CN203869511U - Adhesion-preventing reaction gas self-heating furnace door of boron diffusion furnace - Google Patents
Adhesion-preventing reaction gas self-heating furnace door of boron diffusion furnace Download PDFInfo
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- CN203869511U CN203869511U CN201420251740.8U CN201420251740U CN203869511U CN 203869511 U CN203869511 U CN 203869511U CN 201420251740 U CN201420251740 U CN 201420251740U CN 203869511 U CN203869511 U CN 203869511U
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- China
- Prior art keywords
- heat exchange
- fire door
- exchange coil
- adhesion
- temperature
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 43
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 229910052796 boron Inorganic materials 0.000 title claims abstract description 31
- 238000010438 heat treatment Methods 0.000 title claims abstract description 18
- 239000012495 reaction gas Substances 0.000 title claims abstract description 13
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 239000012774 insulation material Substances 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 14
- 239000007789 gas Substances 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 4
- 239000010453 quartz Substances 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000002844 melting Methods 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000005368 silicate glass Substances 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 8
- 239000004411 aluminium Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000002425 crystallisation Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000010425 asbestos Substances 0.000 description 2
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 description 2
- 239000011449 brick Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910052895 riebeckite Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Abstract
The utility model discloses an adhesion-preventing reaction gas self-heating furnace door of a boron diffusion furnace. The adhesion-preventing reaction gas self-heating furnace door comprises a heat exchange coil, a thermal coupler and a temperature inspecting instrument, wherein the heat exchange coil is located in the position close to the inner wall of the furnace door, one end of the heat exchange coil is arranged at a gas discharge end of the diffusion furnace, and the other end of the heat exchange coil is connected to a vacuum pump; the thermal coupler is arranged nearby the heat exchange coil, and a temperature measuring point is arranged nearby the heat exchange coil; and a signal wire of the thermal coupler penetrates through the furnace door to be connected to the temperature inspecting instrument outside the boron diffusion furnace. According to the adhesion-preventing reaction gas self-heating furnace door, by means of the heat exchange coil structure, self-heating of the furnace door is realized by gas discharged in the boron diffusion technology, the temperature of the furnace door is kept to be higher than the melting point of BSG (boron silicate glass), and the temperature of the coil is effectively monitored by the temperature inspecting instrument, so that the adhesion problem of the quartz furnace door and a furnace tube in the technological process is effectively solved, the service life of the diffusion furnace is greatly prolonged, and the production efficiency is improved.
Description
Technical field
The utility model relates to the making apparatus technology of crystal silicon battery, and particularly a kind of boron diffusion furnace prevents the reaction gas self-heating fire door of adhesion.
Background technology
The crystal silicon battery of main flow is all to adopt P type silicon chip as substrate at present, by phosphorus, is spread and is prepared PN junction, and back up aluminium paste sintering forms aluminium back surface field.But, because the boron in P type crystal silicon substrate and the combination of oxygen cause photo attenuation, so can cause P type silion cell battery efficiency after long-time use to have 15～25% decay.Just use instead subsequently N-type crystal silicon replace P type crystal silicon as substrate to address the above problem, and because N-type silicon has longer minority carrier life time, on such as high efficiency cell configuration such as full back of the body contact batteries, have very large development potentiality, utilizing N-type silicon substrate to prepare battery needs boron to spread to prepare PN junction.In order to reduce costs, the silicon wafer thickness of preparing battery future will be more and more thinner, in current main-stream battery structure, aluminium back surface field is because the thermal coefficient of expansion of aluminium in heat treatment and silicon differs larger, so prepare the situation that battery after aluminium back surface field there will be warpage, in the situation that silicon substrate is very thin, prepare aluminium back surface field and will cause silicon chip cracking, qualification rate reduces, and the method for utilizing boron to diffuse to form back surface field can not cause the bending of silicon chip, simultaneously due to the solid solubility of boron in silicon much larger than aluminium the solid solubility in silicon, thereby boron back surface field is more effective than aluminium back surface field, more be conducive to the lifting of battery efficiency.Thereby with boron diffusion as P type cell back field raising efficiency and to utilize N-type battery further to improve photoelectric transformation efficiency will be a following important development trend, above-mentioned two kinds of battery technologies all inevitably will be used boron diffusion technique.
Solar cell industryization produce in the normal Boron tribromide liquid source tubular diffusion process that adopts of boron diffusion, conventionally diffusion temperature between 900 ℃ to 1100 ℃, diffusion reaction product B in this temperature range
2o
3be liquid, thereby the uniformity of boron diffusion can not show a candle to the uniformity of phosphorus diffusion, this process can produce accessory substance BSG(Pyrex simultaneously).BSG for softening liquid, has very strong viscosity at high temperature, lower than the crystallization of can hardening of 450 degree.In diffusion furnace tube, working as BSG runs up to a certain degree, in diffusion process, the BSG of high-temperature liquid state can flow to along with carrier gas the position of boiler tube and fire door boundary, while being cooled to 800 ℃ of left and right after technique finishes, because fire door place temperature is lower, BSG can form thick material diffusion furnace tube and fire door are sticked together, and as being labeled as the position as shown in the of 4 in Fig. 1, causes Quartz stove tube and fire door to damage, must change boiler tube, fire door, have larger consumptive material loss.Thereby, solve economically boron diffusion fire door boiler tube adhesion problems for the significance that is prepared with of efficient, low-cost solar battery.
Utility model content
The purpose of this utility model is to provide the reaction gas self-heating fire door that a kind of boron diffusion furnace prevents adhesion, by fire door coil pipe being set at fire door place, the pyroreaction gas that reacting furnace is produced is introduced fire door coil pipe, can make the temperature of fire door be increased to more than 600 ℃, effectively prevent BSG low temperature crystallization, thereby avoided the adhesion of fire door boiler tube, extend the service life of the parts such as fire door, and reduced production cost.
The technical solution of the utility model is as follows:
A kind of boron diffusion furnace prevents the reaction gas self-heating fire door of adhesion, it is characterized in that: include heat exchange coil, thermocouple and temperature polling instrument, described heat exchange coil is positioned near fire door inwall place, one end of heat exchange coil is arranged at the pipe end of giving vent to anger of diffusion furnace pump drainage, and the other end of heat exchange coil is connected to vavuum pump; Described thermocouple be arranged at heat exchange coil near; The holding wire of described thermocouple is connected to the temperature polling instrument of boron diffusion furnace outside through fire door.
Described heat exchange coil is spiral round.
Described adding between heat exchange coil and fire door outer wall, is filled with insulation material, as resistant to elevated temperatures materials such as asbestos, insulating bricks.By insulation material, can prevent quartzy fire door outer wall side excess Temperature, be convenient to open fire door, again heating be played to insulation effect.
Described fire door is quartzy fire door, and quartzy fire door is socketed with steel sleeve outward, and steel sleeve is convenient to the mechanical connection of quartzy fire door and door opened control arm.
It is of the present utility model that to realize principle as follows:
At boron diffusion furnace reaction process, carry out in process, open vavuum pump, can the gas access heat exchange coil of the main pump drainage of diffusion furnace will be entered, by temperature polling instrument, monitor the temperature of coil pipe, can borrow the temperature of gas in heat exchange coil to make fire door temperature higher than the fusing point of BSG, thereby the BSG low temperature crystallization occurring in diffusion technique process is melted again.After BSG melts, can open easily quartzy fire door, realize fire door and boiler tube adhesion.
The beneficial effects of the utility model are as follows:
The utility model adopts the structure of heat exchange coil, by the temperature by the Exhaust Gas of main pump drainage in boron diffusion technique, realize the self-heating of fire door, make more than fire door temperature remains on BSG fusing point, and effectively monitor coil temperature by temperature polling instrument, thereby efficiently solve the problem of quartzy fire door and boiler tube adhesion in technical process; At the outside fill insulant material of heat exchange coil, can prevent that quartzy fire door outside wall temperature is too high, be convenient to open fire door, again coil pipe is played to insulation effect; Structure of the present utility model is economy but also accurate not only, can greatly extend the service life of technique diffusion furnace, has improved production efficiency, the significance that is prepared with to efficient, low-cost solar battery.
Accompanying drawing explanation
Fig. 1 is traditional boron diffusion furnace boiler tube and the organigram of fire door;
Fig. 2 is structural representation of the present utility model.
Wherein, Reference numeral is: 1. Quartz stove tube; 2. quartzy fire door; 3. the steel sleeve on quartzy fire door, is convenient to the mechanical connection of quartzy fire door and door opened control arm; 4. escape pipe; 5. air inlet pipe; 6. thermocouple; 7. heat exchange coil; 8. insulation material; 9. the holding wire of thermocouple; 10. temperature polling instrument; 11. vavuum pumps.
The specific embodiment
As shown in Figure 2, a kind of boron diffusion furnace prevents the reaction gas self-heating fire door of adhesion, is arranged on Quartz stove tube 1, is provided with escape pipe 4 and air inlet pipe 5 in diffusion furnace, and this fire door includes the parts such as heat exchange coil 7, thermocouple 6 and temperature polling instrument 10.
Described heat exchange coil 7 is positioned near fire door inwall place, and one end of heat exchange coil 7 is arranged at the pipe end of giving vent to anger of diffusion furnace pump drainage, and the other end of heat exchange coil 7 is connected to vavuum pump 11; Described thermocouple 6 be arranged at heat exchange coil 7 near, the point for measuring temperature of thermocouple 6 be arranged at heat exchanger tube dish near; The holding wire 9 of described thermocouple 6 is connected to the temperature polling instrument 10 of boron diffusion furnace outside through fire door.
The described heat exchange coil 7 that adds is spiral round.
Between described heat exchange coil 7 and fire door outer wall, be filled with insulation material 8, as resistant to elevated temperatures materials such as asbestos, insulating bricks.By insulation material 8, can prevent quartzy fire door 2 outer wall side excess Temperatures, be convenient to open fire door, again heating be played to insulation effect.
Described fire door is quartzy fire door 2, the outer steel sleeve 3 that is socketed with of quartzy fire door 2, and steel sleeve 3 is convenient to the mechanical connection of quartzy fire door 2 and door opened control arm.
It is of the present utility model that to realize principle as follows:
At boron diffusion furnace reaction process, carry out in process, open vavuum pump 11, can the gas access heat exchange coil 7 of the main pump drainage of diffusion furnace will be entered, by the temperature of temperature polling instrument 10 monitoring coil pipes, can borrow the temperature of heat exchange coil 7 interior gases to make fire door temperature higher than the fusing point of BSG, thereby the BSG low temperature crystallization occurring in diffusion technique process is melted again.After BSG melts, can open easily quartzy fire door 2, realize fire door and boiler tube adhesion.
Claims (4)
1. a boron diffusion furnace prevents the reaction gas self-heating fire door of adhesion, it is characterized in that: include heat exchange coil (7), thermocouple (6) and temperature polling instrument (10), described heat exchange coil (7) is positioned near fire door inwall place, one end of heat exchange coil (7) is arranged at the pipe end of giving vent to anger of diffusion furnace pump drainage, and the other end of heat exchange coil (7) is connected to vavuum pump (11); Described thermocouple (6) be arranged at heat exchange coil (7) near, point for measuring temperature is placed near heat exchanger tube dish; The holding wire (9) of described thermocouple (6) is connected to the temperature polling instrument (10) of boron diffusion furnace outside through fire door.
2. a kind of boron diffusion furnace according to claim 1 prevents the reaction gas self-heating fire door of adhesion, it is characterized in that: described heat exchange coil (7) is spiral round.
3. a kind of boron diffusion furnace according to claim 1 prevents the reaction gas self-heating fire door of adhesion, it is characterized in that: between described heat exchange coil (7) and fire door outer wall, be filled with insulation material (8).
4. a kind of boron diffusion furnace according to claim 1 prevents the reaction gas self-heating fire door of adhesion, it is characterized in that: described fire door is quartzy fire door (2), the outer steel sleeve (3) that is socketed with of quartzy fire door (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420251740.8U CN203869511U (en) | 2014-05-16 | 2014-05-16 | Adhesion-preventing reaction gas self-heating furnace door of boron diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420251740.8U CN203869511U (en) | 2014-05-16 | 2014-05-16 | Adhesion-preventing reaction gas self-heating furnace door of boron diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203869511U true CN203869511U (en) | 2014-10-08 |
Family
ID=51650452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420251740.8U Expired - Lifetime CN203869511U (en) | 2014-05-16 | 2014-05-16 | Adhesion-preventing reaction gas self-heating furnace door of boron diffusion furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN203869511U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107201549A (en) * | 2017-04-14 | 2017-09-26 | 中国电子科技集团公司第四十八研究所 | A kind of diffusion furnace for lifting fire door silicon chip sheet resistance uniformity |
| CN110172737A (en) * | 2018-12-31 | 2019-08-27 | 天合光能股份有限公司 | Low-pressure diffusion furnace |
-
2014
- 2014-05-16 CN CN201420251740.8U patent/CN203869511U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107201549A (en) * | 2017-04-14 | 2017-09-26 | 中国电子科技集团公司第四十八研究所 | A kind of diffusion furnace for lifting fire door silicon chip sheet resistance uniformity |
| CN110172737A (en) * | 2018-12-31 | 2019-08-27 | 天合光能股份有限公司 | Low-pressure diffusion furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20141008 |
|
| CX01 | Expiry of patent term |