the middle convex part of the sliding positioning plate B can be movably connected in the groove of the positioning block B in a translation mode, so that the sliding positioning plate B is called single positioning; the two side edges of the sliding positioning plate C are of a rectangular structure, the height of the side surfaces of the two sides of the sliding positioning plate C is smaller than that of the convex blocks of the side surfaces of the two sides of the sliding positioning plate B, and the height of the side surfaces of the two sides of the sliding positioning plate C is larger than that of the concave parts of the side surfaces of the two sides of the sliding positioning plate B; the height of the side surfaces at two sides of the sliding positioning plate C is less than that of the convex blocks at the side surfaces at two sides of the sliding positioning plate A, and the height of the side surfaces at two sides of the sliding positioning plate C is greater than that of the concave parts at the side surfaces at two sides of the sliding positioning plate A;
the length of the convex blocks at the upper end and the lower end of the sliding positioning plate A is equal to that of the concave parts at the upper end and the lower end of the sliding positioning plate B;
furthermore, three grooves are formed in the positioning block A, the depth of the middle groove is greater than that of the grooves in the two sides, the depths of the grooves in the two sides are the same, the middle groove of the positioning block A is connected with the protruding block of the sliding positioning plate A, and the grooves in the two sides of the positioning block A are used for being connected with the two sliding positioning plates C; and the width of each groove is larger than that of the corresponding sliding positioning plate. The depth of the middle groove is greater than that of the grooves on the two sides, the depths of the grooves on the two sides are the same, the middle groove of the positioning block B is connected with the protruding block of the sliding positioning plate B, and the grooves on the two sides of the positioning block B are used for being connected with the two sliding positioning plates C; and the width of each groove is larger than that of the corresponding sliding positioning plate.
And a groove is formed at the lower end of each sliding positioning plate and is used for being connected with the ceramic sucker.
Compared with the prior art, the utility model beneficial effect be:
because the mechanism of the sheet guide machine can be replaced, the utility model can reduce the size of the related automatic equipment; moreover, the utility model can quickly and accurately complete the function of variable spacing and effectively improve the productivity; more importantly the utility model discloses can avoid silicon chip and belt contact, can eliminate the belt seal of silicon chip completely, greatly promote the yield of silicon chip.
Drawings
Fig. 1 is a schematic view of a high-precision micro-variable-pitch suction cup device according to embodiment 1 of the present invention.
Fig. 2 is a partial schematic view of the device of fig. 1 in a compressed state.
Fig. 3 is a partial schematic view of the device of fig. 1 in a stretched state.
Fig. 4 is a schematic diagram of the embodiment 1 of the present invention, in which a portion of the fixing block is removed when the high-precision micro-variable-pitch sucking disc device is in a compressed state.
Fig. 5 is a schematic diagram of the high-precision micro-variable-pitch suction cup device according to embodiment 1 of the present invention for removing part of the fixing block in a stretching state.
Fig. 6 is a partial schematic view of fig. 4.
Fig. 7 is a partial schematic view of fig. 5.
Fig. 8 is a structural view of the slide positioning plate B.
Fig. 9 is a structural view of the slide positioning plate a.
Fig. 10 is a structural view of the slide positioning plate C.
In the figure: 101. the vacuum chuck comprises fixing blocks A, 102, fixing blocks B, 103, guide shafts, 104, guide shaft back plates, 105, sliding positioning plates A, 106, sliding positioning plates B, 107, sliding positioning plates C, 108, positioning blocks B, 109, positioning blocks A, 110, positioning blocks C, 111, a ceramic sucker, 201, a base plate, 202, side supporting plates, 301, an air cylinder support, 302, an air cylinder connecting block, 303, a thin air cylinder, 304, a floating joint, 305, a speed regulating valve, 401, a vacuum air chamber, 402, a vacuum generator support, 403, a vacuum generator, 404, quick connectors A, 405, quick connectors B, 406, quick connectors C, 407, a silencer, 408 and a quick connector D.
Detailed Description
The present invention will be described in detail with reference to the following embodiments, but the scope of the invention is not limited thereto. Unless otherwise stated, the experimental methods adopted by the utility model are all conventional methods, and experimental devices, materials, reagents and the like can be obtained from commercial sources.
Example 1
A high-precision micro-variable-pitch sucker device comprises a variable-pitch sucker mechanism, a driving mechanism, a vacuum mechanism and a support mechanism, wherein the variable-pitch sucker mechanism is arranged on the support mechanism, the vacuum mechanism is connected above the variable-pitch sucker mechanism, and one side of the variable-pitch sucker mechanism is connected with the driving mechanism;
the support mechanism comprises a substrate 201 and a side support plate 202; the side supporting plate 202 is arranged below the substrate 201 and fixedly connected with the substrate; the substrate 201 is provided with a strip along the long side at the left and right sides; the strip is used for arranging the trachea;
the variable-pitch sucker mechanism comprises a sliding positioning plate group, 4 guide shafts 103 and a guide shaft back plate 104; the sliding positioning plate group comprises a plurality of sliding positioning plates; two ends of the guide shaft 103 are respectively provided with a fixed block A101 and a fixed block B102 in a penetrating way; fixing a fixing block A101 and a fixing block B102 at two ends of a guide shaft 103 through a guide shaft back plate 104 and screws respectively; the side surfaces of the fixed block A101 and the fixed block B102 are respectively connected to the side supporting plates 202; the plurality of sliding positioning plates penetrate through the guide shaft 103 and are arranged between the fixing block A101 and the fixing block B102; the fixed block A101 is connected with a driving mechanism; the sliding positioning plate adjacent to the fixed block A101 is the sliding positioning plate at the outermost side of the free end; the sliding positioning plate on the outermost side of the free end is fixedly connected with the fixing block A101; the bottom of each sliding positioning plate is provided with a ceramic sucker 111, and the gas path of the sliding positioning plate is communicated with the gas cavity of the ceramic sucker 111; the sliding positioning plate can slide freely on the guide shaft 103;
the upper end and the lower end of each of two sides of the sliding positioning plate group are respectively connected with a plurality of positioning blocks A109, and the middle ends of two sides of the sliding positioning plate group are respectively connected with a plurality of positioning blocks B108; the upper ends and the lower ends of the two sides of one end, close to the driving mechanism, of the sliding positioning plate group are respectively connected with positioning blocks C110;
the plurality of sliding positioning plates are specifically 50 sliding positioning plates, and comprise a plurality of sliding positioning plates A105, a plurality of sliding positioning plates B106 and a plurality of sliding positioning plates C107; the total of 50 sliding positioning plates pass through the guide shaft 103 and can freely slide according to the grouping sequence of the sliding positioning plate C107 (driven), the sliding positioning plate A105 (double positioning), the sliding positioning plate C107 (driven) and the sliding positioning plate B106 (single positioning), wherein the sliding positioning plate C107 (driven) close to the fixed block B102 is fixed on the fixed block B102; the bottom of the sliding positioning plate is provided with a ceramic sucker 111 which can be communicated with an air cavity of the ceramic sucker 111 through a quick connector D408 at the top of the sliding positioning plate, two sides of the sliding positioning plate A105 (double positioning) and the sliding positioning plate B106 (single positioning) are respectively fixed with a positioning block A109 (short) and a positioning block B108 (long), and only two sides of the sliding positioning plate near the free end of the fixing block B102 are provided with positioning blocks C110 (single side).
The positioning block B108 is internally provided with a groove for connecting with the side surface of the sliding positioning plate which is connected with the sliding positioning plate C107 and the sliding positioning plate B106 in sequence according to the sliding positioning plate C107. The positioning block A109 is internally provided with a groove for connecting with the side surface of the sliding positioning plate which is connected with the sliding positioning plate C107, the sliding positioning plate A105 and the sliding positioning plate C107 in sequence.
A groove is formed in the positioning block C110 and used for positioning the free end sliding positioning plate; the width of the groove is larger than that of the sliding positioning plate.
The vacuum mechanism comprises a vacuum air cavity 401 and a vacuum generator 403; the vacuum air cavity 401 is arranged on the substrate 201, and the side surface of the vacuum air cavity 401 is connected with a vacuum generator 403; the vacuum generator 403 is arranged on a vacuum generator bracket 402, the vacuum generator bracket 402 is fixedly arranged on the side surface of the substrate 201, and the vacuum generator 403 is also provided with a silencer 407; the side surface of the vacuum air cavity 401 is connected with a quick connector B405 and a quick connector C406; the other side of the quick-plug connector C406 is connected with a vacuum port of the vacuum generator 403, and the bottom of the quick-plug connector B405 is connected with a quick-plug connector D408; the quick connector D408 is arranged above the sliding positioning plate, and the quick connector D408 is communicated with the air cavity of the ceramic sucker 111 through the air passage of the sliding positioning plate;
furthermore, the interface diameters of the quick-connection plug B405 and the quick-connection plug C406 are different; the number of the quick-connection plugs B405 is several, and the number of the quick-connection plugs C406 is two. The quick connector C406 is used for vacuumizing the vacuum air chamber.
Further, two vacuum generators 403 are provided, the two vacuum generators 403 are fixedly connected together through a quick connector a 404, and air is uniformly fed through the quick connector a 404 and discharged through a silencer 407.
The driving mechanism comprises an air cylinder, a floating joint 304 and an air cylinder connecting block 302, wherein the air cylinder is arranged on an air cylinder support 301, and the air cylinder support 301 is connected and arranged on one side of the fixing block A101; the cylinder is provided with a speed regulating valve 305 for regulating the expansion speed of the cylinder, the front end of the cylinder is connected with a cylinder connecting block 302 through a floating joint 304, and the cylinder connecting block 302 is connected with a sliding positioning plate on the outermost side of the free end through a screw; thereby the cylinder can drive the variable-interval sucker mechanism to stretch;
further, the cylinder is a thin cylinder 303. The number of the speed control valves 305 is 2.
Further, the support mechanism comprises a substrate 201 and two side support plates 202, the two sides of the bottom surface of the substrate 201 are respectively and fixedly connected with the side support plates 202, the top surface of the substrate 201 is provided with a circle of sealing ring grooves, and the circle of sealing ring grooves are used for sealing when the substrate 201 is connected with the vacuum air cavity 401; the substrate 201 is provided with a strip along the long side at the left and right sides; the strip is used for arranging air pipes, wherein the strip is particularly used for arranging the air pipes connected between a plurality of quick-plug connectors B405 arranged on the upper side of the vacuum air cavity 401 and a quick-plug connector D408 arranged above the sliding positioning plate.
The two sides of the sliding positioning plate A105 are of concave structures, and the convex blocks at the upper end and the lower end of the sliding positioning plate A are respectively connected with the grooves of the positioning block A109; the protruding blocks at the upper end and the lower end of the positioning block A109 can be movably connected in a translation manner in the grooves of the positioning block A109, so that double positioning is realized; the sliding positioning plate B106 is of a convex structure, the middle of the sliding positioning plate B106 is convex, the upper end and the lower end of the sliding positioning plate B are concave, the middle convex block of the sliding positioning plate B106 is connected with the groove of the positioning block B108, and only the middle convex block of the sliding positioning plate B106 is positioned in the groove of the positioning block B108 and can be movably connected in a translation mode, so that the positioning is a single positioning mode; the two side edges of the sliding positioning plate C107 are rectangular, the height of the side surfaces of the two sides of the sliding positioning plate C107 is less than that of the convex blocks on the side surfaces of the two sides of the sliding positioning plate B106, and the height of the side surfaces of the two sides of the sliding positioning plate C107 is greater than that of the concave parts on the side surfaces of the two sides of the sliding positioning plate B106; the height of the side surfaces at the two sides of the sliding positioning plate C107 is less than that of the convex blocks at the side surfaces at the two sides of the sliding positioning plate A105, and the height of the side surfaces at the two sides of the sliding positioning plate C107 is greater than that of the concave parts at the side surfaces at the two sides of the sliding positioning plate A105;
the length of the convex blocks at the upper end and the lower end of the sliding positioning plate A105 is equal to the length of the concave parts at the upper end and the lower end of the sliding positioning plate B106 respectively;
furthermore, three grooves are formed in the positioning block A109, the depth of the middle groove is greater than that of the grooves on the two sides, the depths of the grooves on the two sides are the same, the middle groove of the positioning block A109 is connected with the protruding block of the sliding positioning plate A, and the grooves on the two sides of the positioning block A109 are used for being connected with the two sliding positioning plates C107; and the width of each groove is larger than that of the corresponding sliding positioning plate. Three grooves are formed in the positioning block B108, the depth of the middle groove is greater than that of the grooves on the two sides, the depths of the grooves on the two sides are the same, the middle groove of the positioning block B108 is connected with the protruding block of the sliding positioning plate B106, and the grooves on the two sides of the positioning block B108 are used for being connected with the two sliding positioning plates C107; and the width of each groove is larger than that of the corresponding sliding positioning plate.
The lower end of each sliding positioning plate is provided with a groove for connecting with the ceramic sucker 111.
In the horizontal direction, the length of the sliding locator plate B106 is less than the length of the sliding locator plate C107.
As shown in fig. 2, the positioning blocks a109 (short) on the upper and lower layers are positioned and fixed on the sliding positioning plate a 105 (double positioning) through the groove in the middle, the positioning blocks a109 (short) respectively straddle the sliding positioning plate C107 (driven) at both sides, and the side walls of the positioning blocks a109 (short) are located in the gaps at the upper and lower ends of the sliding positioning plate B106 (single positioning); no interference occurs. Similarly, the positioning block B108 (long) of the middle layer is positioned and fixed on the sliding positioning plate B106 (single positioning) through the groove in the middle, the positioning block B108 (long) also strides over the sliding positioning plate C107 (driven) on both sides, and the side wall of the positioning block B108 (long) is located in the gap in the middle of the sliding positioning plate a 105 (double positioning).
When the variable-pitch sucker mechanism is in a compressed state, as shown in fig. 2, all the sliding positioning plates are compressed without a gap to form a pitch based on the thickness of the sliding positioning plate, when the variable-pitch sucker mechanism is in a stretched state, as shown in fig. 3, the sliding positioning plate a 105 (double positioning) and the two adjacent sliding positioning plates C107 (driven) are limited by the side walls of the grooves on both sides of the positioning block a109, the sliding positioning plate B106 (single positioning) and the two adjacent sliding positioning plates C107 (driven) are limited by the side walls of the grooves on both sides of the positioning block B108, the two groups of basic structures realize the transmission of the pulling force through a middle slide positioning plate C107 (driven), so that when the free end sliding positioning plate is pulled, all 50 sliding positioning plates can be driven to form a gap taking the distance of the slidable groove in the positioning block as a reference.
Fig. 4 is a schematic view of the high-precision micro-variable-pitch sucker device with a portion of the fixing block removed in a compressed state so that the shape of the sliding positioning plate can be clearly seen, and the fixing block is not removed in use. Fig. 5 is a schematic diagram of the high-precision micro-variable-pitch sucker device after a part of the fixing block is removed in a stretching state, so that the shape of the specific sliding positioning plate can be clearly seen, and the fixing block is not removed in specific use.
The core idea of the utility model is that the sucker is precisely positioned and distance-variable through the sliding positioning plate and the positioning block, when the distance-variable sucker mechanism is in a compression state, all the sliding positioning plates are pressed and attached tightly, and positioning is carried out through the thickness of each sliding positioning plate; when becoming interval sucking disc mechanism when tensile state, the slip locating plate can be through locating piece pulling and spacing adjacent slip locating plate, and the slidable recess distance in the locating piece can form the clearance of slip locating plate this moment to the interval of sucking disc has been realized having changed.
The embodiments described above are only preferred embodiments of the present invention, and are not all possible embodiments of the present invention. Any obvious modifications to the above would be obvious to those of ordinary skill in the art, but would not bring the invention so modified beyond the spirit and scope of the present invention.
Claims (8)
1. A high-precision micro-variable-pitch sucker device is characterized by comprising a variable-pitch sucker mechanism, a driving mechanism, a vacuum mechanism and a support mechanism, wherein the variable-pitch sucker mechanism is arranged on the support mechanism, the vacuum mechanism is connected above the variable-pitch sucker mechanism, and one side of the variable-pitch sucker mechanism is connected with the driving mechanism;
the support mechanism comprises a base plate (201) and a side support plate (202); the side supporting plate (202) is arranged below the substrate (201) and fixedly connected with the substrate;
the variable-pitch sucker mechanism comprises a sliding positioning plate group, a plurality of guide shafts (103) and a guide shaft back plate (104); the sliding positioning plate group comprises a plurality of sliding positioning plates; two ends of the guide shaft (103) are respectively provided with a fixed block A (101) and a fixed block B (102) in a penetrating way; fixing a fixing block A (101) and a fixing block B (102) at two ends of a guide shaft (103) through a guide shaft back plate (104) and a screw respectively; the side surfaces of the fixed block A (101) and the fixed block B (102) are respectively connected to the side supporting plates (202); the plurality of sliding positioning plates penetrate through the guide shaft (103) and are arranged between the fixing block A (101) and the fixing block B (102); the fixed block A (101) is connected with a driving mechanism; the sliding positioning plate adjacent to the fixed block A (101) is the sliding positioning plate at the outermost side of the free end; the sliding positioning plate on the outermost side of the free end is fixedly connected with the fixing block A (101); the bottom of each sliding positioning plate is provided with a ceramic sucker (111) and the gas path of the sliding positioning plate is communicated with the gas cavity of the ceramic sucker (111); the sliding positioning plate can freely slide on the guide shaft (103);
the upper end and the lower end of each of two sides of the sliding positioning plate group are respectively connected with a plurality of positioning blocks A (109), and the middle ends of two sides of the sliding positioning plate group are respectively connected with a plurality of positioning blocks B (108); the upper ends and the lower ends of the two sides of one end, close to the driving mechanism, of the sliding positioning plate group are respectively connected with positioning blocks C (110).
2. The high-precision micro-variable-pitch sucker device as claimed in claim 1, wherein the plurality of sliding positioning plates are specifically 50 sliding positioning plates, and comprise a plurality of sliding positioning plates A (105), a plurality of sliding positioning plates B (106) and a plurality of sliding positioning plates C (107); the sliding positioning plate is arranged by sequentially penetrating through the guide shafts according to a sliding positioning plate C (107), a sliding positioning plate A (105), a sliding positioning plate C (107) and a sliding positioning plate B (106),
a groove is formed in the positioning block B (108) and is used for being connected with the side face of the sliding positioning plate which is sequentially connected with the sliding positioning plate C (107) and the sliding positioning plate B (106) and the sliding positioning plate C (107); a groove is formed in the positioning block A (109) and is used for being connected with the side face of the sliding positioning plate which is sequentially connected with the sliding positioning plate C (107), the sliding positioning plate A (105) and the sliding positioning plate C (107);
a groove is formed in the positioning block C (110) and used for positioning the free end sliding positioning plate; the width of the groove is larger than that of the sliding positioning plate.
3. A high precision micro variable pitch chuck device as claimed in claim 2, wherein said vacuum mechanism comprises a vacuum chamber (401), a vacuum generator (403); the vacuum air cavity (401) is arranged on the substrate (201), and the side surface of the vacuum air cavity (401) is connected with the vacuum generator (403); the vacuum generator (403) is arranged on the vacuum generator bracket (402), the vacuum generator bracket (402) is fixedly arranged on the side surface of the substrate (201), and the vacuum generator (403) is also provided with a silencer (407); the side surface of the vacuum air cavity (401) is connected with a quick connector B (405) and a quick connector C (406); the other side of the quick-plug connector C (406) is connected with a vacuum port of the vacuum generator (403), and the bottom of the quick-plug connector B (405) is connected with a quick-plug connector D (408); the quick-plug connector D (408) is arranged above the sliding positioning plate, and the quick-plug connector D (408) is communicated with the air cavity of the ceramic sucker (111) through the air passage of the sliding positioning plate.
4. A high precision micro-variable pitch chuck device as claimed in claim 3, wherein there are two vacuum generators (403), the two vacuum generators (403) are connected and fixed together by a quick connector a (404), and the air is uniformly fed through the quick connector a (404) and discharged by a silencer (407).
5. The high-precision micro-variable-pitch sucker device as claimed in claim 4, wherein the driving mechanism comprises an air cylinder, a floating joint (304) and an air cylinder connecting block (302), the air cylinder is arranged on an air cylinder bracket (301), and the air cylinder bracket (301) is connected and arranged on one side of a fixed block A (101); the air cylinder is provided with a speed regulating valve (305) for regulating the expansion speed of the air cylinder, the front end of the air cylinder is connected with an air cylinder connecting block (302) through a floating joint (304), and the air cylinder connecting block (302) is connected with a sliding positioning plate on the outermost side of the free end through a screw; thereby the cylinder can drive the expansion of the variable-pitch sucker mechanism.
6. The high-precision micro-variable-pitch sucker device as claimed in claim 5, wherein the support mechanism comprises a base plate (201) and two side support plates (202), the base plate (201) is fixedly connected with the side support plates (202) respectively at two sides of the bottom surface, the base plate (201) is provided with a circle of sealing ring grooves at the top surface, and the circle of sealing ring grooves are used for sealing a sealing ring when the base plate (201) is connected with a vacuum air cavity (401); the left side and the right side of the substrate (201) are respectively provided with a long strip along the long edge; the long strip is used for arranging the air pipe, wherein the long strip is particularly used for arranging the air pipe connected between a plurality of quick-plug connectors B (405) arranged on the upper side surface of the vacuum air cavity (401) and a quick-plug connector D (408) arranged above the sliding positioning plate.
7. The high-precision micro-variable-pitch sucker device as claimed in claim 6, wherein two sides of the sliding positioning plate A (105) are concave structures, and the convex blocks at the upper end and the lower end are respectively connected with the grooves of the positioning block A (109); because the convex blocks at the upper end and the lower end of the sliding positioning plate C (107) are respectively movably connected in a translation manner in the groove of the positioning block A (109), the sliding positioning plate B (106) is of a convex structure, the middle of the sliding positioning plate C (106) is convex, the upper end and the lower end of the sliding positioning plate C are concave, the middle convex block is connected with the groove of the positioning block B (108), only the middle convex block is positioned in the groove of the positioning block B (108) and movably connected in a translation manner, the two side edges of the sliding positioning plate C (107) are of a rectangular structure, the height of the side surfaces at the two sides of the sliding positioning plate C (107) is less than that of the convex blocks at the side surfaces at the two sides of the sliding positioning plate B (106), and the height of the side surfaces at the two sides of the sliding positioning plate C (107) is greater than that of the concave parts at the side surfaces at the two sides of the sliding positioning plate B (106); the height of the side surfaces at two sides of the sliding positioning plate C (107) is less than that of the convex blocks at the side surfaces at two sides of the sliding positioning plate A (105), and the height of the side surfaces at two sides of the sliding positioning plate C (107) is greater than that of the concave parts at the side surfaces at two sides of the sliding positioning plate A (105);
the length of the convex blocks at the upper end and the lower end of the sliding positioning plate A (105) is respectively equal to the length of the concave parts at the upper end and the lower end of the sliding positioning plate B (106).
8. The high-precision micro-variable-pitch sucker device as claimed in claim 6, wherein the positioning block A (109) has three inner grooves, the depth of the middle groove is greater than that of the grooves on two sides, the depths of the grooves on two sides are the same, the middle groove of the positioning block A (109) is connected with the protruding block of the sliding positioning plate A (105), and the grooves on two sides of the positioning block A (109) are used for being connected with the two sliding positioning plates C (107); the width of each groove is larger than that of the corresponding sliding positioning plate; the depth of the middle groove is greater than that of the grooves on the two sides, the depths of the grooves on the two sides are the same, the middle groove of the positioning block B (108) is connected with the protruding block of the sliding positioning plate B (106), and the grooves on the two sides of the positioning block B (108) are used for being connected with the two sliding positioning plates C (107); the width of each groove is larger than that of the corresponding sliding positioning plate;
the lower end of each sliding positioning plate is provided with a groove for connecting with a ceramic sucker (111).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120648884.7U CN214588793U (en) | 2021-03-31 | 2021-03-31 | High-precision micro-variable-interval sucker device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120648884.7U CN214588793U (en) | 2021-03-31 | 2021-03-31 | High-precision micro-variable-interval sucker device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214588793U true CN214588793U (en) | 2021-11-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120648884.7U Active CN214588793U (en) | 2021-03-31 | 2021-03-31 | High-precision micro-variable-interval sucker device |
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| Country | Link |
|---|---|
| CN (1) | CN214588793U (en) |
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2021
- 2021-03-31 CN CN202120648884.7U patent/CN214588793U/en active Active
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