CN213519887U - Device for improving low-voltage diffusion sheet resistance uniformity - Google Patents
Device for improving low-voltage diffusion sheet resistance uniformity Download PDFInfo
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- CN213519887U CN213519887U CN202022861829.4U CN202022861829U CN213519887U CN 213519887 U CN213519887 U CN 213519887U CN 202022861829 U CN202022861829 U CN 202022861829U CN 213519887 U CN213519887 U CN 213519887U
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- equalizing plate
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Abstract
The utility model discloses an improve device of low pressure diffusion side resistance homogeneity, concretely relates to low pressure diffusion furnace technical field, its technical scheme is: including boiler tube, thermocouple one, heating coil and flow equalizing plate, boiler tube inner wall fixed mounting thermocouple two, boiler tube inner wall fixed mounting intake pipe, boiler tube outer wall fixed mounting heating coil, boiler tube right-hand member inner wall fixed mounting flow equalizing plate, flow equalizing plate inner wall is equipped with sub flow equalizing plate, flow equalizing plate with the through-hole is seted up to sub flow equalizing plate inner wall, boiler tube right-hand member fixed connection blast pipe, blast pipe right-hand member fixed connection condenser, the beneficial effects of the utility model are that: the flow equalizing plate is arranged in the low-pressure diffusion furnace tube, so that the reflection and dispersion of gas are increased, and the gas diffusion is more uniform.
Description
Technical Field
The utility model relates to a low pressure diffusion furnace field, concretely relates to improve device that low pressure diffusion side hinders homogeneity.
Background
A tubular low-pressure diffusion furnace, in particular a horizontal diffusion furnace, is one of important process devices of a front process of a photovoltaic and semiconductor production line, is widely suitable for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, electronic and electronic, solar cells, photoelectric devices, optical fibers and the like, and can be used for 2-8 inches process size, the diffusion process is mainly used for doping semiconductor wafers under the high-temperature condition, namely, element phosphorus and boron are diffused into silicon wafers, so that the types, concentrations and distribution of impurities in the semiconductors are changed and controlled, different electrical characteristic areas are conveniently established, the common low-pressure phosphorus diffusion can obtain better square resistance uniformity and larger production batch by utilizing a low-pressure atmosphere, the influence on the environment is minimum, and the oxidation process is to ensure that the surface of the silicon wafers reacts with an oxidant under the high temperature, a layer of silicon dioxide film grows, the oxidation method comprises dry oxygen and wet oxygen, the wet oxygen comprises water vapor oxidation and hydrogen-oxygen synthesis, and has the functions of protecting, passivating, insulating, buffering media and the like for silicon wafers or devices, and the tubular low-pressure diffusion furnace is basic equipment of photovoltaic and semiconductor integrated circuit processes and is interdependent, mutually promoted and jointly developed with the photovoltaic and semiconductor processes.
The prior art has the following defects: at present, most of the domestic low-oxygen diffusion adopts the modes of furnace mouth gas inlet and furnace tail gas exhaust, and the process gas is unevenly distributed in the furnace tube.
Therefore, it is necessary to develop a device for improving the uniformity of low-voltage diffusion sheet resistance.
SUMMERY OF THE UTILITY MODEL
Therefore, the utility model provides an improve device of low pressure diffusion sheet resistance homogeneity through set up the flow equalizing plate in the low pressure diffusion boiler tube, increases gaseous reflection and dispersion, makes gas diffusion more even to solve the inhomogeneous problem of process gas distribution in the boiler tube.
In order to achieve the above object, the present invention provides the following technical solutions: the utility model provides a improve device of low pressure diffusion sheet resistance homogeneity, includes boiler tube, thermocouple one, heating coil and flow equalizing plate, boiler tube inner wall fixed mounting thermocouple two, boiler tube inner wall fixed mounting intake pipe, boiler tube outer wall fixed mounting heating coil, boiler tube right-hand member inner wall fixed mounting flow equalizing plate, flow equalizing plate inner wall is equipped with sub flow equalizing plate, flow equalizing plate with sub flow equalizing plate inner wall sets up the through-hole, boiler tube right-hand member fixed connection blast pipe, blast pipe right-hand member fixed connection condenser.
Preferably, the right end of the condenser is fixedly connected with a tail gas pipe, and a vacuum pump is fixedly installed at the right end of the tail gas pipe.
Preferably, the upper end of the vacuum pump is fixedly connected with an acid exhaust pipeline.
Preferably, the air inlet is arranged at the left end of the air inlet pipe, and one end, far away from the air inlet, of the air inlet pipe is fixedly connected with the air bag.
Preferably, a thermocouple I is fixedly installed on the outer wall of the furnace tube.
Preferably, the furnace door is fixedly installed at the left end of the furnace tube, and the through holes are arranged in a diamond shape.
The utility model has the advantages that:
a second thermocouple is fixedly arranged on the inner wall of the furnace tube, the second thermocouple is an element for measuring the temperature in the furnace tube, the second thermocouple directly measures the temperature and converts the temperature signal into a thermal electromotive force signal, the second thermocouple consists of a thermode, an insulating sleeve protection tube and a junction box, an air inlet tube is fixedly arranged on the inner wall of the furnace tube and has the function of introducing air into the interior of the furnace tube, the left end of the furnace tube is an air inlet end, a heating coil is fixedly arranged on the outer wall of the furnace tube and has the function of uniformly heating the furnace tube, a flow equalizing plate is fixedly arranged on the inner wall of the right end of the furnace tube and is arranged at the tail of the furnace, multiple layers are arranged in the flow equalizing plate and have the function of increasing the reflection and dispersion of gas and enabling the diffusion to be more uniform, a sub flow equalizing plate is;
the right end of the furnace tube is fixedly connected with an exhaust pipe, the exhaust pipe has the function of exhausting dispersed gas, the right end of the exhaust pipe is fixedly connected with a condenser, the condenser is a machine part of a refrigeration system, has the function of cooling the gas in the exhaust pipe and can convert the gas into liquid to be exhausted, the heat in the pipe is quickly transferred to the air near the pipe, the right end of the condenser is fixedly connected with a tail gas pipe, the tail gas pipe has the function of conveying the tail gas condensed by the condenser, the right end of the tail gas pipe is fixedly provided with a vacuum pump, the vacuum pump has the function of extracting the tail gas in the tail gas pipe to enable the tail gas pipe to be in a vacuum state, the upper end of the vacuum pump is fixedly connected with an;
the air inlet pipe left end is equipped with the air inlet, and the air inlet has the effect of giving vent to anger, and air inlet one end fixed connection gasbag is kept away from to the intake pipe, and the gasbag has the effect of release gas, and furnace tube outer wall fixed mounting thermocouple one, thermocouple one have the effect to furnace tube surface temperature measurement, furnace tube left end fixed mounting furnace gate, the through-hole sets up to the rhombus, and the furnace gate has the effect of sealed furnace tube.
Drawings
Fig. 1 is a structural diagram of a device for improving the uniformity of low-voltage diffusion sheet resistance provided by the present invention;
FIG. 2 is a structural diagram of a flow equalizing plate in the device for improving the uniformity of low-voltage diffusion sheet resistance provided by the present invention;
fig. 3 is a front view of a flow equalizing plate in the device for improving the uniformity of low-voltage diffusion sheet resistance provided by the present invention.
In the figure: the device comprises a furnace door 1, a furnace tube 2, a thermocouple I3, a heating coil 4, a flow equalizing plate 5, an exhaust pipe 6, a condenser 7, an exhaust pipe 8, a vacuum pump 9, an acid exhaust pipeline 10, an air inlet pipe 11, an air bag 12, a flow equalizing plate 13, a through hole 14, a thermocouple II 15 and an air inlet 16.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.
Referring to the attached drawings 1-3, a device for improving the uniformity of low-voltage diffusion sheet resistance comprises a furnace tube 2, a thermocouple I3, a heating coil 4 and a flow equalizing plate 5;
further, a second thermocouple 15 is fixedly installed on the inner wall of the furnace tube 2, an air inlet tube 11 is fixedly installed on the inner wall of the furnace tube 2, a heating coil 4 is fixedly installed on the outer wall of the furnace tube 2, a flow equalizing plate 5 is fixedly installed on the inner wall of the right end of the furnace tube 2, a sub flow equalizing plate 13 is arranged on the inner wall of the flow equalizing plate 5, through holes 14 are formed in the inner walls of the flow equalizing plate 5 and the sub flow equalizing plate 13, an exhaust tube 6 is fixedly connected to the right end of the furnace tube 2, a condenser 7 is fixedly connected to the right end of the exhaust tube 6, the second thermocouple 15 is an element for measuring the temperature in the furnace tube 2, the second thermocouple 15 directly measures the temperature and converts the temperature signal into a thermal electromotive force signal, and consists of a thermode, an insulating sleeve protection tube and a junction box, the air inlet tube 11 has the function of introducing air into the, the inside of the flow equalizing plate 5 is provided with a plurality of layers, which has the function of increasing the reflection and dispersion of gas to make the diffusion more uniform, the sub flow equalizing plate 13 has the function of uniformly dispersing the gas, the through hole 14 has the function of uniformly ventilating, the exhaust pipe 6 has the function of discharging the dispersed gas, the condenser 7 is set to FNA0.25/1.20, the condenser 7 is a part of a refrigeration system, has the function of cooling the gas in the exhaust pipe 6, can convert the gas into liquid to be discharged, and quickly transfers the heat in the pipe to the air near the pipe;
further, the right end of the condenser 7 is fixedly connected with a tail gas pipe 8, a vacuum pump 9 is fixedly installed at the right end of the tail gas pipe 8, the tail gas pipe 8 has the function of conveying tail gas condensed by the condenser 7, the vacuum pump 9 is set to be DF270, and the vacuum pump 9 has the function of extracting the tail gas in the tail gas pipe 8 so that the tail gas pipe 8 is in a vacuum state;
further, the upper end of the vacuum pump 9 is fixedly connected with an acid exhaust pipeline 10, and the acid exhaust pipeline 10 has the function of conveying acidic substances in the gas;
further, an air inlet 16 is arranged at the left end of the air inlet pipe 11, one end, far away from the air inlet 16, of the air inlet pipe 11 is fixedly connected with the air bag 12, the air inlet 16 has an air outlet function, and the air bag 12 has an air releasing function;
furthermore, a thermocouple I3 is fixedly arranged on the outer wall of the furnace tube 2, and the thermocouple I3 has the function of measuring the temperature of the surface of the furnace tube 2;
further, the furnace tube 2 is fixedly provided with a furnace door 1 at the left end, the through hole 14 is arranged in a diamond shape, and the furnace door 1 has the function of sealing the furnace tube 2.
The utility model discloses a use as follows: when the utility model is used, a second thermocouple 15 is fixedly arranged on the inner wall of the furnace tube 2, the second thermocouple 15 is an element for measuring the temperature inside the furnace tube 2, the second thermocouple 15 directly measures the temperature and converts the temperature signal into a thermal electromotive force signal, and the thermoelectric device comprises a thermode, an insulating sleeve protection tube and a junction box, the inner wall of the furnace tube 2 is fixedly provided with an air inlet tube 11, the air inlet tube 11 has the function of introducing air into the furnace tube 2, the left end of the furnace tube 2 is an air inlet end, the outer wall of the furnace tube 2 is fixedly provided with a heating coil 4, the heating coil 4 has the function of uniformly heating the furnace tube 2, the inner wall of the right end of the furnace tube 2 is fixedly provided with a flow equalizing plate 5, the flow equalizing plate 5 is arranged at the tail of the furnace, the flow equalizing plate 5 is internally provided with a plurality of layers and has the function of increasing the reflection and dispersion of gas to make the diffusion more, the through hole 14 has the function of uniform ventilation, the right end of the furnace tube 2 is fixedly connected with the exhaust tube 6, the exhaust tube 6 has the function of exhausting dispersed gas, the right end of the exhaust tube 6 is fixedly connected with the condenser 7, the condenser 7 is a machine part of a refrigeration system and has the function of cooling the gas in the exhaust tube 6, the gas can be converted into liquid to be exhausted, the heat in the tube can be quickly transferred to the air near the tube, the right end of the condenser 7 is fixedly connected with the tail gas tube 8, the tail gas tube 8 has the function of conveying the tail gas condensed by the condenser 7, the right end of the tail gas tube 8 is fixedly provided with the vacuum pump 9, the vacuum pump 9 has the function of extracting the tail gas in the tail gas tube 8, so that the tail gas tube 8 is in a vacuum state, the upper end of the vacuum pump 9 is fixedly connected with the acid exhaust tube circuit 10, the acid exhaust, the air inlet 16 has the effect of giving vent to anger, and intake pipe 11 is kept away from air inlet 16 one end fixed connection gasbag 12, and gasbag 12 has the effect of release gas, and furnace tube 2 outer wall fixed mounting thermocouple 3, thermocouple 3 have the effect to furnace tube 2 surface temperature measurement, and furnace tube 2 left end fixed mounting furnace gate 1, through-hole 14 set up to the rhombus, and furnace gate 1 has the effect of sealed furnace tube 2.
The above description is only a preferred embodiment of the present invention, and any person skilled in the art may modify the present invention or modify it into an equivalent technical solution by using the technical solutions described above. Therefore, any simple modifications or equivalent replacements made according to the technical solution of the present invention belong to the scope of the claimed invention as far as possible.
Claims (6)
1. The utility model provides an improve device of low pressure diffusion sheet resistance homogeneity, includes boiler tube (2), thermocouple one (3), heating coil (4) and flow equalizing plate (5), its characterized in that: furnace tube (2) inner wall fixed mounting thermocouple two (15), furnace tube (2) inner wall fixed mounting intake pipe (11), furnace tube (2) outer wall fixed mounting heating coil (4), furnace tube (2) right-hand member inner wall fixed mounting flow equalizing plate (5), flow equalizing plate (5) inner wall is equipped with sub flow equalizing plate (13), flow equalizing plate (5) with through-hole (14) are seted up to sub flow equalizing plate (13) inner wall, furnace tube (2) right-hand member fixed connection blast pipe (6), blast pipe (6) right-hand member fixed connection condenser (7).
2. The apparatus of claim 1, wherein the apparatus further comprises: the right end of the condenser (7) is fixedly connected with a tail gas pipe (8), and a vacuum pump (9) is fixedly installed at the right end of the tail gas pipe (8).
3. The apparatus of claim 2, wherein the apparatus further comprises: the upper end of the vacuum pump (9) is fixedly connected with an acid exhaust pipeline (10).
4. The apparatus of claim 1, wherein the apparatus further comprises: the air inlet pipe (11) is characterized in that an air inlet (16) is formed in the left end of the air inlet pipe (11), and the air inlet pipe (11) is far away from one end of the air inlet (16) and is fixedly connected with the air bag (12).
5. The apparatus of claim 1, wherein the apparatus further comprises: the outer wall of the furnace tube (2) is fixedly provided with a thermocouple I (3).
6. The apparatus of claim 1, wherein the apparatus further comprises: the furnace door (1) is fixedly installed at the left end of the furnace tube (2), and the through holes (14) are arranged in a diamond shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022861829.4U CN213519887U (en) | 2020-12-02 | 2020-12-02 | Device for improving low-voltage diffusion sheet resistance uniformity |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022861829.4U CN213519887U (en) | 2020-12-02 | 2020-12-02 | Device for improving low-voltage diffusion sheet resistance uniformity |
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| CN213519887U true CN213519887U (en) | 2021-06-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115094521A (en) * | 2022-06-27 | 2022-09-23 | 中南大学 | Boron diffusion reaction system and process method thereof |
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2020
- 2020-12-02 CN CN202022861829.4U patent/CN213519887U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115094521A (en) * | 2022-06-27 | 2022-09-23 | 中南大学 | Boron diffusion reaction system and process method thereof |
| CN115094521B (en) * | 2022-06-27 | 2023-12-19 | 中南大学 | Boron diffusion reaction system and process method thereof |
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