CN210557878U - Full-automatic PE loading and unloading machine - Google Patents
Full-automatic PE loading and unloading machine Download PDFInfo
- Publication number
- CN210557878U CN210557878U CN201921076752.0U CN201921076752U CN210557878U CN 210557878 U CN210557878 U CN 210557878U CN 201921076752 U CN201921076752 U CN 201921076752U CN 210557878 U CN210557878 U CN 210557878U
- Authority
- CN
- China
- Prior art keywords
- driving mechanism
- linear driving
- axis linear
- fixed
- loading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model belongs to the technical field of silicon chip processing equipment and specifically relates to full-automatic PE loading and unloading mascerating machine. The wafer loading and unloading machine comprises a rack, a Z-axis linear driving mechanism, a Y-axis linear driving mechanism I, an X-axis linear driving mechanism, a Y-axis linear driving mechanism II, a connecting platform, a width adjusting mechanism, a clamping jaw, a rotary motor, a sucker group, a positioning table, a flower basket, a quartz boat and a conveying table, wherein the Z-axis linear driving mechanism and the X-axis linear driving mechanism are fixed on a top plate of the rack, a sliding seat of the Z-axis linear driving mechanism is fixed on a cylinder body of the Y-axis linear driving mechanism I, and the cylinder body of the Y-axis linear driving mechanism I is connected on the top plate of the rack in a sliding fit manner. The utility model discloses a Z axle linear driving mechanism orders about the clamping jaw with Y axle linear driving mechanism one and carries the bench with quartz boat, carries the bench to convey quartz boat to sucking disc group below, and sucking disc group takes out the silicon chip and via the rotating motor direction of rotation to insert in the basket of flowers. The loading and unloading efficiency of the silicon wafer is improved.
Description
Technical Field
The utility model belongs to the technical field of silicon chip processing equipment and specifically relates to full-automatic PE loading and unloading mascerating machine.
Background
In the processing process of the silicon wafer, the processed silicon wafer in the quartz boat needs to be taken out and put into the flower basket. But the working efficiency of the prior art for loading and unloading the silicon wafer is low.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem described in the background art, the utility model provides a full-automatic PE loading and unloading mascerating machine. The quartz boat is carried to the conveying table through the first driving jaw of the Z-axis linear driving mechanism and the first driving jaw of the Y-axis linear driving mechanism, the conveying table conveys the quartz boat to the lower part of the sucker group, and the sucker group takes out the silicon wafer and rotates in the direction through the rotating motor so as to be inserted into the flower basket. The loading and unloading efficiency of the silicon wafer is improved.
The utility model provides a technical scheme that its technical problem adopted is:
a full-automatic PE loading and unloading machine comprises a rack, a Z-axis linear driving mechanism, a Y-axis linear driving mechanism I, an X-axis linear driving mechanism, a Y-axis linear driving mechanism II, a connecting platform, a width adjusting mechanism, clamping jaws, a rotary motor, a sucker group, a positioning table, a flower basket, a quartz boat and a conveying table, wherein the Z-axis linear driving mechanism and the X-axis linear driving mechanism are fixed on a top plate of the rack, a sliding seat of the Z-axis linear driving mechanism is fixed on a cylinder body of the Y-axis linear driving mechanism I, the cylinder body of the Y-axis linear driving mechanism I is connected on the top plate of the rack in a sliding fit manner, the connecting platform is fixed on the sliding seat of the Y-axis linear driving mechanism I, two clamping jaws which are symmetrical to each other are connected on the connecting platform in a sliding manner, a width adjusting mechanism is installed on the connecting platform and connected with the clamping jaws, and the sliding seat of the X, and a rotary motor is fixed on a sliding seat of the Y-axis linear driving mechanism II, a sucker group is fixed on an output shaft of the rotary motor, a conveying table for conveying the quartz boat is fixed in the rack, the conveying table is positioned below the Y-axis linear driving mechanism I and the Y-axis linear driving mechanism II, and a positioning table for positioning the flower basket is fixed on the conveying table.
Specifically, the Z-axis linear driving mechanism, the first Y-axis linear driving mechanism, the X-axis linear driving mechanism, and the second Y-axis linear driving mechanism are all linear modules.
Specifically, width adjustment mechanism comprises positive and negative screw lead screw, ball nut and supporting seat, and positive and negative screw lead screw both ends are rotated through the supporting seat respectively and are connected on connecting platform, and the respective threaded connection of positive screw thread section and the negative screw thread section of positive and negative screw lead screw has ball nut, and two ball nut's outer lane is fixed with two clamping jaws respectively.
The suction disc group is formed by sequentially arranging and fixing a plurality of suction plates which are parallel to each other, the distances between all the suction plates on the suction disc group are the same, suction holes are formed in the suction plates and communicated with the inner cavity of the suction plates, and the inner cavity of the suction plates is communicated with an air pump.
Specifically, the conveying table is a belt conveyor.
Specifically, a bolt is fixed on the positioning table and inserted into a pin hole in the flower basket to realize positioning.
The utility model has the advantages that: the utility model provides a full-automatic PE loading and unloading mascerating machine. The quartz boat is carried to the conveying table through the first driving jaw of the Z-axis linear driving mechanism and the first driving jaw of the Y-axis linear driving mechanism, the conveying table conveys the quartz boat to the lower part of the sucker group, and the sucker group takes out the silicon wafer and rotates in the direction through the rotating motor so as to be inserted into the flower basket. The loading and unloading efficiency of the silicon wafer is improved.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic structural diagram of the present invention;
in the figure, 1, a rack, 2, a Z-axis linear driving mechanism, 3, a Y-axis linear driving mechanism I, 4, an X-axis linear driving mechanism, 5, a Y-axis linear driving mechanism II, 6, a connecting platform, 7, a width adjusting mechanism, 8, a clamping jaw, 9, a rotary motor, 10, a sucker group, 11, a positioning table, 12, a flower basket, 13, a quartz boat, 14, a conveying table, 71, a positive and negative thread screw rod, 72, a ball nut and 73 support seats are arranged.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic drawings and illustrate the basic structure of the present invention only in a schematic manner, and thus show only the components related to the present invention.
Fig. 1 is a schematic structural diagram of the present invention.
A full-automatic PE loading and unloading machine comprises a rack 1, a Z-axis linear driving mechanism 2, a Y-axis linear driving mechanism I3, an X-axis linear driving mechanism 4, a Y-axis linear driving mechanism II 5, a connecting platform 6, a width adjusting mechanism 7, clamping jaws 8, a rotary motor 9, a sucker group 10, a positioning table 11, a flower basket 12, a quartz boat 13 and a conveying table 14, wherein the Z-axis linear driving mechanism 2 and the X-axis linear driving mechanism 4 are fixed on a top plate of the rack 1, a sliding seat of the Z-axis linear driving mechanism 2 is fixed on a cylinder body of the Y-axis linear driving mechanism I3, the cylinder body of the Y-axis linear driving mechanism I3 is connected on the top plate of the rack 1 in a sliding fit manner, a connecting platform 6 is fixed on the sliding seat of the Y-axis linear driving mechanism I3, the two clamping jaws 8 which are symmetrical to each other are connected on the connecting platform 6 in a sliding manner, the, the width adjusting mechanism 7 is connected with the clamping jaw 8, a sliding seat of the X-axis linear driving mechanism 4 is fixed on a cylinder body of the Y-axis linear driving mechanism II 5, a rotary motor 9 is fixed on the sliding seat of the Y-axis linear driving mechanism II 5, a sucker group 10 is fixed on an output shaft of the rotary motor 9, a conveying table 14 used for conveying a quartz boat 13 is fixed in the rack 1, the conveying table 14 is located below the Y-axis linear driving mechanism I3 and the Y-axis linear driving mechanism II 5, and a positioning table 11 used for positioning a flower basket 12 is fixed on the conveying table 14. The Z-axis linear driving mechanism 2, the Y-axis linear driving mechanism I3, the X-axis linear driving mechanism 4 and the Y-axis linear driving mechanism II 5 are all linear modules. The width adjusting mechanism 7 is composed of a positive and negative thread screw rod 71, ball nuts 72 and a supporting seat 73, two ends of the positive and negative thread screw rod 71 are respectively rotatably connected to the connecting platform 6 through the supporting seat 73, the positive thread section and the negative thread section of the positive and negative thread screw rod 71 are respectively in threaded connection with the ball nuts 72, and outer rings of the two ball nuts 72 are respectively fixed with the two clamping jaws 8. The suction disc group 10 is formed by sequentially arranging and fixing a plurality of suction plates which are parallel to each other, the distances between all the suction plates on the suction disc group 10 are the same, suction holes are formed in the suction plates and communicated with the inner cavities of the suction plates, and the inner cavities of the suction plates are communicated with an air pump. The conveying table 14 is a belt conveyor. The positioning table 11 is fixed with a bolt, and the bolt is inserted into a pin hole on the flower basket 12 to realize positioning.
As shown in the attached figure 1, all the suction plates of the suction cup group 10 are connected with an air pump, and the air pump is started to enable suction holes on the suction plates to generate negative pressure, so that the silicon wafer is sucked. The distances between all the suction plates are the same, so that the suction cup group 3 can simultaneously grab a plurality of silicon wafers which are arranged in the quartz boat 13 according to a certain distance and simultaneously insert the silicon wafers into the flower basket 12.
The linear module is characterized in that a motor drives a ball screw to rotate, the rotating ball screw drives a ball nut in threaded connection with the rotating ball screw to linearly move, and a sliding seat fixed with the outer ring of the ball nut synchronously moves with the ball nut.
The conveying table 14 (belt conveyor) is composed of two parallel motors, a belt, driving wheels and a conveying table, the driving wheels are respectively rotated at two ends of the conveying table, the driving wheels are tensioned at the inner ring of the belt, and the shaft of the driving wheel at one end is fixed on the output shaft of the motor. The motor drives the transmission wheel to rotate, and the rotating transmission wheel drives the belt to transmit through friction. The belt drives the silicon wafer to transmit through friction force.
The width adjusting mechanism 7 is adjusted in such a manner that the milled flat section in the middle of the positive and negative threaded screw rod 71 is clamped by a wrench to rotate. The rotating screw rod 71 with positive and negative threads drives the two ball nuts 72 to move oppositely or relatively, and at the moment, the two clamping jaws 8 respectively fixed with the outer rings of the two ball nuts 72 move oppositely or relatively along the sliding grooves on the connecting platform 6, so that the distance between the two clamping jaws 8 can be enlarged or reduced, and the quartz boats 13 with different lengths can be adapted.
The distance between the two clamping jaws 8 is firstly adjusted to the distance matched with the current quartz boat 13 by the width adjusting mechanism 7. Then the first Y-axis linear driving mechanism 3 drives the clamping jaw 8 to move up and down. The clamping jaw 8 is an L-shaped plate, after the horizontal part of the clamping jaw 8 moves to the front of the grooves on the two sides of the quartz boat 13, the Z-axis linear driving mechanism 2 is started, and the clamping jaw 8 is driven by the Z-axis linear driving mechanism 2 to move forwards horizontally until the horizontal part of the clamping jaw 8 moves into the grooves on the two sides of the quartz boat 13. At the moment, the clamping jaws 8 lift the quartz boat 13 from the feeding station and move the quartz boat 13 to a position right above the conveying table 14, and then the quartz boat 13 is placed on a belt of the conveying table 14.
The quartz boat 13 is horizontally moved by a belt until the quartz boat 13 is transferred below the chuck group 10. At this time, the second Y-axis linear driving mechanism 5 drives the chuck group 10 to move downward, so as to suck the silicon wafers in the quartz boat 13 out. Then the rotary motor 9 rotates the sucker group 10 and the silicon wafer by 90 degrees, and then the X-axis linear driving mechanism 4 is started to drive the sucker group 10 and the silicon wafer to horizontally move towards the flower basket 12 until the silicon wafer is inserted into the flower basket 12. When the flower basket 12 is full, the flower basket 12 can be separated from the positioning table 11.
In light of the foregoing, it will be apparent to those skilled in the art from this disclosure that various changes and modifications can be made without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (6)
1. A full-automatic PE loading and unloading machine is characterized by comprising a rack (1), a Z-axis linear driving mechanism (2), a Y-axis linear driving mechanism I (3), an X-axis linear driving mechanism (4), a Y-axis linear driving mechanism II (5), a connecting platform (6), a width adjusting mechanism (7), a clamping jaw (8), a rotary motor (9), a sucker group (10), a positioning platform (11), a flower basket (12), a quartz boat (13) and a conveying platform (14), wherein the Z-axis linear driving mechanism (2) and the X-axis linear driving mechanism (4) are fixed on a top plate of the rack (1), a sliding seat of the Z-axis linear driving mechanism (2) is fixed on a cylinder body of the Y-axis linear driving mechanism I (3), the cylinder body of the Y-axis linear driving mechanism I (3) is connected to the top plate of the rack (1) in a sliding fit manner, the connecting platform (6) is fixed on the sliding seat of the Y-axis linear driving mechanism I (3), the clamping jaw pair is characterized in that two clamping jaws (8) which are symmetrical to each other are connected to the connecting platform (6) in a sliding mode, a width adjusting mechanism (7) is installed on the connecting platform (6), the width adjusting mechanism (7) is connected with the clamping jaws (8), a sliding seat of the X-axis linear driving mechanism (4) is fixed to a cylinder body of the Y-axis linear driving mechanism II (5), a rotary motor (9) is fixed to the sliding seat of the Y-axis linear driving mechanism II (5), a sucker group (10) is fixed to an output shaft of the rotary motor (9), a conveying table (14) used for conveying a quartz boat (13) is fixed to the machine frame (1), the conveying table (14) is located below the Y-axis linear driving mechanism I (3) and the Y-axis linear driving mechanism II (5), and a positioning table (11) used for positioning the flower basket (12) is fixed to the conveying table (14).
2. The full-automatic PE loading and unloading machine as claimed in claim 1, wherein: and the Z-axis linear driving mechanism (2), the Y-axis linear driving mechanism I (3), the X-axis linear driving mechanism (4) and the Y-axis linear driving mechanism II (5) are all linear modules.
3. The full-automatic PE loading and unloading machine as claimed in claim 1, wherein: the width adjusting mechanism (7) is composed of a positive and negative thread screw rod (71), ball nuts (72) and a supporting seat (73), the two ends of the positive and negative thread screw rod (71) are respectively rotatably connected to the connecting platform (6) through the supporting seat (73), the positive thread section and the negative thread section of the positive and negative thread screw rod (71) are respectively in threaded connection with the ball nuts (72), and the outer rings of the two ball nuts (72) are respectively fixed with the two clamping jaws (8).
4. The full-automatic PE loading and unloading machine as claimed in claim 1, wherein: the sucker group (10) is formed by sequentially arranging and fixing a plurality of mutually parallel suction plates, the distances between all the suction plates on the sucker group (10) are the same, suction holes are formed in the suction plates, the suction holes are communicated with the inner cavity of the suction plates, and the inner cavity of the suction plates is communicated with an air pump.
5. The full-automatic PE loading and unloading machine as claimed in claim 1, wherein: the conveying table (14) is a belt conveyor.
6. The full-automatic PE loading and unloading machine as claimed in claim 1, wherein: the positioning table (11) is fixed with a bolt, and the bolt is inserted into a pin hole in the flower basket (12) to realize positioning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921076752.0U CN210557878U (en) | 2019-07-10 | 2019-07-10 | Full-automatic PE loading and unloading machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921076752.0U CN210557878U (en) | 2019-07-10 | 2019-07-10 | Full-automatic PE loading and unloading machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210557878U true CN210557878U (en) | 2020-05-19 |
Family
ID=70630615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921076752.0U Active CN210557878U (en) | 2019-07-10 | 2019-07-10 | Full-automatic PE loading and unloading machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210557878U (en) |
-
2019
- 2019-07-10 CN CN201921076752.0U patent/CN210557878U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207548753U (en) | Manipulator handling equipment | |
| CN107662057B (en) | A kind of manipulator and laser process equipment | |
| CN107665936B (en) | Two unification production lines of solar cell silk screen printing | |
| CN218423804U (en) | Five point gum machines in efficient duplex position of processing | |
| CN109550976A (en) | A kind of aluminium wheels basal plane automatic lathe | |
| CN114274128A (en) | Automatic feeding and discharging mechanical arm for polyethylene production and processing | |
| CN204078688U (en) | A kind of Handling device of silica crucible | |
| CN114639626A (en) | Positioning and carrying device for wafer | |
| CN210557878U (en) | Full-automatic PE loading and unloading machine | |
| CN210435858U (en) | Automatic lens chamfering machine | |
| CN111703895A (en) | Intelligent mechanical arm | |
| CN111113184A (en) | Thermos cup assembly line | |
| CN111070189A (en) | Efficient full-automatic feeding and discharging manipulator equipment | |
| CN113634449B (en) | Efficient multifunctional workpiece machining system | |
| CN209880643U (en) | Conductive silicon wafer inserting machine | |
| CN115258678A (en) | Automatic feeding device | |
| CN115106925A (en) | Multi-station wafer polishing mechanism | |
| CN210281565U (en) | Workpiece conveying mechanism of processing machine | |
| CN114227160A (en) | Cup rim processing technology and assembly line | |
| CN210081410U (en) | Multistation sweeps ray apparatus | |
| CN209880541U (en) | Diffusion blanking stacking machine | |
| CN112775037A (en) | Automatic appearance detection equipment | |
| CN112478595A (en) | Workpiece conveying device | |
| CN213445053U (en) | Silicon wafer discharging machine capable of efficiently conveying silicon wafers | |
| CN220787362U (en) | Double-station carrying device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |