CN209199943U - 氮化镓基高电子迁移率晶体管 - Google Patents
氮化镓基高电子迁移率晶体管 Download PDFInfo
- Publication number
- CN209199943U CN209199943U CN201822065168.7U CN201822065168U CN209199943U CN 209199943 U CN209199943 U CN 209199943U CN 201822065168 U CN201822065168 U CN 201822065168U CN 209199943 U CN209199943 U CN 209199943U
- Authority
- CN
- China
- Prior art keywords
- layer
- drain
- source electrode
- dielectric layer
- grid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201822065168.7U CN209199943U (zh) | 2018-12-10 | 2018-12-10 | 氮化镓基高电子迁移率晶体管 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201822065168.7U CN209199943U (zh) | 2018-12-10 | 2018-12-10 | 氮化镓基高电子迁移率晶体管 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN209199943U true CN209199943U (zh) | 2019-08-02 |
Family
ID=67428365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201822065168.7U Active CN209199943U (zh) | 2018-12-10 | 2018-12-10 | 氮化镓基高电子迁移率晶体管 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN209199943U (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112993018A (zh) * | 2019-12-02 | 2021-06-18 | 吴俊鹏 | 一种降低三五族半导体器件寄生电容的方法及三五族半导体器件结构 |
CN114144892A (zh) * | 2021-07-16 | 2022-03-04 | 英诺赛科(苏州)科技有限公司 | 氮基半导体器件及其制造方法 |
CN114144891A (zh) * | 2021-07-16 | 2022-03-04 | 英诺赛科(苏州)科技有限公司 | 氮基半导体器件及其制造方法 |
EP4310899A1 (en) * | 2022-07-22 | 2024-01-24 | Infineon Technologies AG | Group iii nitride-based semiconductor device |
-
2018
- 2018-12-10 CN CN201822065168.7U patent/CN209199943U/zh active Active
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112993018A (zh) * | 2019-12-02 | 2021-06-18 | 吴俊鹏 | 一种降低三五族半导体器件寄生电容的方法及三五族半导体器件结构 |
CN114144892A (zh) * | 2021-07-16 | 2022-03-04 | 英诺赛科(苏州)科技有限公司 | 氮基半导体器件及其制造方法 |
CN114144891A (zh) * | 2021-07-16 | 2022-03-04 | 英诺赛科(苏州)科技有限公司 | 氮基半导体器件及其制造方法 |
WO2023283955A1 (en) * | 2021-07-16 | 2023-01-19 | Innoscience (Suzhou) Technology Co., Ltd. | Nitride-based semiconductor device and method for manufacturing thereof same |
WO2023283954A1 (en) * | 2021-07-16 | 2023-01-19 | Innoscience (Suzhou) Technology Co., Ltd. | Nitride-based semiconductor device and method for manufacturing the same |
EP4310899A1 (en) * | 2022-07-22 | 2024-01-24 | Infineon Technologies AG | Group iii nitride-based semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN209199943U (zh) | 氮化镓基高电子迁移率晶体管 | |
JP5260550B2 (ja) | Iii族窒化物素子のための活性領域成形およびその製造方法 | |
JP5186661B2 (ja) | 化合物半導体装置 | |
US9620409B2 (en) | Semiconductor device and method of manufacturing the same | |
CN103035522B (zh) | 制造化合物半导体器件的方法 | |
JP2016139781A (ja) | エンハンスメント型高電子移動度トランジスタおよびその製作方法 | |
US8916459B2 (en) | Compound semiconductor device with mesa structure | |
CN102810564B (zh) | 一种射频器件及其制作方法 | |
US9093510B2 (en) | Field effect transistor device | |
TW201301400A (zh) | 電晶體元件及其製造方法 | |
CN109712892B (zh) | Mos器件的制作方法 | |
CN103985762A (zh) | 超低欧姆接触电阻石墨烯晶体管及其制备方法 | |
TWI566402B (zh) | 具有閘極間隔件之增強模式氮化鎵高電子遷移率電晶體元件及其製造方法 | |
JP5673501B2 (ja) | 化合物半導体装置 | |
TWI786422B (zh) | 一種高電子遷移率電晶體(hemt)及其製造方法 | |
CN106601806A (zh) | 一种半导体器件及其制作方法 | |
CN105679679B (zh) | 一种GaN基凹槽栅MISFET的制备方法 | |
CN115332322B (zh) | 一种多沟道GaN HEMT器件及制作方法 | |
JP5163095B2 (ja) | 半導体装置及びその製造方法 | |
CN113628962A (zh) | Ⅲ族氮化物增强型hemt器件及其制造方法 | |
TW201218377A (en) | Enhancement mode GaN-based MOSFET | |
JP2014007389A (ja) | ヘテロ接合型fet | |
TW202010125A (zh) | 半導體裝置及其製造方法 | |
JPH08330325A (ja) | 電界効果トランジスタおよび製造方法 | |
JPH10256533A (ja) | 化合物半導体装置およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191125 Address after: Room 01, 13 / F, central city, 11 Haisheng Road, Tsuen Wan, New Territories, Hong Kong, China Patentee after: Gemini semiconductor manufacturing (Hong Kong) Co., Ltd Address before: Second floor, No.38 Keyi street, Zhunan Town, miaoso County, Taiwan, China Patentee before: JET TECHNOLOGY AND TECHNOLOGY CO., LTD. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210928 Address after: Room 2208, New Technology Plaza, 34 Dayou street, San Po Kong, Kowloon, China Patentee after: Huipu Co.,Ltd. Address before: Room 01, 13 / F, central city, 11 Haisheng Road, Tsuen Wan, New Territories, Hong Kong, China Patentee before: Gemini semiconductor manufacturing (Hong Kong) Co.,Ltd. |
|
TR01 | Transfer of patent right |