CN207079304U - A kind of inlet duct of tube furnace - Google Patents
A kind of inlet duct of tube furnace Download PDFInfo
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- CN207079304U CN207079304U CN201721016092.8U CN201721016092U CN207079304U CN 207079304 U CN207079304 U CN 207079304U CN 201721016092 U CN201721016092 U CN 201721016092U CN 207079304 U CN207079304 U CN 207079304U
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- air inlet
- inlet pipe
- boiler tube
- current divider
- hollow
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Abstract
The utility model discloses a kind of inlet duct of tube furnace, including air inlet pipe, current divider；The current divider is built in boiler tube, and its air inlet is connected with air inlet pipe one end；The air inlet pipe other end inside boiler tube by extending to outside boiler tube；The current divider includes the inconsistent hollow cone of at least three bottom surface radiuses；Nested setting is carried out between the cone.The utility model makes the air-flow in boiler tube be particularly nearly furnace wall region, and the more conventional intake method of air-flow is more stable, makes the effect of diffusion evenly, and square resistance is more concentrated and stably.
Description
Technical field
It the utility model is related to technical field of solar cell manufacturing, more particularly to a kind of inlet duct of tube furnace.
Background technology
Diffusion furnace is in photovoltaic industry mainly for the preparation of the PN junction of solar cell.By under the high temperature conditions
Silicon chip is doped, i.e., elemental oxygen, phosphorus or boron are diffused into silicon chip, so as to be varied and controlled in silicon chip dopant type,
Concentration and distribution, different electrical characteristics regions is formed, reaches the agent structure needed for solar cell.
With the requirement more and more higher of solar cell photoelectric conversion efficiency, the requirement to diffusion technique is also with regard to more and more higher
.The disorder of air-flow in normal pressure diffusion, the diffusion effect of silicon chip is uneven, and then have developed low pressure diffusion technique, air-flow
Stability improves.But uniformity is still inadequate, difference is still larger between the silicon chip of stove tail in boiler tube fire door, stove.
The uneven normal distribution that can directly affect electrical performance of cell parameter of diffusion, efficiency battery piece ratio is caused to raise, especially
It is the cell piece of high square resistance, influence of the diffusion inhomogeneities to battery piece performance is more obvious.Sheet resistance uniformity is good after diffusion will
Be advantageous to being mutually matched for subsequent technique so that the overall performance electrical performance of cell piece is more stable.
It is shown experimentally that, the pressure in diffusion furnace is lower, and the turbulent phenomenon in boiler tube produces reduction, and pipe interior air-flow is uniform
Property increase, the sheet resistance uniformity after diffusion is well many compared with the sheet resistance uniformity that normal pressure spreads.Traditional normal pressure diffusion is gradually washed in a pan
Eliminate.But current low pressure diffusion technique, although in boiler tube turbulent phenomenon reduce, diffusion uniformity is good, this only with respect to
Common normal pressure diffusion.Not good enough, the sheet resistance difference of the cell piece of particularly outer layer and the cell piece of internal layer is also relatively
Greatly, cause the performance of further battery technique unstable, this also needs to improve.
In summary, the silicon chip diffusive gas flow is uneven, in practice in the presence of it is inconvenient the problem of, it is therefore necessary to changed
Enter.
Utility model content
The purpose of this utility model is to provide a kind of inlet duct of tube furnace, the air-flow in boiler tube is particularly nearly furnace wall
Region, the more conventional intake method of air-flow is more stable, makes the effect of diffusion evenly, and square resistance is more concentrated and stably.
To achieve the above object, using following technical scheme：
A kind of inlet duct of tube furnace, including air inlet pipe, current divider；The current divider is built in boiler tube, its air inlet
It is connected with air inlet pipe one end；The air inlet pipe other end inside boiler tube by extending to outside boiler tube；The current divider is included at least
The inconsistent hollow cone of three bottom surface radiuses；Nested setting is carried out between the hollow cone.
It is preferred that the air inlet pipe includes the inconsistent hollow circular cylinder of some radiuses；It is embedding between the hollow circular cylinder
Set is set.
It is preferred that the hollow cone in the current divider is highly consistent；Bottom during some hollow cone nestings
Face is concordant.
It is preferred that the hollow circuit cylinder body length in the air inlet pipe is consistent；End face during some hollow circular cylinder nestings
Concordantly.
It is preferred that the quantity of the hollow circular cylinder is consistent with the quantity of hollow cone；Each hollow circular cylinder
One end corresponds and is connected with hollow cone osculum end.
Using such scheme, the beneficial effects of the utility model are：
1) diverter designs make gas is scattered when entering boiler tube stably to enter, the diffusion effect of silicon chip into sandwich construction
Uniformly, the square resistance of silicon chip concentrates stabilization in same boiler tube；
2) Inlet Manifold Design and the one-to-one structure of current divider, make gas start to be dispersed into the inlet port of air inlet pipe
Enter, strengthen airflow stability.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model and boiler tube；
Fig. 2 is stereogram of the present utility model；
Fig. 3 is that the utility model air inlet spreads schematic diagram with conventional admission；
Fig. 4 is the utility model air inlet and the silicon chip square resistance comparison diagram after conventional admission diffusion；
Wherein, accompanying drawing identifier declaration：
1-air inlet pipe, 2-current divider,
3-boiler tube, 4-quartz boat.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in detail.
Referring to figs. 1 to shown in 4, the utility model provides a kind of inlet duct of tube furnace, including air inlet pipe 1, current divider
2；The current divider 2 is built in boiler tube 3, and its air inlet is connected with the one end of air inlet pipe 1；The other end of air inlet pipe 1 is by boiler tube 3
Portion is extended to outside boiler tube 3；The current divider 2 includes the inconsistent hollow cone of at least three bottom surface radiuses；It is described hollow
Nested setting is carried out between cone.
Wherein, the air inlet pipe 1 includes the inconsistent hollow circular cylinder of some radiuses；It is nested between the hollow circular cylinder
Set.Hollow cone in the current divider 2 is highly consistent；Bottom surface during some hollow cone nestings is concordant.Institute
The hollow circuit cylinder body length stated in air inlet pipe 1 is consistent；End face is concordant during some hollow circular cylinder nestings.The hollow circuit cylinder
The quantity of body is consistent with the quantity of hollow cone；Described each hollow circular cylinder one end corresponds and hollow cone osculum
End connection.
Utility model works principle：
The flow direction of gas is：1-current divider of air inlet pipe, 2-boiler tube 3, the design of air inlet pipe 1 are tied correspondingly with current divider 2
Structure, gas is started layering in the inlet port of air inlet pipe 1 and enter, and current divider 2 is hollow cone, increase gas enters
The stability of boiler tube 3.
Choose the experiment that 2 boiler tubes 3 in tube furnace do diffusion effect：
Wherein, the first boiler tube is the boiler tube 3 using conventional admission, and the second boiler tube is the boiler tube using the utility model air inlet
3.Silicon chip inserted sheet mode in two boiler tubes 3 is that the back-to-back level of two silicon chips is inserted in the neck of same quartz boat 4.Each stove
10 quartz boats 4 are placed in pipe 3 and carry out silicon chip expansion boron, expansion boron condition is identical (BCl3 is boron source), and experiment condition is identical.Inspection
Print position is measured as shown in figure 3, respectively asking for the first quartz boat 4a since inlet end, the 4th quartz boat 4b, the tenth quartz
Silicon chip in boat 4c measures square resistance.Extracted respectively in each quartz boat 4 topmost, it is middle away from extracting at 3, most
Bottom, totally 10 (everywhere includes 2 back-to-back silicon chips) silicon chips carry out detection square resistance.Silicon chip after every diffusion
Square resistance test position is (totally 4 points) and center position at edge distance 2cm respectively on two diagonal, totally 5 points
Square resistance average value.The square resistance of everywhere takes the average value of back-to-back two silicon chip to be averaged as the square resistance at one
Value.
As shown in figure 3, top is the diffusion schematic diagram that the first boiler tube uses conventional admission mode, lower section is to use this practicality
The diffusion schematic diagram of novel gas inlet.
As shown in figure 4, wherein triangle symbol represents the first boiler tube (conventional admission) mesolow diffusion silicon chip square resistance
The experimental result of value, circle symbol represent the second boiler tube (air inlet of the present utility model) mesolow diffusion silicon chip square resistance
Experimental result.
The 11~15 of horizontal end are respectively the first quartz boat 4a square resistances at taken silicon chip from top to bottom；
The 41~45 of horizontal end are respectively the 4th quartz boat 4b square resistances at taken silicon chip from top to bottom；
The 101~105 of horizontal end are respectively the tenth quartz boat 4c square resistances at taken silicon chip from top to bottom.
It is apparent from from Fig. 4：Diffusion effect uniformity of the present utility model is substantially good.
The utility model is applied to normal pressure diffusion furnace and low pressure diffusion furnace, the diffusion for boron, phosphorus, oxygen etc., it can also be used to
In the low-pressure chemical vapor deposition stove of tubular type, the deposition for compounds such as silica.
Preferred embodiment of the present utility model is these are only, is not limited to the utility model, it is all in this practicality
All any modification, equivalent and improvement made within new spirit and principle etc., should be included in guarantor of the present utility model
Within the scope of shield.
Claims (5)
1. a kind of inlet duct of tube furnace, it is characterised in that including air inlet pipe, current divider；The current divider is built in boiler tube,
Its air inlet is connected with air inlet pipe one end；The air inlet pipe other end inside boiler tube by extending to outside boiler tube；The current divider
Including the inconsistent hollow cone of at least three bottom surface radiuses；Nested setting is carried out between the hollow cone.
2. the inlet duct of tube furnace according to claim 1, it is characterised in that the air inlet pipe includes some radiuses not
Consistent hollow circular cylinder；It is nested between the hollow circular cylinder to set.
3. the inlet duct of tube furnace according to claim 2, it is characterised in that the hollow cone in the current divider
It is highly consistent；Bottom surface during some hollow cone nestings is concordant.
4. the inlet duct of tube furnace according to claim 3, it is characterised in that the hollow circular cylinder in the air inlet pipe
Length is consistent；End face is concordant during some hollow circular cylinder nestings.
5. the inlet duct of tube furnace according to claim 4, it is characterised in that the quantity of the hollow circular cylinder is with
The quantity of empty cone is consistent；Described each hollow circular cylinder one end corresponds to be connected with hollow cone osculum end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721016092.8U CN207079304U (en) | 2017-08-15 | 2017-08-15 | A kind of inlet duct of tube furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721016092.8U CN207079304U (en) | 2017-08-15 | 2017-08-15 | A kind of inlet duct of tube furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207079304U true CN207079304U (en) | 2018-03-09 |
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ID=61419827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721016092.8U Active CN207079304U (en) | 2017-08-15 | 2017-08-15 | A kind of inlet duct of tube furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207079304U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111118609A (en) * | 2020-02-03 | 2020-05-08 | 深圳市拉普拉斯能源技术有限公司 | Tube furnace structure for gas diffusion |
-
2017
- 2017-08-15 CN CN201721016092.8U patent/CN207079304U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111118609A (en) * | 2020-02-03 | 2020-05-08 | 深圳市拉普拉斯能源技术有限公司 | Tube furnace structure for gas diffusion |
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| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518000 Shenzhen Laplace Energy Technology Co., Ltd., Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: 518000 Shenzhen Laplace Energy Technology Co., Ltd., Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |